{"id":7641,"date":"2024-04-11T17:22:25","date_gmt":"2024-04-11T09:22:25","guid":{"rendered":"https:\/\/www.nanofab.com.cn\/?p=7641"},"modified":"2024-05-28T10:35:18","modified_gmt":"2024-05-28T02:35:18","slug":"what-is-plasma-enhanced-chemical-vapor-deposition","status":"publish","type":"post","link":"https:\/\/www.nanofab.com.cn\/ko\/\uc778\uc0ac\uc774\ud2b8-2\/application\/\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\/","title":{"rendered":"\ud50c\ub77c\uc988\ub9c8 \uc99d\ucc29 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(PE-CVD)\uc758 \uc6d0\ub9ac\uc640 \uc7a5\uc810"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"7641\" class=\"elementor elementor-7641\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-5667dde elementor-section-stretched elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"5667dde\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;,&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-e6337a4\" data-id=\"e6337a4\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-f6d2728 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"f6d2728\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-c70d05a\" data-id=\"c70d05a\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-0ad4b87 elementor-widget elementor-widget-heading\" data-id=\"0ad4b87\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\">\ud50c\ub77c\uc988\ub9c8 \uc99d\ucc29 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(PE-CVD)\uc758 \uc6d0\ub9ac\uc640 \uc7a5\uc810<\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-77c5937 elementor-widget elementor-widget-post-info\" data-id=\"77c5937\" data-element_type=\"widget\" data-widget_type=\"post-info.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor\/assets\/css\/widget-icon-list.min.css\"><link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-theme-elements.min.css\">\t\t<ul class=\"elementor-icon-list-items elementor-post-info\">\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-repeater-item-577f4c4\" itemprop=\"datePublished\">\n\t\t\t\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/ko\/2024\/04\/11\/\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text elementor-post-info__item elementor-post-info__item--type-date\">\n\t\t\t\t\t\t\t\t\t\t<time>2024-04-11<\/time>\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/li>\n\t\t\t\t<\/ul>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8fe61de elementor-widget elementor-widget-image\" data-id=\"8fe61de\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-image{text-align:center}.elementor-widget-image a{display:inline-block}.elementor-widget-image a img[src$=\".svg\"]{width:48px}.elementor-widget-image img{vertical-align:middle;display:inline-block}<\/style>\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"1024\" height=\"768\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f-1024x768.png\" class=\"attachment-large size-large wp-image-7642\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f-1024x768.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f-300x225.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f-768x576.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f-1536x1152.png 1536w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f-16x12.png 16w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f.png 1632w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7dff69c elementor-widget elementor-widget-text-editor\" data-id=\"7dff69c\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p data-v-md-line=\"5\">PECVD \uae30\uc220\uc740 \ub2e4\uc74c\uacfc \uac19\uc774 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<a href=\"https:\/\/www.nanofab.com.cn\/ko\/\uc778\uc0ac\uc774\ud2b8-2\/application\/\ud654\ud559-\uc99d\ucc29\uc774\ub780-\ubb34\uc5c7\uc778\uac00\uc694\/\">CVD<\/a>\uadf8\ub9ac\uace0<a href=\"https:\/\/www.nanofab.com.cn\/ko\/\uc778\uc0ac\uc774\ud2b8-2\/application\/\ubb3c\ub9ac\uc801-\uc99d\ucc29\uc774\ub780-\ubb34\uc5c7\uc778\uac00\uc694\/\">PVD<\/a>PECVD \uae30\uc220\uc758 \uc99d\ucc29 \uc628\ub3c4\ub294 \uc77c\ubc18\uc801\uc73c\ub85c 600 \u2103 \ubbf8\ub9cc\uc73c\ub85c \uae30\ud310 \uc7ac\ub8cc\uc758 \uc801\uc6a9 \ubc94\uc704\uac00 \ub113\uace0 \uc7a5\ube44\uac00 \uac04\ub2e8\ud558\uace0 \uacf5\uc791\ubb3c\uc758 \ubcc0\ud615\uc774 \uc801\uace0 \ubc14\uc774 \ud328\uc2a4 \ub3c4\uae08 \uc131\ub2a5\uc774 \uc6b0\uc218\ud558\uba70 \uade0\uc77c \ud55c \ucf54\ud305 \ub4f1\uc758 \uc7a5\uc810\uc774 \uc788\uc2b5\ub2c8\ub2e4. CVD \uae30\uc220\uc758 \ub192\uc740 \uc99d\ucc29 \uc628\ub3c4\uc758 \ub2e8\uc810\uc744 \uadf9\ubcf5 \ud560\ubfd0\ub9cc \uc544\ub2c8\ub77c PVD \uae30\uc220\uc758 \uc5f4\uc545\ud55c \ubc14\uc774 \ud328\uc2a4 \ub3c4\uae08 \ubc0f \ubcf5\uc7a1\ud55c \uc7a5\ube44 \ubb38\uc81c\ub97c \ud53c\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. PECVD \uae30\uc220\uc740 CVD \uae30\uc220\uc758 \ub192\uc740 \uc99d\ucc29 \uc628\ub3c4\uc640 \uae30\ud310 \uc7ac\ub8cc\uc5d0 \ub300\ud55c \ub192\uc740 \uc694\uad6c \uc0ac\ud56d\uc758 \ub2e8\uc810\uc744 \uadf9\ubcf5\ud558\uace0 PVD \uae30\uc220\uc758 \uc5f4\uc545\ud55c \uad8c\uc120 \ub3c4\uae08 \ubc0f \ubcf5\uc7a1\ud55c \uc7a5\ube44 \ubb38\uc81c\ub97c \ubc29\uc9c0\ud558\uc5ec \ubc1c\uc804 \uc804\ub9dd\uacfc \uc751\uc6a9 \uac00\uce58\uac00 \ud070 \uc0c8\ub85c\uc6b4 \uc720\ud615\uc758 \ubc15\ub9c9 \uc900\ube44 \uae30\uc220\uc785\ub2c8\ub2e4.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-c077655 elementor-widget elementor-widget-heading\" data-id=\"c077655\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">PE-CVD\uc758 \uc6d0\ub9ac<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6e3a25a elementor-widget elementor-widget-text-editor\" data-id=\"6e3a25a\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p data-v-md-line=\"17\">\ud50c\ub77c\uc988\ub9c8 \uac15\ud654 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29 \uae30\uc220(\uc904\uc5ec\uc11c PECVD)\uc5d0\ub294 DC PECVD, \ud384\uc2a4 DC PECVD, \uae08\uc18d-\uc720\uae30 \ud654\ud569\ubb3c PECVD, \ubb34\uc120 \uc8fc\ud30c\uc218 PECVD, \ub9c8\uc774\ud06c\ub85c\ud30c PECVD, \uc544\ud06c \uad11 PECVD \ub4f1 \uc5ec\ub7ec \uc885\ub958\uac00 \uc788\uc2b5\ub2c8\ub2e4. \ucd5c\uadfc\uc5d0\ub294 \ub2e4\uc591\ud55c \ucf54\ud305 \uae30\uc220\uc758 \uad50\ucc28 \uc218\uc815\uc73c\ub85c PVD\uc640 PECVD \ud1b5\ud569 \ubcf5\ud569 \uc99d\ucc29, \ub3d9\uc77c\ud55c \uc6a9\uad11\ub85c\uc5d0\uc11c\uc758 \uc785\uc790 \uc9c8\ud654 \ubc0f PECVD \ud1b5\ud569 \ubcf5\ud569 \uc99d\ucc29\uc774 \uac1c\ubc1c\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \ubb3c\ub860 \ucd5c\uadfc\uc5d0\ub294 \ub2e4\uc591\ud55c \ucf54\ud305 \uae30\uc220\uc758 \uad50\ucc28 \uc218\uc815\uc73c\ub85c \ub3d9\uc77c\ud55c \uc6a9\uad11\ub85c \uc7a5\uce58 \ubc0f \uae30\uc220\uc5d0\uc11c PVD \ubc0f PECVD \uc77c\uccb4\ud615 \ubcf5\ud569 \uc99d\ucc29, \uc785\uc790 \uc9c8\ud654 \ubc0f PECVD \uc77c\uccb4\ud615 \ubcf5\ud569 \uc99d\ucc29\uc774 \uc9c0\uc18d\uc801\uc73c\ub85c \uac1c\ubc1c\ub418\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ud604\uc7ac \ub300\ubd80\ubd84\uc758 \uc0b0\uc5c5\uc6a9 \ud558\ub4dc \ucf54\ud305 \uc7ac\ub8cc \uc99d\ucc29\uc740 DC \ubc0f \ud384\uc2a4 DC PECVD \uae30\uc220\uc744 \uc801\uc6a9\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p><p data-v-md-line=\"17\">PECVD\uc758 \ucd08\uae30 \uc801\uc6a9\uc740 \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc758 \ubc1c\uc804\uacfc \ud568\uaed8 \ubc18\ub3c4\uccb4 \uc7ac\ub8cc\uc758 \uac00\uacf5, \uc989 Si02\uc758 \ubc18\ub3c4\uccb4 \uc7ac\ub8cc \uae30\ud310 \uc99d\ucc29\uc5d0 \uc2e4\ub9ac\ucf58\uc744 \uc0ac\uc6a9\ud558\ub294 \uac83\uc73c\ub85c \ub098\ud0c0\ub0ac\uc2b5\ub2c8\ub2e4. \ub098\uc911\uc5d0 PECVD \uacf5\uc815\uc758 \ud2b9\uc131\uc5d0 \ub530\ub77c \uc0b0\uc5c5 \uc0dd\uc0b0\uc5d0 \ud2b9\ud788 \uc801\ud569\ud558\uba70, \uacf5\uc815\uc740 \uc8fc\ub85c \ubcf4\ud638 \ud544\ub984\uc758 \ub300 \uba74\uc801 \ubd80\ud488 \ubc0f \ub2e4\uc591\ud55c \uc808\uc5f0 \uce35 \ubc0f DLC \ud544\ub984\uc758 \uc99d\ucc29\uc5d0 \uc0ac\uc6a9\ub418\ub294 \ub9ce\uc740 \ub9c8\uc774\ud06c\ub85c \uc804\uc790 \uc0b0\uc5c5 (\uc608 : \uc9d1\uc801 \ud68c\ub85c \uacf5\uc815 \ub4f1)\uc5d0\uc11c \uc0ac\uc6a9\ub418\uae30 \uc2dc\uc791\ud588\uc2b5\ub2c8\ub2e4. PECVD \uae30\uc220\uc740 \uc99d\ucc29 \ucc54\ubc84\uc5d0 \uace0\uc804\uc555 \uc804\uae30\uc7a5\uc744 \uc801\uc6a9\ud558\uc5ec \ud2b9\uc815 \uc555\ub825 \ubc0f \uc5ec\uae30 \uc18c\uc2a4(\uc608: DC \uace0\uc804\uc555, \ud384\uc2a4 \uc804\uc6d0, \ubb34\uc120 \uc8fc\ud30c\uc218 \ub610\ub294 \ub808\uc774\uc800 \ub4f1)\uc758 \ubc18\uc751 \uac00\uc2a4, \uc5bb\uc740 \uc5d0\ub108\uc9c0\uc758 \uac00\uc18d \ud6a8\uacfc\ub85c \uc804\uae30\uc7a5\uc758 \uc804\uc790, \uac00\uc2a4 \ub0b4 \uc911\uc131 \uc785\uc790(\uc6d0\uc790 \ub610\ub294 \ubd84\uc790\uac00 \ube44\ud0c4\uc131 \ucda9\ub3cc\uc744 \uc77c\uc73c\ud0a8 \ub2e4\uc74c 2\ucc28 \uc804\uc790\uc758 \uc774\uc628\ud654, \ub354 \ub098\uc544\uac00 \uac00\uc2a4 \ub0b4 \uc6d0\uc790 \uc785\uc790, \uc0dd\uc131\ub41c 2\ucc28 \uc804\uc790\ub97c \uc0ac\uc6a9\ud558\ub294 \uae30\uc220\uc785\ub2c8\ub2e4. \uadf8\ub4e4\uc740 \ucda9\ub3cc \uc774\uc628\ud654\uc5d0\uc11c \ub354 \uba40\ub9ac \uadf8\ub9ac\uace0 \uac00\uc2a4 \uc6d0\uc790\uc640 \ubd84\uc790\uac00 \uc804\uc790\ub97c \uc0dd\uc131\ud558\uace0 \uc804\uc790\ub97c \uc0dd\uc131\ud558\ubbc0\ub85c \ubc18\ubcf5\uc801\uc73c\ub85c \ucda9\ub3cc\uacfc \uc774\uc628\ud654\ub97c \ubc18\ubcf5\ud558\uba74 \ub9ce\uc740 \uc218\uc758 \uc804\uc790\uc640 \uc774\uc628\uc744 \uc0dd\uc131\ud569\ub2c8\ub2e4. \uc591\uc785\uc790\uc640 \uc74c\uc785\uc790\uc758 \uc218\uac00 \uac19\uae30 \ub54c\ubb38\uc5d0 \uc774\ub97c \ud50c\ub77c\uc988\ub9c8\ub77c\uace0 \ud569\ub2c8\ub2e4. \ucda9\ub3cc \uacfc\uc815\uc5d0\uc11c \ud558\uc804 \uc785\uc790\ub294 \ub610\ud55c \ud569\uc131\ubb3c\ub85c \uc778\ud574 \uc911\uc131 \uc785\uc790\ub85c \ubcc0\ud658\ub418\uace0 \uacfc\ub3c4\ud55c \uc5d0\ub108\uc9c0\ub97c \ubc29\ucd9c\ud558\uae30 \uc704\ud574 \uae00\ub85c\uc6b0 \ubc29\uc804 \ud615\ud0dc\ub85c \ubcc0\ud658\ub429\ub2c8\ub2e4. \ubc18\uc751 \uac00\uc2a4\ub294 \ud50c\ub77c\uc988\ub9c8\ub85c \uad6c\uc131\ub41c \ub9e4\uc6b0 \ud65c\uc131 \ubd84\uc790 \ub9c8\ub2f9, \uc774\uc628 \ubc0f \uc6d0\uc790 \uadf8\ub8f9\uc73c\ub85c \uc5ec\uae30\ub418\uc5b4 \uc99d\ucc29 \ubc18\uc751 \uc628\ub3c4\ub97c \ud06c\uac8c \ub0ae\ucd94\uace0 \ud654\ud559 \ubc18\uc751 \uacfc\uc815\uc744 \uac00\uc18d\ud654\ud558\uc5ec \uc99d\ucc29 \uc18d\ub3c4\ub97c \ud5a5\uc0c1\uc2dc\ud0b5\ub2c8\ub2e4.<\/p><p data-v-md-line=\"17\">\ubc18\uc751 \uac00\uc2a4\ub294 \ud50c\ub77c\uc988\ub9c8\ub85c \uad6c\uc131\ub41c \ub9e4\uc6b0 \ud65c\uc131 \ubd84\uc790, \uc6d0\uc790, \uc774\uc628 \ubc0f \uc6d0\uc790 \uadf8\ub8f9\uc73c\ub85c \uc5ec\uae30\ub418\uc5b4 \uc99d\ucc29 \ubc18\uc751 \uc628\ub3c4\ub97c \ud06c\uac8c \ub0ae\ucd94\uace0 \ud654\ud559 \ubc18\uc751 \uacfc\uc815\uc744 \uac00\uc18d\ud654\ud558\uba70 \uc99d\ucc29 \uc18d\ub3c4\ub97c \ud5a5\uc0c1\uc2dc\ud0b5\ub2c8\ub2e4. \ub530\ub77c\uc11c \uc77c\ubc18\uc801\uc778 PECVD \uae30\uc220 \uc99d\ucc29 \uc628\ub3c4\ub294 600 \u2103 \uc774\ud558\ub85c \uae30\ud310 \uc7ac\ub8cc\uc758 \uc801\uc6a9 \ubc94\uc704\ub97c \ub113\ud788\uace0 \uac04\ub2e8\ud55c \uc7a5\ube44, \uacf5\uc791\ubb3c\uc758 \uc791\uc740 \ubcc0\ud615, \ub3c4\uae08 \uc8fc\ubcc0\uc758 \uc6b0\uc218\ud55c \uc131\ub2a5, \ucf54\ud305 \uade0\uc77c \uc131, \ud3b8\uc758\uc131\uc758 \uc7a5\uc810\uc758 \uc870\uc131 \uc870\uc808\ub85c \uae30\ud310 \uc7ac\ub8cc\uc758 \uc801\uc6a9 \ubc94\uc704\ub97c \ub113 \ud799\ub2c8\ub2e4. CVD \uae30\uc220\uc758 \ub192\uc740 \uc99d\ucc29 \uc628\ub3c4\uc640 \uae30\ud310 \uc7ac\ub8cc\uc5d0 \ub300\ud55c \uc5c4\uaca9\ud55c \uc694\uad6c \uc0ac\ud56d\uc758 \ub2e8\uc810\uc744 \uadf9\ubcf5\ud558\uace0 \uad8c\uc120 \ub3c4\uae08 \ubd88\ub7c9 \ubc0f PVD \uae30\uc220\uc758 \ubcf5\uc7a1\ud55c \uc7a5\ube44 \ubb38\uc81c\ub97c \ud53c\ud558\uc5ec \uc0b0\uc5c5 \uc0dd\uc0b0\uc5d0 \ub9e4\uc6b0 \uc801\ud569\ud569\ub2c8\ub2e4. \ud604\uc7ac PECVD\ub294 \uc8fc\ub85c MEMS \uc0b0\uc5c5(\uc9d1\uc801 \ud68c\ub85c \uacf5\uc815 \ub4f1) \ubc0f \ubbf8\uc138 \ud544\ub984 \uc81c\uc870\uc5d0 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \ub3d9\uc2dc\uc5d0 PECVD \uae30\uc220\uc740 \uc6b0\uc218\ud55c \uade0\uc77c \uc131 \ubc0f \uc2a4\ud15d \ucee4\ubc84\ub9ac\uc9c0, \uace0\ubc00\ub3c4 \uc99d\ucc29 \ud544\ub984, \ud544\ub984 \uce35\uacfc \uae30\ud310 \uc0ac\uc774\uc758 \ub192\uc740 \uacb0\ud569\ub825 \ubc0f \ube60\ub978 \uc99d\ucc29 \uc18d\ub3c4\ub85c \ubc14\uc774\ub108\ub9ac \uad11\ud559, \ud0dc\uc591 \uad11 \ud544\ub984, \uad6c\ubc30 \uad74\uc808\ub960 \uad11\ud559 \ud544\ub984 \ubc0f \ub808\uc774\uc800 \uc190\uc0c1 \ubc29\uc9c0 \ud544\ub984\uc5d0\ub3c4 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0b5eb74 elementor-widget elementor-widget-heading\" data-id=\"0b5eb74\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">PE-CVD\uc758 \uc7a5\uc810<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-21e5768 elementor-widget elementor-widget-text-editor\" data-id=\"21e5768\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>PECVD \ubc29\ubc95\uc740 \ubc18\uc751\uc131 \uac00\uc2a4 \uc720\ub7c9, \ubc18\uc751\uc131 \uac00\uc2a4 \ube44\uc728, RF \uc804\ub825, \ucc54\ubc84 \uc555\ub825, \uc99d\ucc29 \uc628\ub3c4, \ud544\ub984 \ub450\uaed8 \ub4f1\uacfc \uac19\uc740 \uacf5\uc815 \ud30c\ub77c\ubbf8\ud130\ub97c \ubcc0\uacbd\ud558\uc5ec \ub2e4\uc591\ud55c \ud544\ub984\uc744 \uc81c\uc870\ud560 \uc218 \uc788\uc73c\uba70, \uc774\ub294 \ud544\ub984 \ud2b9\uc131, \ud2b9\ud788 \uad11\ud559 \ubc0f \uae30\uacc4\uc801 \ud2b9\uc131\uc5d0 \ud070 \ubcc0\ud654\ub97c \uac00\uc838\uc62c \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p><p>\uc608\ub97c \ub4e4\uc5b4, SiO2 \ud544\ub984\uc758 PECVD \uc900\ube44\uc758 \uacbd\uc6b0 RF \ucd9c\ub825\uc774 \uc99d\uac00\ud558\uba74 \ubc18\uc751 \uac00\uc2a4\uc758 \ud65c\uc131\ud654 \uc18d\ub3c4\uac00 \uc99d\uac00\ud558\ubbc0\ub85c \ud544\ub984\uc758 \uad6c\uc870\uac00 \uc0c1\ub300\uc801\uc73c\ub85c \uc870\ubc00 \ud574\uc9c0\uace0 \uadf8\uc5d0 \ub530\ub77c \uade0\uc77c \uc131\uc774 \ud5a5\uc0c1\ub429\ub2c8\ub2e4. \uadf8\ub7ec\ub098 \uc804\ub825\uc774 \ub108\ubb34 \ub192\uc73c\uba74 \ubc18\uc751\uc73c\ub85c \uc778\ud574 \uc99d\ucc29 \uc18d\ub3c4\uc5d0 \uc758\ud574 \uc0dd\uc131 \ub41c SiO2\uac00 \ub108\ubb34 \ube60\ub974\uc9c0 \ub9cc \ud544\ub984 \uad6c\uc870\uac00 \ub290\uc2a8\ud574\uc9c0\uace0 \uc9c4\uacf5 \ubc00\ub3c4\uac00 \uc99d\uac00\ud558\uba70 \ubc18\ubcf5\uc131\ub3c4 \uac10\uc18c\ud558\uc5ec \ubb34\uc120 \uc8fc\ud30c\uc218 \uc804\ub825\uc774 \ub108\ubb34 \ub192\uc73c\uba74 \uade0\uc77c \uc131\uc774 \ub5a8\uc5b4\uc9c0\uace0 \uae30\ud310\uc5d0 \ub300\ud55c \ubc29\uc0ac\uc120 \uc190\uc0c1\uae4c\uc9c0 \ucd08\ub798\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uae30\ud310 \uc628\ub3c4\ub294 \ub610\ud55c \ud544\ub984\uc758 \uade0\uc77c\uc131\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce58\ub294 \uc911\uc694\ud55c \uc694\uc18c\uc774\uba70, \uae30\ud310 \uc628\ub3c4\uac00 \uc0c1\uc2b9\ud558\uba74 \uae30\ud310 \ud45c\uba74\uc5d0 \uc99d\ucc29 \ub41c \uc785\uc790\uc758 \uc5d0\ub108\uc9c0\uac00 \uc99d\uac00\ud558\uc5ec\ubca0\uc774\uc2a4 \ud45c\uba74\uc5d0\uc11c \uc785\uc790\uc758 \uc774\ub3d9\uc131\uc774 \uc99d\uac00\ud558\uc5ec \uc774\ub7ec\ud55c \uc785\uc790\uac00 \ud074\ub7ec\uc2a4\ud130 \ub610\ub294 \uc12c\uc73c\ub85c \uc774\ub3d9\ud560 \uac00\ub2a5\uc131\uc774 \uc545\ud654\ub418\uc5b4 \ud544\ub984\uc758 \uade0\uc77c\uc131\uc5d0 \uc9c1\uc811\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4. \ubc18\uba74\uc5d0 \ubca0\uc774\uc2a4 \uc628\ub3c4\uac00 \uc0c1\uc2b9\ud558\uba74 \uc785\uc790\uac00 \ud544\ub984 \ud45c\uba74\uc758 \uacb0\ud568\uc744 \uc27d\uac8c \ucc44\uc6b8 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p><p><strong>\ub530\ub77c\uc11c \uad11\ud559 \ud544\ub984\uc744 \uc81c\uc870\ud558\ub294 PECVD \ubc29\ubc95\uc740 \ub2e4\ub978 \ubc29\ubc95\uc5d0\ub294 \uc5c6\ub294 \ub9ce\uc740 \uc7a5\uc810\uc744 \uac00\uc9c0\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/strong><\/p><p>(1) \ubc18\uc751\ubb3c\uacfc \ubd80\uc0b0\ubb3c\uc740 \uae30\uccb4\uc774\uba70, PVD \ubc0f CVD \uc7a5\ube44\uc5d0 \ube44\ud574 \uad6c\uc870\uac00 \uac04\ub2e8\ud569\ub2c8\ub2e4.<\/p><p>(2) \ud2b9\ud788 a-Si, TiO2 \ub4f1\uacfc \uac19\uc740 \uace0\uad74\uc808\ub960 \ubc15\ub9c9 \uc7ac\ub8cc\uc758 \uacbd\uc6b0 \ubc18\uc751 \uc99d\ucc29 \uc18d\ub3c4\uac00 \ube60\ub985\ub2c8\ub2e4.<\/p><p>(3) \ud544\ub984\uc758 \uc870\uc131\uc744 \uc784\uc758\ub85c \ud06c\uac8c \uc870\uc808\ud560 \uc218 \uc788\uc73c\uba70, SiCO:H, SiN:H, SiOxNy, SiOxFy \ub4f1\uacfc \uac19\uc740 \ub2e4\uc591\ud55c \uc911\uac04 \uad74\uc808\ub960 \uc7ac\ub8cc\ub97c \uac00\uc9c4 \uad11\ud559 \ud544\ub984\uc744 \uc5bb\uc744 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p><p>(4) \uc99d\ucc29\ub41c \ud544\ub984\uc758 \uad6c\uc870\uc801 \ubb34\uacb0\uc131 \ubc0f \ubc00\ub3c4, \uae30\ud310\uc5d0 \ub300\ud55c \uc6b0\uc218\ud55c \uc811\ucc29\ub825<\/p><p>(5) \ub6f0\uc5b4\ub09c \uc2a4\ud15d \ucee4\ubc84\ub9ac\uc9c0<\/p><p>(6) \ub9e4\ub044\ub7ec\uc6b4 \uc99d\ucc29 \ud45c\uba74\uc744 \uc5bb\uc744 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f591a9b elementor-widget elementor-widget-spacer\" data-id=\"f591a9b\" data-element_type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-column .elementor-spacer-inner{height:var(--spacer-size)}.e-con{--container-widget-width:100%}.e-con-inner>.elementor-widget-spacer,.e-con>.elementor-widget-spacer{width:var(--container-widget-width,var(--spacer-size));--align-self:var(--container-widget-align-self,initial);--flex-shrink:0}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container,.e-con>.elementor-widget-spacer>.elementor-widget-container{height:100%;width:100%}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer,.e-con>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer{height:100%}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer>.elementor-spacer-inner,.e-con>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer>.elementor-spacer-inner{height:var(--container-widget-height,var(--spacer-size))}.e-con-inner>.elementor-widget-spacer.elementor-widget-empty,.e-con>.elementor-widget-spacer.elementor-widget-empty{position:relative;min-height:22px;min-width:22px}.e-con-inner>.elementor-widget-spacer.elementor-widget-empty .elementor-widget-empty-icon,.e-con>.elementor-widget-spacer.elementor-widget-empty .elementor-widget-empty-icon{position:absolute;top:0;bottom:0;left:0;right:0;margin:auto;padding:0;width:22px;height:22px}<\/style>\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2483e7e elementor-widget elementor-widget-text-editor\" data-id=\"2483e7e\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>\ub2f9\uc0ac\ub294 \ub2e4\uc74c\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. <a href=\"https:\/\/www.nanofab.com.cn\/ko\/\ub9de\ucda4\ud615-\uc11c\ube44\uc2a4-2\/\ucf54\ud305-\uae30\uc220-\ubc15\ub9c9-\ub77c\ubbf8\ub124\uc774\uc158-2\/\ud654\ud559-\uc99d\uae30-\uc99d\ucc29-2\/\">\ud50c\ub77c\uc988\ub9c8 \uac15\ud654 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(PE-CVD) OEM \ub9de\ucda4\ud615 \uc11c\ube44\uc2a4<\/a>\uc5d0 \ub313\uae00\uc744 \ub0a8\uaca8 \uc8fc\uc138\uc694.