{"id":8099,"date":"2024-07-05T16:25:50","date_gmt":"2024-07-05T08:25:50","guid":{"rendered":"https:\/\/www.nanofab.com.cn\/?p=8099"},"modified":"2024-08-23T17:19:41","modified_gmt":"2024-08-23T09:19:41","slug":"difference-between-lpcvd-and-pecvd","status":"publish","type":"post","link":"https:\/\/www.nanofab.com.cn\/ja\/\u30a4\u30f3\u30b5\u30a4\u30c8-2\/\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\/lpcvd\u3068pecvd\u306e\u9055\u3044\/","title":{"rendered":"LPCVD\u3068PECVD\u306e\u9055\u3044"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"8099\" class=\"elementor elementor-8099\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-a7a690b elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"a7a690b\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-b6059cf\" data-id=\"b6059cf\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-26a0e66 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"26a0e66\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-9a7ae41\" data-id=\"9a7ae41\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-e6d838b elementor-widget elementor-widget-heading\" data-id=\"e6d838b\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\">LPCVD\u3068PECVD\u306e\u9055\u3044<\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-933fe5d elementor-widget elementor-widget-post-info\" data-id=\"933fe5d\" data-element_type=\"widget\" data-widget_type=\"post-info.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor\/assets\/css\/widget-icon-list.min.css\"><link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-theme-elements.min.css\">\t\t<ul class=\"elementor-icon-list-items elementor-post-info\">\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-repeater-item-577f4c4\" itemprop=\"datePublished\">\n\t\t\t\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/ja\/2024\/07\/05\/\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text elementor-post-info__item elementor-post-info__item--type-date\">\n\t\t\t\t\t\t\t\t\t\t<time>2024-07-05<\/time>\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/li>\n\t\t\t\t<\/ul>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-bf6c179 elementor-widget elementor-widget-image\" data-id=\"bf6c179\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-image{text-align:center}.elementor-widget-image a{display:inline-block}.elementor-widget-image a img[src$=\".svg\"]{width:48px}.elementor-widget-image img{vertical-align:middle;display:inline-block}<\/style>\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"768\" height=\"512\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/07\/Thin-Film-Deposition-Systems-768x512-1.jpg\" class=\"attachment-large size-large wp-image-8100\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/07\/Thin-Film-Deposition-Systems-768x512-1.jpg 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/07\/Thin-Film-Deposition-Systems-768x512-1-300x200.jpg 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/07\/Thin-Film-Deposition-Systems-768x512-1-18x12.jpg 18w\" sizes=\"(max-width: 768px) 100vw, 768px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6c30c28 elementor-widget elementor-widget-text-editor\" data-id=\"6c30c28\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p>\u4e00\u65b9\u3001PECVD\u306f\u30d7\u30e9\u30ba\u30de\u30a8\u30f3\u30cf\u30f3\u30b9\u30c9\u30b1\u30df\u30b9\u30c8\u30ea\u30fc\u3092\u5229\u7528\u3057\u3066\u4f4e\u6e29\u3067\u52b9\u7387\u7684\u306a\u6210\u819c\u3092\u5b9f\u73fe\u3059\u308b\u305f\u3081\u3001\u7279\u306b\u6e29\u5ea6\u306b\u654f\u611f\u306a\u57fa\u677f\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002\u9069\u5207\u306a\u8584\u819c\u5f62\u6210\u6280\u8853\u3092\u9078\u629e\u3059\u308b\u3053\u3068\u3067\u3001\u512a\u308c\u305f\u88fd\u54c1\u54c1\u8cea\u3068\u751f\u7523\u6027\u304c\u5b9f\u73fe\u3057\u307e\u3059\u3002<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-c9835a3 elementor-widget elementor-widget-heading\" data-id=\"c9835a3\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">LPCVD\uff08\u4f4e\u5727\u5316\u5b66\u84b8\u7740\u6cd5\uff09<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2654226 elementor-widget