Difference between LPCVD and PECVD
Difference between LPCVD and PECVD By operating at high temperatures in a low-pressure environment, L
Multifunctional Positron Spectrometer HS-POS
HS-POS is a multifunctional materials characterization system that integrates advanced positron annihilation technology with dual-mode measurements of Positron Annihilation Lifetime Spectroscopy (PALS) and Compliance Doppler Broadening Spectroscopy (CDBS), providing non-destructive sub-nanometer defects and electronic structure analyses for the materials science, physical chemistry, and engineering fields.
Positron Annihilation Lifetime Spectrum (PALS)
Accurately measure the annihilation lifetime of positrons in materials (~100 ps-10 ns) and quantitatively characterize the concentration, size, and distribution of vacancy-type defects (single vacancies, vacancy clusters, micropores). Applicable to a wide range of systems including crystalline, amorphous, polymer, and nanomaterials with sub-nanometer resolution. Compliant with Doppler broadening spectrum (CDBS)
Through the dual-detector conformal measurement technique, the high signal-to-noise annihilation photon energy broadening spectrum is obtained, and the electronic momentum distribution near the Fermi energy level of the material is analyzed. Element-specific defects (e.g., impurity-vacancy complexes) can be identified, realizing high-sensitivity detection of chemical environment and electronic structure.
Semiconductor materials: irradiation defects in wafers, dopant-vacancy complex analysis, characterization of interfacial defects in power devices.
Metals and alloys: fatigue/irradiation/deformation-induced vacancy evolution mechanism study, early diagnosis of creep damage in high-temperature alloys.
Energy materials: lithium ion embedding/de-embedding defects in electrode materials for lithium ion batteries, helium bubble behavior monitoring of fusion reactor materials (e.g., tungsten).
Nano and porous materials: nanoparticle size distribution and surface active site analysis.
Polymers and biomaterials: tracing the microscopic aging process of biodegradable materials.
Time resolution: Lifetime measurement time resolution ≤ 155ps (Co-60 transient peak, Na-22 window condition FWHM).
Detector energy resolution: Lifetime measurement (Na-22 source): ≤12% (1.275MeV peak); high-purity germanium detector (Co-60 source): ≤1.90keV (1.332MeV peak).
Data acquisition performance: life measurement time sampling rate ≥ 5G / SPS; amplitude resolution ≥ 14 bits; life measurement count rate ≥ 100cps; high-purity germanium detector efficiency: ≥ 25%.
Automated process: One-button operation starts a fully automated measurement process, the system intelligently matches the optimal parameters and performs automatic calibration.
Spectrum stabilization performance: real-time correction of the energy spectrum drift of long-time measurement, verified by Co-60 radioactive source (1.332MeV peak), the drift rate ≤ 0.01%/h.
Multi-mode display system: support linear/logarithmic coordinate system switching; can independently display dual-detector energy spectrum, synchronized display of energy spectrum and lifetime spectrum multi-window view.
Intelligent spectrum analysis function: complete recording of spectrum information (start time, measurement duration, dead time, total counts); accurate setting of ROI boundaries, automatic peak searching and calculation of peak position, half-height and full width, and ROI area; based on the Gaussian fitting algorithm to solve the peak parameters.
Material Defect and Free Volume Analysis: Supports defect state capture rate measurements for metal/semiconductor materials, and characterization of free volume radius and free volume fraction for polymers.
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Difference between LPCVD and PECVD By operating at high temperatures in a low-pressure environment, L
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