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-cd43023 uael-mobile-wpf-button-justify uael-wpf-style-box uael-wpf-input-size-sm uael-wpf-button-left uael-wpf-btn-size-sm uael-wpf-highlight-style-default elementor-widget elementor-widget-uael-wpf-styler\" data-id=\"cd43023\" data-element_type=\"widget\" data-settings=\"{&quot;btn_border_radius&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;0&quot;,&quot;right&quot;:&quot;0&quot;,&quot;bottom&quot;:&quot;0&quot;,&quot;left&quot;:&quot;0&quot;,&quot;isLinked&quot;:false},&quot;wpf_button_align_mobile&quot;:&quot;justify&quot;,&quot;wpf_input_padding&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;wpf_input_padding_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;wpf_input_padding_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;wpf_input_radius&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;0&quot;,&quot;right&quot;:&quot;0&quot;,&quot;bottom&quot;:&quot;0&quot;,&quot;left&quot;:&quot;0&quot;,&quot;isLinked&quot;:true},&quot;wpf_input_radius_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;wpf_input_radius_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;wpf_button_align&quot;:&quot;left&quot;,&quot;wpf_button_padding&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;wpf_button_padding_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;wpf_button_padding_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;btn_border_radius_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;btn_border_radius_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;form_fields_margin&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;form_fields_margin_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;form_fields_margin_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;form_label_margin_bottom&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;form_label_margin_bottom_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;form_label_margin_bottom_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;form_desc_margin_top&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;form_desc_margin_top_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;form_desc_margin_top_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;check_radio_items_spacing&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;check_radio_items_spacing_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;check_radio_items_spacing_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;submit_spacing&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;submit_spacing_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;submit_spacing_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"uael-wpf-styler.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class = \"uael-wpf-container\">\r\n\t\t\t\t\t\t<div class = \"uael-wpf uael-wpf-style elementor-clickable\">\r\n\t\t\t\t\t\t<div class=\"wpforms-container wpforms-container-full\" id=\"wpforms-2729\"><form id=\"wpforms-form-2729\" class=\"wpforms-validate wpforms-form wpforms-ajax-form\" data-formid=\"2729\" method=\"post\" enctype=\"multipart\/form-data\" action=\"\/ko\/wp-json\/wp\/v2\/posts\/7641\" data-token=\"bc88c845ea429835182066c967aeb694\" data-trp-original-action=\"\/ko\/wp-json\/wp\/v2\/posts\/7641\"><noscript class=\"wpforms-error-noscript\">\uc774 \uc591\uc2dd\uc744 \uc791\uc131\ud558\ub824\uba74 \ube0c\ub77c\uc6b0\uc800\uc5d0\uc11c JavaScript\ub97c \ud65c\uc131\ud654\ud569\ub2c8\ub2e4.<\/noscript><div class=\"wpforms-field-container\"><div id=\"wpforms-2729-field_5-container\" class=\"wpforms-field wpforms-field-textarea\" data-field-id=\"5\"><label class=\"wpforms-field-label\" for=\"wpforms-2729-field_5\">\ud544\uc694(\uc218\uc694) <span class=\"wpforms-required-label\">*<\/span><\/label><textarea id=\"wpforms-2729-field_5\" class=\"wpforms-field-medium wpforms-field-required\" name=\"wpforms[fields][5]\" placeholder=\"\uc694\uad6c \uc0ac\ud56d\uc744 \uc785\ub825\ud558\uc138\uc694...\" required><\/textarea><\/div><div id=\"wpforms-2729-field_10-container\" class=\"wpforms-field wpforms-field-layout\" data-field-id=\"10\"><label class=\"wpforms-field-label wpforms-label-hide\" for=\"wpforms-2729-field_10\">\ub808\uc774\uc544\uc6c3<\/label><div class=\"wpforms-field-layout-columns wpforms-field-layout-preset-50-50\"><div class=\"wpforms-layout-column wpforms-layout-column-50\"><div id=\"wpforms-2729-field_9-container\" class=\"wpforms-field wpforms-field-email\" data-field-id=\"9\"><label class=\"wpforms-field-label\" for=\"wpforms-2729-field_9\">\uc0ac\uc11c\ud568(\uc774\uba54\uc77c) <span class=\"wpforms-required-label\">*<\/span><\/label><input type=\"email\" id=\"wpforms-2729-field_9\" class=\"wpforms-field-medium wpforms-field-required\" name=\"wpforms[fields][9]\" placeholder=\"\uc774\uba54\uc77c \uc785\ub825...\" required><\/div><\/div><div class=\"wpforms-layout-column wpforms-layout-column-50\"><div id=\"wpforms-2729-field_1-container\" class=\"wpforms-field wpforms-field-text\" data-field-id=\"1\"><label class=\"wpforms-field-label\" for=\"wpforms-2729-field_1\">\uc774\ub984(\uc774\ub984)<\/label><input type=\"text\" id=\"wpforms-2729-field_1\" class=\"wpforms-field-medium\" name=\"wpforms[fields][1]\" placeholder=\"\uc774\ub984\uc744 \uc785\ub825\ud558\uc138\uc694...\" ><\/div><\/div><\/div><\/div><\/div><div class=\"wpforms-submit-container\"><input type=\"hidden\" name=\"wpforms[id]\" value=\"2729\"><input type=\"hidden\" name=\"wpforms[author]\" value=\"3\"><button type=\"submit\" name=\"wpforms[submit]\" id=\"wpforms-submit-2729\" class=\"wpforms-submit\" data-alt-text=\"\u53d1\u9001\u4e2d\u2026\" data-submit-text=\"\u8054\u7cfb\u6211\u4eec\" aria-live=\"assertive\" value=\"wpforms-submit\">\ubb38\uc758\ud558\uae30<\/button><img decoding=\"async\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/wpforms\/assets\/images\/submit-spin.svg\" class=\"wpforms-submit-spinner\" style=\"display: none;\" width=\"26\" height=\"26\" alt=\"\ub85c\ub529 \uc911\"><\/div><input type=\"hidden\" name=\"trp-form-language\" value=\"ko\"\/><\/form><\/div>  <!-- .wpforms-container -->\t\t\t\t\t<\/div>\r\n\t\t\t\t<\/div>\r\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-1ea385e\" data-id=\"1ea385e\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-ab7fe6f elementor-widget elementor-widget-heading\" data-id=\"ab7fe6f\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<div class=\"elementor-heading-title elementor-size-default\">\uad00\ub828 \uc81c\ud488<\/div>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4a3c6ff elementor-grid-1 elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-posts--thumbnail-top elementor-widget elementor-widget-posts\" data-id=\"4a3c6ff\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:10,&quot;sizes&quot;:[]},&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-posts.min.css\">\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7386 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/ko\/\ub9de\ucda4\ud615-\uc11c\ube44\uc2a4-2\/\ucf54\ud305-\uae30\uc220-\ubc15\ub9c9-\ub77c\ubbf8\ub124\uc774\uc158-2\/\uc6d0\uc790-\uce35-\uc99d\ucc29-\uacc4\uc57d-\ucc98\ub9ac-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img decoding=\"async\" width=\"300\" height=\"195\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png\" class=\"attachment-medium size-medium wp-image-7388\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8.png 