{"id":7641,"date":"2024-04-11T17:22:25","date_gmt":"2024-04-11T09:22:25","guid":{"rendered":"https:\/\/www.nanofab.com.cn\/?p=7641"},"modified":"2024-05-28T10:35:18","modified_gmt":"2024-05-28T02:35:18","slug":"what-is-plasma-enhanced-chemical-vapor-deposition","status":"publish","type":"post","link":"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\/","title":{"rendered":"Principes et avantages du d\u00e9p\u00f4t chimique en phase vapeur assist\u00e9 par plasma (PE-CVD)"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"7641\" class=\"elementor elementor-7641\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-5667dde elementor-section-stretched elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"5667dde\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;,&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-e6337a4\" data-id=\"e6337a4\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-f6d2728 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"f6d2728\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-c70d05a\" data-id=\"c70d05a\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-0ad4b87 elementor-widget elementor-widget-heading\" data-id=\"0ad4b87\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\">Principes et avantages du d\u00e9p\u00f4t chimique en phase vapeur assist\u00e9 par plasma (PE-CVD)<\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-77c5937 elementor-widget elementor-widget-post-info\" data-id=\"77c5937\" data-element_type=\"widget\" data-widget_type=\"post-info.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor\/assets\/css\/widget-icon-list.min.css\"><link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-theme-elements.min.css\">\t\t<ul class=\"elementor-icon-list-items elementor-post-info\">\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-repeater-item-577f4c4\" itemprop=\"datePublished\">\n\t\t\t\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/fr\/2024\/04\/11\/\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text elementor-post-info__item elementor-post-info__item--type-date\">\n\t\t\t\t\t\t\t\t\t\t<time>2024-04-11<\/time>\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/li>\n\t\t\t\t<\/ul>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8fe61de elementor-widget elementor-widget-image\" data-id=\"8fe61de\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-image{text-align:center}.elementor-widget-image a{display:inline-block}.elementor-widget-image a img[src$=\".svg\"]{width:48px}.elementor-widget-image img{vertical-align:middle;display:inline-block}<\/style>\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"1024\" height=\"768\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f-1024x768.png\" class=\"attachment-large size-large wp-image-7642\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f-1024x768.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f-300x225.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f-768x576.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f-1536x1152.png 1536w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f-16x12.png 16w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f.png 1632w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7dff69c elementor-widget elementor-widget-text-editor\" data-id=\"7dff69c\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p data-v-md-line=\"5\">La technologie PECVD est utilis\u00e9e comme<a href=\"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/quest-ce-que-le-depot-chimique-en-phase-vapeur\/\">MCV<\/a>et<a href=\"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/quest-ce-que-le-depot-physique-en-phase-vapeur\/\">PVD<\/a>La temp\u00e9rature de d\u00e9p\u00f4t de la technologie PECVD est g\u00e9n\u00e9ralement inf\u00e9rieure \u00e0 600\u2103, ce qui \u00e9largit le champ d'application des mat\u00e9riaux de substrat et pr\u00e9sente les avantages d'un \u00e9quipement simple, d'une faible d\u00e9formation de la pi\u00e8ce, d'une bonne performance de la m\u00e9tallisation par contournement et d'un rev\u00eatement uniforme, etc. La technologie PECVD surmonte les inconv\u00e9nients de la temp\u00e9rature de d\u00e9p\u00f4t \u00e9lev\u00e9e et les exigences \u00e9lev\u00e9es de la technologie CVD en mati\u00e8re de mat\u00e9riaux de substrat, et \u00e9vite les probl\u00e8mes de placage par enroulement et d'\u00e9quipement complexe de la technologie PVD, ce qui constitue un nouveau type de technologie de pr\u00e9paration des couches minces avec de grandes perspectives de d\u00e9veloppement et une grande valeur d'application.