{"id":7648,"date":"2024-04-12T17:19:21","date_gmt":"2024-04-12T09:19:21","guid":{"rendered":"https:\/\/www.nanofab.com.cn\/?p=7648"},"modified":"2024-05-28T10:43:14","modified_gmt":"2024-05-28T02:43:14","slug":"the-film-was-prepared-by-sputtering-method","status":"publish","type":"post","link":"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/le-film-a-ete-prepare-par-la-methode-de-sputerisation-2\/","title":{"rendered":"Principe et caract\u00e9ristiques de la pr\u00e9paration de couches minces par la m\u00e9thode de pulv\u00e9risation cathodique"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"7648\" class=\"elementor elementor-7648\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-887b02e elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"887b02e\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-c4390b6\" data-id=\"c4390b6\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-0103fa9 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"0103fa9\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-6d0c635\" data-id=\"6d0c635\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-e5acb31 elementor-widget elementor-widget-heading\" data-id=\"e5acb31\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\">Principe et caract\u00e9ristiques de la pr\u00e9paration de couches minces par la m\u00e9thode de pulv\u00e9risation cathodique<\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9636a43 elementor-widget elementor-widget-post-info\" data-id=\"9636a43\" data-element_type=\"widget\" data-widget_type=\"post-info.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor\/assets\/css\/widget-icon-list.min.css\"><link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-theme-elements.min.css\">\t\t<ul class=\"elementor-icon-list-items elementor-post-info\">\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-repeater-item-577f4c4\" itemprop=\"datePublished\">\n\t\t\t\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/fr\/2024\/04\/12\/\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text elementor-post-info__item elementor-post-info__item--type-date\">\n\t\t\t\t\t\t\t\t\t\t<time>2024-04-12<\/time>\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/li>\n\t\t\t\t<\/ul>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e42fe72 elementor-widget elementor-widget-image\" data-id=\"e42fe72\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-image{text-align:center}.elementor-widget-image a{display:inline-block}.elementor-widget-image a img[src$=\".svg\"]{width:48px}.elementor-widget-image img{vertical-align:middle;display:inline-block}<\/style>\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"686\" height=\"386\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/bf83dd064bc83d1ad8fff443d2e2c55.png\" class=\"attachment-large size-large wp-image-7649\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/bf83dd064bc83d1ad8fff443d2e2c55.png 686w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/bf83dd064bc83d1ad8fff443d2e2c55-300x169.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/bf83dd064bc83d1ad8fff443d2e2c55-18x10.png 18w\" sizes=\"(max-width: 686px) 100vw, 686px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-126ab6c elementor-widget elementor-widget-text-editor\" data-id=\"126ab6c\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p>La technologie de pulv\u00e9risation est<a href=\"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/quest-ce-que-le-depot-physique-en-phase-vapeur\/\">D\u00e9p\u00f4t physique en phase vapeur (PVD)<\/a>Un type de, peut \u00eatre utilis\u00e9 pour la pr\u00e9paration d'isolants, de m\u00e9taux et d'autres films minces, des films composites peuvent \u00e9galement \u00eatre pr\u00e9par\u00e9s, la th\u00e9orie peut \u00eatre pulv\u00e9ris\u00e9e presque tous suffisamment pour faire une cible solide m\u00e9taux, alliages, compos\u00e9s polym\u00e8res et mat\u00e9riaux c\u00e9ramiques, etc., la pr\u00e9paration de films minces, rapide, \u00e0 basse temp\u00e9rature, peu de dommages au film ; la pr\u00e9paration de films minces pr\u00e9par\u00e9s par l'uniformit\u00e9 de la couche de film, interne non poreuse, haute densit\u00e9, bonne adh\u00e9rence avec le substrat, le film est de haute qualit\u00e9.