640w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/ko\/\ub9de\ucda4\ud615-\uc11c\ube44\uc2a4-2\/\ucf54\ud305-\uae30\uc220-\ubc15\ub9c9-\ub77c\ubbf8\ub124\uc774\uc158-2\/\uc6d0\uc790-\uce35-\uc99d\ucc29-\uacc4\uc57d-\ucc98\ub9ac-2\/\" >\n\t\t\t\t\uc6d0\uc790\uce35 \uc99d\ucc29(ALD) \uce58\ud658 \ucc98\ub9ac\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/ko\/\ub9de\ucda4\ud615-\uc11c\ube44\uc2a4-2\/\ucf54\ud305-\uae30\uc220-\ubc15\ub9c9-\ub77c\ubbf8\ub124\uc774\uc158-2\/\uc6d0\uc790-\uce35-\uc99d\ucc29-\uacc4\uc57d-\ucc98\ub9ac-2\/\" aria-label=\"\uc6d0\uc790\uce35 \uc99d\ucc29(ALD) \ud558\ub3c4\uae09\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7344 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/ko\/\ub9de\ucda4\ud615-\uc11c\ube44\uc2a4-2\/\ucf54\ud305-\uae30\uc220-\ubc15\ub9c9-\ub77c\ubbf8\ub124\uc774\uc158-2\/\ud654\ud559-\uc99d\uae30-\uc99d\ucc29-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png\" class=\"attachment-medium size-medium wp-image-7347\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1024x684.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-768x513.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1536x1025.png 1536w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/f394ed96-eaca-40cc-83f6-ebadaea95553-qlt2nzpy27w47wpv9hvjdczv85dnqtqc8q83uvppb4.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553.png 1600w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/ko\/\ub9de\ucda4\ud615-\uc11c\ube44\uc2a4-2\/\ucf54\ud305-\uae30\uc220-\ubc15\ub9c9-\ub77c\ubbf8\ub124\uc774\uc158-2\/\ud654\ud559-\uc99d\uae30-\uc99d\ucc29-2\/\" >\n\t\t\t\t\ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD) \uc0dd\uc131 \uacf5\uc815\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/ko\/\ub9de\ucda4\ud615-\uc11c\ube44\uc2a4-2\/\ucf54\ud305-\uae30\uc220-\ubc15\ub9c9-\ub77c\ubbf8\ub124\uc774\uc158-2\/\ud654\ud559-\uc99d\uae30-\uc99d\ucc29-2\/\" aria-label=\"\ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD) \ud558\ub3c4\uae09\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7355 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/ko\/\ub9de\ucda4\ud615-\uc11c\ube44\uc2a4-2\/\ucf54\ud305-\uae30\uc220-\ubc15\ub9c9-\ub77c\ubbf8\ub124\uc774\uc158-2\/\ubb3c\ub9ac\uc801-\uc99d\ucc29\uc774\ub780-\ubb34\uc5c7\uc778\uac00\uc694-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png\" class=\"attachment-medium size-medium wp-image-7357\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-1024x683.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-768x512.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-qlti2lfsi53oh54jrq611wpt5lt6dogutrcqlbec0w.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932.png 1508w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/ko\/\ub9de\ucda4\ud615-\uc11c\ube44\uc2a4-2\/\ucf54\ud305-\uae30\uc220-\ubc15\ub9c9-\ub77c\ubbf8\ub124\uc774\uc158-2\/\ubb3c\ub9ac\uc801-\uc99d\ucc29\uc774\ub780-\ubb34\uc5c7\uc778\uac00\uc694-2\/\" >\n\t\t\t\t\ubb3c\ub9ac\uc801 \uae30\uc0c1 \uc99d\ucc29(PVD) \uc0dd\uc131 \ucc98\ub9ac\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/ko\/\ub9de\ucda4\ud615-\uc11c\ube44\uc2a4-2\/\ucf54\ud305-\uae30\uc220-\ubc15\ub9c9-\ub77c\ubbf8\ub124\uc774\uc158-2\/\ubb3c\ub9ac\uc801-\uc99d\ucc29\uc774\ub780-\ubb34\uc5c7\uc778\uac00\uc694-2\/\" aria-label=\"\ubb3c\ub9ac\uc801 \uae30\uc0c1 \uc99d\ucc29(PVD) \ud558\ub3c4\uae09\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0be945d elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"0be945d\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-divider{--divider-border-style:none;--divider-border-width:1px;--divider-color:#0c0d0e;--divider-icon-size:20px;--divider-element-spacing:10px;--divider-pattern-height:24px;--divider-pattern-size:20px;--divider-pattern-url:none;--divider-pattern-repeat:repeat-x}.elementor-widget-divider .elementor-divider{display:flex}.elementor-widget-divider .elementor-divider__text{font-size:15px;line-height:1;max-width:95%}.elementor-widget-divider .elementor-divider__element{margin:0 var(--divider-element-spacing);flex-shrink:0}.elementor-widget-divider .elementor-icon{font-size:var(--divider-icon-size)}.elementor-widget-divider .elementor-divider-separator{display:flex;margin:0;direction:ltr}.elementor-widget-divider--view-line_icon .elementor-divider-separator,.elementor-widget-divider--view-line_text .elementor-divider-separator{align-items:center}.elementor-widget-divider--view-line_icon .elementor-divider-separator:after,.elementor-widget-divider--view-line_icon .elementor-divider-separator:before,.elementor-widget-divider--view-line_text .elementor-divider-separator:after,.elementor-widget-divider--view-line_text .elementor-divider-separator:before{display:block;content:\"\";border-block-end:0;flex-grow:1;border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--element-align-left .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-left .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-left .elementor-divider__element{margin-left:0}.elementor-widget-divider--element-align-right .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-right .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-right .elementor-divider__element{margin-right:0}.elementor-widget-divider--element-align-start .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-start .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-start .elementor-divider__element{margin-inline-start:0}.elementor-widget-divider--element-align-end .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-end .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-end .elementor-divider__element{margin-inline-end:0}.elementor-widget-divider:not(.elementor-widget-divider--view-line_text):not(.elementor-widget-divider--view-line_icon) .elementor-divider-separator{border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--separator-type-pattern{--divider-border-style:none}.elementor-widget-divider--separator-type-pattern.elementor-widget-divider--view-line .elementor-divider-separator,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:after,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:before,.elementor-widget-divider--separator-type-pattern:not([class*=elementor-widget-divider--view]) .elementor-divider-separator{width:100%;min-height:var(--divider-pattern-height);-webkit-mask-size:var(--divider-pattern-size) 100%;mask-size:var(--divider-pattern-size) 100%;-webkit-mask-repeat:var(--divider-pattern-repeat);mask-repeat:var(--divider-pattern-repeat);background-color:var(--divider-color);-webkit-mask-image:var(--divider-pattern-url);mask-image:var(--divider-pattern-url)}.elementor-widget-divider--no-spacing{--divider-pattern-size:auto}.elementor-widget-divider--bg-round{--divider-pattern-repeat:round}.rtl .elementor-widget-divider .elementor-divider__text{direction:rtl}.e-con-inner>.elementor-widget-divider,.e-con>.elementor-widget-divider{width:var(--container-widget-width,100%);--flex-grow:var(--container-widget-flex-grow)}<\/style>\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-06b8788 elementor-widget elementor-widget-heading\" data-id=\"06b8788\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<div class=\"elementor-heading-title elementor-size-default\">\uad00\ub828 \uc77d\uae30<\/div>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3919c66 elementor-grid-1 elementor-posts--thumbnail-none elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-widget elementor-widget-posts\" data-id=\"3919c66\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7544 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/ko\/\uc778\uc0ac\uc774\ud2b8-2\/application\/\uc804\uc790\ube54-\uc99d\ucc29\uc774\ub780-\ubb34\uc5c7\uc778\uac00\uc694\/\" >\n\t\t\t\t\uc804\uc790\ube54 \uc99d\ucc29 \ucf54\ud305(EB-PVD) \uacf5\uc815 \ubc0f \uc7a5\ub2e8\uc810\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\uc804\uc790\ube54 \uc99d\ucc29 \ucf54\ud305(EB-PVD) \uc804\uc790\ube54\uc758 \uacf5\uc815 \ubc0f \uc7a5\uc810<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/ko\/\uc778\uc0ac\uc774\ud2b8-2\/application\/\uc804\uc790\ube54-\uc99d\ucc29\uc774\ub780-\ubb34\uc5c7\uc778\uac00\uc694\/\" aria-label=\"\uc804\uc790\ube54 \uc99d\ucc29 \ucf54\ud305(EB-PVD) \uacf5\uc815 \ubc0f \uc7a5\ub2e8\uc810\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7553 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/ko\/\uc778\uc0ac\uc774\ud2b8-2\/application\/\ub9c8\uadf8\ub124\ud2b8\ub860-\uc2a4\ud37c\ud130\ub9c1\uc774\ub780\/\" >\n\t\t\t\t\ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1 \u4e28 \uc6d0\ub9ac, \ubd84\ub958 \ubc0f \uc7a5\uc810 \uc774\ud574\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1\uc774\ub780? \ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1\uc740 PVD \ubc15\ub9c9 \uc0dd\uc0b0\uc5d0 \uc77c\ubc18\uc801\uc73c\ub85c \uc0ac\uc6a9\ub418\ub294 \ubc29\ubc95\uc785\ub2c8\ub2e4.<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/ko\/\uc778\uc0ac\uc774\ud2b8-2\/application\/\ub9c8\uadf8\ub124\ud2b8\ub860-\uc2a4\ud37c\ud130\ub9c1\uc774\ub780\/\" aria-label=\"\ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30 \u4e28 \uc6d0\ub9ac, \ubd84\ub958 \ubc0f \uc7a5\uc810 \uc774\ud574\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7621 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/ko\/\uc778\uc0ac\uc774\ud2b8-2\/application\/\u771f\u7a7a\u84b8\u53d1\u4e3a\u4f55\u9009\u62e9\u7535\u5b50\u675f\/\" >\n\t\t\t\t\uc9c4\uacf5 \uc99d\ucc29(EB-PVD)\uc744 \uc704\ud574 \uc804\uc790\ube54\uc744 \uc120\ud0dd\ud574\uc57c \ud558\ub294 \uc774\uc720\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\uc9c4\uacf5 \uc99d\ucc29\uc744 \uc704\ud574 \uc804\uc790\ube54\uc744 \uc120\ud0dd\ud574\uc57c \ud558\ub294 \uc774\uc720(EB-PVD) \uc9c4\uc2e4<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/ko\/\uc778\uc0ac\uc774\ud2b8-2\/application\/\u771f\u7a7a\u84b8\u53d1\u4e3a\u4f55\u9009\u62e9\u7535\u5b50\u675f\/\" aria-label=\"\uc9c4\uacf5 \uc99d\ucc29\uc774 \uc804\uc790\ube54(EB-PVD)\uc744 \uc120\ud0dd\ud558\ub294 \uc774\uc720\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-35f6d81 elementor-widget elementor-widget-heading\" data-id=\"35f6d81\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title elementor-size-default\"><a href=\"https:\/\/www.nanofab.com.cn\/ko\/\uc778\uc0ac\uc774\ud2b8-2\/\">\ub354 \ub9ce\uc740 \uad00\ub828 \uc815\ubcf4...<\/a><\/p>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>\ud50c\ub77c\uc988\ub9c8 \uac15\ud654 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(PE-CVD)\uc758 \uc6d0\ub9ac\uc640 \uc7a5\uc810 PECVD \uae30\uc220\uc740 CVD\uc640 PVD\ub97c \ubcf4\uc644\ud558\uae30 \uc704\ud574 \uac1c\ubc1c\ub418\uc5c8\uc2b5\ub2c8\ub2e4 [...]<\/p>","protected":false},"author":3,"featured_media":7642,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""}},"footnotes":""},"categories":[215],"tags":[],"class_list":["post-7641","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-application"],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v20.0 (Yoast SEO v22.4) - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>\u63d0\u5347\u8584\u819c\uff1aPECVD\u7684\u4f18\u70b9 - \u6e2f\u6e7e\u534a\u5bfc\u4f53<\/title>\n<meta name=\"description\" content=\"\u8584\u819c\u5236\u5907\u5de5\u827a\u5728\u8d85\u5927\u89c4\u6a21\u96c6\u6210\u7535\u8def\u6280\u672f\u4e2d\u6709\u7740\u975e\u5e38\u5e7f\u6cdb\u7684\u5e94\u7528\uff0c\u6309\u7167\u5176\u6210\u819c\u65b9\u6cd5\u53ef\u5206\u4e3a\u4e24\u5927\u7c7b:\u7269\u7406\u6c14\u76f8\u6c89\u79ef(PVD)\u548c\u5316\u5b66\u6c14\u76f8\u6c89\u79ef(CVD)\u7b49\u79bb\u5b50\u589e\u5f3a\u578b\u5316\u5b66\u6c14\u76f8\u6dc0\u79ef(PECVD)\u662f\u5316\u5b66\u6c14\u76f8\u6dc0\u79ef\u7684\u4e00\u79cd,\u5176\u6dc0\u79ef\u6e29\u5ea6\u4f4e\u662f\u5b83\u6700\u7a81\u51fa\u7684\u4f18\u70b9\u3002\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.nanofab.com.cn\/ko\/\uc778\uc0ac\uc774\ud2b8-2\/application\/\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\/\" \/>\n<meta property=\"og:locale\" content=\"ko_KR\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08PE-CVD\uff09\u7684\u539f\u7406\u548c\u4f18\u70b9\" \/>\n<meta property=\"og:description\" content=\"\u8584\u819c\u5236\u5907\u5de5\u827a\u5728\u8d85\u5927\u89c4\u6a21\u96c6\u6210\u7535\u8def\u6280\u672f\u4e2d\u6709\u7740\u975e\u5e38\u5e7f\u6cdb\u7684\u5e94\u7528\uff0c\u6309\u7167\u5176\u6210\u819c\u65b9\u6cd5\u53ef\u5206\u4e3a\u4e24\u5927\u7c7b:\u7269\u7406\u6c14\u76f8\u6c89\u79ef(PVD)\u548c\u5316\u5b66\u6c14\u76f8\u6c89\u79ef(CVD)\u7b49\u79bb\u5b50\u589e\u5f3a\u578b\u5316\u5b66\u6c14\u76f8\u6dc0\u79ef(PECVD)\u662f\u5316\u5b66\u6c14\u76f8\u6dc0\u79ef\u7684\u4e00\u79cd,\u5176\u6dc0\u79ef\u6e29\u5ea6\u4f4e\u662f\u5b83\u6700\u7a81\u51fa\u7684\u4f18\u70b9\u3002\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.nanofab.com.cn\/ko\/\uc778\uc0ac\uc774\ud2b8-2\/application\/\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\/\" \/>\n<meta property=\"og:site_name\" content=\"\u6e2f\u6e7e\u534a\u5bfc\u4f53\" \/>\n<meta property=\"article:published_time\" content=\"2024-04-11T09:22:25+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2024-05-28T02:35:18+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f-1024x768.png\" \/>\n\t<meta property=\"og:image:width\" content=\"1024\" \/>\n\t<meta