{"id":7896,"date":"2024-05-23T16:57:46","date_gmt":"2024-05-23T08:57:46","guid":{"rendered":"https:\/\/www.nanofab.com.cn\/?p=7896"},"modified":"2024-05-28T11:16:16","modified_gmt":"2024-05-28T03:16:16","slug":"the-difference-between-icpcvd-and-pecvd-in-preparing-silicon-nitride-films","status":"publish","type":"post","link":"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/la-difference-entre-icpvd-et-pecvd-dans-la-preparation-des-films-de-nitrures-de-silicium\/","title":{"rendered":"Diff\u00e9rences entre ICPCVD et PECVD pour la pr\u00e9paration de films de nitrure de silicium"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"7896\" class=\"elementor elementor-7896\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-cad2906 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"cad2906\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-07ecf70\" data-id=\"07ecf70\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-9691ecb elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"9691ecb\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-a4bad46\" data-id=\"a4bad46\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-8ed3a97 elementor-widget elementor-widget-heading\" data-id=\"8ed3a97\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\">Diff\u00e9rences entre ICPCVD et PECVD pour la pr\u00e9paration de films de nitrure de silicium<\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-fcf753a elementor-widget elementor-widget-post-info\" data-id=\"fcf753a\" data-element_type=\"widget\" data-widget_type=\"post-info.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor\/assets\/css\/widget-icon-list.min.css\"><link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-theme-elements.min.css\">\t\t<ul class=\"elementor-icon-list-items elementor-post-info\">\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-repeater-item-577f4c4\" itemprop=\"datePublished\">\n\t\t\t\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/fr\/2024\/05\/23\/\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text elementor-post-info__item elementor-post-info__item--type-date\">\n\t\t\t\t\t\t\t\t\t\t<time>2024-05-23<\/time>\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/li>\n\t\t\t\t<\/ul>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1ef8e4d elementor-widget elementor-widget-image\" data-id=\"1ef8e4d\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-image{text-align:center}.elementor-widget-image a{display:inline-block}.elementor-widget-image a img[src$=\".svg\"]{width:48px}.elementor-widget-image img{vertical-align:middle;display:inline-block}<\/style>\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"900\" height=\"600\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/1.png\" class=\"attachment-large size-large wp-image-5109\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/1.png 900w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/1-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/1-768x512.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/1-600x400.png 600w\" sizes=\"(max-width: 900px) 100vw, 900px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4aea5b5 elementor-widget elementor-widget-text-editor\" data-id=\"4aea5b5\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p>ICPCVD (d\u00e9p\u00f4t chimique en phase vapeur par plasma coupl\u00e9 inductivement) et<a href=\"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\/\">PECVD (d\u00e9p\u00f4t chimique en phase vapeur assist\u00e9 par plasma)<\/a>sont deux techniques couramment utilis\u00e9es pour pr\u00e9parer des films de nitrure de silicium (SiNx). Bien qu'il s'agisse dans les deux cas de m\u00e9thodes de d\u00e9p\u00f4t chimique en phase vapeur assist\u00e9 par plasma, il existe entre elles des diff\u00e9rences importantes en termes de g\u00e9n\u00e9ration de plasma, de propri\u00e9t\u00e9s des films et d'applications.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5a37401 elementor-widget elementor-widget-heading\" data-id=\"5a37401\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Principes et \u00e9quipement<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6e2dfef elementor-widget elementor-widget-text-editor\" data-id=\"6e2dfef\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>ICPCVD<\/p><ul><li>G\u00e9n\u00e9ration de plasma : le couplage inductif est utilis\u00e9 pour g\u00e9n\u00e9rer un plasma de haute densit\u00e9 dans une bobine, g\u00e9n\u00e9ralement par radiofr\u00e9quence (RF). Le plasma est form\u00e9 dans une chambre \u00e0 vide et guid\u00e9 vers la surface du substrat.<\/li><li>Densit\u00e9 du plasma : l'ICPCVD produit une densit\u00e9 de plasma plus \u00e9lev\u00e9e qui fournit une \u00e9nergie de bombardement ionique plus importante.