<a href=\"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/quest-ce-que-la-pulverisation-cathodique-magnetron-2\/\">Technologie de pulv\u00e9risation cathodique magn\u00e9tron<\/a>Le taux de pulv\u00e9risation propos\u00e9 et l'utilisation de la cible ont \u00e9t\u00e9 consid\u00e9rablement am\u00e9lior\u00e9s et sont largement utilis\u00e9s dans la recherche scientifique et la production industrielle.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-49b40b7 elementor-widget elementor-widget-heading\" data-id=\"49b40b7\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">gaz \u00e0 d\u00e9charge luminescente<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-21946cf elementor-widget elementor-widget-text-editor\" data-id=\"21946cf\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Le processus de pulv\u00e9risation est \u00e9tabli sur la base d'une d\u00e9charge lumineuse gazeuse, la d\u00e9charge lumineuse est un type de d\u00e9charge gazeuse, une sorte de cathode de bombardement ionique pour produire des \u00e9lectrons secondaires afin de maintenir une d\u00e9charge stable auto-entretenue en raison de la chambre de pulv\u00e9risation existe encore dans un petit nombre d'ions et d'\u00e9lectrons, il suffit donc d'ajouter la tension n\u00e9gative, pas encore produit une d\u00e9charge lumineuse, \u00e0 ce moment le courant est faible, le courant est presque inchang\u00e9, pour participer au mouvement du nombre de charges d\u00e9terminent l'intensit\u00e9 du courant, \u00e0 ce moment-l\u00e0 on parle de d\u00e9charge sombre. L'intensit\u00e9 du courant, c'est ce qu'on appelle la d\u00e9charge obscure. Lorsque la tension augmente, l'\u00e9nergie des \u00e9lectrons et des ions charg\u00e9s dans la chambre de pulv\u00e9risation augmente progressivement, et lorsque les \u00e9lectrons et les ions charg\u00e9s sont acc\u00e9l\u00e9r\u00e9s dans le champ \u00e9lectrique, ils entrent constamment en collision avec les \u00e9lectrodes et les atomes de gaz \u00e9lectrifi\u00e9s, et le nombre de particules charg\u00e9es augmente continuellement, et le courant augmente. Ensuite, avec l'augmentation du nombre de particules charg\u00e9es, le courant augmente aussi lentement, la tension reste inchang\u00e9e, cette r\u00e9gion de d\u00e9charge est appel\u00e9e \"zone de d\u00e9charge de Thomson\". Enfin, le d\u00e9veloppement de \"l'avalanche\", le positif loin de la surface de la cible cathodique continue \u00e0 bombarder les \u00e9lectrons secondaires sont bombard\u00e9s, la lib\u00e9ration des \u00e9lectrons secondaires et la chambre de pulv\u00e9risation dans la collision de gaz, la formation de plus d'ions positifs, les ions positifs suivis par le bombardement de la cible produite par les \u00e9lectrons secondaires, et puis avec les atomes de gaz entrent en collision pour former plus d'ions positifs. Dans ce processus, lorsque le processus de d\u00e9charge du syst\u00e8me est auto-entretenu, le gaz commence \u00e0 briller, la tension diminue, puis le courant augmente soudainement, ce qui est g\u00e9n\u00e9ralement appel\u00e9 une r\u00e9gion de \"zone de d\u00e9charge normale\". Ensuite, la puissance est augment\u00e9e et la densit\u00e9 de courant et de tension entre les deux p\u00f4les augmente, \u00e0 ce moment-l\u00e0 la d\u00e9charge lumineuse se stabilise et cette r\u00e9gion est connue sous le nom de \"r\u00e9gion de d\u00e9charge lumineuse anormale\", qui est la r\u00e9gion r\u00e9ellement utilis\u00e9e dans la technologie de pulv\u00e9risation cathodique. Elle est suivie par la \"zone de d\u00e9charge d'arc\", qui est la zone o\u00f9 la tension entre les p\u00f4les tombe \u00e0 un niveau tr\u00e8s bas apr\u00e8s la zone de d\u00e9charge lumineuse anormale.