{"id":7761,"date":"2024-04-19T16:49:46","date_gmt":"2024-04-19T08:49:46","guid":{"rendered":"https:\/\/www.nanofab.com.cn\/?p=7761"},"modified":"2024-05-13T10:16:53","modified_gmt":"2024-05-13T02:16:53","slug":"the-reason-of-influencing-the-warping-degree-of-silicon-wafer","status":"publish","type":"post","link":"https:\/\/www.nanofab.com.cn\/en\/insight-2\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer-2\/","title":{"rendered":"Polysilicon Film\u4e28Various reasons affecting wafer warpage"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"7761\" class=\"elementor elementor-7761\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-a8a5b91 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"a8a5b91\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-3a4b8ae\" data-id=\"3a4b8ae\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-b539f84 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"b539f84\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-62a8e5d\" data-id=\"62a8e5d\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-3b2329d elementor-widget elementor-widget-heading\" data-id=\"3b2329d\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\">Polycrystalline silicon thin film\u4e28reasons affecting the warpage of silicon wafers<\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-22b678f elementor-widget elementor-widget-post-info\" data-id=\"22b678f\" data-element_type=\"widget\" data-widget_type=\"post-info.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor\/assets\/css\/widget-icon-list.min.css\"><link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-theme-elements.min.css\">\t\t<ul class=\"elementor-icon-list-items elementor-post-info\">\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-repeater-item-577f4c4\" itemprop=\"datePublished\">\n\t\t\t\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/en\/2024\/04\/19\/\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text elementor-post-info__item elementor-post-info__item--type-date\">\n\t\t\t\t\t\t\t\t\t\t<time>2024-04-19<\/time>\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/li>\n\t\t\t\t<\/ul>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-129eae1 elementor-widget elementor-widget-image\" data-id=\"129eae1\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-image{text-align:center}.elementor-widget-image a{display:inline-block}.elementor-widget-image a img[src$=\".svg\"]{width:48px}.elementor-widget-image img{vertical-align:middle;display:inline-block}<\/style>\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"780\" height=\"490\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/39eab4126e833fe2e5a396e60db9ef0.png\" class=\"attachment-large size-large wp-image-7762\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/39eab4126e833fe2e5a396e60db9ef0.png 780w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/39eab4126e833fe2e5a396e60db9ef0-300x188.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/39eab4126e833fe2e5a396e60db9ef0-768x482.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/39eab4126e833fe2e5a396e60db9ef0-18x12.png 18w\" sizes=\"(max-width: 780px) 100vw, 780px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5ed3ccd elementor-widget elementor-widget-text-editor\" data-id=\"5ed3ccd\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p>In many cases, stress can introduce many undesired results. The outstanding problem with utilizing LPCVD deposited polysilicon films for debris absorption is that the stresses within the film can cause a large degree of warpage in the wafer.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b448466 elementor-widget elementor-widget-heading\" data-id=\"b448466\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Reasons affecting wafer warpage<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-83b3402 elementor-widget elementor-widget-text-editor\" data-id=\"83b3402\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<h2>Effect of deposition temperature on wafer warpage<\/h2>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-dc8b0bd elementor-widget elementor-widget-text-editor\" data-id=\"dc8b0bd\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>The warpage of wafers with thin film deposited is much larger than that of wafers without thin film deposited after polishing, and the warpage of wafers becomes smaller as the temperature of thin film deposition increases.<\/p><p>First of all, because the polysilicon film is double-sided deposition, after polishing the single-sided film is removed, due to the role of the film's internal stress, the degree of its soaring curvature is bound to increase.<\/p><p>Secondly, according to the stress theory analysis, the residual stress of polysilicon film has a great relationship with its microstructure, which has a strong dependence on the deposition conditions. At low temperature, the deposition rate is slow, due to the role of the very small kinetic energy of silicon atoms, which will cause them to nucleate at the boundary of the smaller fine grains, the weak bonding between the film and the substrate produces small tensile stresses, and the vacancies, defects, etc., will also be a source of stress. As the deposition temperature increases, the kinetic energy increases, prompting the formation of islands and agglomeration to form larger nuclei, causing a reduction in volume and an increase in stress, leading to compressive stress. Further increase in temperature, surface energy and grain growth, diffusion of atoms between inter-grain boundaries and increase in compressive stress. When deposited between 580 and 610\u00b0C, the interior of the film can be transformed from tensile to compressive stress. When the temperature continues to rise, the grains grow into columns, the atoms extend the vertical direction of growth, and the compressive stress gradually decreases. Because the direction of the sample bending is the same, it can be seen that, within a certain temperature range, the film internal are manifested as compressive stress and with the increase in temperature, the compressive stress decreases.<\/p><p>In addition, because there is no additional stress imposed by other films during polysilicon deposition, the total stress of the film can be simplified as the sum of the internal and thermal stresses, of which the temperature is the main factor affecting the thermal stresses, and an increase in the deposition temperature will result in an increase in the internal stresses of the film.