{"id":7544,"date":"2024-04-04T15:24:06","date_gmt":"2024-04-04T07:24:06","guid":{"rendered":"https:\/\/www.nanofab.com.cn\/?p=7544"},"modified":"2024-06-13T15:32:15","modified_gmt":"2024-06-13T07:32:15","slug":"what-is-electron-beam-evaporation-deposition","status":"publish","type":"post","link":"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/quest-ce-que-le-depot-par-evaporation-par-faisceau-delectrons-2\/","title":{"rendered":"Proc\u00e9d\u00e9s de rev\u00eatement par \u00e9vaporation par faisceau d'\u00e9lectrons (EB-PVD), avantages et inconv\u00e9nients"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"7544\" class=\"elementor elementor-7544\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-55163b3 elementor-section-stretched elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"55163b3\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;,&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-8487099\" data-id=\"8487099\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-09c365b elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"09c365b\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-d23f70b\" data-id=\"d23f70b\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-ca75822 elementor-widget elementor-widget-heading\" data-id=\"ca75822\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\">Processus et avantages du rev\u00eatement par \u00e9vaporation par faisceau d'\u00e9lectrons (EB-PVD)<\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5172cc9 elementor-widget elementor-widget-post-info\" data-id=\"5172cc9\" data-element_type=\"widget\" data-widget_type=\"post-info.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor\/assets\/css\/widget-icon-list.min.css\"><link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-theme-elements.min.css\">\t\t<ul class=\"elementor-icon-list-items elementor-post-info\">\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-repeater-item-577f4c4\" itemprop=\"datePublished\">\n\t\t\t\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/fr\/2024\/04\/04\/\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text elementor-post-info__item elementor-post-info__item--type-date\">\n\t\t\t\t\t\t\t\t\t\t<time>2024-04-04<\/time>\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/li>\n\t\t\t\t<\/ul>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-696b9be elementor-widget elementor-widget-image\" data-id=\"696b9be\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-image{text-align:center}.elementor-widget-image a{display:inline-block}.elementor-widget-image a img[src$=\".svg\"]{width:48px}.elementor-widget-image img{vertical-align:middle;display:inline-block}<\/style>\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"626\" height=\"417\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/ce1a76ab6de1b85efc4303d0140426c.png\" class=\"attachment-large size-large wp-image-7545\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/ce1a76ab6de1b85efc4303d0140426c.png 626w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/ce1a76ab6de1b85efc4303d0140426c-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/ce1a76ab6de1b85efc4303d0140426c-18x12.png 18w\" sizes=\"(max-width: 626px) 100vw, 626px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-51b7cad elementor-widget elementor-widget-text-editor\" data-id=\"51b7cad\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p>L'\u00e9vaporation par faisceau d'\u00e9lectrons est une technologie de rev\u00eatement de surface bas\u00e9e sur une source de chaleur \u00e0 faisceau d'\u00e9lectrons.<a href=\"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/quest-ce-que-le-depot-physique-en-phase-vapeur\/\">D\u00e9p\u00f4t physique en phase vapeur<\/a>Le principe est simple et efficace. Dans ce proc\u00e9d\u00e9, un faisceau d'\u00e9lectrons de haute \u00e9nergie est focalis\u00e9 sur la surface du mat\u00e9riau \u00e0 \u00e9vaporer, qui est chauff\u00e9 localement par transfert d'\u00e9nergie, ce qui provoque son \u00e9vaporation \u00e0 l'\u00e9tat gazeux. Le mat\u00e9riau gazeux est ensuite d\u00e9pos\u00e9 sur le substrat cible dans un environnement sous vide pour former un film mince. Ce processus est hautement contr\u00f4lable et reproductible, ce qui permet un r\u00e9glage pr\u00e9cis de l'\u00e9paisseur, de la composition et de la structure du film.