<\/li><li>Complexit\u00e9 de l'\u00e9quipement : l'\u00e9quipement ICPCVD est complexe et co\u00fbteux en raison de la n\u00e9cessit\u00e9 d'utiliser des bobines sophistiqu\u00e9es et des syst\u00e8mes de contr\u00f4le de la puissance.<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6dc55eb elementor-widget elementor-widget-text-editor\" data-id=\"6dc55eb\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>PECVD<\/p><ul><li>G\u00e9n\u00e9ration de plasma : le couplage capacitif est utilis\u00e9 pour g\u00e9n\u00e9rer du plasma entre deux \u00e9lectrodes, g\u00e9n\u00e9ralement par l'interm\u00e9diaire d'une puissance RF.<\/li><li>Densit\u00e9 du plasma : la PECVD produit une densit\u00e9 de plasma relativement faible, mais suffisante pour faciliter les r\u00e9actions chimiques et le d\u00e9p\u00f4t de films.<\/li><li>Complexit\u00e9 de l'\u00e9quipement : l'\u00e9quipement PECVD est relativement simple, peu co\u00fbteux et facile \u00e0 utiliser et \u00e0 entretenir.<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a2dc3c3 elementor-widget elementor-widget-heading\" data-id=\"a2dc3c3\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Propri\u00e9t\u00e9s des films minces<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1e2864d elementor-widget elementor-widget-text-editor\" data-id=\"1e2864d\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<ul><li>Densit\u00e9 du film : en raison de la densit\u00e9 \u00e9lev\u00e9e du plasma, l'ICPCVD permet de d\u00e9poser des films de nitrure de silicium de haute densit\u00e9 et de faible porosit\u00e9 ; les films PECVD ont une densit\u00e9 relativement faible.<\/li><\/ul><ul><li>Puret\u00e9 chimique : les films d\u00e9pos\u00e9s par ICPCVD pr\u00e9sentent g\u00e9n\u00e9ralement une plus grande puret\u00e9 chimique et des niveaux d'impuret\u00e9s plus faibles. Les films d\u00e9pos\u00e9s par PECVD peuvent contenir plus d'hydrog\u00e8ne et d'autres impuret\u00e9s, mais cela peut \u00eatre am\u00e9lior\u00e9 par un post-traitement.<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2ab730e elementor-widget elementor-widget-heading\" data-id=\"2ab730e\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Comparaison des caract\u00e9ristiques<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a7a14fb elementor-widget elementor-widget-image\" data-id=\"a7a14fb\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"713\" height=\"365\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/05\/0a8382bc07ea65374dad6486008cdc2.png\" class=\"attachment-large size-large wp-image-7900\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/05\/0a8382bc07ea65374dad6486008cdc2.png 713w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/05\/0a8382bc07ea65374dad6486008cdc2-300x154.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/05\/0a8382bc07ea65374dad6486008cdc2-18x9.png 18w\" sizes=\"(max-width: 713px) 100vw, 713px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f5cc40f elementor-widget elementor-widget-spacer\" data-id=\"f5cc40f\" data-element_type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-column .elementor-spacer-inner{height:var(--spacer-size)}.e-con{--container-widget-width:100%}.e-con-inner>.elementor-widget-spacer,.e-con>.elementor-widget-spacer{width:var(--container-widget-width,var(--spacer-size));--align-self:var(--container-widget-align-self,initial);--flex-shrink:0}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container,.e-con>.elementor-widget-spacer>.elementor-widget-container{height:100%;width:100%}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer,.e-con>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer{height:100%}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer>.elementor-spacer-inner,.e-con>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer>.elementor-spacer-inner{height:var(--container-widget-height,var(--spacer-size))}.e-con-inner>.elementor-widget-spacer.elementor-widget-empty,.e-con>.elementor-widget-spacer.elementor-widget-empty{position:relative;min-height:22px;min-width:22px}.e-con-inner>.elementor-widget-spacer.elementor-widget-empty .elementor-widget-empty-icon,.e-con>.elementor-widget-spacer.elementor-widget-empty .elementor-widget-empty-icon{position:absolute;top:0;bottom:0;left:0;right:0;margin:auto;padding:0;width:22px;height:22px}<\/style>\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d2c5222 elementor-widget elementor-widget-spacer\" data-id=\"d2c5222\" data-element_type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b79ddfc elementor-widget elementor-widget-heading\" data-id=\"b79ddfc\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Domaines d'application<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0de60a9 elementor-widget elementor-widget-text-editor\" data-id=\"0de60a9\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>ICPCVD<\/p><ul><li>Rev\u00eatements optiques \u00e0 haute performance : l'ICPCVD convient aux rev\u00eatements optiques \u00e0 haute performance, tels que les rev\u00eatements antireflets et protecteurs, en raison des densit\u00e9s de film \u00e9lev\u00e9es et des caract\u00e9ristiques de faible contrainte.