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-89f3e7c elementor-widget elementor-widget-heading\" data-id=\"89f3e7c\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Pulv\u00e9risation magn\u00e9tron \u00e0 courant continu<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e026a29 elementor-widget elementor-widget-text-editor\" data-id=\"e026a29\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Dans une d\u00e9charge luminescente DC \u00e0 basse tension, le processus est divis\u00e9 en cinq zones : la zone cathodique, la zone luminescente n\u00e9gative, la zone obscure de Faraday, la zone de la colonne positive et la zone anodique. L'une de ces zones, la d\u00e9charge lumineuse anormale, est celle qui est utilis\u00e9e pour la pulv\u00e9risation du film d\u00e9pos\u00e9. Lors de la pulv\u00e9risation, le substrat agit comme une anode, g\u00e9n\u00e9ralement plac\u00e9e dans la zone de lueur n\u00e9gative, et la cible agit comme une cathode. \u00c9tant donn\u00e9 que l'\u00e9nergie et la vitesse des \u00e9lectrons sont beaucoup plus \u00e9lev\u00e9es que celles des ions, une couche de plasma se forme pendant la d\u00e9charge luminescente et, en raison de la pr\u00e9sence du potentiel de gaine, une grande partie de la tension appliqu\u00e9e \u00e0 l'\u00e9lectrode est absorb\u00e9e par le potentiel de gaine de la cathode. L'\u00e9tablissement du potentiel de gaine du plasma fait que les ions qui atteignent la cathode sont acc\u00e9l\u00e9r\u00e9s en cons\u00e9quence et gagnent de l'\u00e9nergie. Par cons\u00e9quent, les ions ont une \u00e9nergie \u00e9lev\u00e9e lorsqu'ils atteignent la surface de la cathode \u00e0 travers la r\u00e9gion du plasma de la d\u00e9charge lumineuse, et produisent un effet de bombardement sur la surface de la cathode, de sorte que les mol\u00e9cules et les atomes du mat\u00e9riau de la cathode sont pulv\u00e9ris\u00e9s et que le ph\u00e9nom\u00e8ne de pulv\u00e9risation se produit. Ces mol\u00e9cules et atomes ont une certaine \u00e9nergie cin\u00e9tique et sont projet\u00e9s dans une certaine direction vers la surface de la pi\u00e8ce \u00e0 usiner pour former un film mince.<\/p><p>La pulv\u00e9risation est un processus complexe qui s'accompagne de divers ph\u00e9nom\u00e8nes de bombardement ionique. La condition de base pour le d\u00e9p\u00f4t de couches minces est que la plupart des particules \u00e9ject\u00e9es de la surface solide sous l'effet de la collision \u00e0 grande vitesse des particules incidentes sont des atomes ou des mol\u00e9cules neutres. En outre, les \u00e9lectrons secondaires rayonn\u00e9s sont les particules \u00e9l\u00e9mentaires qui alimentent la d\u00e9charge lumineuse lors de la pulv\u00e9risation, et leur \u00e9nergie est \u00e9gale au potentiel de la cible.<\/p><p>La pulv\u00e9risation cathodique est la m\u00e9thode de pulv\u00e9risation la plus ancienne pour r\u00e9aliser des applications techniques. Le dispositif de pulv\u00e9risation cathodique est constitu\u00e9 de deux \u00e9lectrodes, la cathode et l'anode, et est donc \u00e9galement appel\u00e9 pulv\u00e9risation cathodique ou pulv\u00e9risation \u00e0 courant continu (CC).<\/p><p>En raison de l'existence de la pulv\u00e9risation dipolaire, le taux de dissociation du gaz est faible (entre 0,3 % ~ 0,5%), la vitesse de d\u00e9p\u00f4t est lente, le taux d'utilisation du mat\u00e9riau cible est faible, les \u00e9lectrons font augmenter la temp\u00e9rature du substrat et d'autres d\u00e9fauts, de sorte que la technologie de pulv\u00e9risation n'a pas \u00e9t\u00e9 largement utilis\u00e9e au d\u00e9but, afin de compenser ces d\u00e9fauts, la technologie de pulv\u00e9risation magn\u00e9tron a \u00e9t\u00e9 mise en avant dans les ann\u00e9es 1970. La technologie de pulv\u00e9risation magn\u00e9tron att\u00e9nue les dommages caus\u00e9s au film par la chaleur des \u00e9lectrons secondaires frappant le substrat et am\u00e9liore le taux de pulv\u00e9risation de la pulv\u00e9risation dipolaire. Par cons\u00e9quent, la technologie de pulv\u00e9risation magn\u00e9tron a connu un d\u00e9veloppement rapide et une large application d\u00e8s son introduction, et elle est aujourd'hui devenue l'une des principales technologies de rev\u00eatement de surface des mat\u00e9riaux.