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-c077655 elementor-widget elementor-widget-heading\" data-id=\"c077655\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Principe de la PE-CVD<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6e3a25a elementor-widget elementor-widget-text-editor\" data-id=\"6e3a25a\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p data-v-md-line=\"17\">Il existe de nombreux types de technologies de d\u00e9p\u00f4t chimique en phase vapeur assist\u00e9 par plasma (PECVD en abr\u00e9g\u00e9), telles que le PECVD \u00e0 courant continu, le PECVD \u00e0 courant continu puls\u00e9, le PECVD de compos\u00e9s organo-m\u00e9talliques, le PECVD \u00e0 radiofr\u00e9quence, le PECVD \u00e0 micro-ondes, le PECVD \u00e0 lumi\u00e8re d'arc, etc. Ces derni\u00e8res ann\u00e9es, avec la fertilisation crois\u00e9e de diverses technologies de rev\u00eatement, le d\u00e9p\u00f4t composite int\u00e9gr\u00e9 PVD et PECVD, la nitruration de particules et le d\u00e9p\u00f4t composite int\u00e9gr\u00e9 PECVD dans le m\u00eame four ont \u00e9t\u00e9 mis au point. Bien entendu, ces derni\u00e8res ann\u00e9es, avec la fertilisation crois\u00e9e de diverses technologies de rev\u00eatement, les dispositifs et technologies de d\u00e9p\u00f4t composite int\u00e9gr\u00e9 par PVD et PECVD, de nitruration de particules et de d\u00e9p\u00f4t composite int\u00e9gr\u00e9 par PECVD dans le m\u00eame four sont en constante \u00e9volution. \u00c0 l'heure actuelle, la plupart des d\u00e9p\u00f4ts industriels de mat\u00e9riaux de rev\u00eatement durs utilisent la technologie PECVD \u00e0 courant continu et \u00e0 courant continu puls\u00e9.<\/p><p data-v-md-line=\"17\">La premi\u00e8re application de la technologie PECVD a suivi le d\u00e9veloppement de l'industrie des semi-conducteurs et est apparue pour le traitement des mat\u00e9riaux semi-conducteurs, c'est-\u00e0-dire l'utilisation de silicone dans le d\u00e9p\u00f4t de Si02 sur le substrat du mat\u00e9riau semi-conducteur. Plus tard, sur la base des caract\u00e9ristiques du processus PECVD particuli\u00e8rement adapt\u00e9 \u00e0 la production industrielle, le processus a commenc\u00e9 \u00e0 \u00eatre utilis\u00e9 dans un grand nombre d'industries micro\u00e9lectroniques (telles que le processus de circuit int\u00e9gr\u00e9, etc.), principalement pour le d\u00e9p\u00f4t de parties de grande surface du film protecteur et de diverses couches isolantes et de films DLC. La technologie PECVD utilise un champ \u00e9lectrique \u00e0 haute tension appliqu\u00e9 dans la chambre de d\u00e9p\u00f4t, de sorte que le gaz de r\u00e9action est soumis \u00e0 une certaine pression et \u00e0 une source d'excitation (par exemple : haute tension continue, alimentation \u00e9lectrique puls\u00e9e, radiofr\u00e9quence ou laser, etc.), les \u00e9lectrons dans le champ \u00e9lectrique sous l'effet acc\u00e9l\u00e9rateur de l'\u00e9nergie gagn\u00e9e, et les particules neutres dans le gaz (atomes ou mol\u00e9cules subissant une collision in\u00e9lastique, puis l'ionisation des \u00e9lectrons secondaires, qui \u00e0 leur tour se poursuivent et les particules atomiques dans le gaz, les \u00e9lectrons secondaires g\u00e9n\u00e9r\u00e9s. Ils sont ensuite ionis\u00e9s et produisent des \u00e9lectrons, de sorte que la collision et l'ionisation r\u00e9p\u00e9t\u00e9es produisent un grand nombre d'\u00e9lectrons et d'ions. Le nombre de particules positives et n\u00e9gatives \u00e9tant \u00e9gal, on parle de plasma. Les particules charg\u00e9es dans le processus de collision seront \u00e9galement dues au composite et transform\u00e9es en particules neutres, et sous la forme d'une d\u00e9charge lumineuse pour lib\u00e9rer l'\u00e9nergie exc\u00e9dentaire. Le gaz de r\u00e9action est excit\u00e9 dans une cour mol\u00e9culaire tr\u00e8s active, des ions et des groupes atomiques compos\u00e9s de plasma, r\u00e9duisant consid\u00e9rablement la temp\u00e9rature de la r\u00e9action de d\u00e9p\u00f4t, acc\u00e9l\u00e9rant le processus de r\u00e9action chimique pour am\u00e9liorer la vitesse de d\u00e9p\u00f4t.