property=\"og:image:height\" content=\"768\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/png\" \/>\n<meta name=\"author\" content=\"jeff5829\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Written by\" \/>\n\t<meta name=\"twitter:data1\" content=\"jeff5829\" \/>\n\t<meta name=\"twitter:label2\" content=\"Est. reading time\" \/>\n\t<meta name=\"twitter:data2\" content=\"2\ubd84\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"@id\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#article\",\"isPartOf\":{\"@id\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/\"},\"author\":{\"name\":\"jeff5829\",\"@id\":\"https:\/\/www.nanofab.com.cn\/#\/schema\/person\/43ad5264cbf98ccd5ec1fbd4f6c3b0e5\"},\"headline\":\"\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08PE-CVD\uff09\u7684\u539f\u7406\u548c\u4f18\u70b9\",\"datePublished\":\"2024-04-11T09:22:25+00:00\",\"dateModified\":\"2024-05-28T02:35:18+00:00\",\"mainEntityOfPage\":{\"@id\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/\"},\"wordCount\":53,\"commentCount\":0,\"publisher\":{\"@id\":\"https:\/\/www.nanofab.com.cn\/#organization\"},\"image\":{\"@id\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#primaryimage\"},\"thumbnailUrl\":\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f.png\",\"articleSection\":[\"\u5e94\u7528\"],\"inLanguage\":\"ko-KR\",\"potentialAction\":[{\"@type\":\"CommentAction\",\"name\":\"Comment\",\"target\":[\"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#respond\"]}]},{\"@type\":\"WebPage\",\"@id\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/\",\"url\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/\",\"name\":\"\u63d0\u5347\u8584\u819c\uff1aPECVD\u7684\u4f18\u70b9 - \u6e2f\u6e7e\u534a\u5bfc\u4f53\",\"isPartOf\":{\"@id\":\"https:\/\/www.nanofab.com.cn\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#primaryimage\"},\"image\":{\"@id\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#primaryimage\"},\"thumbnailUrl\":\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f.png\",\"datePublished\":\"2024-04-11T09:22:25+00:00\",\"dateModified\":\"2024-05-28T02:35:18+00:00\",\"description\":\"\u8584\u819c\u5236\u5907\u5de5\u827a\u5728\u8d85\u5927\u89c4\u6a21\u96c6\u6210\u7535\u8def\u6280\u672f\u4e2d\u6709\u7740\u975e\u5e38\u5e7f\u6cdb\u7684\u5e94\u7528\uff0c\u6309\u7167\u5176\u6210\u819c\u65b9\u6cd5\u53ef\u5206\u4e3a\u4e24\u5927\u7c7b:\u7269\u7406\u6c14\u76f8\u6c89\u79ef(PVD)\u548c\u5316\u5b66\u6c14\u76f8\u6c89\u79ef(CVD)\u7b49\u79bb\u5b50\u589e\u5f3a\u578b\u5316\u5b66\u6c14\u76f8\u6dc0\u79ef(PECVD)\u662f\u5316\u5b66\u6c14\u76f8\u6dc0\u79ef\u7684\u4e00\u79cd,\u5176\u6dc0\u79ef\u6e29\u5ea6\u4f4e\u662f\u5b83\u6700\u7a81\u51fa\u7684\u4f18\u70b9\u3002\",\"breadcrumb\":{\"@id\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#breadcrumb\"},\"inLanguage\":\"ko-KR\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"ko-KR\",\"@id\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#primaryimage\",\"url\":\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f.png\",\"contentUrl\":\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f.png\",\"width\":1632,\"height\":1224},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"\u9996\u9875\",\"item\":\"https:\/\/www.nanofab.com.cn\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08PE-CVD\uff09\u7684\u539f\u7406\u548c\u4f18\u70b9\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/www.nanofab.com.cn\/#website\",\"url\":\"https:\/\/www.nanofab.com.cn\/\",\"name\":\"Harbour\u6e2f\u6e7e\u534a\u5bfc\u4f53\",\"description\":\"Greater China\",\"publisher\":{\"@id\":\"https:\/\/www.nanofab.com.cn\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/www.nanofab.com.cn\/?s={search_term_string}\"},\"query-input\":\"required name=search_term_string\"}],\"inLanguage\":\"ko-KR\"},{\"@type\":\"Organization\",\"@id\":\"https:\/\/www.nanofab.com.cn\/#organization\",\"name\":\"\u6e2f\u6e7e\u534a\u5bfc\u4f53\",\"url\":\"https:\/\/www.nanofab.com.cn\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"ko-KR\",\"@id\":\"https:\/\/www.nanofab.com.cn\/#\/schema\/logo\/image\/\",\"url\":\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/cropped-cropped-cropped-\u6e2f\u6e7e\u534a\u5bfc\u4f53-logo.png\",\"contentUrl\":\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/cropped-cropped-cropped-\u6e2f\u6e7e\u534a\u5bfc\u4f53-logo.png\",\"width\":380,\"height\":60,\"caption\":\"\u6e2f\u6e7e\u534a\u5bfc\u4f53\"},\"image\":{\"@id\":\"https:\/\/www.nanofab.com.cn\/#\/schema\/logo\/image\/\"}},{\"@type\":\"Person\",\"@id\":\"https:\/\/www.nanofab.com.cn\/#\/schema\/person\/43ad5264cbf98ccd5ec1fbd4f6c3b0e5\",\"name\":\"jeff5829\",\"image\":{\"@type\":\"ImageObject\",\"inLanguage\":\"ko-KR\",\"@id\":\"https:\/\/www.nanofab.com.cn\/#\/schema\/person\/image\/\",\"url\":\"https:\/\/secure.gravatar.com\/avatar\/07276a17cfc0fa45dca16dd680ca6060143a60e8f4bd15c2584de1fdcec39601?s=96&d=mm&r=g\",\"contentUrl\":\"https:\/\/secure.gravatar.com\/avatar\/07276a17cfc0fa45dca16dd680ca6060143a60e8f4bd15c2584de1fdcec39601?s=96&d=mm&r=g\",\"caption\":\"jeff5829\"},\"url\":\"https:\/\/www.nanofab.com.cn\/ko\/author\/jeff5829\/\"}]}<\/script>\n<!-- \/ Yoast SEO Premium plugin. -->","yoast_head_json":{"title":"\u63d0\u5347\u8584\u819c\uff1aPECVD\u7684\u4f18\u70b9 - \u6e2f\u6e7e\u534a\u5bfc\u4f53","description":"\u8584\u819c\u5236\u5907\u5de5\u827a\u5728\u8d85\u5927\u89c4\u6a21\u96c6\u6210\u7535\u8def\u6280\u672f\u4e2d\u6709\u7740\u975e\u5e38\u5e7f\u6cdb\u7684\u5e94\u7528\uff0c\u6309\u7167\u5176\u6210\u819c\u65b9\u6cd5\u53ef\u5206\u4e3a\u4e24\u5927\u7c7b:\u7269\u7406\u6c14\u76f8\u6c89\u79ef(PVD)\u548c\u5316\u5b66\u6c14\u76f8\u6c89\u79ef(CVD)\u7b49\u79bb\u5b50\u589e\u5f3a\u578b\u5316\u5b66\u6c14\u76f8\u6dc0\u79ef(PECVD)\u662f\u5316\u5b66\u6c14\u76f8\u6dc0\u79ef\u7684\u4e00\u79cd,\u5176\u6dc0\u79ef\u6e29\u5ea6\u4f4e\u662f\u5b83\u6700\u7a81\u51fa\u7684\u4f18\u70b9\u3002","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.nanofab.com.cn\/ko\/\uc778\uc0ac\uc774\ud2b8-2\/application\/\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\/","og_locale":"ko_KR","og_type":"article","og_title":"\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08PE-CVD\uff09\u7684\u539f\u7406\u548c\u4f18\u70b9","og_description":"\u8584\u819c\u5236\u5907\u5de5\u827a\u5728\u8d85\u5927\u89c4\u6a21\u96c6\u6210\u7535\u8def\u6280\u672f\u4e2d\u6709\u7740\u975e\u5e38\u5e7f\u6cdb\u7684\u5e94\u7528\uff0c\u6309\u7167\u5176\u6210\u819c\u65b9\u6cd5\u53ef\u5206\u4e3a\u4e24\u5927\u7c7b:\u7269\u7406\u6c14\u76f8\u6c89\u79ef(PVD)\u548c\u5316\u5b66\u6c14\u76f8\u6c89\u79ef(CVD)\u7b49\u79bb\u5b50\u589e\u5f3a\u578b\u5316\u5b66\u6c14\u76f8\u6dc0\u79ef(PECVD)\u662f\u5316\u5b66\u6c14\u76f8\u6dc0\u79ef\u7684\u4e00\u79cd,\u5176\u6dc0\u79ef\u6e29\u5ea6\u4f4e\u662f\u5b83\u6700\u7a81\u51fa\u7684\u4f18\u70b9\u3002","og_url":"https:\/\/www.nanofab.com.cn\/ko\/\uc778\uc0ac\uc774\ud2b8-2\/application\/\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\/","og_site_name":"\u6e2f\u6e7e\u534a\u5bfc\u4f53","article_published_time":"2024-04-11T09:22:25+00:00","article_modified_time":"2024-05-28T02:35:18+00:00","og_image":[{"width":1024,"height":768,"url":"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f-1024x768.png","type":"image\/png"}],"author":"jeff5829","twitter_card":"summary_large_image","twitter_misc":{"Written