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3254be1 elementor-widget elementor-widget-heading\" data-id=\"3254be1\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Composants d'\u00e9quipement pour la technologie EB-PVD<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-058feec elementor-widget elementor-widget-text-editor\" data-id=\"058feec\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p data-v-md-line=\"5\">Le principe du rev\u00eatement par \u00e9vaporation par faisceau d'\u00e9lectrons est bas\u00e9 sur le transfert d'\u00e9nergie et l'\u00e9vaporation du mat\u00e9riau par un faisceau d'\u00e9lectrons. Dans ce processus, le mat\u00e9riau est chauff\u00e9 \u00e0 une temp\u00e9rature suffisamment \u00e9lev\u00e9e gr\u00e2ce \u00e0 l'utilisation d'une source de chaleur \u00e0 faisceau d'\u00e9lectrons pour passer directement de l'\u00e9tat solide \u00e0 l'\u00e9tat gazeux et se d\u00e9poser ensuite sur le substrat cible pour former un film mince.<\/p><p>Syst\u00e8me de vide : il se compose d'une chambre \u00e0 vide, de pompes \u00e0 vide et de la tuyauterie associ\u00e9e pour garantir que le processus de d\u00e9p\u00f4t se d\u00e9roule dans un environnement de vide \u00e9lev\u00e9, g\u00e9n\u00e9ralement de l'ordre de 10^-5 \u00e0 10^-7 torr.<\/p><p>Source de faisceau d'\u00e9lectrons : g\u00e9n\u00e8re un faisceau d'\u00e9lectrons de haute \u00e9nergie qui est focalis\u00e9 et balay\u00e9 par un syst\u00e8me de lentilles \u00e9lectromagn\u00e9tiques qui contr\u00f4le l'\u00e9nergie et la position du faisceau.<\/p><p>Cible : mat\u00e9riau, g\u00e9n\u00e9ralement un m\u00e9tal, un alliage ou un compos\u00e9, qui est chauff\u00e9 et \u00e9vapor\u00e9 par le faisceau d'\u00e9lectrons.<\/p><p>Table de substrat : utilis\u00e9e pour maintenir et chauffer le substrat, qui peut \u00eatre tourn\u00e9 ou inclin\u00e9 pour am\u00e9liorer l'uniformit\u00e9 du film.<\/p><p>Syst\u00e8me de contr\u00f4le : comprenant le contr\u00f4le de la puissance du faisceau d'\u00e9lectrons, le contr\u00f4le du chauffage du substrat et le contr\u00f4le du syst\u00e8me de vide.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3497ccc elementor-widget elementor-widget-heading\" data-id=\"3497ccc\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">\u00c9tapes du processus pour la technologie EB-PVD<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9361c7a elementor-widget elementor-widget-text-editor\" data-id=\"9361c7a\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<ul><li>Nettoyage du support<\/li><li>Chargement du substrat<\/li><li>Evacuation pr\u00e9liminaire<\/li><li>Pompage \u00e0 vide \u00e9lev\u00e9<\/li><li>Chauffage par faisceau d'\u00e9lectrons<\/li><li>\u00c9vaporation de la cible<\/li><li>transfert de vapeur<\/li><li>Formation des films<\/li><li>Contr\u00f4le de l'\u00e9paisseur<\/li><li>Contr\u00f4le de la vitesse de d\u00e9p\u00f4t<\/li><li>Substrats de refroidissement<\/li><li>Retirer le substrat<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b7f5e30 elementor-widget elementor-widget-heading\" data-id=\"b7f5e30\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Avantages de la technologie EB-PVD<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-874cdc6 elementor-widget elementor-widget-text-editor\" data-id=\"874cdc6\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p><strong>Taux de d\u00e9p\u00f4t \u00e9lev\u00e9<\/strong><\/p><ul><li>Rendement \u00e9lev\u00e9 : la densit\u00e9 \u00e9nerg\u00e9tique \u00e9lev\u00e9e du faisceau d'\u00e9lectrons et l'\u00e9vaporation rapide de la cible permettent d'obtenir une vitesse de d\u00e9p\u00f4t \u00e9lev\u00e9e, adapt\u00e9e au d\u00e9p\u00f4t de grandes surfaces et de films \u00e9pais.<\/li><\/ul><p><strong>Film de haute puret\u00e9<\/strong><\/p><ul><li>Environnement sous vide : le d\u00e9p\u00f4t est effectu\u00e9 dans un environnement sous vide pouss\u00e9, ce qui r\u00e9duit efficacement les impuret\u00e9s et la contamination et garantit une grande puret\u00e9 du film.<\/li><li>Source de mat\u00e9riaux purs : l'utilisation de cibles de haute puret\u00e9 am\u00e9liore encore la puret\u00e9 et la qualit\u00e9 du film.<\/li><\/ul><p><strong>Un contr\u00f4le pr\u00e9cis<\/strong><\/p><ul><li>\u00c9paisseur et composition : en ajustant la puissance du faisceau d'\u00e9lectrons, la vitesse de balayage et la temp\u00e9rature du substrat, l'\u00e9paisseur et la composition du film peuvent \u00eatre contr\u00f4l\u00e9es avec pr\u00e9cision.<\/li><li>Uniformit\u00e9 : la technologie de balayage par faisceau d'\u00e9lectrons permet un d\u00e9p\u00f4t uniforme sur la surface du substrat, ce qui garantit une \u00e9paisseur de film constante.