<\/p><p data-v-md-line=\"17\">Le gaz de r\u00e9action est excit\u00e9 en mol\u00e9cules, atomes, ions et groupes atomiques tr\u00e8s actifs compos\u00e9s de plasma, ce qui r\u00e9duit consid\u00e9rablement la temp\u00e9rature de r\u00e9action de d\u00e9p\u00f4t, acc\u00e9l\u00e8re le processus de r\u00e9action chimique et am\u00e9liore la vitesse de d\u00e9p\u00f4t. Par cons\u00e9quent, la temp\u00e9rature de d\u00e9p\u00f4t de la technologie PECVD g\u00e9n\u00e9rale &lt;600 \u2103, \u00e9largit le champ d&#039;application du mat\u00e9riau de substrat, avec un \u00e9quipement simple, une faible d\u00e9formation de la pi\u00e8ce \u00e0 usiner, de bonnes performances autour du placage, l&#039;uniformit\u00e9 du rev\u00eatement, la modulation de la composition des avantages de la commodit\u00e9. Elle surmonte les inconv\u00e9nients de la temp\u00e9rature de d\u00e9p\u00f4t \u00e9lev\u00e9e de la technologie CVD et des exigences strictes concernant le mat\u00e9riau du substrat, et \u00e9vite les probl\u00e8mes de placage \u00e0 enroulement m\u00e9diocre et d&#039;\u00e9quipement complexe de la technologie PVD, ce qui convient parfaitement \u00e0 la production industrielle. \u00c0 l&#039;heure actuelle, la technologie PECVD est principalement utilis\u00e9e dans l&#039;industrie des MEMS (comme le processus des circuits int\u00e9gr\u00e9s) et pour la pr\u00e9paration de films fins. Parall\u00e8lement, la technologie PECVD est \u00e9galement utilis\u00e9e dans l&#039;optique binaire, les films solaires, les films optiques \u00e0 gradient d&#039;indice de r\u00e9fraction et les films anti-laser gr\u00e2ce \u00e0 sa bonne uniformit\u00e9 et \u00e0 sa couverture des \u00e9tapes, \u00e0 la densit\u00e9 des films d\u00e9pos\u00e9s, \u00e0 la force d&#039;adh\u00e9rence \u00e9lev\u00e9e entre la couche de film et le substrat, et \u00e0 la vitesse de d\u00e9p\u00f4t rapide.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0b5eb74 elementor-widget elementor-widget-heading\" data-id=\"0b5eb74\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Avantages de la PE-CVD<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-21e5768 elementor-widget elementor-widget-text-editor\" data-id=\"21e5768\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>La m\u00e9thode PECVD peut \u00eatre utilis\u00e9e pour pr\u00e9parer diff\u00e9rents films en faisant varier les param\u00e8tres du processus, par exemple le d\u00e9bit de gaz r\u00e9actif, le rapport de gaz r\u00e9actif, la puissance RF, la pression de la chambre, la temp\u00e9rature de d\u00e9p\u00f4t, l'\u00e9paisseur du film, etc.<\/p><p>Par exemple, pour la pr\u00e9paration de films de SiO2 par PECVD, lorsque la puissance RF est augment\u00e9e, le taux d'activation du gaz de r\u00e9action augmente, la structure du film est donc relativement dense et l'uniformit\u00e9 est am\u00e9lior\u00e9e en cons\u00e9quence. Cependant, lorsque la puissance est trop \u00e9lev\u00e9e, la r\u00e9action rendra le SiO2 g\u00e9n\u00e9r\u00e9 par la vitesse de d\u00e9p\u00f4t trop rapide, mais conduira \u00e0 une structure de film l\u00e2che, la densit\u00e9 du vide augmentera, la r\u00e9p\u00e9tabilit\u00e9 diminuera \u00e9galement, ce qui conduira \u00e0 une mauvaise uniformit\u00e9, lorsque la puissance de la radiofr\u00e9quence est trop \u00e9lev\u00e9e, et m\u00eame \u00e0 un endommagement du substrat par les radiations. La temp\u00e9rature du substrat est \u00e9galement un facteur important affectant l'uniformit\u00e9 du film, lorsque la temp\u00e9rature du substrat augmente, elle augmente l'\u00e9nergie des particules d\u00e9pos\u00e9es \u00e0 la surface du substrat, ce qui entra\u00eene une augmentation de la mobilit\u00e9 des particules \u00e0 la surface de la base, exacerbant la possibilit\u00e9 que ces particules se d\u00e9placent en grappes ou en \u00eelots, ce qui affecte directement l'uniformit\u00e9 du film. D'autre part, une augmentation de la temp\u00e9rature de la base facilite le remplissage des d\u00e9fauts de la surface du film par les particules.<\/p><p><strong>Par cons\u00e9quent, la m\u00e9thode PECVD de pr\u00e9paration des films optiques pr\u00e9sente de nombreux avantages que d'autres m\u00e9thodes n'ont pas.<\/strong><\/p><p>(1) Les r\u00e9actifs et les sous-produits sont des gaz et la structure est simple par rapport aux \u00e9quipements PVD et CVD.<\/p><p>(2) Vitesse de d\u00e9p\u00f4t rapide, en particulier pour les mat\u00e9riaux en couches minces \u00e0 indice de r\u00e9fraction \u00e9lev\u00e9, tels que l'a-Si, le TiO2, etc.<\/p><p>(3) La composition du film peut \u00eatre r\u00e9gl\u00e9e arbitrairement dans une large mesure, et il est possible d'obtenir des films optiques avec une vari\u00e9t\u00e9 de mat\u00e9riaux \u00e0 indice de r\u00e9fraction interm\u00e9diaire, tels que SiCO:H, SiN:H, SiOxNy, SiOxFy, etc.