by":"jeff5829","Est. reading time":"2\ubd84"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"Article","@id":"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#article","isPartOf":{"@id":"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/"},"author":{"name":"jeff5829","@id":"https:\/\/www.nanofab.com.cn\/#\/schema\/person\/43ad5264cbf98ccd5ec1fbd4f6c3b0e5"},"headline":"\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08PE-CVD\uff09\u7684\u539f\u7406\u548c\u4f18\u70b9","datePublished":"2024-04-11T09:22:25+00:00","dateModified":"2024-05-28T02:35:18+00:00","mainEntityOfPage":{"@id":"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/"},"wordCount":53,"commentCount":0,"publisher":{"@id":"https:\/\/www.nanofab.com.cn\/#organization"},"image":{"@id":"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#primaryimage"},"thumbnailUrl":"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f.png","articleSection":["\u5e94\u7528"],"inLanguage":"ko-KR","potentialAction":[{"@type":"CommentAction","name":"Comment","target":["https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#respond"]}]},{"@type":"WebPage","@id":"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/","url":"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/","name":"\u63d0\u5347\u8584\u819c\uff1aPECVD\u7684\u4f18\u70b9 - \u6e2f\u6e7e\u534a\u5bfc\u4f53","isPartOf":{"@id":"https:\/\/www.nanofab.com.cn\/#website"},"primaryImageOfPage":{"@id":"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#primaryimage"},"image":{"@id":"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#primaryimage"},"thumbnailUrl":"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f.png","datePublished":"2024-04-11T09:22:25+00:00","dateModified":"2024-05-28T02:35:18+00:00","description":"\u8584\u819c\u5236\u5907\u5de5\u827a\u5728\u8d85\u5927\u89c4\u6a21\u96c6\u6210\u7535\u8def\u6280\u672f\u4e2d\u6709\u7740\u975e\u5e38\u5e7f\u6cdb\u7684\u5e94\u7528\uff0c\u6309\u7167\u5176\u6210\u819c\u65b9\u6cd5\u53ef\u5206\u4e3a\u4e24\u5927\u7c7b:\u7269\u7406\u6c14\u76f8\u6c89\u79ef(PVD)\u548c\u5316\u5b66\u6c14\u76f8\u6c89\u79ef(CVD)\u7b49\u79bb\u5b50\u589e\u5f3a\u578b\u5316\u5b66\u6c14\u76f8\u6dc0\u79ef(PECVD)\u662f\u5316\u5b66\u6c14\u76f8\u6dc0\u79ef\u7684\u4e00\u79cd,\u5176\u6dc0\u79ef\u6e29\u5ea6\u4f4e\u662f\u5b83\u6700\u7a81\u51fa\u7684\u4f18\u70b9\u3002","breadcrumb":{"@id":"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#breadcrumb"},"inLanguage":"ko-KR","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/"]}]},{"@type":"ImageObject","inLanguage":"ko-KR","@id":"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#primaryimage","url":"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f.png","contentUrl":"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f.png","width":1632,"height":1224},{"@type":"BreadcrumbList","@id":"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"\u9996\u9875","item":"https:\/\/www.nanofab.com.cn\/"},{"@type":"ListItem","position":2,"name":"\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08PE-CVD\uff09\u7684\u539f\u7406\u548c\u4f18\u70b9"}]},{"@type":"WebSite","@id":"https:\/\/www.nanofab.com.cn\/#website","url":"https:\/\/www.nanofab.com.cn\/","name":"Harbour\u6e2f\u6e7e\u534a\u5bfc\u4f53","description":"Greater China","publisher":{"@id":"https:\/\/www.nanofab.com.cn\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.nanofab.com.cn\/?s={search_term_string}"},"query-input":"required name=search_term_string"}],"inLanguage":"ko-KR"},{"@type":"Organization","@id":"https:\/\/www.nanofab.com.cn\/#organization","name":"\u6e2f\u6e7e\u534a\u5bfc\u4f53","url":"https:\/\/www.nanofab.com.cn\/","logo":{"@type":"ImageObject","inLanguage":"ko-KR","@id":"https:\/\/www.nanofab.com.cn\/#\/schema\/logo\/image\/","url":"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/cropped-cropped-cropped-\u6e2f\u6e7e\u534a\u5bfc\u4f53-logo.png","contentUrl":"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/cropped-cropped-cropped-\u6e2f\u6e7e\u534a\u5bfc\u4f53-logo.png","width":380,"height":60,"caption":"\u6e2f\u6e7e\u534a\u5bfc\u4f53"},"image":{"@id":"https:\/\/www.nanofab.com.cn\/#\/schema\/logo\/image\/"}},{"@type":"Person","@id":"https:\/\/www.nanofab.com.cn\/#\/schema\/person\/43ad5264cbf98ccd5ec1fbd4f6c3b0e5","name":"jeff5829","image":{"@type":"ImageObject","inLanguage":"ko-KR","@id":"https:\/\/www.nanofab.com.cn\/#\/schema\/person\/image\/","url":"https:\/\/secure.gravatar.com\/avatar\/07276a17cfc0fa45dca16dd680ca6060143a60e8f4bd15c2584de1fdcec39601?s=96&d=mm&r=g","contentUrl":"https:\/\/secure.gravatar.com\/avatar\/07276a17cfc0fa45dca16dd680ca6060143a60e8f4bd15c2584de1fdcec39601?s=96&d=mm&r=g","caption":"jeff5829"},"url":"https:\/\/www.nanofab.com.cn\/ko\/author\/jeff5829\/"}]}},"_links":{"self":[{"href":"https:\/\/www.nanofab.com.cn\/ko\/wp-json\/wp\/v2\/posts\/7641","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.nanofab.com.cn\/ko\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.nanofab.com.cn\/ko\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.nanofab.com.cn\/ko\/wp-json\/wp\/v2\/users\/3"}],"replies":[{"embeddable":true,"href":"https:\/\/www.nanofab.com.cn\/ko\/wp-json\/wp\/v2\/comments?post=7641"}],"version-history":[{"count":12,"href":"https:\/\/www.nanofab.com.cn\/ko\/wp-json\/wp\/v2\/posts\/7641\/revisions"}],"predecessor-version":[{"id":7962,"href":"https:\/\/www.nanofab.com.cn\/ko\/wp-json\/wp\/v2\/posts\/7641\/revisions\/7962"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.nanofab.com.cn\/ko\/wp-json\/wp\/v2\/media\/7642"}],"wp:attachment":[{"href":"https:\/\/www.nanofab.com.cn\/ko\/wp-json\/wp\/v2\/media?parent=7641"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.nanofab.com.cn\/ko\/wp-json\/wp\/v2\/categories?post=7641"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.nanofab.com.cn\/ko\/wp-json\/wp\/v2\/tags?post=7641"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}