<\/li><\/ul><p><strong>Convient \u00e0 une large gamme de mat\u00e9riaux<\/strong><\/p><ul><li>Cibles polyvalentes : la technologie EB-PVD peut traiter une large gamme de mat\u00e9riaux, notamment des m\u00e9taux, des alliages, des oxydes, des carbures et des nitrures, et elle est tr\u00e8s adaptable.<\/li><li>Composites : le d\u00e9p\u00f4t de composites peut \u00eatre r\u00e9alis\u00e9 par co\u00e9vaporation ou \u00e9vaporation multi-sources pour pr\u00e9parer des films minces aux propri\u00e9t\u00e9s particuli\u00e8res.<\/li><\/ul><p><strong>Film de haute qualit\u00e9<\/strong><\/p><ul><li>Densification \u00e9lev\u00e9e : le film d\u00e9pos\u00e9 pr\u00e9sente une structure dense et non poreuse, avec d'excellentes propri\u00e9t\u00e9s m\u00e9caniques et une grande durabilit\u00e9.<\/li><li>Forte adh\u00e9rence : forte adh\u00e9rence entre le film et le substrat pour les environnements soumis \u00e0 de fortes contraintes et \u00e0 des temp\u00e9ratures \u00e9lev\u00e9es.<\/li><\/ul><p><strong>Capacit\u00e9 de d\u00e9p\u00f4t \u00e0 haute temp\u00e9rature<\/strong><\/p><ul><li>R\u00e9sistance aux temp\u00e9ratures \u00e9lev\u00e9es : le proc\u00e9d\u00e9 EB-PVD est capable de d\u00e9poser des mat\u00e9riaux dans des environnements \u00e0 haute temp\u00e9rature et convient \u00e0 la fabrication de mat\u00e9riaux r\u00e9sistants aux temp\u00e9ratures \u00e9lev\u00e9es, tels que les rev\u00eatements \u00e0 barri\u00e8re thermique (TBC).<\/li><li>Stabilit\u00e9 \u00e0 haute temp\u00e9rature : le film d\u00e9pos\u00e9 pr\u00e9sente une bonne stabilit\u00e9 \u00e0 haute temp\u00e9rature et n'est pas facile \u00e0 oxyder ou \u00e0 d\u00e9composer.<\/li><\/ul><p><strong>faibles dommages<\/strong><\/p><ul><li>Protection du substrat : le chauffage par faisceau d'\u00e9lectrons \u00e9tant principalement concentr\u00e9 sur le mat\u00e9riau cible, l'effet thermique sur le substrat est faible et convient au d\u00e9p\u00f4t de couches minces de mat\u00e9riaux sensibles \u00e0 la chaleur.<\/li><\/ul><p><strong>Flexibilit\u00e9 des processus<\/strong><\/p><ul><li>Param\u00e8tres de processus r\u00e9glables : la puissance du faisceau d'\u00e9lectrons, le mode de balayage, la temp\u00e9rature du substrat et d'autres param\u00e8tres de processus peuvent \u00eatre r\u00e9gl\u00e9s pour r\u00e9pondre aux diff\u00e9rentes exigences de l'application.<\/li><li>Applications polyvalentes : le d\u00e9p\u00f4t de films multicouches et \u00e0 gradient peut \u00eatre r\u00e9alis\u00e9 pour r\u00e9pondre \u00e0 diff\u00e9rentes exigences fonctionnelles et de performance.<\/li><\/ul><p><strong>Environnement et \u00e9conomie<\/strong><\/p><ul><li>Respect de l'environnement : l'environnement sous vide pouss\u00e9 r\u00e9duit l'utilisation et l'\u00e9mission de gaz nocifs et est relativement respectueux de l'environnement.<\/li><li>Rentabilit\u00e9 : bien que l'investissement initial dans l'\u00e9quipement soit \u00e9lev\u00e9, l'efficacit\u00e9 et la qualit\u00e9 \u00e9lev\u00e9es du processus de d\u00e9p\u00f4t r\u00e9duisent le co\u00fbt d'utilisation \u00e0 long terme.<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-893fc8d elementor-widget elementor-widget-heading\" data-id=\"893fc8d\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">mati\u00e8re vaporisable<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4aeee8c elementor-widget elementor-widget-text-editor\" data-id=\"4aeee8c\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Aluminium (Al), cuivre (Cu), titane (Ti), nickel (Ni), chrome (Cr), or (Au), argent (Ag), tungst\u00e8ne (W), oxyde d'indium et d'\u00e9tain (ITO), oxyde de titane (TiO2), oxyde d'aluminium (Al2O3), oxyde de zinc (ZnO), oxyde de hafnium (HfO2), carbure de titane (TiC), carbure de silicium (SiC), nitrure de titane (TiN), nitrure de silicium (Si3N4), nitrure d'aluminium (AlN), borure de titane (TiB2), siliciure de titane (TiSi2), carbone (C) et ainsi de suite. Nitrure de silicium (Si3N4), nitrure d'aluminium (AlN), borure de titane (TiB2), siliciure de titane (TiSi2), carbone (C), etc.