elementor-widget-text-editor\" data-id=\"2654226\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p><strong>LPCVD\u6280\u8853<\/strong>LPCVD\u306f\u3001\u4e3b\u306b\u534a\u5c0e\u4f53\u3084\u30de\u30a4\u30af\u30ed\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u7523\u696d\u306a\u3069\u306e\u30cf\u30a4\u30c6\u30af\u88fd\u9020\u306b\u9069\u3057\u3066\u3044\u308b\u3002LPCVD\u306f\u3001\u4f4e\u5727\u74b0\u5883\u4e0b\u3067\u9ad8\u6e29\u3067\u4f5c\u52d5\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u9ad8\u6027\u80fd\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u306e\u53b3\u3057\u3044\u8981\u6c42\u3092\u6e80\u305f\u3059\u3001\u9ad8\u54c1\u8cea\u3067\u7dfb\u5bc6\u304b\u3064\u5747\u4e00\u306a\u819c\u3092\u88fd\u9020\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f396641 elementor-widget elementor-widget-text-editor\" data-id=\"f396641\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p><strong>\u30b3\u30a2\u306e\u5f37\u307f<\/strong>:: \u4ee5\u4e0b\u306e\u3068\u304a\u308a\u3067\u3059\u3002<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-044fc3a elementor-widget elementor-widget-text-editor\" data-id=\"044fc3a\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<ul><li><strong>\u9ad8\u54c1\u8cea\u30d5\u30a3\u30eb\u30e0<\/strong>LPCVD \u819c\u306f\u3001\u6975\u3081\u3066\u9ad8\u3044\u5747\u4e00\u6027\u3068\u5bc6\u5ea6\u3092\u6301\u3061\u3001\u6b20\u9665\u304c\u5c11\u306a\u304f\u3001\u4f4e\u5fdc\u529b\u3067\u6210\u819c\u3055\u308c\u308b\u305f\u3081\u3001\u9ad8\u3044\u7cbe\u5ea6\u3068\u4fe1\u983c\u6027\u304c\u8981\u6c42\u3055\u308c\u308b\u7528\u9014\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002<\/li><li><strong>\u5e45\u5e83\u3044\u6750\u6599\u9069\u5408\u6027<\/strong>\u4e8c\u9178\u5316\u30b1\u30a4\u7d20(SiO\u2082)\u3001\u7a92\u5316\u30b1\u30a4\u7d20(Si\u2083N\u2084)\u3001\u30dd\u30ea\u30b7\u30ea\u30b3\u30f3(Poly-Si)\u306a\u3069\u3001\u69d8\u3005\u306a\u4e3b\u8981\u6750\u6599\u3092\u6210\u819c\u3067\u304d\u3001\u8907\u96d1\u306a\u30d7\u30ed\u30bb\u30b9\u8981\u4ef6\u306b\u5bfe\u5fdc\u3002<\/li><li><strong>\u9ad8\u6e29\u84b8\u7740<\/strong>LPCVD\u306f\u8010\u9ad8\u6e29\u57fa\u677f\u306b\u9069\u3057\u3066\u304a\u308a\u3001\u9ad8\u6e29\u74b0\u5883\u3067\u4f7f\u7528\u3055\u308c\u308b\u96fb\u5b50\u6a5f\u5668\u306b\u512a\u308c\u305f\u819c\u8cea\u3092\u63d0\u4f9b\u3059\u308b\u3002<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-180dd1d elementor-widget elementor-widget-text-editor\" data-id=\"180dd1d\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p><strong>\u5fdc\u7528\u5206\u91ce<\/strong>:: \u4ee5\u4e0b\u306e\u3068\u304a\u308a\u3067\u3059\u3002<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1956520 elementor-widget elementor-widget-text-editor\" data-id=\"1956520\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<ul><li><strong>\u534a\u5c0e\u4f53\u7523\u696d<\/strong>\u9ad8\u6027\u80fd\u96c6\u7a4d\u56de\u8def\u3001\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3001\u30e1\u30e2\u30ea\u30c7\u30d0\u30a4\u30b9\u7b49\u306e\u88fd\u9020\u3002<\/li><li><strong>\u30de\u30a4\u30af\u30ed\u30a8\u30ec\u30af\u30c8\u30ed\u30e1\u30ab\u30cb\u30ab\u30eb\u30b7\u30b9\u30c6\u30e0\uff08MEMS\uff09<\/strong>\u7cbe\u5bc6\u30de\u30a4\u30af\u30ed\u30e1\u30ab\u30cb\u30ab\u30eb\u69cb\u9020\u3068\u30bb\u30f3\u30b5\u30fc\u306e\u88fd\u9020\u3002<\/li><li><strong>\u5149\u96fb\u5b50\u30c7\u30d0\u30a4\u30b9<\/strong>\u9ad8\u54c1\u8cea\u5149\u5b66\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3068\u4fdd\u8b77\u819c\u306e\u8abf\u88fd<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-156303d elementor-widget elementor-widget-heading\" data-id=\"156303d\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">PECVD (\u30d7\u30e9\u30ba\u30de\u30a8\u30f3\u30cf\u30f3\u30b9\u30c8\u5316\u5b66\u84b8\u7740)<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-97ba4d5 elementor-widget elementor-widget-text-editor\" data-id=\"97ba4d5\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p><a href=\"https:\/\/www.nanofab.com.cn\/ja\/\u30a4\u30f3\u30b5\u30a4\u30c8-2\/\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\/\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\/\"><strong>PECVD\u6280\u8853<\/strong><\/a>\u4f4e\u6e29\u6210\u819c\u304c\u53ef\u80fd\u306aPECVD\u306f\u3001\u30d7\u30e9\u30ba\u30de\u30a8\u30f3\u30cf\u30f3\u30b9\u30c9\u30b1\u30df\u30b9\u30c8\u30ea\u30fc\u3092\u5229\u7528\u3057\u3066\u4f4e\u6e29\u3067\u9ad8\u52b9\u7387\u306e\u8584\u819c\u6210\u819c\u3092\u5b9f\u73fe\u3059\u308b\u305f\u3081\u3001\u7279\u306b\u6e29\u5ea6\u306b\u654f\u611f\u306a\u57fa\u677f\u306b\u9069\u3057\u3066\u3044\u308b\u3002<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1b5a6dd