{"id":7896,"date":"2024-05-23T16:57:46","date_gmt":"2024-05-23T08:57:46","guid":{"rendered":"https:\/\/www.nanofab.com.cn\/?p=7896"},"modified":"2024-05-28T11:16:16","modified_gmt":"2024-05-28T03:16:16","slug":"the-difference-between-icpcvd-and-pecvd-in-preparing-silicon-nitride-films","status":"publish","type":"post","link":"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/der-unterschied-zwischen-icpcvd-und-pecvd-bei-der-aufbereitung-von-silizium-nitrid-filmen\/","title":{"rendered":"Unterschiede zwischen ICPCVD und PECVD bei der Herstellung von Siliziumnitridschichten"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"7896\" class=\"elementor elementor-7896\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-cad2906 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"cad2906\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-07ecf70\" data-id=\"07ecf70\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-9691ecb elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"9691ecb\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-a4bad46\" data-id=\"a4bad46\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-8ed3a97 elementor-widget elementor-widget-heading\" data-id=\"8ed3a97\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\">Unterschiede zwischen ICPCVD und PECVD bei der Herstellung von Siliziumnitridschichten<\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-fcf753a elementor-widget elementor-widget-post-info\" data-id=\"fcf753a\" data-element_type=\"widget\" data-widget_type=\"post-info.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor\/assets\/css\/widget-icon-list.min.css\"><link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-theme-elements.min.css\">\t\t<ul class=\"elementor-icon-list-items elementor-post-info\">\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-repeater-item-577f4c4\" itemprop=\"datePublished\">\n\t\t\t\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/2024\/05\/23\/\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text elementor-post-info__item elementor-post-info__item--type-date\">\n\t\t\t\t\t\t\t\t\t\t<time>2024-05-23<\/time>\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/li>\n\t\t\t\t<\/ul>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1ef8e4d elementor-widget elementor-widget-image\" data-id=\"1ef8e4d\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-image{text-align:center}.elementor-widget-image a{display:inline-block}.elementor-widget-image a img[src$=\".svg\"]{width:48px}.elementor-widget-image img{vertical-align:middle;display:inline-block}<\/style>\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"900\" height=\"600\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/1.png\" class=\"attachment-large size-large wp-image-5109\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/1.png 900w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/1-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/1-768x512.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/1-600x400.png 600w\" sizes=\"(max-width: 900px) 100vw, 900px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4aea5b5 elementor-widget elementor-widget-text-editor\" data-id=\"4aea5b5\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p>ICPCVD (induktiv gekoppelte plasmachemische Gasphasenabscheidung) und<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\/\">PECVD (Plasmaunterst\u00fctzte chemische Gasphasenabscheidung)<\/a>sind zwei g\u00e4ngige Verfahren zur Herstellung von Siliziumnitridschichten (SiNx). Obwohl es sich in beiden F\u00e4llen um plasmagest\u00fctzte Verfahren der chemischen Gasphasenabscheidung handelt, gibt es einige wichtige Unterschiede in Bezug auf die Plasmaerzeugung, die Schichteigenschaften und die Anwendungen.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5a37401 elementor-widget elementor-widget-heading\" data-id=\"5a37401\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Grunds\u00e4tze und Ausr\u00fcstung<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6e2dfef elementor-widget elementor-widget-text-editor\" data-id=\"6e2dfef\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>ICPCVD<\/p><ul><li>Plasmaerzeugung: Mittels induktiver Kopplung wird in einer Spule ein hochdichtes Plasma erzeugt, in der Regel durch Hochfrequenz (HF). Das Plasma wird in einer Vakuumkammer gebildet und auf die Oberfl\u00e4che des Substrats geleitet.<\/li><li>Plasmadichte: Bei der ICPCVD wird eine h\u00f6here Plasmadichte erzeugt, die eine h\u00f6here Energie f\u00fcr den Ionenbeschuss liefert.<\/li><li>Komplexit\u00e4t der Anlagen: ICPCVD-Anlagen sind komplex und teuer, da sie hochentwickelte Spulen- und Leistungsregelungssysteme ben\u00f6tigen.<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6dc55eb elementor-widget elementor-widget-text-editor\" data-id=\"6dc55eb\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>PECVD<\/p><ul><li>Plasmaerzeugung: Durch kapazitive Kopplung wird ein Plasma zwischen zwei Elektroden erzeugt, in der Regel mit Hilfe von HF-Leistung.<\/li><li>Plasmadichte: Bei der PECVD wird eine relativ geringe Plasmadichte erzeugt, die aber immer noch ausreicht, um chemische Reaktionen und die Schichtabscheidung zu erm\u00f6glichen.<\/li><li>Komplexit\u00e4t der Anlagen: PECVD-Anlagen sind relativ einfach, kosteng\u00fcnstig und leicht zu bedienen und zu warten.<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a2dc3c3 elementor-widget elementor-widget-heading\" data-id=\"a2dc3c3\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">D\u00fcnnfilm-Eigenschaften<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1e2864d elementor-widget elementor-widget-text-editor\" data-id=\"1e2864d\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<ul><li>Schichtdichte: Aufgrund der hohen Plasmadichte k\u00f6nnen mit ICPCVD Siliciumnitridschichten mit hoher Dichte und geringer Porosit\u00e4t abgeschieden werden; PECVD-Schichten haben eine relativ geringe Dichte.