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d20ed9c elementor-widget elementor-widget-spacer\" data-id=\"d20ed9c\" data-element_type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-column .elementor-spacer-inner{height:var(--spacer-size)}.e-con{--container-widget-width:100%}.e-con-inner>.elementor-widget-spacer,.e-con>.elementor-widget-spacer{width:var(--container-widget-width,var(--spacer-size));--align-self:var(--container-widget-align-self,initial);--flex-shrink:0}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container,.e-con>.elementor-widget-spacer>.elementor-widget-container{height:100%;width:100%}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer,.e-con>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer{height:100%}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer>.elementor-spacer-inner,.e-con>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer>.elementor-spacer-inner{height:var(--container-widget-height,var(--spacer-size))}.e-con-inner>.elementor-widget-spacer.elementor-widget-empty,.e-con>.elementor-widget-spacer.elementor-widget-empty{position:relative;min-height:22px;min-width:22px}.e-con-inner>.elementor-widget-spacer.elementor-widget-empty .elementor-widget-empty-icon,.e-con>.elementor-widget-spacer.elementor-widget-empty .elementor-widget-empty-icon{position:absolute;top:0;bottom:0;left:0;right:0;margin:auto;padding:0;width:22px;height:22px}<\/style>\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3cb2012 elementor-widget elementor-widget-text-editor\" data-id=\"3cb2012\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Nous proposons <a href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/quest-ce-que-le-depot-physique-en-phase-vapeur-2\/\">D\u00e9p\u00f4t par \u00e9vaporation par faisceau d'\u00e9lectrons (EB-PVD) Services de personnalisation OEM<\/a>N'h\u00e9sitez pas \u00e0 laisser un commentaire.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8eedcd1 uael-mobile-wpf-button-justify uael-wpf-style-box uael-wpf-input-size-sm uael-wpf-button-left uael-wpf-btn-size-sm uael-wpf-highlight-style-default elementor-widget elementor-widget-uael-wpf-styler\" data-id=\"8eedcd1\" data-element_type=\"widget\" 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srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8.png 640w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/depot-de-couches-atomiques-traitement-des-contrats-2\/\" >\n\t\t\t\tTraitement de substitution par d\u00e9p\u00f4t en couche atomique (ALD)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/depot-de-couches-atomiques-traitement-des-contrats-2\/\" aria-label=\"En savoir plus sur le traitement des fonderies par d\u00e9p\u00f4t de couches atomiques (ALD)\" tabindex=\"-1\" >\n\t\t\tLire plus \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7344 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/depot-chimique-en-phase-vapeur-traitement-a-facon\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png\" class=\"attachment-medium size-medium wp-image-7347\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1024x684.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-768x513.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1536x1025.png 1536w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/f394ed96-eaca-40cc-83f6-ebadaea95553-qlt2nzpy27w47wpv9hvjdczv85dnqtqc8q83uvppb4.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553.png 1600w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/depot-chimique-en-phase-vapeur-traitement-a-facon\/\" >\n\t\t\t\tTraitement de g\u00e9n\u00e9ration par d\u00e9p\u00f4t chimique en phase vapeur (CVD)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/depot-chimique-en-phase-vapeur-traitement-a-facon\/\" aria-label=\"En savoir plus sur la sous-traitance du d\u00e9p\u00f4t chimique en phase vapeur (CVD)\" tabindex=\"-1\" >\n\t\t\tLire plus \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7355 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/quest-ce-que-le-depot-physique-en-phase-vapeur-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png\" class=\"attachment-medium size-medium wp-image-7357\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-1024x683.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-768x512.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-qlti2lfsi53oh54jrq611wpt5lt6dogutrcqlbec0w.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932.png 1508w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/quest-ce-que-le-depot-physique-en-phase-vapeur-2\/\" >\n\t\t\t\tTraitement de g\u00e9n\u00e9ration par d\u00e9p\u00f4t physique en phase vapeur (PVD)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/fr\/services-personnalises-2\/technologie-de-revetement-laminage-en-couche-mince\/quest-ce-que-le-depot-physique-en-phase-vapeur-2\/\" aria-label=\"En savoir plus sur la sous-traitance du d\u00e9p\u00f4t physique en phase vapeur (PVD)\" tabindex=\"-1\" >\n\t\t\tLire plus \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5bd004f elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"5bd004f\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 