{"id":7931,"date":"2024-05-27T17:11:02","date_gmt":"2024-05-27T09:11:02","guid":{"rendered":"https:\/\/www.nanofab.com.cn\/?p=7931"},"modified":"2024-05-27T17:13:59","modified_gmt":"2024-05-27T09:13:59","slug":"ald-preparation-of-tin-film","status":"publish","type":"post","link":"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/ald-aufbereitung-von-zinn-film-2\/","title":{"rendered":"Herstellung von d\u00fcnnen Schichten aus Titannitrid (TIN) durch ALD-Verfahren"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"7931\" class=\"elementor elementor-7931\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-5a34f4f elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"5a34f4f\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-daa1ff7\" data-id=\"daa1ff7\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-683559d elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"683559d\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-dfe18ed\" data-id=\"dfe18ed\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-7539ab8 elementor-widget elementor-widget-heading\" data-id=\"7539ab8\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\">Herstellung von Titannitrid (TiN)-D\u00fcnnschichten durch ALD-Verfahren<\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f29998b elementor-widget elementor-widget-post-info\" data-id=\"f29998b\" data-element_type=\"widget\" data-widget_type=\"post-info.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor\/assets\/css\/widget-icon-list.min.css\"><link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-theme-elements.min.css\">\t\t<ul class=\"elementor-icon-list-items elementor-post-info\">\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-repeater-item-577f4c4\" itemprop=\"datePublished\">\n\t\t\t\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/2024\/05\/27\/\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text elementor-post-info__item elementor-post-info__item--type-date\">\n\t\t\t\t\t\t\t\t\t\t<time>2024-05-27<\/time>\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/li>\n\t\t\t\t<\/ul>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-be3cfa7 elementor-widget elementor-widget-image\" data-id=\"be3cfa7\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-image{text-align:center}.elementor-widget-image a{display:inline-block}.elementor-widget-image a img[src$=\".svg\"]{width:48px}.elementor-widget-image img{vertical-align:middle;display:inline-block}<\/style>\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"728\" height=\"560\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/05\/4c95716e2e2c943d095b1a2779b34ae.png\" class=\"attachment-large size-large wp-image-7932\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/05\/4c95716e2e2c943d095b1a2779b34ae.png 728w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/05\/4c95716e2e2c943d095b1a2779b34ae-300x231.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/05\/4c95716e2e2c943d095b1a2779b34ae-16x12.png 16w\" sizes=\"(max-width: 728px) 100vw, 728px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7c34566 elementor-widget elementor-widget-text-editor\" data-id=\"7c34566\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p>passieren (eine Rechnung oder Inspektion etc.)<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/was-ist-atomlagenabscheidung\/\">Verfahren der Atomlagenabscheidung (ALD)<\/a>vorbereitet<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/eigenschaften-und-anwendungen-von-titannitrid\/\">D\u00fcnne Schichten aus Titannitrid (TiN)<\/a>TiN-Schichten haben eine hohe H\u00e4rte, ausgezeichnete Verschlei\u00dffestigkeit, hohe Korrosionsbest\u00e4ndigkeit, einen niedrigen Reibungskoeffizienten, hohe Temperaturstabilit\u00e4t, elektrische Leitf\u00e4higkeit, ausgezeichnete Biokompatibilit\u00e4t und \u00e4sthetisch ansprechende dekorative Eigenschaften. Diese hervorragenden Eigenschaften haben dazu gef\u00fchrt, dass TiN-Schichten in einer Vielzahl von Bereichen wie der maschinellen Bearbeitung, der Elektronik und Halbleiterindustrie, der Dekoration, der Biomedizin, der Optik und der Luft- und Raumfahrt eingesetzt werden. Das ALD-Verfahren hat zwar den Nachteil geringerer Abscheidungsraten und h\u00f6herer Ausr\u00fcstungskosten, seine Vorteile bei der Herstellung hochwertiger TiN-Schichten sind jedoch un\u00fcbertroffen.