elementor-widget elementor-widget-text-editor\" data-id=\"1b5a6dd\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p><strong>\u30b3\u30a2\u306e\u5f37\u307f<\/strong>:: \u4ee5\u4e0b\u306e\u3068\u304a\u308a\u3067\u3059\u3002<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-30070b8 elementor-widget elementor-widget-text-editor\" data-id=\"30070b8\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<ul><li><strong>\u4f4e\u6e29\u84b8\u7740<\/strong>PECVD\u306f100\u2103\u304b\u3089400\u2103\u306e\u4f4e\u6e29\u9818\u57df\u3067\u4f5c\u52d5\u3057\u3001\u30d7\u30e9\u30b9\u30c1\u30c3\u30af\u3001\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u30fb\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u3001\u6709\u6a5f\u57fa\u677f\u306a\u3069\u306e\u6e29\u5ea6\u306b\u654f\u611f\u306a\u6750\u6599\u306b\u9069\u3057\u3066\u3044\u308b\u3002<\/li><li><strong>\u591a\u7528\u9014<\/strong>\u4e8c\u9178\u5316\u73ea\u7d20\uff08SiO\u2082\uff09\u3001\u7a92\u5316\u73ea\u7d20\uff08Si\u2083N\u2084\uff09\u3001\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30e9\u30a4\u30af\u30ab\u30fc\u30dc\u30f3\uff08DLC\uff09\u306a\u3069\u3001\u3055\u307e\u3056\u307e\u306a\u5206\u91ce\u306e\u7528\u9014\u306b\u5bfe\u5fdc\u3067\u304d\u308b\u5e45\u5e83\u3044\u6750\u6599\u3092\u6210\u819c\u3067\u304d\u308b\u3002<\/li><li><strong>\u9ad8\u3044\u84b8\u7740\u7387<\/strong>\u30d7\u30e9\u30ba\u30de\u306b\u3088\u308b\u53cd\u5fdc\u901f\u5ea6\u306e\u5411\u4e0a\u306f\u751f\u7523\u6027\u3092\u9ad8\u3081\u3001\u5927\u898f\u6a21\u306a\u5de5\u696d\u751f\u7523\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-54502ec elementor-widget elementor-widget-text-editor\" data-id=\"54502ec\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p><strong>\u5fdc\u7528\u5206\u91ce<\/strong>:: \u4ee5\u4e0b\u306e\u3068\u304a\u308a\u3067\u3059\u3002<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-76c24d8 elementor-widget elementor-widget-text-editor\" data-id=\"76c24d8\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<ul><li><strong>\u534a\u5c0e\u4f53\u3068\u30de\u30a4\u30af\u30ed\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9<\/strong>\u4f4e\u5fdc\u529b\u3001\u4f4e\u6b20\u9665\u306e\u7d76\u7e01\u5c64\u304a\u3088\u3073\u30d1\u30c3\u30b7\u30d9\u30fc\u30b7\u30e7\u30f3\u5c64\u306e\u88fd\u9020\u7528\u3002<\/li><li><strong>\u5149\u30c7\u30d0\u30a4\u30b9<\/strong>\u9ad8\u54c1\u8cea\u306a\u53cd\u5c04\u9632\u6b62\u30d5\u30a3\u30eb\u30e0\u3084\u30d5\u30a3\u30eb\u30bf\u30fc\u30d5\u30a3\u30eb\u30e0\u306e\u4f5c\u6210\u3002<\/li><li><strong>\u592a\u967d\u96fb\u6c60<\/strong>\u592a\u967d\u5149\u767a\u96fb\u306e\u5909\u63db\u52b9\u7387\u3092\u5411\u4e0a\u3055\u305b\u308b\u305f\u3081\u306e\u30d1\u30c3\u30b7\u30d9\u30fc\u30b7\u30e7\u30f3\u5c64\u3068\u53cd\u5c04\u9632\u6b62\u5c64\u306e\u6210\u819c\u3002<\/li><li><strong>MEMS\u3068\u30bb\u30f3\u30b5\u30fc<\/strong>\u9ad8\u6027\u80fd\u30de\u30a4\u30af\u30ed\u30e1\u30ab\u30cb\u30ab\u30eb\u69cb\u9020\u3068\u9ad8\u611f\u5ea6\u5c64\u306e\u88fd\u9020<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b9f6597 elementor-widget elementor-widget-text-editor\" data-id=\"b9f6597\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>LPCVD\u306f\u9ad8\u6e29\u3067\u5316\u5b66\u53cd\u5fdc\u3092\u4fc3\u9032\u3057\u3001\u8010\u9ad8\u6e29\u57fa\u677f\u3084\u9ad8\u6027\u80fd\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u5bfe\u5fdc\u3059\u308b\u3002\u4e00\u65b9\u3001PECVD\u306f\u30d7\u30e9\u30ba\u30de\u3092\u4f7f\u3063\u3066\u4f4e\u6e29\u3067\u5316\u5b66\u53cd\u5fdc\u3092\u4fc3\u9032\u3057\u3001\u6e29\u5ea6\u306b\u654f\u611f\u306a\u57fa\u677f\u3084\u5e45\u5e83\u3044\u591a\u6a5f\u80fd\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u5bfe\u5fdc\u3059\u308b\u3002\u3053\u306e\u9055\u3044\u306b\u3088\u308a\u3001\u305d\u308c\u305e\u308c\u306e\u30d7\u30ed\u30bb\u30b9\u3092\u7279\u5b9a\u306e\u7528\u9014\u306b\u4f7f\u7528\u3057\u3001\u7570\u306a\u308b\u88fd\u9020\u30cb\u30fc\u30ba\u306b\u5bfe\u5fdc\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002<\/p><p>\u7279\u5225\u306a\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u306e\u3054\u8981\u671b\u3084\u3001\u95a2\u9023\u30d7\u30ed\u30bb\u30b9\u306b\u95a2\u3059\u308b\u304a\u554f\u3044\u5408\u308f\u305b\u306f\u3001\u3053\u3061\u3089\u307e\u3067\u3054\u9023\u7d61\u304f\u3060\u3055\u3044\uff01<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-90a445f