<\/p><p>(4) La structure du film de pr\u00e9cipitation est compl\u00e8te et dense, bonne adh\u00e9rence au substrat.<\/p><p>(5) Excellente couverture des marches<\/p><p>(6) Il est possible d'obtenir une surface de d\u00e9p\u00f4t lisse<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f591a9b elementor-widget elementor-widget-spacer\" data-id=\"f591a9b\" data-element_type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-column .elementor-spacer-inner{height:var(--spacer-size)}.e-con{--container-widget-width:100%}.e-con-inner>.elementor-widget-spacer,.e-con>.elementor-widget-spacer{width:var(--container-widget-width,var(--spacer-size));--align-self:var(--container-widget-align-self,initial);--flex-shrink:0}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container,.e-con>.elementor-widget-spacer>.elementor-widget-container{height:100%;width:100%}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer,.e-con>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer{height:100%}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer>.elementor-spacer-inner,.e-con>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer>.elementor-spacer-inner{height:var(--container-widget-height,var(--spacer-size))}.e-con-inner>.elementor-widget-spacer.elementor-widget-empty,.e-con>.elementor-widget-spacer.elementor-widget-empty{position:relative;min-height:22px;min-width:22px}.e-con-inner>.elementor-widget-spacer.elementor-widget-empty .elementor-widget-empty-icon,.e-con>.elementor-widget-spacer.elementor-widget-empty .elementor-widget-empty-icon{position:absolute;top:0;bottom:0;left:0;right:0;margin:auto;padding:0;width:22px;height:22px}<\/style>\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2483e7e elementor-widget elementor-widget-text-editor\" data-id=\"2483e7e\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Nous proposons <a href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/depot-chimique-en-phase-vapeur-traitement-a-facon\/\">D\u00e9p\u00f4t chimique en phase vapeur assist\u00e9 par plasma (PE-CVD) Services de personnalisation OEM<\/a>N'h\u00e9sitez pas \u00e0 laisser un commentaire.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-cd43023 uael-mobile-wpf-button-justify uael-wpf-style-box uael-wpf-input-size-sm uael-wpf-button-left uael-wpf-btn-size-sm uael-wpf-highlight-style-default elementor-widget elementor-widget-uael-wpf-styler\" data-id=\"cd43023\" data-element_type=\"widget\" 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srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8.png 640w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/depot-de-couches-atomiques-traitement-des-contrats-2\/\" >\n\t\t\t\tTraitement de substitution par d\u00e9p\u00f4t en couche atomique (ALD)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/depot-de-couches-atomiques-traitement-des-contrats-2\/\" aria-label=\"En savoir plus sur le traitement des fonderies par d\u00e9p\u00f4t de couches atomiques (ALD)\" tabindex=\"-1\" >\n\t\t\tLire plus \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7344 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/depot-chimique-en-phase-vapeur-traitement-a-facon\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png\" class=\"attachment-medium size-medium wp-image-7347\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1024x684.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-768x513.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1536x1025.png 1536w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/f394ed96-eaca-40cc-83f6-ebadaea95553-qlt2nzpy27w47wpv9hvjdczv85dnqtqc8q83uvppb4.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553.png 1600w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/depot-chimique-en-phase-vapeur-traitement-a-facon\/\" >\n\t\t\t\tTraitement de g\u00e9n\u00e9ration par d\u00e9p\u00f4t chimique en phase vapeur (CVD)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/depot-chimique-en-phase-vapeur-traitement-a-facon\/\" aria-label=\"En savoir plus sur la sous-traitance du d\u00e9p\u00f4t chimique en phase vapeur (CVD)\" tabindex=\"-1\" >\n\t\t\tLire plus \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7355 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/quest-ce-que-le-depot-physique-en-phase-vapeur-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png\" class=\"attachment-medium size-medium wp-image-7357\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-1024x683.