{"id":7761,"date":"2024-04-19T16:49:46","date_gmt":"2024-04-19T08:49:46","guid":{"rendered":"https:\/\/www.nanofab.com.cn\/?p=7761"},"modified":"2024-05-13T10:16:53","modified_gmt":"2024-05-13T02:16:53","slug":"the-reason-of-influencing-the-warping-degree-of-silicon-wafer","status":"publish","type":"post","link":"https:\/\/www.nanofab.com.cn\/es\/vision-2\/application\/la-razon-de-influir-en-el-grado-de-warping-de-silicon-wafer-2\/","title":{"rendered":"Polysilicon thin film\u4e28Varias razones que afectan al alabeo de las obleas"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"7761\" class=\"elementor elementor-7761\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-a8a5b91 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"a8a5b91\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-3a4b8ae\" data-id=\"3a4b8ae\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-b539f84 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"b539f84\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-62a8e5d\" data-id=\"62a8e5d\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-3b2329d elementor-widget elementor-widget-heading\" data-id=\"3b2329d\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\">Pel\u00edcula delgada de silicio policristalino\u4e28razones que afectan al alabeo de las obleas de silicio<\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-22b678f elementor-widget elementor-widget-post-info\" data-id=\"22b678f\" data-element_type=\"widget\" data-widget_type=\"post-info.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor\/assets\/css\/widget-icon-list.min.css\"><link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-theme-elements.min.css\">\t\t<ul class=\"elementor-icon-list-items elementor-post-info\">\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-repeater-item-577f4c4\" itemprop=\"datePublished\">\n\t\t\t\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/es\/2024\/04\/19\/\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text elementor-post-info__item elementor-post-info__item--type-date\">\n\t\t\t\t\t\t\t\t\t\t<time>2024-04-19<\/time>\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/li>\n\t\t\t\t<\/ul>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-129eae1 elementor-widget elementor-widget-image\" data-id=\"129eae1\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-image{text-align:center}.elementor-widget-image a{display:inline-block}.elementor-widget-image a img[src$=\".svg\"]{width:48px}.elementor-widget-image img{vertical-align:middle;display:inline-block}<\/style>\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"780\" height=\"490\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/39eab4126e833fe2e5a396e60db9ef0.png\" class=\"attachment-large size-large wp-image-7762\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/39eab4126e833fe2e5a396e60db9ef0.png 780w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/39eab4126e833fe2e5a396e60db9ef0-300x188.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/39eab4126e833fe2e5a396e60db9ef0-768x482.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/39eab4126e833fe2e5a396e60db9ef0-18x12.png 18w\" sizes=\"(max-width: 780px) 100vw, 780px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5ed3ccd elementor-widget elementor-widget-text-editor\" data-id=\"5ed3ccd\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p>En muchos casos, la tensi\u00f3n puede introducir muchos resultados no deseados. El problema m\u00e1s destacado del uso de LPCVD para depositar pel\u00edculas finas de silicio policristalino para la absorci\u00f3n de residuos es que las tensiones dentro de la pel\u00edcula pueden provocar un alto grado de alabeo en la oblea.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b448466 elementor-widget elementor-widget-heading\" data-id=\"b448466\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Razones que afectan al alabeo de las obleas<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-83b3402 elementor-widget elementor-widget-text-editor\" data-id=\"83b3402\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<h2>Efecto de la temperatura de deposici\u00f3n en el alabeo de las obleas<\/h2>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-dc8b0bd elementor-widget elementor-widget-text-editor\" data-id=\"dc8b0bd\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>El alabeo de las obleas con pel\u00edcula delgada depositada es mucho mayor que el de las obleas sin pel\u00edcula delgada depositada despu\u00e9s del pulido, y el alabeo de las obleas se reduce a medida que aumenta la temperatura de deposici\u00f3n de la pel\u00edcula delgada.