<\/p><p>It can be seen that the polycrystalline silicon films deposited at high temperatures obtain relatively small wafer warpage values, proving that the total stress of the films is mainly affected by the internal stress, which is strongly dependent on the temperature change. Therefore, under the condition that the surface quality meets the requirements, an appropriate increase in the deposition temperature can improve the warpage of silicon wafers.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-91fb539 elementor-widget elementor-widget-text-editor\" data-id=\"91fb539\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<h2>Effect of film thickness on wafer warpage<\/h2>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3b0940e elementor-widget elementor-widget-text-editor\" data-id=\"3b0940e\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Much of the resultant change in warpage with film thickness may be related to the evolution of internal stresses in film growth. The film is initially subjected to compressive stresses, which then gradually change to tensile stresses and finally back to compressive stresses. This behavior is closely related to the growth process during the deposition phase of the film. In the initial stage, the film grows as discrete clusters or islets on the substrate surface, and these islets typically exhibit compressive stresses due to surface or interfacial stresses that reduce the lattice gap between the relatively very small individual grains. In the second stage, the islands grow so that island-to-island contact begins to occur, leading to the formation of grain boundaries and therefore causing the tensile stresses in the film to begin to increase. The aggregation of islands as a reverse elastic fracture mechanism, the intergranular boundary is considered as a crack, and the system can reduce its free energy by approaching this crack by replacing the high surface energy by a lower interfacial energy. By approaching the crack or grain boundary, the film material is subjected to tensile stress. In the third stage, as the thickness of the film increases, the surface atoms are transferred to the intergranular boundaries, forming a continuous film, and the film stress begins to decrease, gradually changing from tensile stress to compressive stress, which increases with the thickness. In addition, since the reaction conditions are identical except for the different deposition thicknesses, it is known that the thermal stresses of the films are the same. Therefore, the total stress change is determined by the internal stress of the film.<\/p><p>There is a tendency for the warpage of the substrate wafers to become smaller with increasing film thickness. This is in good agreement with the third stage of the film internal stress evolution during the growth process. Therefore, the warpage of the substrate wafers will still decrease with further increase of film thickness under certain conditions.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4f54660 elementor-widget elementor-widget-heading\" data-id=\"4f54660\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Effect of annealing process on warpage of polycrystalline back-sealed wafers<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-89a9664 elementor-widget elementor-widget-text-editor\" data-id=\"89a9664\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<h2>Effect of annealing temperature on warpage of polycrystalline back-sealed wafers<\/h2>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0509bb6 elementor-widget elementor-widget-text-editor\" data-id=\"0509bb6\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>After double-sided deposition of multi-product silicon films on the surface of acid-etched wafers using the LPCVD method, the warpage of the wafers before and after annealing was basically unchanged. After one-sided polishing, the warpage of the substrate wafer increased significantly. However, with the increase of annealing temperature, the warpage tends to decrease. 1000\u2103 is the critical point of the drastic change of warpage, and annealing higher than 1000\u2103 can realize the effective control of warpage.<\/p><p>During thin film growth, low process temperatures result in reduced surface diffusion, making it impossible for absorbed silicon atoms to be embedded in the lowest energy equilibrium. For this reason, films in the as-deposited state have many point defects, vacancies, dislocations, intergranular boundaries, accumulated stresses, etc. As the annealing temperature increases, the vacancies become movable and drift into the dislocations, which are also activated and move to the free surface by creep and slip, releasing the stresses. As the defect density decreases, the entire film becomes dense. Grain growth and accompanying re-nucleation, driven by surface energy, continues during annealing. As the grains grow, the smaller sized grains are consumed by neighboring larger sized grains, gradually making their body surface area ratio larger. Consequently, as the annealing temperature increases, the stress relief within the film increases and the warpage of the wafer decreases.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-58b6b9a elementor-widget elementor-widget-text-editor\" data-id=\"58b6b9a\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<h2>Effect of annealing time on warpage of polycrystalline back-sealed wafers<\/h2>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e0d356d elementor-widget elementor-widget-text-editor\" data-id=\"e0d356d\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>When the annealing temperature is 900\u00b0C, the warpage of the wafers decreases with the annealing time but the amount of change also decreases. At annealing temperatures of 1000\u00b0C and 1100\u00b0C, the warpage of wafers changes very little with annealing time. However, under the same conditions, the warpage at 1000\u2103 is slightly larger than that at 1100\u2103, and the difference between the two is larger at 900\u2103. When the annealing temperature is low, the atomic movement is relatively slow, the stress release is more delayed, appropriate increase in annealing time can make the atom move a longer distance to reach the stress release point, can make the warpage slightly improved. The temperature of annealing is very favorable to the improvement of warpage. As the annealing temperature increases, the surface diffusion becomes intense and the residual stresses are eliminated. For multi-product silicon film, annealing above 1000\u2103 for 60min can basically release the stress and obtain a better warpage.