<\/p><p>L'aimant est plac\u00e9 \u00e0 l'arri\u00e8re de la cible, de sorte que la surface de la ligne de force magn\u00e9tique qui p\u00e9n\u00e8tre hors de la cible forme une structure perpendiculaire au champ \u00e9lectrique et retourne finalement \u00e0 la surface de la cible. L'effet de liaison du champ magn\u00e9tique sur les \u00e9lectrons secondaires \u00e0 la surface de la cible augmente consid\u00e9rablement la concentration de plasma pr\u00e8s de la surface de la cible, ce qui r\u00e9sout efficacement le probl\u00e8me de la faible vitesse de d\u00e9p\u00f4t de la pulv\u00e9risation dipolaire ordinaire. Les \u00e9lectrons dans les champs \u00e9lectriques et magn\u00e9tiques, la trajectoire est courb\u00e9e, dans le processus de vol vers le substrat les \u00e9lectrons et les atomes de gaz entrent en collision, de sorte que les mol\u00e9cules de gaz ionis\u00e9es cations et \u00e9lectrons, les \u00e9lectrons vers l'anode, et les cations seront acc\u00e9l\u00e9r\u00e9s sous l'action du champ \u00e9lectrique vers la cible, et le bombardement \u00e0 haute \u00e9nergie de la surface de la cible, de sorte que la pulv\u00e9risation de la cible, la pulv\u00e9risation hors des atomes neutres de la cible (ou des mol\u00e9cules) dans le d\u00e9p\u00f4t du substrat de la formation du film.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-edde6a7 elementor-widget elementor-widget-heading\" data-id=\"edde6a7\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">pulv\u00e9risation r\u00e9active<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4eb24dd elementor-widget elementor-widget-text-editor\" data-id=\"4eb24dd\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Si le film \u00e0 pr\u00e9parer est un compos\u00e9, il existe deux m\u00e9thodes : (1) la pulv\u00e9risation directe du mat\u00e9riau cible du compos\u00e9 et (2) la pr\u00e9paration par pulv\u00e9risation r\u00e9active. \u00c9tant donn\u00e9 que les mol\u00e9cules du premier compos\u00e9, apr\u00e8s avoir \u00e9t\u00e9 pulv\u00e9ris\u00e9es, peuvent se d\u00e9composer dans une atmosph\u00e8re de plasma en raison de l'impact des \u00e9lectrons, et que le film final obtenu n'a pas la m\u00eame composition chimique que la substance du mat\u00e9riau cible, le film est parfois pr\u00e9par\u00e9 par pulv\u00e9risation r\u00e9active. La pulv\u00e9risation r\u00e9active est g\u00e9n\u00e9ralement utilis\u00e9e pour pulv\u00e9riser des films compos\u00e9s tels que des oxydes ou des nitrures (nitrure de tantale, nitrure de silicium, films supraconducteurs, films conducteurs transparents ITO, etc.) Pendant l'exp\u00e9rience, une quantit\u00e9 appropri\u00e9e de gaz r\u00e9actif (azote, oxyg\u00e8ne, etc.) est m\u00e9lang\u00e9e au gaz de pulv\u00e9risation, et l'azote ou l'oxyg\u00e8ne se transforme en ions n\u00e9gatifs dans la chambre de pulv\u00e9risation, qui r\u00e9agissent avec les atomes ou les groupes d'atomes bombard\u00e9s du mat\u00e9riau cible pour former des compos\u00e9s. L'avantage de la pulv\u00e9risation r\u00e9active est que la composition chimique du film peut \u00eatre contr\u00f4l\u00e9e en ajustant les param\u00e8tres du processus au moment de la pulv\u00e9risation, en ajustant les composants du film pour parvenir \u00e0 un contr\u00f4le pr\u00e9cis des composants du film. En fonction de la vitesse de d\u00e9p\u00f4t de la pulv\u00e9risation r\u00e9active, on peut distinguer trois cat\u00e9gories : le mode transition, le mode m\u00e9tal et le mode oxyde.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-41d7cc5 elementor-widget elementor-widget-heading\" data-id=\"41d7cc5\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Pulv\u00e9risation RF<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-04a2a87 elementor-widget elementor-widget-text-editor\" data-id=\"04a2a87\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>La pulv\u00e9risation par radiofr\u00e9quence (RF), \u00e9galement connue sous le nom de pulv\u00e9risation \u00e0 haute fr\u00e9quence, a \u00e9t\u00e9 invent\u00e9e pour pulv\u00e9riser des mat\u00e9riaux isolants. La pulv\u00e9risation par diode et la pulv\u00e9risation par magn\u00e9tron peuvent pulv\u00e9riser des m\u00e9taux et des semi-conducteurs, mais pas des isolants, car les ions qui frappent une cible isolante la chargent \u00e9lectriquement et, lorsque le potentiel de la cible augmente progressivement, le champ \u00e9lectrique acc\u00e9l\u00e9r\u00e9 par les ions devient de plus en plus petit jusqu'\u00e0 ce que la pulv\u00e9risation s'arr\u00eate et que la d\u00e9charge lumineuse s'arr\u00eate, ce qui fait que la pulv\u00e9risation ne peut plus se poursuivre. C'est la raison pour laquelle la pulv\u00e9risation par diode et la pulv\u00e9risation par magn\u00e9tron ne peuvent pulv\u00e9riser que des conducteurs et des semi-conducteurs, mais pas des couches minces d'isolants, ce qui a conduit au d\u00e9veloppement de la technologie de pulv\u00e9risation RF.