<\/p><p>En primer lugar, debido a que la pel\u00edcula de polisilicio es de deposici\u00f3n de doble cara, despu\u00e9s de pulir la pel\u00edcula de una sola cara se retira, debido al papel de la tensi\u00f3n interna de la pel\u00edcula, el grado de su curvatura ascendente est\u00e1 destinado a aumentar.<\/p><p>En segundo lugar, seg\u00fan el an\u00e1lisis de la teor\u00eda de la tensi\u00f3n, la tensi\u00f3n residual de la pel\u00edcula de polisilicio tiene una gran relaci\u00f3n con su microestructura, que depende en gran medida de las condiciones de deposici\u00f3n. A baja temperatura, la velocidad de deposici\u00f3n es lenta, debido a la acci\u00f3n de la muy peque\u00f1a energ\u00eda cin\u00e9tica de los \u00e1tomos de silicio, que har\u00e1 que se nucleen en el l\u00edmite de los granos finos m\u00e1s peque\u00f1os, la d\u00e9bil uni\u00f3n entre la pel\u00edcula y el sustrato produce peque\u00f1as tensiones de tracci\u00f3n, y las vacantes, defectos, etc., tambi\u00e9n ser\u00e1n una fuente de tensi\u00f3n. A medida que aumenta la temperatura de deposici\u00f3n, aumenta la energ\u00eda cin\u00e9tica, lo que provoca la formaci\u00f3n de islas y aglomeraciones para formar n\u00facleos m\u00e1s grandes, lo que causa una reducci\u00f3n del volumen y un aumento de la tensi\u00f3n, dando lugar a tensiones de compresi\u00f3n. Al aumentar a\u00fan m\u00e1s la temperatura, la energ\u00eda superficial y el crecimiento del grano, la difusi\u00f3n de \u00e1tomos entre los l\u00edmites intergranulares y el aumento de la tensi\u00f3n de compresi\u00f3n. Cuando se deposita entre 580 y 610\u00b0C, la pel\u00edcula puede pasar de tensiones de tracci\u00f3n a tensiones de compresi\u00f3n dentro de la pel\u00edcula. Cuando la temperatura sigue aumentando, los granos crecen en columnas, los \u00e1tomos extienden la direcci\u00f3n vertical de crecimiento y la tensi\u00f3n de compresi\u00f3n disminuye gradualmente. Dado que la direcci\u00f3n de flexi\u00f3n de las muestras es la misma, se observa que, dentro de un determinado intervalo de temperaturas, las internas de la pel\u00edcula se manifiestan como tensiones de compresi\u00f3n y, con el aumento de la temperatura, la tensi\u00f3n de compresi\u00f3n disminuye.<\/p><p>Adem\u00e1s, como no hay tensiones adicionales impuestas por otras pel\u00edculas durante la deposici\u00f3n del polisilicio, la tensi\u00f3n total de la pel\u00edcula puede simplificarse como la suma de las tensiones internas y t\u00e9rmicas, de las cuales la temperatura es el principal factor que afecta a las tensiones t\u00e9rmicas, y un aumento de la temperatura de deposici\u00f3n provocar\u00e1 un aumento de las tensiones internas de la pel\u00edcula.<\/p><p>Se puede observar que las pel\u00edculas de silicio policristalino depositadas a altas temperaturas obtienen valores de alabeo de las obleas relativamente peque\u00f1os, lo que demuestra que la tensi\u00f3n total de las pel\u00edculas se ve afectada principalmente por las tensiones internas, que dependen en gran medida de los cambios de temperatura. Por lo tanto, a condici\u00f3n de que la calidad de la superficie cumpla los requisitos, el alabeo de las obleas de silicio puede mejorarse aumentando adecuadamente la temperatura de deposici\u00f3n.