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e36d5de elementor-widget elementor-widget-text-editor\" data-id=\"e36d5de\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Due to the different film preparation process, heat treatment process and film thickness requirements, resulting in different stress states within the film, the geometric parameters of the deposited film after substrate polishing also have different sizes. Therefore, it is possible to properly select the process conditions of film preparation and heat treatment process to realize the control of film residual stress, and at the same time, according to the different film thickness requirements, roughly deduce the change of the warpage after substrate polishing, so as to appropriately assess the processing capability of the product. The specific conclusions are as follows.<\/p><p>1, under the same conditions, with the temperature of film deposition increases, the warpage of the silicon wafer gradually becomes smaller. At higher deposition temperatures, the substrate wafer warpage value is relatively small.<\/p><p>2. The warpage of the substrate wafer tends to become smaller with increasing film thickness. This is in good agreement with the third stage of the evolution of the internal stresses in the film during the growth process. Therefore, we can infer that the warpage of the substrate wafers will still decrease with the further increase of the film thickness.<\/p><p>3, with the annealing temperature increases, the warpage of the substrate wafer tends to decrease. 1000 \u2103 or so is the critical point of warpage drastic changes, higher than 1000 \u2103 annealed for 60min can realize the effective control of the warpage.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-eb7a641 elementor-widget elementor-widget-text-editor\" data-id=\"eb7a641\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>We offer <a href=\"https:\/\/www.nanofab.com.cn\/en\/customized-services\/coating-technology-thin-film-lamination-2\/chemical-vapor-deposition-2\/\">Chemical Vapor Deposition (CVD) OEM Customization Services<\/a>, Feel free to leave a message to inquire.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-cc21078 uael-mobile-wpf-button-justify uael-wpf-style-box uael-wpf-input-size-sm uael-wpf-button-left uael-wpf-btn-size-sm uael-wpf-highlight-style-default elementor-widget elementor-widget-uael-wpf-styler\" data-id=\"cc21078\" data-element_type=\"widget\" data-settings=\"{&quot;btn_border_radius&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;0&quot;,&quot;right&quot;:&quot;0&quot;,&quot;bottom&quot;:&quot;0&quot;,&quot;left&quot;:&quot;0&quot;,&quot;isLinked&quot;:false},&quot;wpf_button_align_mobile&quot;:&quot;justify&quot;,&quot;wpf_input_padding&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;wpf_input_padding_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;wpf_input_padding_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;wpf_input_radius&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;0&quot;,&quot;right&quot;:&quot;0&quot;,&quot;bottom&quot;:&quot;0&quot;,&quot;left&quot;:&quot;0&quot;,&quot;isLinked&quot;:true},&quot;wpf_input_radius_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;wpf_input_radius_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;wpf_button_align&quot;:&quot;left&quot;,&quot;wpf_button_padding&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;wpf_button_padding_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;wpf_button_padding_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;btn_border_radius_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;btn_border_radius_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;form_fields_margin&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;form_fields_margin_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;form_fields_margin_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;form_label_margin_bottom&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;form_label_margin_bottom_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;form_label_margin_bottom_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;form_desc_margin_top&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;form_desc_margin_top_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;form_desc_margin_top_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;check_radio_items_spacing&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;check_radio_items_spacing_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;check_radio_items_spacing_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;submit_spacing&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;submit_spacing_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;submit_spacing_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"uael-wpf-styler.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class = \"uael-wpf-container\">\r\n\t\t\t\t\t\t<div class = \"uael-wpf uael-wpf-style elementor-clickable\">\r\n\t\t\t\t\t\t<div class=\"wpforms-container wpforms-container-full\" id=\"wpforms-2729\"><form id=\"wpforms-form-2729\" class=\"wpforms-validate wpforms-form wpforms-ajax-form\" data-formid=\"2729\" method=\"post\" enctype=\"multipart\/form-data\" action=\"\/en\/wp-json\/wp\/v2\/posts\/7761\" data-token=\"c547701ad074fafd3b313fb3abe283f9\" data-trp-original-action=\"\/en\/wp-json\/wp\/v2\/posts\/7761\"><noscript class=\"wpforms-error-noscript\">Please enable JavaScript in your browser to complete this form.<\/noscript><div class=\"wpforms-field-container\"><div id=\"wpforms-2729-field_5-container\" class=\"wpforms-field wpforms-field-textarea\" data-field-id=\"5\"><label class=\"wpforms-field-label\" for=\"wpforms-2729-field_5\">Need (Demand) <span class=\"wpforms-required-label\">*<\/span><\/label><textarea id=\"wpforms-2729-field_5\" class=\"wpforms-field-medium wpforms-field-required\" name=\"wpforms[fields][5]\" placeholder=\"Fill in your requirements...