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-768x512.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-qlti2lfsi53oh54jrq611wpt5lt6dogutrcqlbec0w.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932.png 1508w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/quest-ce-que-le-depot-physique-en-phase-vapeur-2\/\" >\n\t\t\t\tTraitement de g\u00e9n\u00e9ration par d\u00e9p\u00f4t physique en phase vapeur (PVD)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/quest-ce-que-le-depot-physique-en-phase-vapeur-2\/\" aria-label=\"En savoir plus sur la sous-traitance du d\u00e9p\u00f4t physique en phase vapeur (PVD)\" tabindex=\"-1\" >\n\t\t\tLire plus \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0be945d elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"0be945d\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 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100%;-webkit-mask-repeat:var(--divider-pattern-repeat);mask-repeat:var(--divider-pattern-repeat);background-color:var(--divider-color);-webkit-mask-image:var(--divider-pattern-url);mask-image:var(--divider-pattern-url)}.elementor-widget-divider--no-spacing{--divider-pattern-size:auto}.elementor-widget-divider--bg-round{--divider-pattern-repeat:round}.rtl .elementor-widget-divider .elementor-divider__text{direction:rtl}.e-con-inner>.elementor-widget-divider,.e-con>.elementor-widget-divider{width:var(--container-widget-width,100%);--flex-grow:var(--container-widget-flex-grow)}<\/style>\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-06b8788 elementor-widget elementor-widget-heading\" data-id=\"06b8788\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<div class=\"elementor-heading-title elementor-size-default\">Lecture associ\u00e9e<\/div>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3919c66 elementor-grid-1 elementor-posts--thumbnail-none elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-widget elementor-widget-posts\" data-id=\"3919c66\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-8099 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/difference-entre-lpcvd-et-pecvd\/\" >\n\t\t\t\tDiff\u00e9rence entre LPCVD et PECVD\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Diff\u00e9rence entre LPCVD et PECVD Parvenir \u00e0 un niveau \u00e9lev\u00e9 dans un environnement \u00e0 faible tension<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/difference-entre-lpcvd-et-pecvd\/\" aria-label=\"En savoir plus sur la diff\u00e9rence entre LPCVD et PECVD\" tabindex=\"-1\" >\n\t\t\tLire plus \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7881 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/modifications-du-silicium-amorphe-a-differentes-longueurs-donde-2\/\" >\n\t\t\t\tVariation de l'indice de r\u00e9fraction et du coefficient d'absorption du silicium amorphe \u00e0 diff\u00e9rentes longueurs d'onde\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Variation de l'indice de r\u00e9fraction et du coefficient d'absorption du silicium amorphe \u00e0 diff\u00e9rentes longueurs d'onde Dans l'\u00e9tude des<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/modifications-du-silicium-amorphe-a-differentes-longueurs-donde-2\/\" aria-label=\"Lire la suite : Variation de l&#039;indice de r\u00e9fraction et du coefficient d&#039;absorption du silicium amorphe \u00e0 diff\u00e9rentes longueurs d&#039;onde\" tabindex=\"-1\" >\n\t\t\tLire plus \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7544 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/quest-ce-que-le-depot-par-evaporation-par-faisceau-delectrons-2\/\" >\n\t\t\t\tProc\u00e9d\u00e9s de rev\u00eatement par \u00e9vaporation par faisceau d'\u00e9lectrons (EB-PVD), avantages et inconv\u00e9nients\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Proc\u00e9d\u00e9s et avantages du rev\u00eatement par \u00e9vaporation par faisceau d'\u00e9lectrons (EB-PVD) Faisceau d'\u00e9lectrons<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/quest-ce-que-le-depot-par-evaporation-par-faisceau-delectrons-2\/\" aria-label=\"En savoir plus sur les proc\u00e9d\u00e9s de rev\u00eatement par \u00e9vaporation par faisceau d&#039;\u00e9lectrons (EB-PVD), leurs avantages et leurs inconv\u00e9nients\" tabindex=\"-1\" >\n\t\t\tLire plus \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-35f6d81 elementor-widget elementor-widget-heading\" data-id=\"35f6d81\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title elementor-size-default\"><a href=\"https:\/\/www.nanofab.com.cn\/fr\/perspectives-2\/\">Plus d'informations...