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-91fb539 elementor-widget elementor-widget-text-editor\" data-id=\"91fb539\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<h2>Efecto del grosor de la pel\u00edcula en el alabeo de la oblea<\/h2>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3b0940e elementor-widget elementor-widget-text-editor\" data-id=\"3b0940e\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Gran parte del cambio resultante en el alabeo con el grosor de la pel\u00edcula puede estar relacionado con la evoluci\u00f3n de las tensiones internas en el crecimiento de la pel\u00edcula. Inicialmente, la pel\u00edcula est\u00e1 sometida a tensiones de compresi\u00f3n, que luego cambian gradualmente a tensiones de tracci\u00f3n y, finalmente, de nuevo a tensiones de compresi\u00f3n. Este comportamiento est\u00e1 estrechamente relacionado con el proceso de crecimiento durante la fase de deposici\u00f3n de la pel\u00edcula. En la fase inicial, la pel\u00edcula crece en forma de grupos discretos o islotes en la superficie del sustrato, y estos islotes suelen presentar tensiones de compresi\u00f3n debidas a tensiones superficiales o interfaciales que reducen la separaci\u00f3n reticular entre los granos individuales relativamente muy peque\u00f1os. En la segunda etapa, los islotes crecen de forma que empiezan a entrar en contacto entre s\u00ed, lo que conduce a la formaci\u00f3n de l\u00edmites de grano y, por tanto, provoca que las tensiones de tracci\u00f3n en la pel\u00edcula empiecen a aumentar. La agregaci\u00f3n de islas como mecanismo de fractura el\u00e1stica inversa, el l\u00edmite intergranular se considera una grieta, y el sistema puede reducir su energ\u00eda libre acerc\u00e1ndose a esta grieta sustituyendo la alta energ\u00eda superficial por una energ\u00eda interfacial menor. Al acercarse a la grieta o al l\u00edmite de grano, el material de la pel\u00edcula se somete a un esfuerzo de tracci\u00f3n. En la tercera etapa, a medida que aumenta el espesor de la pel\u00edcula, los \u00e1tomos superficiales se transfieren a los l\u00edmites intergranulares, formando una pel\u00edcula continua, y la tensi\u00f3n de la pel\u00edcula comienza a disminuir, pasando gradualmente de tensi\u00f3n de tracci\u00f3n a tensi\u00f3n de compresi\u00f3n, que aumenta con el espesor. Adem\u00e1s, dado que las condiciones de reacci\u00f3n son id\u00e9nticas excepto por los diferentes espesores de deposici\u00f3n, se sabe que las tensiones t\u00e9rmicas de las pel\u00edculas son las mismas. Por lo tanto, el cambio de tensi\u00f3n total viene determinado por la tensi\u00f3n interna de la pel\u00edcula.<\/p><p>Existe una tendencia a que el alabeo de las obleas de sustrato sea menor a medida que aumenta el grosor de la pel\u00edcula. Esto concuerda con la tercera etapa de la evoluci\u00f3n de las tensiones internas de la pel\u00edcula durante el proceso de crecimiento. Por lo tanto, el alabeo de las obleas de sustrato seguir\u00e1 disminuyendo con el aumento del grosor de la pel\u00edcula en determinadas condiciones.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4f54660 elementor-widget elementor-widget-heading\" data-id=\"4f54660\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Efecto del proceso de recocido en el alabeo de obleas policristalinas selladas por el dorso<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-89a9664 elementor-widget elementor-widget-text-editor\" data-id=\"89a9664\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<h2>Efecto de la temperatura de recocido en el alabeo de obleas policristalinas con sellado posterior<\/h2>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0509bb6 elementor-widget elementor-widget-text-editor\" data-id=\"0509bb6\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Tras la deposici\u00f3n a doble cara de pel\u00edculas de silicio multiproducto sobre la superficie de obleas grabadas al \u00e1cido mediante el m\u00e9todo LPCVD, el alabeo de las obleas antes y despu\u00e9s del recocido se mantuvo b\u00e1sicamente inalterado. Tras el pulido unilateral, el alabeo de la oblea de sustrato aument\u00f3 significativamente. Sin embargo, con el aumento de la temperatura de recocido, el alabeo tiende a disminuir, y alrededor de 1000\u2103 es el punto cr\u00edtico del cambio dr\u00e1stico del alabeo, y el recocido a m\u00e1s de 1000\u2103 puede lograr el control efectivo del alabeo.