\" required><\/textarea><\/div><div id=\"wpforms-2729-field_10-container\" class=\"wpforms-field wpforms-field-layout\" data-field-id=\"10\"><label class=\"wpforms-field-label wpforms-label-hide\" for=\"wpforms-2729-field_10\">Layout<\/label><div class=\"wpforms-field-layout-columns wpforms-field-layout-preset-50-50\"><div class=\"wpforms-layout-column wpforms-layout-column-50\"><div id=\"wpforms-2729-field_9-container\" class=\"wpforms-field wpforms-field-email\" data-field-id=\"9\"><label class=\"wpforms-field-label\" for=\"wpforms-2729-field_9\">Mailbox (E-mail) <span class=\"wpforms-required-label\">*<\/span><\/label><input type=\"email\" id=\"wpforms-2729-field_9\" class=\"wpforms-field-medium wpforms-field-required\" name=\"wpforms[fields][9]\" placeholder=\"Fill in your e-mail...\" required><\/div><\/div><div class=\"wpforms-layout-column wpforms-layout-column-50\"><div id=\"wpforms-2729-field_1-container\" class=\"wpforms-field wpforms-field-text\" data-field-id=\"1\"><label class=\"wpforms-field-label\" for=\"wpforms-2729-field_1\">Name (Name)<\/label><input type=\"text\" id=\"wpforms-2729-field_1\" class=\"wpforms-field-medium\" name=\"wpforms[fields][1]\" placeholder=\"Fill in your name...\" ><\/div><\/div><\/div><\/div><\/div><div class=\"wpforms-submit-container\"><input type=\"hidden\" name=\"wpforms[id]\" value=\"2729\"><input type=\"hidden\" name=\"wpforms[author]\" value=\"3\"><button type=\"submit\" name=\"wpforms[submit]\" id=\"wpforms-submit-2729\" class=\"wpforms-submit\" data-alt-text=\"\u53d1\u9001\u4e2d\u2026\" data-submit-text=\"\u8054\u7cfb\u6211\u4eec\" aria-live=\"assertive\" value=\"wpforms-submit\">Contact Us<\/button><img decoding=\"async\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/wpforms\/assets\/images\/submit-spin.svg\" class=\"wpforms-submit-spinner\" style=\"display: none;\" width=\"26\" height=\"26\" alt=\"Loading\"><\/div><input type=\"hidden\" name=\"trp-form-language\" value=\"en\"\/><\/form><\/div>  <!-- .wpforms-container -->\t\t\t\t\t<\/div>\r\n\t\t\t\t<\/div>\r\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-285e581\" data-id=\"285e581\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-7fb0d73 elementor-widget elementor-widget-heading\" data-id=\"7fb0d73\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<div class=\"elementor-heading-title elementor-size-default\">Related Products<\/div>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-218b1ce elementor-grid-1 elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-posts--thumbnail-top elementor-widget elementor-widget-posts\" data-id=\"218b1ce\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:10,&quot;sizes&quot;:[]},&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-posts.min.css\">\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7386 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/en\/customized-services\/coating-technology-thin-film-lamination-2\/atomic-layer-deposition-contract-processing-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img decoding=\"async\" width=\"300\" height=\"195\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png\" class=\"attachment-medium size-medium wp-image-7388\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8.png 640w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/en\/customized-services\/coating-technology-thin-film-lamination-2\/atomic-layer-deposition-contract-processing-2\/\" >\n\t\t\t\tAtomic Layer Deposition (ALD) Foundry Processing\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/en\/customized-services\/coating-technology-thin-film-lamination-2\/atomic-layer-deposition-contract-processing-2\/\" aria-label=\"Read more about Atomic Layer Deposition (ALD) Foundry Processing\" tabindex=\"-1\" >\n\t\t\tRead More \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7344 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/en\/customized-services\/coating-technology-thin-film-lamination-2\/chemical-vapor-deposition-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png\" class=\"attachment-medium size-medium wp-image-7347\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1024x684.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-768x513.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1536x1025.png 1536w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/f394ed96-eaca-40cc-83f6-ebadaea95553-qlt2nzpy27w47wpv9hvjdczv85dnqtqc8q83uvppb4.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553.png 1600w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/en\/customized-services\/coating-technology-thin-film-lamination-2\/chemical-vapor-deposition-2\/\" >\n\t\t\t\tChemical Vapor Deposition (CVD) Subcontracting\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/en\/customized-services\/coating-technology-thin-film-lamination-2\/chemical-vapor-deposition-2\/\" aria-label=\"Read more about Chemical Vapor Deposition (CVD) Foundry Processing\" tabindex=\"-1\" >\n\t\t\tRead More \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7355 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/en\/customized-services\/coating-technology-thin-film-lamination-2\/what-is-physical-vapor-deposition-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png\" class=\"attachment-medium size-medium wp-image-7357\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-1024x683.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-768x512.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-qlti2lfsi53oh54jrq611wpt5lt6dogutrcqlbec0w.