<br \/>Le principe de la pulv\u00e9risation par radiofr\u00e9quence est le suivant : si une tension de radiofr\u00e9quence est appliqu\u00e9e \u00e0 la cible, lorsqu'une onde sinuso\u00efdale est appliqu\u00e9e \u00e0 la cible dans le demi-cycle positif, la masse des \u00e9lectrons \u00e9tant inf\u00e9rieure \u00e0 la masse des ions, les \u00e9lectrons sont plus faciles \u00e0 d\u00e9placer que les ions positifs, leur mobilit\u00e9 est plus \u00e9lev\u00e9e, et les \u00e9lectrons sont donc capables de voler vers la cible en tr\u00e8s peu de temps pour neutraliser les charges positives accumul\u00e9es \u00e0 la surface de la cible et d\u00e9poser un grand nombre d'\u00e9lectrons \u00e0 la surface de la cible, de sorte que la cible pr\u00e9sente un potentiel n\u00e9gatif et attire les ions positifs. Continuer \u00e0 bombarder la surface de la cible par pulv\u00e9risation, de sorte que le ph\u00e9nom\u00e8ne de pulv\u00e9risation continue \u00e0 produire un demi-cycle positif et un demi-cycle n\u00e9gatif. Le champ \u00e9lectrique du courant alternatif \u00e0 haute fr\u00e9quence (HFAC) fait que le mat\u00e9riau cible est alternativement bombard\u00e9 par des ions et des \u00e9lectrons, et le choc des \u00e9lectrons dans le champ \u00e9lectrique \u00e0 haute fr\u00e9quence augmente la probabilit\u00e9 d'ionisation, de sorte que le taux de pulv\u00e9risation de la pulv\u00e9risation RF est plus \u00e9lev\u00e9 que celui de la pulv\u00e9risation dipolaire. La pulv\u00e9risation RF peut non seulement pulv\u00e9riser les isolants, mais aussi les conducteurs.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-39db460 elementor-widget elementor-widget-text-editor\" data-id=\"39db460\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Outre les m\u00e9thodes de pulv\u00e9risation susmentionn\u00e9es, il existe \u00e9galement la pulv\u00e9risation ionique, la pulv\u00e9risation biaise, la pulv\u00e9risation ECR, etc.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2b45ca4 elementor-widget elementor-widget-text-editor\" data-id=\"2b45ca4\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Nous proposons <a 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srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8.png 640w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/depot-de-couches-atomiques-traitement-des-contrats-2\/\" >\n\t\t\t\tTraitement de substitution par d\u00e9p\u00f4t en couche atomique (ALD)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/depot-de-couches-atomiques-traitement-des-contrats-2\/\" aria-label=\"En savoir plus sur le traitement des fonderies par d\u00e9p\u00f4t de couches atomiques (ALD)\" tabindex=\"-1\" >\n\t\t\tLire plus \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7344 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/depot-chimique-en-phase-vapeur-traitement-a-facon\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png\" class=\"attachment-medium size-medium wp-image-7347\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1024x684.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-768x513.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1536x1025.png 1536w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/f394ed96-eaca-40cc-83f6-ebadaea95553-qlt2nzpy27w47wpv9hvjdczv85dnqtqc8q83uvppb4.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553.png 1600w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/depot-chimique-en-phase-vapeur-traitement-a-facon\/\" >\n\t\t\t\tTraitement de g\u00e9n\u00e9ration par d\u00e9p\u00f4t chimique en phase vapeur (CVD)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/depot-chimique-en-phase-vapeur-traitement-a-facon\/\" aria-label=\"En savoir plus sur la sous-traitance du d\u00e9p\u00f4t chimique en phase vapeur (CVD)\" tabindex=\"-1\" >\n\t\t\tLire plus \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7355 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/quest-ce-que-le-depot-physique-en-phase-vapeur-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png\" class=\"attachment-medium size-medium wp-image-7357\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-1024x683.