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-34131de elementor-widget elementor-widget-heading\" data-id=\"34131de\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Eigenschaften von Titannitridschichten<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-369f6af elementor-widget elementor-widget-text-editor\" data-id=\"369f6af\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<ul><li>Hohe H\u00e4rte: TiN-Schichten haben eine Vickers-H\u00e4rte von ca. 1800-2100 HV und bieten eine hervorragende Verschlei\u00dffestigkeit.<\/li><li>Hervorragende Verschlei\u00dffestigkeit: TiN-Schichten verbessern die Verschlei\u00dffestigkeit des Substrats in Umgebungen mit hoher Reibung und hohem Verschlei\u00df erheblich.<\/li><li>Hohe Korrosionsbest\u00e4ndigkeit: TiN-Schichten haben eine gute Best\u00e4ndigkeit gegen viele Chemikalien, insbesondere in sauren und alkalischen Umgebungen.<\/li><li>Niedriger Reibungskoeffizient: Der Reibungskoeffizient betr\u00e4gt etwa 0,4-0,6, was zur Verringerung des Verschlei\u00dfes und zur Verbesserung der Schmierung beitr\u00e4gt.<\/li><li>Hochtemperaturstabilit\u00e4t: TiN-Schichten weisen eine gute chemische und physikalische Stabilit\u00e4t bei hohen Temperaturen auf und k\u00f6nnen Temperaturen von bis zu 600-800 \u00b0C standhalten.<\/li><li>Elektrische Leitf\u00e4higkeit: TiN-Schichten haben eine gute elektrische Leitf\u00e4higkeit mit einem spezifischen Widerstand von etwa 25-30 \u03bc\u03a9-cm.<\/li><li>Ausgezeichnete Biokompatibilit\u00e4t: TiN-Schichten sind ungiftig und biokompatibel und eignen sich daher f\u00fcr biomedizinische Beschichtungen.<\/li><li>Dekorativ: TiN-Folie hat einen goldgelben Glanz und verblasst nicht leicht; sie wird h\u00e4ufig f\u00fcr dekorative Beschichtungen verwendet.<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-bce64f2 elementor-widget elementor-widget-heading\" data-id=\"bce64f2\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Verfahren der Atomlagenabscheidung (ALD)<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7737c9a elementor-widget elementor-widget-text-editor\" data-id=\"7737c9a\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Die Atomlagenabscheidung (Atomic Layer Deposition, ALD) ist ein Verfahren zur Abscheidung d\u00fcnner Schichten, das auf einer selbstbegrenzenden chemischen Reaktion beruht, bei der die Dicke und die Zusammensetzung der Schicht durch die schrittweise Einf\u00fchrung von Vorl\u00e4ufergasen genau gesteuert wird.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-18ce9b5 elementor-widget elementor-widget-text-editor\" data-id=\"18ce9b5\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p><strong>Prozessschritte f\u00fcr die Herstellung von TiN-D\u00fcnnschichten durch ALD<\/strong><\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d09cb45 elementor-widget elementor-widget-text-editor\" data-id=\"d09cb45\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>1) Sauberkeit der Substratoberfl\u00e4che: Stellen Sie sicher, dass die Oberfl\u00e4che des Substrats sauber und frei von organischen Stoffen und Oxyden ist.<\/p><p>2) Einf\u00fchrung von Vorl\u00e4ufern: Abwechselnde Einf\u00fchrung von Titanvorl\u00e4ufern und Stickstoffvorl\u00e4ufergasen.<\/p><ul><li>H\u00e4ufig verwendete Titanvorl\u00e4ufer: Titantetrachlorid (TiCl\u2084), Titantetraisopropoxid (Ti(OiPr)\u2084).<\/li><li>H\u00e4ufig verwendete Stickstoffvorl\u00e4ufer: Ammoniak (NH\u2083), Stickstoff (N\u2082).<\/li><\/ul><p>3. die Reaktionsschritte:<\/p><ul><li>Adsorption von Titanvorl\u00e4ufern: Titanvorl\u00e4ufer werden bei einer bestimmten Temperatur in die Reaktionskammer eingebracht, um an der Oberfl\u00e4che des Substrats zu adsorbieren.<\/li><li>Sp\u00fclen: Sp\u00fclen mit einem Inertgas (z. B. Stickstoff), um \u00fcbersch\u00fcssige Titanvorl\u00e4ufer und Nebenprodukte zu entfernen.<\/li><li>Stickstoffvorl\u00e4uferreaktion: Der Stickstoffvorl\u00e4ufer wird eingef\u00fchrt und reagiert mit dem auf der Oberfl\u00e4che des Substrats adsorbierten Titanvorl\u00e4ufer, um einen Titannitridfilm zu bilden.<\/li><li>Erneut sp\u00fclen: Mit Inertgas sp\u00fclen, um \u00fcbersch\u00fcssige Stickstoffvorl\u00e4ufer und Nebenprodukte zu entfernen.<\/li><\/ul><p>4. zyklische Abscheidung: Wiederholung der oben genannten Schritte, Schicht f\u00fcr Schicht, bis die gew\u00fcnschte Schichtdicke erreicht ist.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4c78ba1 elementor-widget elementor-widget-text-editor\" data-id=\"4c78ba1\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p><strong>Blickwinkel<\/strong><\/p><ul><li>Pr\u00e4zise Kontrolle der Schichtdicke: Pro Reaktion wird nur eine atomare Schicht abgeschieden, was eine pr\u00e4zise Kontrolle der Schichtdicke erm\u00f6glicht.