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932.png 1508w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/en\/customized-services\/coating-technology-thin-film-lamination-2\/what-is-physical-vapor-deposition-2\/\" >\n\t\t\t\tPhysical Vapor Deposition (PVD) Subcontracting\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/en\/customized-services\/coating-technology-thin-film-lamination-2\/what-is-physical-vapor-deposition-2\/\" aria-label=\"Read more about Physical Vapor Deposition (PVD) Subcontracting\" tabindex=\"-1\" >\n\t\t\tRead More \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7063f65 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"7063f65\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-divider{--divider-border-style:none;--divider-border-width:1px;--divider-color:#0c0d0e;--divider-icon-size:20px;--divider-element-spacing:10px;--divider-pattern-height:24px;--divider-pattern-size:20px;--divider-pattern-url:none;--divider-pattern-repeat:repeat-x}.elementor-widget-divider .elementor-divider{display:flex}.elementor-widget-divider .elementor-divider__text{font-size:15px;line-height:1;max-width:95%}.elementor-widget-divider .elementor-divider__element{margin:0 var(--divider-element-spacing);flex-shrink:0}.elementor-widget-divider .elementor-icon{font-size:var(--divider-icon-size)}.elementor-widget-divider .elementor-divider-separator{display:flex;margin:0;direction:ltr}.elementor-widget-divider--view-line_icon .elementor-divider-separator,.elementor-widget-divider--view-line_text .elementor-divider-separator{align-items:center}.elementor-widget-divider--view-line_icon .elementor-divider-separator:after,.elementor-widget-divider--view-line_icon .elementor-divider-separator:before,.elementor-widget-divider--view-line_text .elementor-divider-separator:after,.elementor-widget-divider--view-line_text .elementor-divider-separator:before{display:block;content:\"\";border-block-end:0;flex-grow:1;border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--element-align-left .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-left .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-left .elementor-divider__element{margin-left:0}.elementor-widget-divider--element-align-right .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-right .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-right .elementor-divider__element{margin-right:0}.elementor-widget-divider--element-align-start .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-start .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-start .elementor-divider__element{margin-inline-start:0}.elementor-widget-divider--element-align-end .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-end .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-end .elementor-divider__element{margin-inline-end:0}.elementor-widget-divider:not(.elementor-widget-divider--view-line_text):not(.elementor-widget-divider--view-line_icon) .elementor-divider-separator{border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--separator-type-pattern{--divider-border-style:none}.elementor-widget-divider--separator-type-pattern.elementor-widget-divider--view-line .elementor-divider-separator,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:after,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:before,.elementor-widget-divider--separator-type-pattern:not([class*=elementor-widget-divider--view]) .elementor-divider-separator{width:100%;min-height:var(--divider-pattern-height);-webkit-mask-size:var(--divider-pattern-size) 100%;mask-size:var(--divider-pattern-size) 100%;-webkit-mask-repeat:var(--divider-pattern-repeat);mask-repeat:var(--divider-pattern-repeat);background-color:var(--divider-color);-webkit-mask-image:var(--divider-pattern-url);mask-image:var(--divider-pattern-url)}.elementor-widget-divider--no-spacing{--divider-pattern-size:auto}.elementor-widget-divider--bg-round{--divider-pattern-repeat:round}.rtl .elementor-widget-divider .elementor-divider__text{direction:rtl}.e-con-inner>.elementor-widget-divider,.e-con>.elementor-widget-divider{width:var(--container-widget-width,100%);--flex-grow:var(--container-widget-flex-grow)}<\/style>\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-47b8402 elementor-widget elementor-widget-heading\" data-id=\"47b8402\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<div class=\"elementor-heading-title elementor-size-default\">Related Reading<\/div>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0550566 elementor-grid-1 elementor-posts--thumbnail-none elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-widget elementor-widget-posts\" data-id=\"0550566\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-6160 post type-post status-publish format-standard has-post-thumbnail hentry category-application tag-app-silicon-nitride-window\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/en\/insight-2\/application\/what-is-silicon-nitride-thin-film-window\/\" >\n\t\t\t\tScience Guide: Introduction, Principle and Application Scenarios of Silicon Nitride Thin Film Windows\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Science Guide: Introduction, Characteristics and Application Scenarios of Silicon Nitride Thin Film Windows Nitride<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/en\/insight-2\/application\/what-is-silicon-nitride-thin-film-window\/\" aria-label=\"Read more about Science Guide: Silicon Nitride Thin Film Window Introduction, Principle and Application Scenarios\" tabindex=\"-1\" >\n\t\t\tRead More \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7641 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/en\/insight-2\/application\/\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\/\" >\n\t\t\t\tPrinciples and Advantages of Plasma Enhanced Chemical Vapor Deposition (PE-CVD)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Principles and advantages of plasma enhanced chemical vapor deposition (PE-CVD)<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/en\/insight-2\/application\/\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\/\" aria-label=\"Read more about Principles and Advantages of Plasma Enhanced Chemical Vapor Deposition (PE-CVD)\" tabindex=\"-1\" >\n\t\t\tRead More \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-4820 post type-post status-publish format-standard has-post-thumbnail hentry category-application tag-app-silicon-nitride-window\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/en\/insight-2\/application\/materials-science-silicon-nitride-thin-film-window\/\" >\n\t\t\t\tIntroduction of 3 applications of silicon nitride thin film windows in materials science\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>3 Application Scenarios of Silicon Nitride Thin Film Windows in Materials Science Silicon Nitride Thin<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/en\/insight-2\/application\/materials-science-silicon-nitride-thin-film-window\/\" aria-label=\"Read more about An Introduction to 3 Applications of Silicon Nitride Thin Film Windows in Materials Science\" tabindex=\"-1\" >\n\t\t\tRead More \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-eb240b5 elementor-widget elementor-widget-heading\" data-id=\"eb240b5\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title elementor-size-default\"><a href=\"https:\/\/www.nanofab.com.cn\/en\/insights-2\/\">More Related...