elementor-widget elementor-widget-text-editor\" data-id=\"90a445f\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>\u3092\u63d0\u4f9b\u3057\u3066\u3044\u307e\u3059\u3002 <a href=\"https:\/\/www.nanofab.com.cn\/ja\/\u30ab\u30b9\u30bf\u30e0\u30b5\u30fc\u30d3\u30b9-2\/\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6280\u8853-\u8584\u819c\u30e9\u30df\u30cd\u30fc\u30b7\u30e7\u30f3-2\/\u5316\u5b66-\u84b8\u7740-\u53d7\u8a17\u52a0\u5de5-2\/\">\u5316\u5b66\u6c17\u76f8\u6210\u9577\uff08CVD\uff09OEM\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u30b5\u30fc\u30d3\u30b9<\/a>\u304a\u6c17\u8efd\u306b\u30b3\u30e1\u30f3\u30c8\u3092\u304a\u5bc4\u305b\u304f\u3060\u3055\u3044\u3002<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-094e804 uael-mobile-wpf-button-justify uael-wpf-style-box uael-wpf-input-size-sm uael-wpf-button-left uael-wpf-btn-size-sm uael-wpf-highlight-style-default elementor-widget elementor-widget-uael-wpf-styler\" data-id=\"094e804\" data-element_type=\"widget\" data-settings=\"{&quot;btn_border_radius&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;0&quot;,&quot;right&quot;:&quot;0&quot;,&quot;bottom&quot;:&quot;0&quot;,&quot;left&quot;:&quot;0&quot;,&quot;isLinked&quot;:false},&quot;wpf_button_align_mobile&quot;:&quot;justify&quot;,&quot;wpf_input_padding&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;wpf_input_padding_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;wpf_input_padding_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;wpf_input_radius&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;0&quot;,&quot;right&quot;:&quot;0&quot;,&quot;bottom&quot;:&quot;0&quot;,&quot;left&quot;:&quot;0&quot;,&quot;isLinked&quot;:true},&quot;wpf_input_radius_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;wpf_input_radius_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;wpf_button_align&quot;:&quot;left&quot;,&quot;wpf_button_padding&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;wpf_button_padding_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;wpf_button_padding_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;btn_border_radius_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;btn_border_radius_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;form_fields_margin&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;form_fields_margin_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;form_fields_margin_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;form_label_margin_bottom&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;form_label_margin_bottom_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;form_label_margin_bottom_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;form_desc_margin_top&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;form_desc_margin_top_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;form_desc_margin_top_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;check_radio_items_spacing&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;check_radio_items_spacing_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;check_radio_items_spacing_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;submit_spacing&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;submit_spacing_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;submit_spacing_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"uael-wpf-styler.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class = \"uael-wpf-container\">\r\n\t\t\t\t\t\t<div class = \"uael-wpf uael-wpf-style elementor-clickable\">\r\n\t\t\t\t\t\t<div class=\"wpforms-container wpforms-container-full\" id=\"wpforms-2729\"><form id=\"wpforms-form-2729\" class=\"wpforms-validate wpforms-form wpforms-ajax-form\" data-formid=\"2729\" method=\"post\" enctype=\"multipart\/form-data\" action=\"\/ja\/wp-json\/wp\/v2\/posts\/8099\" data-token=\"1b15fba757e6d485ea0f70b2607a7a09\" data-trp-original-action=\"\/ja\/wp-json\/wp\/v2\/posts\/8099\"><noscript class=\"wpforms-error-noscript\">\u3053\u306e\u6620\u753b\u306fJavaScript\u3092\u4f7f\u7528\u3057\u3066\u304a\u308a\u3001\u52b9\u679c\u7684\u3067\u3042\u308b\u3002<\/noscript><div class=\"wpforms-field-container\"><div id=\"wpforms-2729-field_5-container\" class=\"wpforms-field wpforms-field-textarea\" data-field-id=\"5\"><label class=\"wpforms-field-label\" for=\"wpforms-2729-field_5\">\u30cb\u30fc\u30ba\uff08\u9700\u8981\uff09 <span class=\"wpforms-required-label\">*<\/span><\/label><textarea id=\"wpforms-2729-field_5\" class=\"wpforms-field-medium wpforms-field-required\" name=\"wpforms[fields][5]\" placeholder=\"\u3054\u8981\u671b\u3092\u304a\u805e\u304b\u305b\u304f\u3060\u3055\u3044...