<\/a><\/p>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>Principes et avantages du d\u00e9p\u00f4t chimique en phase vapeur assist\u00e9 par plasma (PE-CVD) La technologie PECVD a \u00e9t\u00e9 d\u00e9velopp\u00e9e en compl\u00e9ment du d\u00e9p\u00f4t en phase vapeur assist\u00e9 par plasma (CVD) et du d\u00e9p\u00f4t en phase vapeur assist\u00e9 par plasma (PVD) [...]<\/p>","protected":false},"author":3,"featured_media":7642,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"@id\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#article\",\"isPartOf\":{\"@id\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/\"},\"author\":{\"name\":\"jeff5829\",\"@id\":\"https:\/\/www.nanofab.com.cn\/#\/schema\/person\/43ad5264cbf98ccd5ec1fbd4f6c3b0e5\"},\"headline\":\"\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08PE-CVD\uff09\u7684\u539f\u7406\u548c\u4f18\u70b9\",\"datePublished\":\"2024-04-11T09:22:25+00:00\",\"dateModified\":\"2024-05-28T02:35:18+00:00\",\"mainEntityOfPage\":{\"@id\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/\"},\"wordCount\":53,\"commentCount\":0,\"publisher\":{\"@id\":\"https:\/\/www.nanofab.com.cn\/#organization\"},\"image\":{\"@id\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#primaryimage\"},\"thumbnailUrl\":\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f.png\",\"articleSection\":[\"\u5e94\u7528\"],\"inLanguage\":\"fr-FR\",\"potentialAction\":[{\"@type\":\"CommentAction\",\"name\":\"Comment\",\"target\":[\"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#respond\"]}]},{\"@type\":\"WebPage\",\"@id\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/\",\"url\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/\",\"name\":\"\u63d0\u5347\u8584\u819c\uff1aPECVD\u7684\u4f18\u70b9 - \u6e2f\u6e7e\u534a\u5bfc\u4f53\",\"isPartOf\":{\"@id\":\"https:\/\/www.nanofab.com.cn\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#primaryimage\"},\"image\":{\"@id\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#primaryimage\"},\"thumbnailUrl\":\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f.png\",\"datePublished\":\"2024-04-11T09:22:25+00:00\",\"dateModified\":\"2024-05-28T02:35:18+00:00\",\"description\":\"\u8584\u819c\u5236\u5907\u5de5\u827a\u5728\u8d85\u5927\u89c4\u6a21\u96c6\u6210\u7535\u8def\u6280\u672f\u4e2d\u6709\u7740\u975e\u5e38\u5e7f\u6cdb\u7684\u5e94\u7528\uff0c\u6309\u7167\u5176\u6210\u819c\u65b9\u6cd5\u53ef\u5206\u4e3a\u4e24\u5927\u7c7b:\u7269\u7406\u6c14\u76f8\u6c89\u79ef(PVD)\u548c\u5316\u5b66\u6c14\u76f8\u6c89\u79ef(CVD)\u7b49\u79bb\u5b50\u589e\u5f3a\u578b\u5316\u5b66\u6c14\u76f8\u6dc0\u79ef(PECVD)\u662f\u5316\u5b66\u6c14\u76f8\u6dc0\u79ef\u7684\u4e00\u79cd,\u5176\u6dc0\u79ef\u6e29\u5ea6\u4f4e\u662f\u5b83\u6700\u7a81\u51fa\u7684\u4f18\u70b9\u3002\",\"breadcrumb\":{\"@id\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#breadcrumb\"},\"inLanguage\":\"fr-FR\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"fr-FR\",\"@id\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#primaryimage\",\"url\":\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f.png\",\"contentUrl\":\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f.png\",\"width\":1632,\"height\":1224},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"\u9996\u9875\",\"item\":\"https:\/\/www.nanofab.com.cn\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08PE-CVD\uff09\u7684\u539f\u7406\u548c\u4f18\u70b9\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/www.nanofab.com.cn\/#website\",\"url\":\"https:\/\/www.nanofab.com.cn\/\",\"name\":\"Harbour\u6e2f\u6e7e\u534a\u5bfc\u4f53\",\"description\":\"Greater China\",\"publisher\":{\"@id\":\"https:\/\/www.nanofab.com.cn\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/www.nanofab.com.cn\/?s={search_term_string}\"},\"query-input\":\"required