<\/a><\/p>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>Polycrystalline Silicon Thin Films\u4e28Influencing the Warpage of Silicon Wafers In many cases, stress can introduce many undesired results. Using LPCVD to deposit polysilicon thin films for [...]<\/p>","protected":false},"author":3,"featured_media":7762,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""}},"footnotes":""},"categories":[215],"tags":[],"class_list":["post-7761","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-application"],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v20.0 (Yoast SEO v22.4) - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>\u591a\u6676\u7845\u8584\u819c\u4e28\u5f71\u54cd\u7845\u7247\u7fd8\u66f2\u5ea6\u7684\u5404\u79cd\u539f\u56e0 - \u6e2f\u6e7e\u534a\u5bfc\u4f53<\/title>\n<meta name=\"description\" content=\"\u7531\u4e8e\u8584\u819c\u5236\u5907\u5de5\u827a\u3001\u70ed\u5904\u7406\u8fc7\u7a0b\u548c\u819c\u539a\u8981\u6c42\u7684\u4e0d\u540c\uff0c\u9020\u6210\u8584\u819c\u5185\u90e8\u4e0d\u540c\u7684\u5e94\u529b\u72b6\u6001\uff0c\u6c89\u79ef\u8584\u819c\u7684\u886c\u5e95\u629b\u5149\u540e\u51e0\u4f55\u53c2\u6570\u4e5f\u5177\u6709\u4e0d\u540c\u7684\u5927\u5c0f\u3002\u53ef\u4ee5\u6070\u5f53\u9009\u62e9\u5236\u5907\u8584\u819c\u7684\u5de5\u827a\u6761\u4ef6\u3001\u70ed\u5904\u7406\u8fc7\u7a0b\u5b9e\u73b0\u5bf9\u8584\u819c\u6b8b\u4f59\u5e94\u529b\u7684\u63a7\u5236\uff0c\u540c\u65f6\u6839\u636e\u819c\u539a\u8981\u6c42\u7684\u4e0d\u540c\uff0c\u63a8\u7b97\u51fa\u886c\u5e95\u629b\u5149\u540e\u7fd8\u66f2\u5ea6\u7684\u53d8\u5316\u60c5\u51b5\uff0c\u5bf9\u4ea7\u54c1\u7684\u52a0\u5de5\u80fd\u529b\u8fdb\u884c\u9002\u5f53\u7684\u8bc4\u4f30\u3002\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.nanofab.com.cn\/en\/insight-2\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer-2\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"\u591a\u6676\u7845\u8584\u819c\u4e28\u5f71\u54cd\u7845\u7247\u7fd8\u66f2\u5ea6\u7684\u5404\u79cd\u539f\u56e0\" \/>\n<meta property=\"og:description\" content=\"\u7531\u4e8e\u8584\u819c\u5236\u5907\u5de5\u827a\u3001\u70ed\u5904\u7406\u8fc7\u7a0b\u548c\u819c\u539a\u8981\u6c42\u7684\u4e0d\u540c\uff0c\u9020\u6210\u8584\u819c\u5185\u90e8\u4e0d\u540c\u7684\u5e94\u529b\u72b6\u6001\uff0c\u6c89\u79ef\u8584\u819c\u7684\u886c\u5e95\u629b\u5149\u540e\u51e0\u4f55\u53c2\u6570\u4e5f\u5177\u6709\u4e0d\u540c\u7684\u5927\u5c0f\u3002\u53ef\u4ee5\u6070\u5f53\u9009\u62e9\u5236\u5907\u8584\u819c\u7684\u5de5\u827a\u6761\u4ef6\u3001\u70ed\u5904\u7406\u8fc7\u7a0b\u5b9e\u73b0\u5bf9\u8584\u819c\u6b8b\u4f59\u5e94\u529b\u7684\u63a7\u5236\uff0c\u540c\u65f6\u6839\u636e\u819c\u539a\u8981\u6c42\u7684\u4e0d\u540c\uff0c\u63a8\u7b97\u51fa\u886c\u5e95\u629b\u5149\u540e\u7fd8\u66f2\u5ea6\u7684\u53d8\u5316\u60c5\u51b5\uff0c\u5bf9\u4ea7\u54c1\u7684\u52a0\u5de5\u80fd\u529b\u8fdb\u884c\u9002\u5f53\u7684\u8bc4\u4f30\u3002\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.nanofab.com.cn\/en\/insight-2\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer-2\/\" \/>\n<meta property=\"og:site_name\" content=\"\u6e2f\u6e7e\u534a\u5bfc\u4f53\" \/>\n<meta property=\"article:published_time\" content=\"2024-04-19T08:49:46+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2024-05-13T02:16:53+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/39eab4126e833fe2e5a396e60db9ef0.png\" \/>\n\t<meta property=\"og:image:width\" content=\"780\" \/>\n\t<meta property=\"og:image:height\" content=\"490\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/png\" \/>\n<meta name=\"author\" content=\"jeff5829\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Written by\" \/>\n\t<meta name=\"twitter:data1\" content=\"jeff5829\" \/>\n\t<meta name=\"twitter:label2\" content=\"Est. reading time\" \/>\n\t<meta name=\"twitter:data2\" content=\"1 minute\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"@id\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer\/#article\",\"isPartOf\":{\"@id\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer\/\"},\"author\":{\"name\":\"jeff5829\",\"@id\":\"https:\/\/www.nanofab.com.cn\/#\/schema\/person\/43ad5264cbf98ccd5ec1fbd4f6c3b0e5\"},\"headline\":\"\u591a\u6676\u7845\u8584\u819c\u4e28\u5f71\u54cd\u7845\u7247\u7fd8\u66f2\u5ea6\u7684\u5404\u79cd\u539f\u56e0\",\"datePublished\":\"2024-04-19T08:49:46+00:00\",\"dateModified\":\"2024-05-13T02:16:53+00:00\",\"mainEntityOfPage\":{\"@id\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer\/\"},\"wordCount\":9,\"commentCount\":0,\"publisher\":{\"@id\":\"https:\/\/www.nanofab.com.cn\/#organization\"},\"image\":{\"@id\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer\/#primaryimage\"},\"thumbnailUrl\":\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/39eab4126e833fe2e5a396e60db9ef0.png\",\"articleSection\":[\"\u5e94\u7528\"],\"inLanguage\":\"en-US\",\"potentialAction\":[{\"@type\":\"CommentAction\",\"name\":\"Comment\",\"target\":[\"https:\/\/www.nanofab.com.cn\/insight\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer\/#respond\"]}]},{\"@type\":\"WebPage\",\"@id\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer\/\",\"url\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer\/\",\"name\":\"\u591a\u6676\u7845\u8584\u819c\u4e28\u5f71\u54cd\u7845\u7247\u7fd8\u66f2\u5ea6\u7684\u5404\u79cd\u539f\u56e0 - \u6e2f\u6e7e\u534a\u5bfc\u4f53\",\"isPartOf\":{\"@id\":\"https:\/\/www.nanofab.com.cn\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer\/#primaryimage\"},\"image\":{\"@id\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer\/#primaryimage\"},\"thumbnailUrl\":\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/39eab4126e833fe2e5a396e60db9ef0.png\",\"datePublished\":\"2024-04-19T08:49:46+00:00\",\"dateModified\":\"2024-05-13T02:16:53+00:00\",\"description\":\"\u7531\u4e8e\u8584\u819c\u5236\u5907\u5de5\u827a\u3001\u70ed\u5904\u7406\u8fc7\u7a0b\u548c\u819c\u539a\u8981\u6c42\u7684\u4e0d\u540c\uff0c\u9020\u6210\u8584\u819c\u5185\u90e8\u4e0d\u540c\u7684\u5e94\u529b\u72b6\u6001\uff0c\u6c89\u79ef\u8584\u819c\u7684\u886c\u5e95\u629b\u5149\u540e\u51e0\u4f55\u53c2\u6570\u4e5f\u5177\u6709\u4e0d\u540c\u7684\u5927\u5c0f\u3002\u53ef\u4ee5\u6070\u5f53\u9009\u62e9\u5236\u5907\u8584\u819c\u7684\u5de5\u827a\u6761\u4ef6\u3001\u70ed\u5904\u7406\u8fc7\u7a0b\u5b9e\u73b0\u5bf9\u8