<\/li><li>Hohe Gleichm\u00e4\u00dfigkeit: Die Folie wird gleichm\u00e4\u00dfig \u00fcber komplexe Formen und gro\u00dfe Substrate verteilt.<\/li><li>Niedertemperaturverfahren: Niedrigere Abscheidungstemperatur, geeignet f\u00fcr temperaturempfindliche Substrate.<\/li><li>Hochwertige Folie: dichte Folie, hohe Reinheit, wenige Fehler.<\/li><\/ul><p><strong>Nachteile<\/strong><\/p><ul><li>Geringe Abscheiderate: Pro Zyklus wird nur eine Atomschicht abgeschieden, und die Abscheiderate ist insgesamt langsam.<\/li><li>Komplexe und kostspielige Ausr\u00fcstung: Eine pr\u00e4zise Steuerung von Gasfluss und Temperatur ist erforderlich, und die Kosten f\u00fcr die Ausr\u00fcstung sind hoch.<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-fb950b8 elementor-widget elementor-widget-text-editor\" data-id=\"fb950b8\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Wir bieten <a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\">Atomlagenabscheidung (ALD) OEM-Anpassungsdienste<\/a>k\u00f6nnen Sie gerne einen Kommentar hinterlassen.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5141357 uael-mobile-wpf-button-justify uael-wpf-style-box uael-wpf-input-size-sm uael-wpf-button-left uael-wpf-btn-size-sm uael-wpf-highlight-style-default elementor-widget elementor-widget-uael-wpf-styler\" data-id=\"5141357\" data-element_type=\"widget\" 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href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-posts.min.css\">\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7386 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img decoding=\"async\" width=\"300\" height=\"195\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png\" class=\"attachment-medium size-medium wp-image-7388\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8.png 640w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" >\n\t\t\t\tSubstitutionsverfahren durch Atomlagenabscheidung (ALD)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" aria-label=\"Lesen Sie mehr \u00fcber Atomic Layer Deposition (ALD) Foundry Processing\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7344 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png\" class=\"attachment-medium size-medium wp-image-7347\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1024x684.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-768x513.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1536x1025.png 1536w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/f394ed96-eaca-40cc-83f6-ebadaea95553-qlt2nzpy27w47wpv9hvjdczv85dnqtqc8q83uvppb4.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553.png 1600w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" >\n\t\t\t\tChemical Vapour Deposition (CVD) Generation Processing\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" aria-label=\"Lesen Sie mehr \u00fcber Chemical Vapour Deposition (CVD) Subcontracting\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7355 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png\" class=\"attachment-medium size-medium wp-image-7357\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-1024x683.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-768x512.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-qlti2lfsi53oh54jrq611wpt5lt6dogutrcqlbec0w.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932.png 1508w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" >\n\t\t\t\tPhysikalische Abscheidung aus der Gasphase (PVD) - Generative Verarbeitung\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" aria-label=\"Lesen Sie mehr \u00fcber Physical Vapour Deposition (PVD) Subcontracting\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-577bb45 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"577bb45\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-divider{--divider-border-style:none;--divider-border-width:1px;--divider-color:#0c0d0e;--divider-icon-size:20px;--divider-element-spacing:10px;--divider-pattern-height:24px;--divider-pattern-size:20px;--divider-pattern-url:none;--divider-pattern-repeat:repeat-x}.elementor-widget-divider .elementor-divider{display:flex}.elementor-widget-divider .elementor-divider__text{font-size:15px;line-height:1;max-width:95%}.elementor-widget-divider .elementor-divider__element{margin:0 