<\/p><p>Durante el crecimiento de la pel\u00edcula, las bajas temperaturas del proceso provocan una reducci\u00f3n de la difusi\u00f3n superficial, lo que hace imposible que los \u00e1tomos de silicio absorbidos se incrusten en el equilibrio de energ\u00eda m\u00e1s bajo. Por esta raz\u00f3n, las pel\u00edculas en estado de dep\u00f3sito presentan muchos defectos puntuales, vacantes, dislocaciones, l\u00edmites intergranulares, tensiones acumuladas, etc. A medida que aumenta la temperatura de recocido, las vacantes se vuelven m\u00f3viles y derivan hacia las dislocaciones, que tambi\u00e9n se activan y se desplazan hacia la superficie libre por fluencia y deslizamiento, liberando las tensiones. A medida que disminuye la densidad de defectos, toda la pel\u00edcula se vuelve densa. El crecimiento del grano y la renucleaci\u00f3n que lo acompa\u00f1a, impulsados por la energ\u00eda superficial, contin\u00faan durante el recocido. A medida que los granos crecen, los granos de menor tama\u00f1o son consumidos por los granos vecinos de mayor tama\u00f1o, aumentando gradualmente su relaci\u00f3n de superficie corporal. Por consiguiente, a medida que aumenta la temperatura de recocido, aumenta el alivio de la tensi\u00f3n dentro de la pel\u00edcula y disminuye el alabeo de la oblea.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-58b6b9a elementor-widget elementor-widget-text-editor\" data-id=\"58b6b9a\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<h2>Efecto del tiempo de recocido en el alabeo de obleas policristalinas selladas por detr\u00e1s<\/h2>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e0d356d elementor-widget elementor-widget-text-editor\" data-id=\"e0d356d\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>A una temperatura de recocido de 900\u00b0C, el alabeo de las obleas disminuye con el tiempo de recocido, pero la cantidad de cambio tambi\u00e9n disminuye. A temperaturas de recocido de 1000\u00b0C y 1100\u00b0C, el alabeo de las obleas cambia muy poco con el tiempo de recocido. Sin embargo, en las mismas condiciones, el alabeo a 1000\u2103 es ligeramente mayor que a 1100\u2103, y la diferencia entre ambos es mayor a 900\u2103. Cuando la temperatura de recocido es baja, el movimiento at\u00f3mico es relativamente lento, la liberaci\u00f3n de la tensi\u00f3n es m\u00e1s retardada, el aumento apropiado del tiempo de recocido puede hacer que el \u00e1tomo se mueva una distancia mayor para alcanzar el punto de liberaci\u00f3n de la tensi\u00f3n, puede hacer que el alabeo mejore ligeramente. La temperatura de recocido es muy favorable para la mejora del alabeo. A medida que aumenta la temperatura de recocido, la difusi\u00f3n superficial se hace intensa y se eliminan las tensiones residuales. Para la pel\u00edcula de silicio multiproducto, el recocido por encima de 1000\u2103 durante 60min puede b\u00e1sicamente liberar la tensi\u00f3n y obtener un mejor alabeo.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e36d5de elementor-widget elementor-widget-text-editor\" data-id=\"e36d5de\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Debido a los diferentes procesos de preparaci\u00f3n de la pel\u00edcula, el proceso de tratamiento t\u00e9rmico y los requisitos de espesor de la pel\u00edcula, que dan lugar a diferentes estados de tensi\u00f3n dentro de la pel\u00edcula, los par\u00e1metros geom\u00e9tricos de la pel\u00edcula depositada despu\u00e9s del pulido del sustrato tambi\u00e9n tienen diferentes tama\u00f1os. Por lo tanto, las condiciones del proceso de preparaci\u00f3n de la pel\u00edcula y del proceso de tratamiento t\u00e9rmico pueden seleccionarse adecuadamente para lograr el control de la tensi\u00f3n residual de la pel\u00edcula, y al mismo tiempo, de acuerdo con los diferentes requisitos de espesor de la pel\u00edcula, el cambio de alabeo despu\u00e9s del pulido del sustrato puede deducirse aproximadamente, y la capacidad de procesamiento del producto puede evaluarse adecuadamente. Las conclusiones espec\u00edficas son las siguientes.<\/p><p>1. En las mismas condiciones, el alabeo de la oblea de silicio se reduce gradualmente a medida que aumenta la temperatura de deposici\u00f3n de la pel\u00edcula. A temperaturas de deposici\u00f3n m\u00e1s elevadas, el valor del alabeo de la oblea de sustrato es relativamente peque\u00f1o.<\/p><p>2. El alabeo de la oblea de sustrato tiende a reducirse con el aumento del espesor de la pel\u00edcula. Esto concuerda con la tercera etapa de la evoluci\u00f3n de la tensi\u00f3n interna de la pel\u00edcula durante el proceso de crecimiento. Por lo tanto, podemos deducir que el alabeo de la oblea de sustrato seguir\u00e1 disminuyendo con el aumento del espesor de la pel\u00edcula.