584\u819c\u6b8b\u4f59\u5e94\u529b\u7684\u63a7\u5236\uff0c\u540c\u65f6\u6839\u636e\u819c\u539a\u8981\u6c42\u7684\u4e0d\u540c\uff0c\u63a8\u7b97\u51fa\u886c\u5e95\u629b\u5149\u540e\u7fd8\u66f2\u5ea6\u7684\u53d8\u5316\u60c5\u51b5\uff0c\u5bf9\u4ea7\u54c1\u7684\u52a0\u5de5\u80fd\u529b\u8fdb\u884c\u9002\u5f53\u7684\u8bc4\u4f30\u3002\",\"breadcrumb\":{\"@id\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer\/#breadcrumb\"},\"inLanguage\":\"en-US\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/www.nanofab.com.cn\/insight\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"en-US\",\"@id\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer\/#primaryimage\",\"url\":\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/39eab4126e833fe2e5a396e60db9ef0.png\",\"contentUrl\":\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/39eab4126e833fe2e5a396e60db9ef0.png\",\"width\":780,\"height\":490},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/www.nanofab.com.cn\/insight\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"\u9996\u9875\",\"item\":\"https:\/\/www.nanofab.com.cn\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"\u591a\u6676\u7845\u8584\u819c\u4e28\u5f71\u54cd\u7845\u7247\u7fd8\u66f2\u5ea6\u7684\u5404\u79cd\u539f\u56e0\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/www.nanofab.com.cn\/#website\",\"url\":\"https:\/\/www.nanofab.com.cn\/\",\"name\":\"Harbour\u6e2f\u6e7e\u534a\u5bfc\u4f53\",\"description\":\"Greater China\",\"publisher\":{\"@id\":\"https:\/\/www.nanofab.com.cn\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/www.nanofab.com.cn\/?s={search_term_string}\"},\"query-input\":\"required name=search_term_string\"}],\"inLanguage\":\"en-US\"},{\"@type\":\"Organization\",\"@id\":\"https:\/\/www.nanofab.com.cn\/#organization\",\"name\":\"\u6e2f\u6e7e\u534a\u5bfc\u4f53\",\"url\":\"https:\/\/www.nanofab.com.cn\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"en-US\",\"@id\":\"https:\/\/www.nanofab.com.cn\/#\/schema\/logo\/image\/\",\"url\":\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/cropped-cropped-cropped-\u6e2f\u6e7e\u534a\u5bfc\u4f53-logo.png\",\"contentUrl\":\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/cropped-cropped-cropped-\u6e2f\u6e7e\u534a\u5bfc\u4f53-logo.png\",\"width\":380,\"height\":60,\"caption\":\"\u6e2f\u6e7e\u534a\u5bfc\u4f53\"},\"image\":{\"@id\":\"https:\/\/www.nanofab.com.cn\/#\/schema\/logo\/image\/\"}},{\"@type\":\"Person\",\"@id\":\"https:\/\/www.nanofab.com.cn\/#\/schema\/person\/43ad5264cbf98ccd5ec1fbd4f6c3b0e5\",\"name\":\"jeff5829\",\"image\":{\"@type\":\"ImageObject\",\"inLanguage\":\"en-US\",\"@id\":\"https:\/\/www.nanofab.com.cn\/#\/schema\/person\/image\/\",\"url\":\"https:\/\/secure.gravatar.com\/avatar\/07276a17cfc0fa45dca16dd680ca6060143a60e8f4bd15c2584de1fdcec39601?s=96&d=mm&r=g\",\"contentUrl\":\"https:\/\/secure.gravatar.com\/avatar\/07276a17cfc0fa45dca16dd680ca6060143a60e8f4bd15c2584de1fdcec39601?s=96&d=mm&r=g\",\"caption\":\"jeff5829\"},\"url\":\"https:\/\/www.nanofab.com.cn\/en\/author\/jeff5829\/\"}]}<\/script>\n<!-- \/ Yoast SEO Premium plugin. -->","yoast_head_json":{"title":"\u591a\u6676\u7845\u8584\u819c\u4e28\u5f71\u54cd\u7845\u7247\u7fd8\u66f2\u5ea6\u7684\u5404\u79cd\u539f\u56e0 - \u6e2f\u6e7e\u534a\u5bfc\u4f53","description":"\u7531\u4e8e\u8584\u819c\u5236\u5907\u5de5\u827a\u3001\u70ed\u5904\u7406\u8fc7\u7a0b\u548c\u819c\u539a\u8981\u6c42\u7684\u4e0d\u540c\uff0c\u9020\u6210\u8584\u819c\u5185\u90e8\u4e0d\u540c\u7684\u5e94\u529b\u72b6\u6001\uff0c\u6c89\u79ef\u8584\u819c\u7684\u886c\u5e95\u629b\u5149\u540e\u51e0\u4f55\u53c2\u6570\u4e5f\u5177\u6709\u4e0d\u540c\u7684\u5927\u5c0f\u3002\u53ef\u4ee5\u6070\u5f53\u9009\u62e9\u5236\u5907\u8584\u819c\u7684\u5de5\u827a\u6761\u4ef6\u3001\u70ed\u5904\u7406\u8fc7\u7a0b\u5b9e\u73b0\u5bf9\u8584\u819c\u6b8b\u4f59\u5e94\u529b\u7684\u63a7\u5236\uff0c\u540c\u65f6\u6839\u636e\u819c\u539a\u8981\u6c42\u7684\u4e0d\u540c\uff0c\u63a8\u7b97\u51fa\u886c\u5e95\u629b\u5149\u540e\u7fd8\u66f2\u5ea6\u7684\u53d8\u5316\u60c5\u51b5\uff0c\u5bf9\u4ea7\u54c1\u7684\u52a0\u5de5\u80fd\u529b\u8fdb\u884c\u9002\u5f53\u7684\u8bc4\u4f30\u3002","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.nanofab.com.cn\/en\/insight-2\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer-2\/","og_locale":"en_US","og_type":"article","og_title":"\u591a\u6676\u7845\u8584\u819c\u4e28\u5f71\u54cd\u7845\u7247\u7fd8\u66f2\u5ea6\u7684\u5404\u79cd\u539f\u56e0","og_description":"\u7531\u4e8e\u8584\u819c\u5236\u5907\u5de5\u827a\u3001\u70ed\u5904\u7406\u8fc7\u7a0b\u548c\u819c\u539a\u8981\u6c42\u7684\u4e0d\u540c\uff0c\u9020\u6210\u8584\u819c\u5185\u90e8\u4e0d\u540c\u7684\u5e94\u529b\u72b6\u6001\uff0c\u6c89\u79ef\u8584\u819c\u7684\u886c\u5e95\u629b\u5149\u540e\u51e0\u4f55\u53c2\u6570\u4e5f\u5177\u6709\u4e0d\u540c\u7684\u5927\u5c0f\u3002\u53ef\u4ee5\u6070\u5f53\u9009\u62e9\u5236\u5907\u8584\u819c\u7684\u5de5\u827a\u6761\u4ef6\u3001\u70ed\u5904\u7406\u8fc7\u7a0b\u5b9e\u73b0\u5bf9\u8584\u819c\u6b8b\u4f59\u5e94\u529b\u7684\u63a7\u5236\uff0c\u540c\u65f6\u6839\u636e\u819c\u539a\u8981\u6c42\u7684\u4e0d\u540c\uff0c\u63a8\u7b97\u51fa\u886c\u5e95\u629b\u5149\u540e\u7fd8\u66f2\u5ea6\u7684\u53d8\u5316\u60c5\u51b5\uff0c\u5bf9\u4ea7\u54c1\u7684\u52a0\u5de5\u80fd\u529b\u8fdb\u884c\u9002\u5f53\u7684\u8bc4\u4f30\u3002","og_url":"https:\/\/www.nanofab.com.cn\/en\/insight-2\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer-2\/","og_site_name":"\u6e2f\u6e7e\u534a\u5bfc\u4f53","article_published_time":"2024-04-19T08:49:46+00:00","article_modified_time":"2024-05-13T02:16:53+00:00","og_image":[{"width":780,"height":490,"url":"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/39eab4126e833fe2e5a396e60db9ef0.png","type":"image\/png"}],"author":"jeff5829","twitter_card":"summary_large_image","twitter_misc":{"Written by":"jeff5829","Est. reading time":"1 