var(--divider-element-spacing);flex-shrink:0}.elementor-widget-divider .elementor-icon{font-size:var(--divider-icon-size)}.elementor-widget-divider .elementor-divider-separator{display:flex;margin:0;direction:ltr}.elementor-widget-divider--view-line_icon .elementor-divider-separator,.elementor-widget-divider--view-line_text .elementor-divider-separator{align-items:center}.elementor-widget-divider--view-line_icon .elementor-divider-separator:after,.elementor-widget-divider--view-line_icon 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100%;-webkit-mask-repeat:var(--divider-pattern-repeat);mask-repeat:var(--divider-pattern-repeat);background-color:var(--divider-color);-webkit-mask-image:var(--divider-pattern-url);mask-image:var(--divider-pattern-url)}.elementor-widget-divider--no-spacing{--divider-pattern-size:auto}.elementor-widget-divider--bg-round{--divider-pattern-repeat:round}.rtl .elementor-widget-divider .elementor-divider__text{direction:rtl}.e-con-inner>.elementor-widget-divider,.e-con>.elementor-widget-divider{width:var(--container-widget-width,100%);--flex-grow:var(--container-widget-flex-grow)}<\/style>\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ef4780f elementor-widget elementor-widget-heading\" data-id=\"ef4780f\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<div class=\"elementor-heading-title elementor-size-default\">Verwandte Lekt\u00fcre<\/div>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-343e6b1 elementor-grid-1 elementor-posts--thumbnail-none elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-widget elementor-widget-posts\" data-id=\"343e6b1\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7790 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/\u7535\u5b50\u675f\u84b8\u53d1\u9540\u4e8c\u6c27\u5316\u7845\u8584\u819c\u6709\u4ec0\u4e48\u7279\u6027\u4e0e\u5e94\u7528-2\/\" >\n\t\t\t\tWelche Eigenschaften und Anwendungen haben elektronenstrahlbedampfte Siliziumdioxidschichten?\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Welche Eigenschaften und Anwendungen haben Siliziumdioxidschichten, die durch Elektronenstrahlverdampfung hergestellt werden? Dioxid<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/\u7535\u5b50\u675f\u84b8\u53d1\u9540\u4e8c\u6c27\u5316\u7845\u8584\u819c\u6709\u4ec0\u4e48\u7279\u6027\u4e0e\u5e94\u7528-2\/\" aria-label=\"Lesen Sie mehr \u00fcber Welche Eigenschaften und Anwendungen haben elektronenstrahlbedampfte Siliciumdioxidschichten?\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-8054 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/auswirkung-des-gluhprozesses-auf-die-platinbestandigkeit\/\" >\n\t\t\t\tEinfluss des Gl\u00fchverfahrens auf die Platinbest\u00e4ndigkeit\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Einfluss des Gl\u00fchprozesses auf Platinwiderst\u00e4nde Im Bereich der hochpr\u00e4zisen Temperaturmessung werden D\u00fcnnschichtwiderst\u00e4nde<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/auswirkung-des-gluhprozesses-auf-die-platinbestandigkeit\/\" aria-label=\"Lesen Sie mehr \u00fcber die Auswirkung des Gl\u00fchprozesses auf Platinwiderst\u00e4nde\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7324 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/was-ist-die-chemische-gasphasenabscheidung\/\" >\n\t\t\t\tChemische Abscheidung aus der Gasphase (CVD) - Klassifizierung, Merkmale und Anwendungen\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Chemische Gasphasenabscheidung (CVD) Klassifizierung, Merkmale und Anwendungen Chemische Gasphasenabscheidung<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/was-ist-die-chemische-gasphasenabscheidung\/\" aria-label=\"Lesen Sie mehr \u00fcber die chemische Gasphasenabscheidung (CVD) - Klassifizierung, Merkmale und Anwendungen\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b1d27ad elementor-widget elementor-widget-heading\" data-id=\"b1d27ad\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title elementor-size-default\"><a href=\"https:\/\/www.nanofab.com.cn\/de\/einblicke-2\/\">Mehr dazu...<\/a><\/p>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>Herstellung von d\u00fcnnen Schichten aus Titannitrid (TiN) im ALD-Verfahren D\u00fcnne Schichten aus Titannitrid (TiN), die im ALD-Verfahren (Atomic Layer Deposition) hergestellt werden, weisen eine hohe H\u00e4rte, [...]<\/p>","protected":false},"author":3,"featured_media":7932,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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