<\/p><p>3, con los aumentos de temperatura de recocido, el alabeo de la oblea de sustrato tiende a disminuir. 1000 \u2103 m\u00e1s o menos es el punto cr\u00edtico de cambios dr\u00e1sticos de alabeo, superior a 1000 \u2103 recocido durante 60min se puede lograr en el alabeo de control efectivo.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-eb7a641 elementor-widget elementor-widget-text-editor\" data-id=\"eb7a641\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Ofrecemos <a href=\"https:\/\/www.nanofab.com.cn\/es\/servicios-personalizados-2\/tecnologia-de-revestimiento-laminacion-de-pelicula-fina-2\/deposicion-quimica-de-vapor-2\/\">Deposici\u00f3n qu\u00edmica en fase vapor (CVD) Servicios de personalizaci\u00f3n OEM<\/a>no dude en dejarnos un comentario.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-cc21078 uael-mobile-wpf-button-justify uael-wpf-style-box uael-wpf-input-size-sm uael-wpf-button-left uael-wpf-btn-size-sm uael-wpf-highlight-style-default elementor-widget elementor-widget-uael-wpf-styler\" data-id=\"cc21078\" data-element_type=\"widget\" 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srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8.png 640w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/es\/servicios-personalizados-2\/tecnologia-de-revestimiento-laminacion-de-pelicula-fina-2\/deposicion-de-capas-atomicas-procesamiento-de-contratos-2\/\" >\n\t\t\t\tProcesado de sustituci\u00f3n por deposici\u00f3n de capas at\u00f3micas (ALD)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/es\/servicios-personalizados-2\/tecnologia-de-revestimiento-laminacion-de-pelicula-fina-2\/deposicion-de-capas-atomicas-procesamiento-de-contratos-2\/\" aria-label=\"M\u00e1s informaci\u00f3n sobre Deposici\u00f3n en capas at\u00f3micas (ALD) Subcontrataci\u00f3n\" tabindex=\"-1\" >\n\t\t\tLeer M\u00e1s \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7344 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/es\/servicios-personalizados-2\/tecnologia-de-revestimiento-laminacion-de-pelicula-fina-2\/deposicion-quimica-de-vapor-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png\" class=\"attachment-medium size-medium wp-image-7347\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1024x684.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-768x513.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1536x1025.png 1536w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/f394ed96-eaca-40cc-83f6-ebadaea95553-qlt2nzpy27w47wpv9hvjdczv85dnqtqc8q83uvppb4.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553.png 1600w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/es\/servicios-personalizados-2\/tecnologia-de-revestimiento-laminacion-de-pelicula-fina-2\/deposicion-quimica-de-vapor-2\/\" >\n\t\t\t\tProcesado por deposici\u00f3n qu\u00edmica en fase vapor (CVD)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/es\/servicios-personalizados-2\/tecnologia-de-revestimiento-laminacion-de-pelicula-fina-2\/deposicion-quimica-de-vapor-2\/\" aria-label=\"M\u00e1s informaci\u00f3n sobre Deposici\u00f3n qu\u00edmica en fase vapor (CVD) Subcontrataci\u00f3n\" tabindex=\"-1\" >\n\t\t\tLeer M\u00e1s \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7355 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/es\/servicios-personalizados-2\/tecnologia-de-revestimiento-laminacion-de-pelicula-fina-2\/que-es-el-deposicion-fisica-de-vapor-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png\" class=\"attachment-medium size-medium wp-image-7357\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-1024x683.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-768x512.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-qlti2lfsi53oh54jrq611wpt5lt6dogutrcqlbec0w.