<\/li><li>Dispositifs \u00e0 semi-conducteurs : l'ICPCVD est avantageuse pour les dispositifs \u00e0 semi-conducteurs exigeant une grande pr\u00e9cision et une grande fiabilit\u00e9, tels que les MOSFET et les dispositifs MEMS.<\/li><li>Couches isolantes de haute qualit\u00e9 : pour les couches isolantes n\u00e9cessitant une rigidit\u00e9 di\u00e9lectrique \u00e9lev\u00e9e et de faibles courants de fuite.<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d40a3a8 elementor-widget elementor-widget-text-editor\" data-id=\"d40a3a8\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>PECVD<\/p><ul><li>Rev\u00eatement de grandes surfaces : la technique PECVD convient aux applications de d\u00e9p\u00f4t rapide sur de grandes surfaces, telles que les cellules solaires et les feuilles d'affichage.<\/li><li>Structures multicouches en couches minces : la PECVD convient \u00e0 la pr\u00e9paration de structures multicouches en couches minces, comme dans les \u00e9crans plats et les dispositifs opto\u00e9lectroniques.<\/li><li>Applications \u00e0 basse temp\u00e9rature : pour les substrats sensibles \u00e0 la temp\u00e9rature tels que les substrats organiques et plastiques.<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8a19cc5 elementor-widget elementor-widget-text-editor\" data-id=\"8a19cc5\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>L'ICPCVD et le PECVD ont chacun leurs propres avantages et domaines d'application, et le choix de la m\u00e9thode d\u00e9pend largement des besoins sp\u00e9cifiques de l'application et des exigences du processus ; l'ICPCVD offre des avantages en termes de films de haute densit\u00e9, de faible contrainte et de grande puret\u00e9, tandis que le PECVD est plus performant en termes de grande surface, de d\u00e9p\u00f4t rapide et de contr\u00f4le des co\u00fbts. En comprenant les diff\u00e9rences entre ces deux m\u00e9thodes, le processus de d\u00e9p\u00f4t le plus appropri\u00e9 peut \u00eatre s\u00e9lectionn\u00e9 en fonction des exigences r\u00e9elles, en discutant et en n\u00e9gociant avec nos chercheurs et nos ing\u00e9nieurs.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f5219e9 elementor-widget elementor-widget-text-editor\" data-id=\"f5219e9\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Nous proposons <a href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/\">Services de personnalisation des processus de rev\u00eatement (micro et nanofabrication)<\/a>N'h\u00e9sitez pas \u00e0 laisser un commentaire.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f83c2e0 uael-mobile-wpf-button-justify uael-wpf-style-box uael-wpf-input-size-sm uael-wpf-button-left uael-wpf-btn-size-sm uael-wpf-highlight-style-default elementor-widget elementor-widget-uael-wpf-styler\" data-id=\"f83c2e0\" data-element_type=\"widget\" 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href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-posts.min.css\">\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7386 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/depot-de-couches-atomiques-traitement-des-contrats-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"195\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png\" class=\"attachment-medium size-medium wp-image-7388\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8.png 640w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/depot-de-couches-atomiques-traitement-des-contrats-2\/\" >\n\t\t\t\tTraitement de substitution par d\u00e9p\u00f4t en couche atomique (ALD)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/depot-de-couches-atomiques-traitement-des-contrats-2\/\" aria-label=\"En savoir plus sur le traitement des fonderies par d\u00e9p\u00f4t de couches atomiques (ALD)\" tabindex=\"-1\" >\n\t\t\tLire plus \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7344 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/depot-chimique-en-phase-vapeur-traitement-a-facon\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png\" class=\"attachment-medium size-medium wp-image-7347\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1024x684.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-768x513.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1536x1025.png 1536w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/f394ed96-eaca-40cc-83f6-ebadaea95553-qlt2nzpy27w47wpv9hvjdczv85dnqtqc8q83uvppb4.