\" required><\/textarea><\/div><div id=\"wpforms-2729-field_10-container\" class=\"wpforms-field wpforms-field-layout\" data-field-id=\"10\"><label class=\"wpforms-field-label wpforms-label-hide\" for=\"wpforms-2729-field_10\">\u30ec\u30a4\u30a2\u30a6\u30c8<\/label><div class=\"wpforms-field-layout-columns wpforms-field-layout-preset-50-50\"><div class=\"wpforms-layout-column wpforms-layout-column-50\"><div id=\"wpforms-2729-field_9-container\" class=\"wpforms-field wpforms-field-email\" data-field-id=\"9\"><label class=\"wpforms-field-label\" for=\"wpforms-2729-field_9\">\u30e1\u30fc\u30eb\u30dc\u30c3\u30af\u30b9\uff08\u96fb\u5b50\u30e1\u30fc\u30eb\uff09 <span class=\"wpforms-required-label\">*<\/span><\/label><input type=\"email\" id=\"wpforms-2729-field_9\" class=\"wpforms-field-medium wpforms-field-required\" name=\"wpforms[fields][9]\" placeholder=\"E\u30e1\u30fc\u30eb\u3092\u8a18\u5165\u3057\u3066\u304f\u3060\u3055\u3044...\" required><\/div><\/div><div class=\"wpforms-layout-column wpforms-layout-column-50\"><div id=\"wpforms-2729-field_1-container\" class=\"wpforms-field wpforms-field-text\" data-field-id=\"1\"><label class=\"wpforms-field-label\" for=\"wpforms-2729-field_1\">\u6c0f\u540d\uff08\u3075\u308a\u304c\u306a\uff09<\/label><input type=\"text\" id=\"wpforms-2729-field_1\" class=\"wpforms-field-medium\" name=\"wpforms[fields][1]\" placeholder=\"\u540d\u524d\u3092\u8a18\u5165\u3059\u308b...\" ><\/div><\/div><\/div><\/div><\/div><div class=\"wpforms-submit-container\"><input type=\"hidden\" name=\"wpforms[id]\" value=\"2729\"><input type=\"hidden\" name=\"wpforms[author]\" value=\"3\"><button type=\"submit\" name=\"wpforms[submit]\" id=\"wpforms-submit-2729\" class=\"wpforms-submit\" data-alt-text=\"\u53d1\u9001\u4e2d\u2026\" data-submit-text=\"\u8054\u7cfb\u6211\u4eec\" aria-live=\"assertive\" value=\"wpforms-submit\">\u304a\u554f\u3044\u5408\u308f\u305b<\/button><img decoding=\"async\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/wpforms\/assets\/images\/submit-spin.svg\" class=\"wpforms-submit-spinner\" style=\"display: none;\" width=\"26\" height=\"26\" alt=\"\u8aad\u66f8\"><\/div><input type=\"hidden\" name=\"trp-form-language\" value=\"ja\"\/><\/form><\/div>  <!-- .wpforms-container -->\t\t\t\t\t<\/div>\r\n\t\t\t\t<\/div>\r\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-4ad2eba\" data-id=\"4ad2eba\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-e99c735 elementor-widget elementor-widget-heading\" data-id=\"e99c735\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<div class=\"elementor-heading-title elementor-size-default\">\u95a2\u9023\u88fd\u54c1<\/div>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0e39075 elementor-grid-1 elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-posts--thumbnail-top elementor-widget elementor-widget-posts\" data-id=\"0e39075\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:10,&quot;sizes&quot;:[]},&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-posts.min.css\">\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7386 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/ja\/\u30ab\u30b9\u30bf\u30e0\u30b5\u30fc\u30d3\u30b9-2\/\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6280\u8853-\u8584\u819c\u30e9\u30df\u30cd\u30fc\u30b7\u30e7\u30f3-2\/\u539f\u5b50\u5c64\u5806\u7a4d-\u53d7\u8a17\u52a0\u5de5-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img decoding=\"async\" width=\"300\" height=\"195\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png\" class=\"attachment-medium size-medium wp-image-7388\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8.png 