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932.png 1508w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/es\/servicios-personalizados-2\/tecnologia-de-revestimiento-laminacion-de-pelicula-fina-2\/que-es-el-deposicion-fisica-de-vapor-2\/\" >\n\t\t\t\tProcesado por deposici\u00f3n f\u00edsica en fase vapor (PVD)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/es\/servicios-personalizados-2\/tecnologia-de-revestimiento-laminacion-de-pelicula-fina-2\/que-es-el-deposicion-fisica-de-vapor-2\/\" aria-label=\"M\u00e1s informaci\u00f3n sobre la subcontrataci\u00f3n del dep\u00f3sito f\u00edsico en fase vapor (PVD)\" tabindex=\"-1\" >\n\t\t\tLeer M\u00e1s \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7063f65 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"7063f65\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 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class=\"elementor-widget-container\">\n\t\t\t<div class=\"elementor-heading-title elementor-size-default\">Lecturas relacionadas<\/div>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0550566 elementor-grid-1 elementor-posts--thumbnail-none elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-widget elementor-widget-posts\" data-id=\"0550566\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7731 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/es\/vision-2\/application\/factores-que-influyen-en-la-tasa-de-crecimiento-de-las-peliculas-de-polisilicio\/\" >\n\t\t\t\tExploraci\u00f3n en profundidad\u4e28Varios factores que afectan a la tasa de crecimiento de pel\u00edculas delgadas de silicio policristalino\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/es\/vision-2\/application\/factores-que-influyen-en-la-tasa-de-crecimiento-de-las-peliculas-de-polisilicio\/\" aria-label=\"Leer m\u00e1s sobre Exploraci\u00f3n en profundidad\u4e28Varios factores que afectan a la tasa de crecimiento de la pel\u00edcula delgada de silicio policristalino\" tabindex=\"-1\" >\n\t\t\tLeer M\u00e1s \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7881 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/es\/vision-2\/application\/cambios-de-silicio-amorfo-a-diferentes-longitudes-de-onda\/\" >\n\t\t\t\tVariaci\u00f3n del \u00edndice de refracci\u00f3n y del coeficiente de absorci\u00f3n del silicio amorfo a diferentes longitudes de onda\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Variaci\u00f3n del \u00edndice de refracci\u00f3n y del coeficiente de absorci\u00f3n del silicio amorfo a diferentes longitudes de onda En el estudio de la<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/es\/vision-2\/application\/cambios-de-silicio-amorfo-a-diferentes-longitudes-de-onda\/\" aria-label=\"Leer m\u00e1s sobre Variaci\u00f3n del \u00edndice de refracci\u00f3n y del coeficiente de absorci\u00f3n del silicio amorfo a diferentes longitudes de onda\" tabindex=\"-1\" >\n\t\t\tLeer M\u00e1s \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-5420 post type-post status-publish format-standard has-post-thumbnail hentry category-application tag-app-silicon-nitride-window\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/es\/vision-2\/application\/silicone-nitride-bioscience-applications-2\/\" >\n\t\t\t\tExploraci\u00f3n de 4 aplicaciones de las ventanas de pel\u00edcula fina de nitruro de silicio en las biociencias\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>En este art\u00edculo se describen las propiedades y ventajas de las ventanas de pel\u00edcula fina de nitruro de silicio y se analizan cuatro aplicaciones habituales en las ciencias de la vida.<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/es\/vision-2\/application\/silicone-nitride-bioscience-applications-2\/\" aria-label=\"Leer m\u00e1s sobre Exploraci\u00f3n de 4 aplicaciones de las ventanas de pel\u00edcula delgada de nitruro de silicio en biociencia\" tabindex=\"-1\" >\n\t\t\tLeer M\u00e1s \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-eb240b5 elementor-widget elementor-widget-heading\" data-id=\"eb240b5\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title elementor-size-default\"><a href=\"https:\/\/www.nanofab.com.cn\/es\/perspectivas-2\/\">M\u00e1s relacionados...<\/a><\/p>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>Pel\u00edculas delgadas de silicio policristalino\u4e28Influencia en el alabeo de obleas de silicio En muchos casos, la tensi\u00f3n puede introducir muchos resultados no deseados. El uso de LPCVD para depositar pel\u00edculas delgadas de silicio policristalino para [...]<\/p>","protected":false},"author":3,"featured_media":7762,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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