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-768x512.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-qlti2lfsi53oh54jrq611wpt5lt6dogutrcqlbec0w.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932.png 1508w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/quest-ce-que-le-depot-physique-en-phase-vapeur-2\/\" >\n\t\t\t\tTraitement de g\u00e9n\u00e9ration par d\u00e9p\u00f4t physique en phase vapeur (PVD)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/quest-ce-que-le-depot-physique-en-phase-vapeur-2\/\" aria-label=\"En savoir plus sur la sous-traitance du d\u00e9p\u00f4t physique en phase vapeur (PVD)\" tabindex=\"-1\" >\n\t\t\tLire plus \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-bacec6c elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"bacec6c\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 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class=\"elementor-widget-container\">\n\t\t\t<div class=\"elementor-heading-title elementor-size-default\">Lecture associ\u00e9e<\/div>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-fb99be6 elementor-grid-1 elementor-posts--thumbnail-none elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-widget elementor-widget-posts\" data-id=\"fb99be6\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-8099 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/difference-entre-lpcvd-et-pecvd\/\" >\n\t\t\t\tDiff\u00e9rence entre LPCVD et PECVD\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Diff\u00e9rence entre LPCVD et PECVD Parvenir \u00e0 un niveau \u00e9lev\u00e9 dans un environnement \u00e0 faible tension<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/difference-entre-lpcvd-et-pecvd\/\" aria-label=\"En savoir plus sur la diff\u00e9rence entre LPCVD et PECVD\" tabindex=\"-1\" >\n\t\t\tLire plus \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7761 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/la-raison-de-linfluence-sur-le-degre-de-deformation-dune-plaquette-de-silicium-2\/\" >\n\t\t\t\tFilm mince de polysilicium\u4e28Plusieurs raisons affectant le gauchissement des plaquettes de silicium\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Film mince de silicium polycristallin\u4e28influence sur le gauchissement des plaquettes de silicium Dans de nombreux cas, il faudrait<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/la-raison-de-linfluence-sur-le-degre-de-deformation-dune-plaquette-de-silicium-2\/\" aria-label=\"Lire la suite de Film mince de silicium polycristallin\u4e28Plusieurs raisons affectant le gauchissement des plaquettes de silicium\" tabindex=\"-1\" >\n\t\t\tLire plus \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7476 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/quest-ce-que-le-depot-en-couche-atomique\/\" >\n\t\t\t\tD\u00e9p\u00f4t par couche atomique (ALD) : principes, avantages et applications\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>D\u00e9p\u00f4t par couche atomique (ALD) Principes, avantages et applications D\u00e9p\u00f4t par couche atomique<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/quest-ce-que-le-depot-en-couche-atomique\/\" aria-label=\"En savoir plus sur les principes, les avantages et les applications du d\u00e9p\u00f4t par couche atomique (ALD)\" tabindex=\"-1\" >\n\t\t\tLire plus \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-db1b6ea elementor-widget elementor-widget-heading\" data-id=\"db1b6ea\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title elementor-size-default\"><a href=\"https:\/\/www.nanofab.com.cn\/fr\/perspectives-2\/\">Plus d'informations...<\/a><\/p>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>\u6e85\u5c04\u6cd5\u5236\u5907\u8584\u819c\u7684\u539f\u7406\u53ca\u7279\u70b9 \u6e85\u5c04\u6280\u672f\u662f\u7269\u7406\u6c14\u76f8\u6c89\u79ef(PVD)\u7684\u4e00\u79cd\uff0c\u53ef\u7528\u4e8e\u5236\u5907\u7edd\u7f18\u4f53\u3001\u91d1\u5c5e\u7b49\u591a\u79cd\u8584\u819c\uff0c\u590d\u5408\u8584\u819c [&hellip;]<\/p>","protected":false},"author":3,"featured_media":7649,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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