640w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/ja\/\u30ab\u30b9\u30bf\u30e0\u30b5\u30fc\u30d3\u30b9-2\/\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6280\u8853-\u8584\u819c\u30e9\u30df\u30cd\u30fc\u30b7\u30e7\u30f3-2\/\u539f\u5b50\u5c64\u5806\u7a4d-\u53d7\u8a17\u52a0\u5de5-2\/\" >\n\t\t\t\t\u539f\u5b50\u5c64\u5806\u7a4d\u6cd5\uff08ALD\uff09\u7f6e\u63db\u51e6\u7406\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/ja\/\u30ab\u30b9\u30bf\u30e0\u30b5\u30fc\u30d3\u30b9-2\/\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6280\u8853-\u8584\u819c\u30e9\u30df\u30cd\u30fc\u30b7\u30e7\u30f3-2\/\u539f\u5b50\u5c64\u5806\u7a4d-\u53d7\u8a17\u52a0\u5de5-2\/\" aria-label=\"\u539f\u5b50\u5c64\u84b8\u7740\uff08ALD\uff09\u306e\u4e0b\u8acb\u3051\u306b\u3064\u3044\u3066\u3082\u3063\u3068\u8aad\u3080\" tabindex=\"-1\" >\n\t\t\t\u7d9a\u304d\u3092\u8aad\u3080 \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7344 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/ja\/\u30ab\u30b9\u30bf\u30e0\u30b5\u30fc\u30d3\u30b9-2\/\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6280\u8853-\u8584\u819c\u30e9\u30df\u30cd\u30fc\u30b7\u30e7\u30f3-2\/\u5316\u5b66-\u84b8\u7740-\u53d7\u8a17\u52a0\u5de5-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png\" class=\"attachment-medium size-medium wp-image-7347\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1024x684.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-768x513.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1536x1025.png 1536w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/f394ed96-eaca-40cc-83f6-ebadaea95553-qlt2nzpy27w47wpv9hvjdczv85dnqtqc8q83uvppb4.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553.png 1600w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/ja\/\u30ab\u30b9\u30bf\u30e0\u30b5\u30fc\u30d3\u30b9-2\/\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6280\u8853-\u8584\u819c\u30e9\u30df\u30cd\u30fc\u30b7\u30e7\u30f3-2\/\u5316\u5b66-\u84b8\u7740-\u53d7\u8a17\u52a0\u5de5-2\/\" >\n\t\t\t\t\u5316\u5b66\u6c17\u76f8\u6210\u9577\uff08CVD\uff09\u30d7\u30ed\u30bb\u30b9\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/ja\/\u30ab\u30b9\u30bf\u30e0\u30b5\u30fc\u30d3\u30b9-2\/\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6280\u8853-\u8584\u819c\u30e9\u30df\u30cd\u30fc\u30b7\u30e7\u30f3-2\/\u5316\u5b66-\u84b8\u7740-\u53d7\u8a17\u52a0\u5de5-2\/\" aria-label=\"\u5316\u5b66\u84b8\u7740\uff08CVD\uff09\u306e\u4e0b\u8acb\u3051\u306b\u3064\u3044\u3066\u3082\u3063\u3068\u8aad\u3080\" tabindex=\"-1\" >\n\t\t\t\u7d9a\u304d\u3092\u8aad\u3080 \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7355 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/ja\/\u30ab\u30b9\u30bf\u30e0\u30b5\u30fc\u30d3\u30b9-2\/\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6280\u8853-\u8584\u819c\u30e9\u30df\u30cd\u30fc\u30b7\u30e7\u30f3-2\/\u7269\u7406\u84b8\u7740\u3068\u306f\u4f55\u304b-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png\" class=\"attachment-medium size-medium wp-image-7357\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-1024x683.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-768x512.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-qlti2lfsi53oh54jrq611wpt5lt6dogutrcqlbec0w.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932.png 1508w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/ja\/\u30ab\u30b9\u30bf\u30e0\u30b5\u30fc\u30d3\u30b9-2\/\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6280\u8853-\u8584\u819c\u30e9\u30df\u30cd\u30fc\u30b7\u30e7\u30f3-2\/\u7269\u7406\u84b8\u7740\u3068\u306f\u4f55\u304b-2\/\" >\n\t\t\t\t\u7269\u7406\u84b8\u7740(PVD)\u751f\u6210\u30d7\u30ed\u30bb\u30b9\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/ja\/\u30ab\u30b9\u30bf\u30e0\u30b5\u30fc\u30d3\u30b9-2\/\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6280\u8853-\u8584\u819c\u30e9\u30df\u30cd\u30fc\u30b7\u30e7\u30f3-2\/\u7269\u7406\u84b8\u7740\u3068\u306f\u4f55\u304b-2\/\" aria-label=\"\u7269\u7406\u84b8\u7740(PVD)\u306e\u4e0b\u8acb\u3051\u306b\u3064\u3044\u3066\u3082\u3063\u3068\u8aad\u3080\" tabindex=\"-1\" >\n\t\t\t\u7d9a\u304d\u3092\u8aad\u3080 \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2c10a79 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"2c10a79\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-divider{--divider-border-style:none;--divider-border-width:1px;--divider-color:#0c0d0e;--divider-icon-size:20px;--divider-element-spacing:10px;--divider-pattern-height:24px;--divider-pattern-size:20px;--divider-pattern-url:none;--divider-pattern-repeat:repeat-x}.elementor-widget-divider .elementor-divider{display:flex}.elementor-widget-divider .elementor-divider__text{font-size:15px;line-height:1;max-width:95%}.elementor-widget-divider .elementor-divider__element{margin:0 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.elementor-divider__element{margin-inline-start:0}.elementor-widget-divider--element-align-end .