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100%;-webkit-mask-repeat:var(--divider-pattern-repeat);mask-repeat:var(--divider-pattern-repeat);background-color:var(--divider-color);-webkit-mask-image:var(--divider-pattern-url);mask-image:var(--divider-pattern-url)}.elementor-widget-divider--no-spacing{--divider-pattern-size:auto}.elementor-widget-divider--bg-round{--divider-pattern-repeat:round}.rtl .elementor-widget-divider .elementor-divider__text{direction:rtl}.e-con-inner>.elementor-widget-divider,.e-con>.elementor-widget-divider{width:var(--container-widget-width,100%);--flex-grow:var(--container-widget-flex-grow)}<\/style>\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-69a3f8d elementor-widget elementor-widget-heading\" data-id=\"69a3f8d\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<div class=\"elementor-heading-title elementor-size-default\">Lecture associ\u00e9e<\/div>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6dc0f4b elementor-grid-1 elementor-posts--thumbnail-none elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-widget elementor-widget-posts\" data-id=\"6dc0f4b\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-8099 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/difference-entre-lpcvd-et-pecvd\/\" >\n\t\t\t\tDiff\u00e9rence entre LPCVD et PECVD\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Diff\u00e9rence entre LPCVD et PECVD Parvenir \u00e0 un niveau \u00e9lev\u00e9 dans un environnement \u00e0 faible tension<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/difference-entre-lpcvd-et-pecvd\/\" aria-label=\"En savoir plus sur la diff\u00e9rence entre LPCVD et PECVD\" tabindex=\"-1\" >\n\t\t\tLire plus \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7881 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/modifications-du-silicium-amorphe-a-differentes-longueurs-donde-2\/\" >\n\t\t\t\tVariation de l'indice de r\u00e9fraction et du coefficient d'absorption du silicium amorphe \u00e0 diff\u00e9rentes longueurs d'onde\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Variation de l'indice de r\u00e9fraction et du coefficient d'absorption du silicium amorphe \u00e0 diff\u00e9rentes longueurs d'onde Dans l'\u00e9tude des<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/modifications-du-silicium-amorphe-a-differentes-longueurs-donde-2\/\" aria-label=\"Lire la suite : Variation de l&#039;indice de r\u00e9fraction et du coefficient d&#039;absorption du silicium amorphe \u00e0 diff\u00e9rentes longueurs d&#039;onde\" tabindex=\"-1\" >\n\t\t\tLire plus \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-4820 post type-post status-publish format-standard has-post-thumbnail hentry category-application tag-app-silicon-nitride-window\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/science-des-materiaux-nitrure-de-silicium-film-mince-fenetre-2\/\" >\n\t\t\t\tIntroduction \u00e0 3 applications des fen\u00eatres \u00e0 couches minces en nitrure de silicium dans la science des mat\u00e9riaux\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>3 sc\u00e9narios d'application pour les fen\u00eatres en couches minces de nitrure de silicium dans la science des mat\u00e9riaux Les couches minces de nitrure de silicium sont utilis\u00e9es pour la fabrication de fen\u00eatres en couches minces.<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/fr\/perspicacite-2\/application\/science-des-materiaux-nitrure-de-silicium-film-mince-fenetre-2\/\" aria-label=\"Lire la suite : Introduction \u00e0 3 applications des fen\u00eatres \u00e0 couches minces en nitrure de silicium dans la science des mat\u00e9riaux\" tabindex=\"-1\" >\n\t\t\tLire plus \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-77094ce elementor-widget elementor-widget-heading\" data-id=\"77094ce\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title elementor-size-default\"><a href=\"https:\/\/www.nanofab.com.cn\/fr\/perspectives-2\/\">Plus d'informations...<\/a><\/p>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>\u7535\u5b50\u675f\u84b8\u53d1\u9540\u819c\uff08EB-PVD\uff09\u7684\u5de5\u827a\u548c\u4f18\u70b9 \u7535\u5b50\u675f\u84b8\u53d1\u662f\u4e00\u79cd\u57fa\u4e8e\u7535\u5b50\u675f\u70ed\u6e90\u7684\u8868\u9762\u6d82\u5c42\u6280\u672f\uff0c\u5c5e\u4e8e\u7269\u7406\u6c14\u76f8\u6c89\u79ef\uff0c\u5176 [&hellip;]<\/p>","protected":false},"author":3,"featured_media":7545,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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