minute"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"Article","@id":"https:\/\/www.nanofab.com.cn\/insight\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer\/#article","isPartOf":{"@id":"https:\/\/www.nanofab.com.cn\/insight\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer\/"},"author":{"name":"jeff5829","@id":"https:\/\/www.nanofab.com.cn\/#\/schema\/person\/43ad5264cbf98ccd5ec1fbd4f6c3b0e5"},"headline":"\u591a\u6676\u7845\u8584\u819c\u4e28\u5f71\u54cd\u7845\u7247\u7fd8\u66f2\u5ea6\u7684\u5404\u79cd\u539f\u56e0","datePublished":"2024-04-19T08:49:46+00:00","dateModified":"2024-05-13T02:16:53+00:00","mainEntityOfPage":{"@id":"https:\/\/www.nanofab.com.cn\/insight\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer\/"},"wordCount":9,"commentCount":0,"publisher":{"@id":"https:\/\/www.nanofab.com.cn\/#organization"},"image":{"@id":"https:\/\/www.nanofab.com.cn\/insight\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer\/#primaryimage"},"thumbnailUrl":"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/39eab4126e833fe2e5a396e60db9ef0.png","articleSection":["\u5e94\u7528"],"inLanguage":"en-US","potentialAction":[{"@type":"CommentAction","name":"Comment","target":["https:\/\/www.nanofab.com.cn\/insight\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer\/#respond"]}]},{"@type":"WebPage","@id":"https:\/\/www.nanofab.com.cn\/insight\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer\/","url":"https:\/\/www.nanofab.com.cn\/insight\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer\/","name":"\u591a\u6676\u7845\u8584\u819c\u4e28\u5f71\u54cd\u7845\u7247\u7fd8\u66f2\u5ea6\u7684\u5404\u79cd\u539f\u56e0 - \u6e2f\u6e7e\u534a\u5bfc\u4f53","isPartOf":{"@id":"https:\/\/www.nanofab.com.cn\/#website"},"primaryImageOfPage":{"@id":"https:\/\/www.nanofab.com.cn\/insight\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer\/#primaryimage"},"image":{"@id":"https:\/\/www.nanofab.com.cn\/insight\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer\/#primaryimage"},"thumbnailUrl":"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/39eab4126e833fe2e5a396e60db9ef0.png","datePublished":"2024-04-19T08:49:46+00:00","dateModified":"2024-05-13T02:16:53+00:00","description":"\u7531\u4e8e\u8584\u819c\u5236\u5907\u5de5\u827a\u3001\u70ed\u5904\u7406\u8fc7\u7a0b\u548c\u819c\u539a\u8981\u6c42\u7684\u4e0d\u540c\uff0c\u9020\u6210\u8584\u819c\u5185\u90e8\u4e0d\u540c\u7684\u5e94\u529b\u72b6\u6001\uff0c\u6c89\u79ef\u8584\u819c\u7684\u886c\u5e95\u629b\u5149\u540e\u51e0\u4f55\u53c2\u6570\u4e5f\u5177\u6709\u4e0d\u540c\u7684\u5927\u5c0f\u3002\u53ef\u4ee5\u6070\u5f53\u9009\u62e9\u5236\u5907\u8584\u819c\u7684\u5de5\u827a\u6761\u4ef6\u3001\u70ed\u5904\u7406\u8fc7\u7a0b\u5b9e\u73b0\u5bf9\u8584\u819c\u6b8b\u4f59\u5e94\u529b\u7684\u63a7\u5236\uff0c\u540c\u65f6\u6839\u636e\u819c\u539a\u8981\u6c42\u7684\u4e0d\u540c\uff0c\u63a8\u7b97\u51fa\u886c\u5e95\u629b\u5149\u540e\u7fd8\u66f2\u5ea6\u7684\u53d8\u5316\u60c5\u51b5\uff0c\u5bf9\u4ea7\u54c1\u7684\u52a0\u5de5\u80fd\u529b\u8fdb\u884c\u9002\u5f53\u7684\u8bc4\u4f30\u3002","breadcrumb":{"@id":"https:\/\/www.nanofab.com.cn\/insight\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer\/#breadcrumb"},"inLanguage":"en-US","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.nanofab.com.cn\/insight\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer\/"]}]},{"@type":"ImageObject","inLanguage":"en-US","@id":"https:\/\/www.nanofab.com.cn\/insight\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer\/#primaryimage","url":"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/39eab4126e833fe2e5a396e60db9ef0.png","contentUrl":"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/39eab4126e833fe2e5a396e60db9ef0.png","width":780,"height":490},{"@type":"BreadcrumbList","@id":"https:\/\/www.nanofab.com.cn\/insight\/application\/the-reason-of-influencing-the-warping-degree-of-silicon-wafer\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"\u9996\u9875","item":"https:\/\/www.nanofab.com.cn\/"},{"@type":"ListItem","position":2,"name":"\u591a\u6676\u7845\u8584\u819c\u4e28\u5f71\u54cd\u7845\u7247\u7fd8\u66f2\u5ea6\u7684\u5404\u79cd\u539f\u56e0"}]},{"@type":"WebSite","@id":"https:\/\/www.nanofab.com.cn\/#website","url":"https:\/\/www.nanofab.com.cn\/","name":"Harbour\u6e2f\u6e7e\u534a\u5bfc\u4f53","description":"Greater China","publisher":{"@id":"https:\/\/www.nanofab.com.cn\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.nanofab.com.cn\/?s={search_term_string}"},"query-input":"required name=search_term_string"}],"inLanguage":"en-US"},{"@type":"Organization","@id":"https:\/\/www.nanofab.com.cn\/#organization","name":"\u6e2f\u6e7e\u534a\u5bfc\u4f53","url":"https:\/\/www.nanofab.com.cn\/","logo":{"@type":"ImageObject","inLanguage":"en-US","@id":"https:\/\/www.nanofab.com.cn\/#\/schema\/logo\/image\/","url":"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/cropped-cropped-cropped-\u6e2f\u6e7e\u534a\u5bfc\u4f53-logo.png","contentUrl":"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/cropped-cropped-cropped-\u6e2f\u6e7e\u534a\u5bfc\u4f53-logo.png","width":380,"height":60,"caption":"\u6e2f\u6e7e\u534a\u5bfc\u4f53"},"image":{"@id":"https:\/\/www.nanofab.com.cn\/#\/schema\/logo\/image\/"}},{"@type":"Person","@id":"https:\/\/www.nanofab.com.cn\/#\/schema\/person\/43ad5264cbf98ccd5ec1fbd4f6c3b0e5","name":"jeff5829","image":{"@type":"ImageObject","inLanguage":"en-US","@id":"https:\/\/www.nanofab.com.cn\/#\/schema\/person\/image\/","url":"https:\/\/secure.gravatar.com\/avatar\/07276a17cfc0fa45dca16dd680ca6060143a60e8f4bd15c2584de1fdcec39601?s=96&d=mm&r=g","contentUrl":"https:\/\/secure.gravatar.com\/avatar\/07276a17cfc0fa45dca16dd680ca6060143a60e8f4bd15c2584de1fdcec39601?s=96&d=mm&r=g","caption":"jeff5829"},"url":"https:\/\/www.nanofab.com.cn\/en\/author\/jeff5829\/"}]}},"_links":{"self":[{"href":"https:\/\/www.nanofab.com.cn\/en\/wp-json\/wp\/v2\/posts\/7761","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.nanofab.com.cn\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.nanofab.com.cn\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.nanofab.com.cn\/en\/wp-json\/wp\/v2\/users\/3"}],"replies":[{"embeddable":true,"href":"https:\/\/www.nanofab.com.cn\/en\/wp-json\/wp\/v2\/comments?post=7761"}],"version-history":[{"count":5,"href":"https:\/\/www.nanofab.com.cn\/en\/wp-json\/wp\/v2\/posts\/7761\/revisions"}],"predecessor-version":[{"id":7767,"href":"https:\/\/www.nanofab.com.cn\/en\/wp-json\/wp\/v2\/posts\/7761\/revisions\/7767"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.nanofab.com.cn\/en\/wp-json\/wp\/v2\/media\/7762"}],"wp:attachment":[{"href":"https:\/\/www.nanofab.com.cn\/en\/wp-json\/wp\/v2\/media?parent=7761"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.nanofab.com.cn\/en\/wp-json\/wp\/v2\/categories?post=7761"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.nanofab.com.cn\/en\/wp-json\/wp\/v2\/tags?post=7761"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}