name=search_term_string\"}],\"inLanguage\":\"fr-FR\"},{\"@type\":\"Organization\",\"@id\":\"https:\/\/www.nanofab.com.cn\/#organization\",\"name\":\"\u6e2f\u6e7e\u534a\u5bfc\u4f53\",\"url\":\"https:\/\/www.nanofab.com.cn\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"fr-FR\",\"@id\":\"https:\/\/www.nanofab.com.cn\/#\/schema\/logo\/image\/\",\"url\":\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/cropped-cropped-cropped-\u6e2f\u6e7e\u534a\u5bfc\u4f53-logo.png\",\"contentUrl\":\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/cropped-cropped-cropped-\u6e2f\u6e7e\u534a\u5bfc\u4f53-logo.png\",\"width\":380,\"height\":60,\"caption\":\"\u6e2f\u6e7e\u534a\u5bfc\u4f53\"},\"image\":{\"@id\":\"https:\/\/www.nanofab.com.cn\/#\/schema\/logo\/image\/\"}},{\"@type\":\"Person\",\"@id\":\"https:\/\/www.nanofab.com.cn\/#\/schema\/person\/43ad5264cbf98ccd5ec1fbd4f6c3b0e5\",\"name\":\"jeff5829\",\"image\":{\"@type\":\"ImageObject\",\"inLanguage\":\"fr-FR\",\"@id\":\"https:\/\/www.nanofab.com.cn\/#\/schema\/person\/image\/\",\"url\":\"https:\/\/secure.gravatar.com\/avatar\/07276a17cfc0fa45dca16dd680ca6060143a60e8f4bd15c2584de1fdcec39601?s=96&d=mm&r=g\",\"contentUrl\":\"https:\/\/secure.gravatar.com\/avatar\/07276a17cfc0fa45dca16dd680ca6060143a60e8f4bd15c2584de1fdcec39601?s=96&d=mm&r=g\",\"caption\":\"jeff5829\"},\"url\":\"https:\/\/www.nanofab.com.cn\/fr\/author\/jeff5829\/\"}]}<\/script>\n<!-- \/ Yoast SEO Premium plugin. -->","yoast_head_json":{"title":"\u63d0\u5347\u8584\u819c\uff1aPECVD\u7684\u4f18\u70b9 - \u6e2f\u6e7e\u534a\u5bfc\u4f53","description":"\u8584\u819c\u5236\u5907\u5de5\u827a\u5728\u8d85\u5927\u89c4\u6a21\u96c6\u6210\u7535\u8def\u6280\u672f\u4e2d\u6709\u7740\u975e\u5e38\u5e7f\u6cdb\u7684\u5e94\u7528\uff0c\u6309\u7167\u5176\u6210\u819c\u65b9\u6cd5\u53ef\u5206\u4e3a\u4e24\u5927\u7c7b:\u7269\u7406\u6c14\u76f8\u6c89\u79ef(PVD)\u548c\u5316\u5b66\u6c14\u76f8\u6c89\u79ef(CVD)\u7b49\u79bb\u5b50\u589e\u5f3a\u578b\u5316\u5b66\u6c14\u76f8\u6dc0\u79ef(PECVD)\u662f\u5316\u5b66\u6c14\u76f8\u6dc0\u79ef\u7684\u4e00\u79cd,\u5176\u6dc0\u79ef\u6e29\u5ea6\u4f4e\u662f\u5b83\u6700\u7a81\u51fa\u7684\u4f18\u70b9\u3002","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\/","og_locale":"fr_FR","og_type":"article","og_title":"\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08PE-CVD\uff09\u7684\u539f\u7406\u548c\u4f18\u70b9","og_description":"\u8584\u819c\u5236\u5907\u5de5\u827a\u5728\u8d85\u5927\u89c4\u6a21\u96c6\u6210\u7535\u8def\u6280\u672f\u4e2d\u6709\u7740\u975e\u5e38\u5e7f\u6cdb\u7684\u5e94\u7528\uff0c\u6309\u7167\u5176\u6210\u819c\u65b9\u6cd5\u53ef\u5206\u4e3a\u4e24\u5927\u7c7b:\u7269\u7406\u6c14\u76f8\u6c89\u79ef(PVD)\u548c\u5316\u5b66\u6c14\u76f8\u6c89\u79ef(CVD)\u7b49\u79bb\u5b50\u589e\u5f3a\u578b\u5316\u5b66\u6c14\u76f8\u6dc0\u79ef(PECVD)\u662f\u5316\u5b66\u6c14\u76f8\u6dc0\u79ef\u7684\u4e00\u79cd,\u5176\u6dc0\u79ef\u6e29\u5ea6\u4f4e\u662f\u5b83\u6700\u7a81\u51fa\u7684\u4f18\u70b9\u3002","og_url":"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\/","og_site_name":"\u6e2f\u6e7e\u534a\u5bfc\u4f53","article_published_time":"2024-04-11T09:22:25+00:00","article_modified_time":"2024-05-28T02:35:18+00:00","og_image":[{"width":1024,"height":768,"url":"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f-1024x768.png","type":"image\/png"}],"author":"jeff5829","twitter_card":"summary_large_image","twitter_misc":{"\u00c9crit par":"jeff5829","Dur\u00e9e de lecture estim\u00e9e":"2 minutes"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"Article","@id":"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#article","isPartOf":{"@id":"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/"},"author":{"name":"jeff5829","@id":"https:\/\/www.nanofab.com.cn\/#\/schema\/person\/43ad5264cbf98ccd5ec1fbd4f6c3b0e5"},"headline":"\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08PE-CVD\uff09\u7684\u539f\u7406\u548c\u4f18\u70b9","datePublished":"2024-04-11T09:22:25+00:00","dateModified":"2024-05-28T02:35:18+00:00","mainEntityOfPage":{"@id":"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/"},"wordCount":53,"commentCount":0,"publisher":{"@id":"https:\/\/www.nanofab.com.cn\/#organization"},"image":{"@id":"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#primaryimage"},"thumbnailUrl":"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f.png","articleSection":["\u5e94\u7528"],"inLanguage":"fr-FR","potentialAction":[{"@type":"CommentAction","name":"Comment","target":["https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#respond"]}]},{"@type":"WebPage","@id":"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/","url":"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/","name":"\u63d0\u5347\u8584\u819c\uff1aPECVD\u7684\u4f18\u70b9 - \u6e2f\u6e7e\u534a\u5bfc\u4f53","isPartOf":{"@id":"https:\/\/www.nanofab.com.cn\/#website"},"primaryImageOfPage":{"@id":"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#primaryimage"},"image":{"@id":"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#primaryimage"},"thumbnailUrl":"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f.png","datePublished":"2024-04-11T09:22:25+00:00","dateModified":"2024-05-28T02:35:18+00:00","description":"\u8584\u819c\u5236\u5907\u5de5\u827a\u5728\u8d85\u5927\u89c4\u6a21\u96c6\u6210\u7535\u8def\u6280\u672f\u4e2d\u6709\u7740\u975e\u5e38\u5e7f\u6cdb\u7684\u5e94\u7528\uff0c\u6309\u7167\u5176\u6210\u819c\u65b9\u6cd5\u53ef\u5206\u4e3a\u4e24\u5927\u7c7b:\u7269\u7406\u6c14\u76f8\u6c89\u79ef(PVD)\u548c\u5316\u5b66\u6c14\u76f8\u6c89\u79ef(CVD)\u7b49\u79bb\u5b50\u589e\u5f3a\u578b\u5316\u5b66\u6c14\u76f8\u6dc0\u79ef(PECVD)\u662f\u5316\u5b66\u6c14\u76f8\u6dc0\u79ef\u7684\u4e00\u79cd,\u5176\u6dc0\u79ef\u6e29\u5ea6\u4f4e\u662f\u5b83\u6700\u7a81\u51fa\u7684\u4f18\u70b9\u3002","breadcrumb":{"@id":"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#breadcrumb"},"inLanguage":"fr-FR","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/"]}]},{"@type":"ImageObject","inLanguage":"fr-FR","@id":"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#primaryimage","url":"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f.png","contentUrl":"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f.png","width":1632,"height":1224},{"@type":"BreadcrumbList","@id":"https:\/\/www.nanofab.com.cn\/insight\/application\/what-is-plasma-enhanced-chemical-vapor-deposition\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"\u9996\u9875","item":"https:\/\/www.nanofab.com.cn\/"},{"@type":"ListItem","position":2,"name":"\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08PE-CVD\uff09\u7684\u539f\u7406\u548c\u4f18\u70b9"}]},{"@type":"WebSite","@id":"https:\/\/www.nanofab.com.cn\/#website","url":"https:\/\/www.nanofab.com.cn\/","name":"Harbour\u6e2f\u6e7e\u534a\u5bfc\u4f53","description":"Greater China","publisher":{"@id":"https:\/\/www.nanofab.com.cn\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.nanofab.com.cn\/?s={search_term_string}"},"query-input":"required name=search_term_string"}],"inLanguage":"fr-FR"},{"@type":"Organization","@id":"https:\/\/www.nanofab.com.cn\/#organization","name":"\u6e2f\u6e7e\u534a\u5bfc\u4f53","url":"https:\/\/www.nanofab.com.cn\/","logo":{"@type":"ImageObject","inLanguage":"fr-FR","@id":"https:\/\/www.nanofab.com.cn\/#\/schema\/logo\/image\/","url":"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/cropped-cropped-cropped-\u6e2f\u6e7e\u534a\u5bfc\u4f53-logo.png","contentUrl":"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/cropped-cropped-cropped-\u6e2f\u6e7e\u534a\u5bfc\u4f53-logo.png","width":380,"height":60,"caption":"\u6e2f\u6e7e\u534a\u5bfc\u4f53"},"image":{"@id":"https:\/\/www.nanofab.com.cn\/#\/schema\/logo\/image\/"}},{"@type":"Person","@id":"https:\/\/www.nanofab.com.cn\/#\/schema\/person\/43ad5264cbf98ccd5ec1fbd4f6c3b0e5","name":"jeff5829","image":{"@type":"ImageObject","inLanguage":"fr-FR","@id":"https:\/\/www.nanofab.com.cn\/#\/schema\/person\/image\/","url":"https:\/\/secure.gravatar.com\/avatar\/07276a17cfc0fa45dca16dd680ca6060143a60e8f4bd15c2584de1fdcec39601?s=96&d=mm&r=g","contentUrl":"https:\/\/secure.gravatar.com\/avatar\/07276a17cfc0fa45dca16dd680ca6060143a60e8f4bd15c2584de1fdcec39601?s=96&d=mm&r=g","caption":"jeff5829"},"url":"https:\/\/www.nanofab.com.cn\/fr\/author\/jeff5829\/"}]}},"_links":{"self":[{"href":"https:\/\/www.nanofab.com.cn\/fr\/wp-json\/wp\/v2\/posts\/7641","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.nanofab.com.cn\/fr\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.nanofab.com.cn\/fr\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.nanofab.com.cn\/fr\/wp-json\/wp\/v2\/users\/3"}],"replies":[{"embeddable":true,"href":"https:\/\/www.nanofab.com.cn\/fr\/wp-json\/wp\/v2\/comments?post=7641"}],"version-history":[{"count":12,"href":"https:\/\/www.nanofab.com.cn\/fr\/wp-json\/wp\/v2\/posts\/7641\/revisions"}],"predecessor-version":[{"id":7962,"href":"https:\/\/www.nanofab.com.cn\/fr\/wp-json\/wp\/v2\/posts\/7641\/revisions\/7962"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.nanofab.com.cn\/fr\/wp-json\/wp\/v2\/media\/7642"}],"wp:attachment":[{"href":"https:\/\/www.nanofab.com.cn\/fr\/wp-json\/wp\/v2\/media?parent=7641"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.nanofab.com.cn\/fr\/wp-json\/wp\/v2\/categories?post=7641"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.nanofab.com.cn\/fr\/wp-json\/wp\/v2\/tags?post=7641"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}