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553.png 1600w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/depot-chimique-en-phase-vapeur-traitement-a-facon\/\" >\n\t\t\t\tTraitement de g\u00e9n\u00e9ration par d\u00e9p\u00f4t chimique en phase vapeur (CVD)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/depot-chimique-en-phase-vapeur-traitement-a-facon\/\" aria-label=\"En savoir plus sur la sous-traitance du d\u00e9p\u00f4t chimique en phase vapeur (CVD)\" tabindex=\"-1\" >\n\t\t\tLire plus \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7355 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/quest-ce-que-le-depot-physique-en-phase-vapeur-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png\" class=\"attachment-medium size-medium wp-image-7357\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-1024x683.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-768x512.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-qlti2lfsi53oh54jrq611wpt5lt6dogutrcqlbec0w.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932.png 1508w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/quest-ce-que-le-depot-physique-en-phase-vapeur-2\/\" >\n\t\t\t\tTraitement de g\u00e9n\u00e9ration par d\u00e9p\u00f4t physique en phase vapeur (PVD)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/quest-ce-que-le-depot-physique-en-phase-vapeur-2\/\" aria-label=\"En savoir plus sur la sous-traitance du d\u00e9p\u00f4t physique en phase vapeur (PVD)\" tabindex=\"-1\" >\n\t\t\tLire plus \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2d0835e elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"2d0835e\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 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class=\"elementor-widget-container\">\n\t\t\t<div class=\"elementor-heading-title elementor-size-default\">Lecture associ\u00e9e<\/div>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-28e6ec7 elementor-grid-1 elementor-posts--thumbnail-none elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-widget elementor-widget-posts\" data-id=\"28e6ec7\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7571 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/\u6e85\u5c04\u9540\u819c-2\/\" >\n\t\t\t\tQuels sont les facteurs qui influencent le processus de rev\u00eatement par pulv\u00e9risation cathodique sur les mat\u00e9riaux en couches minces ?\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Quels sont les facteurs qui influencent le processus de rev\u00eatement par pulv\u00e9risation cathodique sur les mat\u00e9riaux en couches minces ? Avec une \u00e9nergie \u00e9lev\u00e9e<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/\u6e85\u5c04\u9540\u819c-2\/\" aria-label=\"Pour en savoir plus sur les facteurs qui influencent le processus de rev\u00eatement par pulv\u00e9risation cathodique sur les mat\u00e9riaux en couches minces, cliquez ici.\" tabindex=\"-1\" >\n\t\t\tLire plus \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-8065 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/processus-principe-et-application-du-revetement-optique\/\" >\n\t\t\t\tPrincipes de traitement et applications des rev\u00eatements optiques\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Principes et applications de la technologie de rev\u00eatement optique Les principes du processus de rev\u00eatement optique impliquent principalement<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/processus-principe-et-application-du-revetement-optique\/\" aria-label=\"En savoir plus sur les principes de traitement et les applications des rev\u00eatements optiques\" tabindex=\"-1\" >\n\t\t\tLire plus \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7324 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/quest-ce-que-le-depot-chimique-en-phase-vapeur\/\" >\n\t\t\t\tClassification, caract\u00e9ristiques et applications du d\u00e9p\u00f4t chimique en phase vapeur (CVD)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>D\u00e9p\u00f4t chimique en phase vapeur (CVD) Classification, caract\u00e9ristiques et applications D\u00e9p\u00f4t chimique en phase vapeur (CVD)<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/quest-ce-que-le-depot-chimique-en-phase-vapeur\/\" aria-label=\"En savoir plus sur la classification, les caract\u00e9ristiques et les applications du d\u00e9p\u00f4t chimique en phase vapeur (CVD)\" tabindex=\"-1\" >\n\t\t\tLire plus \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-52c1988 elementor-widget elementor-widget-heading\" data-id=\"52c1988\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title elementor-size-default\"><a href=\"https:\/\/www.nanofab.com.cn\/fr\/perspectives-2\/\">Plus d'informations...<\/a><\/p>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>Diff\u00e9rence entre ICPCVD et PECVD Pr\u00e9paration de couches minces de nitrure de silicium ICPCVD (Plasm [...]<\/p>","protected":false},"author":3,"featured_media":5109,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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