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-end .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-end .elementor-divider__element{margin-inline-end:0}.elementor-widget-divider:not(.elementor-widget-divider--view-line_text):not(.elementor-widget-divider--view-line_icon) .elementor-divider-separator{border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--separator-type-pattern{--divider-border-style:none}.elementor-widget-divider--separator-type-pattern.elementor-widget-divider--view-line .elementor-divider-separator,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:after,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:before,.elementor-widget-divider--separator-type-pattern:not([class*=elementor-widget-divider--view]) .elementor-divider-separator{width:100%;min-height:var(--divider-pattern-height);-webkit-mask-size:var(--divider-pattern-size) 100%;mask-size:var(--divider-pattern-size) 100%;-webkit-mask-repeat:var(--divider-pattern-repeat);mask-repeat:var(--divider-pattern-repeat);background-color:var(--divider-color);-webkit-mask-image:var(--divider-pattern-url);mask-image:var(--divider-pattern-url)}.elementor-widget-divider--no-spacing{--divider-pattern-size:auto}.elementor-widget-divider--bg-round{--divider-pattern-repeat:round}.rtl .elementor-widget-divider .elementor-divider__text{direction:rtl}.e-con-inner>.elementor-widget-divider,.e-con>.elementor-widget-divider{width:var(--container-widget-width,100%);--flex-grow:var(--container-widget-flex-grow)}<\/style>\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-c7fa7fc elementor-widget elementor-widget-heading\" data-id=\"c7fa7fc\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<div class=\"elementor-heading-title elementor-size-default\">\u95a2\u9023\u3059\u308b\u8aad\u307f\u65b9<\/div>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ff482a2 elementor-grid-1 elementor-posts--thumbnail-none elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-widget elementor-widget-posts\" data-id=\"ff482a2\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7931 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/ja\/\u30a4\u30f3\u30b5\u30a4\u30c8-2\/\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\/\u932b\u30d5\u30a3\u30eb\u30e0\u306e\u30a2\u30eb\u30c9\u8abf\u88fd\/\" >\n\t\t\t\tALD\u30d7\u30ed\u30bb\u30b9\u306b\u3088\u308b\u7a92\u5316\u30c1\u30bf\u30f3(TIN)\u8584\u819c\u306e\u4f5c\u88fd\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\u539f\u5b50\u5c64\u5806\u7a4d\u6cd5\u3092\u7528\u3044\u305fALD\u30d7\u30ed\u30bb\u30b9\u306b\u3088\u308b\u7a92\u5316\u30c1\u30bf\u30f3(TiN)\u8584\u819c\u306e\u4f5c\u88fd<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/ja\/\u30a4\u30f3\u30b5\u30a4\u30c8-2\/\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\/\u932b\u30d5\u30a3\u30eb\u30e0\u306e\u30a2\u30eb\u30c9\u8abf\u88fd\/\" aria-label=\"\u7a92\u5316\u30c1\u30bf\u30f3(TIN)\u8584\u819c\u4f5c\u6210\u306e\u305f\u3081\u306eALD\u30d7\u30ed\u30bb\u30b9 \u306b\u3064\u3044\u3066\u3082\u3063\u3068\u8aad\u3080\" tabindex=\"-1\" >\n\t\t\t\u7d9a\u304d\u3092\u8aad\u3080 \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7989 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/ja\/\u30a4\u30f3\u30b5\u30a4\u30c8-2\/\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\/\u30b7\u30ea\u30b3\u30f3\u7a92\u5316\u7269\u8584\u819c\u306e\u5149\u96fb\u754c\u3078\u306e\u5fdc\u7528\/\" >\n\t\t\t\t\u5149\u5b66\u7528\u9014\u5411\u3051\u7a92\u5316\u30b1\u30a4\u7d20\uff08SiNx\uff09\u8584\u819c\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\u5149\u5b66\u306b\u304a\u3051\u308b\u7a92\u5316\u30b1\u30a4\u7d20\u819c \u6b63\u6e96\u3068\u3057\u3066\u306e\u7a92\u5316\u30b1\u30a4\u7d20\u819c<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/ja\/\u30a4\u30f3\u30b5\u30a4\u30c8-2\/\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\/\u30b7\u30ea\u30b3\u30f3\u7a92\u5316\u7269\u8584\u819c\u306e\u5149\u96fb\u754c\u3078\u306e\u5fdc\u7528\/\" aria-label=\"\u5149\u5b66\u7528\u9014\u5411\u3051\u7a92\u5316\u30b1\u30a4\u7d20\uff08SiNx\uff09\u8584\u819c \u306b\u3064\u3044\u3066\u3082\u3063\u3068\u8aad\u3080\" tabindex=\"-1\" >\n\t\t\t\u7d9a\u304d\u3092\u8aad\u3080 \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7761 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/ja\/\u30a4\u30f3\u30b5\u30a4\u30c8-2\/\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\/\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30fc\u30cf\u306e\u53cd\u308a\u5ea6\u5408\u3044\u3092\u5de6\u53f3\u3059\u308b\u7406\u7531\/\" >\n\t\t\t\t\u30dd\u30ea\u30b7\u30ea\u30b3\u30f3\u8584\u819c\u4e28\u30a6\u30a8\u30cf\u53cd\u308a\u306b\u5f71\u97ff\u3059\u308b\u69d8\u3005\u306a\u7406\u7531\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\u591a\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\u8584\u819c\u4e28\u30b7\u30ea\u30b3\u30f3\u30a6\u30a8\u30cf\u30fc\u306e\u53cd\u308a\u3078\u306e\u5f71\u97ff \u591a\u304f\u306e\u5834\u5408\u3001\u30b7\u30ea\u30b3\u30f3\u30a6\u30a8\u30cf\u30fc\u306e\u53cd\u308a\u306b\u306f\u3001\u6b21\u306e\u3088\u3046\u306a\u3082\u306e\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/ja\/\u30a4\u30f3\u30b5\u30a4\u30c8-2\/\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\/\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30fc\u30cf\u306e\u53cd\u308a\u5ea6\u5408\u3044\u3092\u5de6\u53f3\u3059\u308b\u7406\u7531\/\" aria-label=\"\u591a\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\u8584\u819c\u4e28\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30fc\u30cf\u306e\u53cd\u308a\u306b\u5f71\u97ff\u3059\u308b\u69d8\u3005\u306a\u7406\u7531 \u306b\u3064\u3044\u3066\u3082\u3063\u3068\u8aad\u3080\" tabindex=\"-1\" >\n\t\t\t\u7d9a\u304d\u3092\u8aad\u3080 \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0ec8646 elementor-widget elementor-widget-heading\" data-id=\"0ec8646\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title elementor-size-default\"><a href=\"https:\/\/www.nanofab.com.cn\/ja\/\u30a4\u30f3\u30b5\u30a4\u30c8-2\/\">\u3082\u3063\u3068\u95a2\u9023\u3059\u308b...<\/a><\/p>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>LPCVD\u3068PECVD\u306e\u9055\u3044 LPCVD\u306f\u3001\u4f4e\u5727\u74b0\u5883\u4e0b\u3067\u9ad8\u6e29\u3067\u52d5\u4f5c\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u9ad8\u6027\u80fd\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u306e\u53b3\u3057\u3044\u8981\u4ef6\u3092\u6e80\u305f\u3059\u9ad8\u54c1\u8cea\u3067\u9ad8\u5bc6\u5ea6\u304b\u3064\u5747\u8cea\u306a\u819c\u3092\u88fd\u9020\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002PECVD\u306f\u3001\u4f4e\u6e29\u3067\u9ad8\u52b9\u7387\u306e\u8584\u819c\u6210\u819c\u3092\u9054\u6210\u3059\u308b\u305f\u3081\u306b\u30d7\u30e9\u30ba\u30de\u30a8\u30f3\u30cf\u30f3\u30b9\u30c9\u30b1\u30df\u30b9\u30c8\u30ea\u30fc\u3092\u5229\u7528\u3059\u308b\u305f\u3081\u3001\u6e29\u5ea6\u306b\u654f\u611f\u306a[...]\u7528\u9014\u306b\u7279\u306b\u9069\u3057\u3066\u3044\u308b\u3002<\/p>","protected":false},"author":3,"featured_media":8100,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""}},"footnotes":""},"categories":[215],"tags":[],"class_list":["post-8099","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-application"],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v20.0 (Yoast SEO v22.4) - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>LPCVD\u548cPECVD\u7684\u533a\u522b - \u6e2f\u6e7e\u534a\u5bfc\u4f53<\/title>\n<meta name=\"description\" content=\"\u901a\u8fc7\u5728\u4f4e\u538b\u73af\u5883\u4e0b\u7684\u9ad8\u6e29\u64cd\u4f5c\uff0cLPCVD\u80fd\u591f\u751f\u6210\u9ad8\u8d28\u91cf\u3001\u81f4\u5bc6\u4e14\u5747\u5300\u7684\u8584\u819c\uff0c\u6ee1\u8db3\u9ad8\u6027\u80fd\u7535\u5b50\u5668\u4ef6\u7684\u4e25\u683c\u8981\u6c42\u3002PECVD\u5229\u7528\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u53cd\u5e94\uff0c\u5728\u8f83\u4f4e\u6e29\u5ea6\u4e0b\u5b9e\u73b0\u9ad8\u6548\u7684\u8584\u819c\u6c89\u79ef\uff0c\u7279\u522b\u9002\u7528\u4e8e\u6e29\u5ea6\u654f\u611f\u7684\u57fa\u6750\u3002\u9009\u62e9\u9002\u5408\u7684\u8584\u819c\u6c89\u79ef\u6280\u672f\u624d\u80fd\u63d0\u4f9b\u5353\u8d8a\u7684\u4ea7\u54c1\u8d28\u91cf\u548c\u751f\u4ea7\u6548\u7387\u3002\" \/>\n<meta name=\"robots\" content=\"index, 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