<\/li><\/ul><ul><li>Chemische Reinheit: Mit ICPCVD abgeschiedene Schichten weisen in der Regel eine h\u00f6here chemische Reinheit und einen geringeren Anteil an Verunreinigungen auf. Mit PECVD abgeschiedene Schichten k\u00f6nnen mehr Wasserstoff und andere Verunreinigungen enthalten, was jedoch durch Nachbearbeitung verbessert werden kann.<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2ab730e elementor-widget elementor-widget-heading\" data-id=\"2ab730e\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Vergleich der Merkmale<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a7a14fb elementor-widget elementor-widget-image\" data-id=\"a7a14fb\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"713\" height=\"365\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/05\/0a8382bc07ea65374dad6486008cdc2.png\" class=\"attachment-large size-large wp-image-7900\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/05\/0a8382bc07ea65374dad6486008cdc2.png 713w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/05\/0a8382bc07ea65374dad6486008cdc2-300x154.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/05\/0a8382bc07ea65374dad6486008cdc2-18x9.png 18w\" sizes=\"(max-width: 713px) 100vw, 713px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f5cc40f elementor-widget elementor-widget-spacer\" data-id=\"f5cc40f\" data-element_type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-column .elementor-spacer-inner{height:var(--spacer-size)}.e-con{--container-widget-width:100%}.e-con-inner>.elementor-widget-spacer,.e-con>.elementor-widget-spacer{width:var(--container-widget-width,var(--spacer-size));--align-self:var(--container-widget-align-self,initial);--flex-shrink:0}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container,.e-con>.elementor-widget-spacer>.elementor-widget-container{height:100%;width:100%}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer,.e-con>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer{height:100%}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer>.elementor-spacer-inner,.e-con>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer>.elementor-spacer-inner{height:var(--container-widget-height,var(--spacer-size))}.e-con-inner>.elementor-widget-spacer.elementor-widget-empty,.e-con>.elementor-widget-spacer.elementor-widget-empty{position:relative;min-height:22px;min-width:22px}.e-con-inner>.elementor-widget-spacer.elementor-widget-empty .elementor-widget-empty-icon,.e-con>.elementor-widget-spacer.elementor-widget-empty .elementor-widget-empty-icon{position:absolute;top:0;bottom:0;left:0;right:0;margin:auto;padding:0;width:22px;height:22px}<\/style>\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d2c5222 elementor-widget elementor-widget-spacer\" data-id=\"d2c5222\" data-element_type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b79ddfc elementor-widget elementor-widget-heading\" data-id=\"b79ddfc\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Anwendungsbereiche<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0de60a9 elementor-widget elementor-widget-text-editor\" data-id=\"0de60a9\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>ICPCVD<\/p><ul><li>Hochleistungsf\u00e4hige optische Beschichtungen: ICPCVD eignet sich aufgrund der hohen Schichtdichten und der geringen Spannungen f\u00fcr leistungsstarke optische Beschichtungen, wie z. B. Antireflex- und Schutzschichten.<\/li><li>Halbleiterbauelemente: ICPCVD ist vorteilhaft f\u00fcr Halbleiterbauelemente mit hohen Anforderungen an Pr\u00e4zision und Zuverl\u00e4ssigkeit, wie MOSFETs und MEMS-Bauelemente.<\/li><li>Hochwertige Isolierschichten: f\u00fcr Isolierschichten, die eine hohe Durchschlagsfestigkeit und geringe Leckstr\u00f6me erfordern.<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d40a3a8 elementor-widget elementor-widget-text-editor\" data-id=\"d40a3a8\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>PECVD<\/p><ul><li>Gro\u00dffl\u00e4chige Beschichtung: PECVD eignet sich f\u00fcr gro\u00dffl\u00e4chige und schnelle Beschichtungsanwendungen wie Solarzellen und Displayr\u00fcckseiten.<\/li><li>Mehrschichtige D\u00fcnnschichtstrukturen: PECVD eignet sich f\u00fcr die Herstellung von mehrschichtigen D\u00fcnnschichtstrukturen, wie sie in Flachbildschirmen und optoelektronischen Ger\u00e4ten verwendet werden.<\/li><li>Niedrigtemperaturanwendungen: F\u00fcr temperaturempfindliche Substrate wie organische und Kunststoffsubstrate.<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8a19cc5 elementor-widget elementor-widget-text-editor\" data-id=\"8a19cc5\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>ICPCVD und PECVD haben jeweils ihre eigenen Vorteile und Anwendungsbereiche, und die Wahl des Verfahrens h\u00e4ngt weitgehend von den spezifischen Anwendungsbed\u00fcrfnissen und Prozessanforderungen ab; ICPCVD bietet Vorteile in Bezug auf hohe Dichte, geringe Spannung und hochreine Schichten, w\u00e4hrend PECVD besser in Bezug auf gro\u00dfe Fl\u00e4chen, schnelle Abscheidung und Kostenkontrolle abschneidet. Wenn Sie die Unterschiede zwischen diesen beiden Verfahren verstehen, k\u00f6nnen Sie mit unseren Forschern und Ingenieuren diskutieren, um das f\u00fcr Ihre Bed\u00fcrfnisse am besten geeignete Abscheidungsverfahren auszuw\u00e4hlen.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f5219e9 elementor-widget elementor-widget-text-editor\" data-id=\"f5219e9\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Wir bieten <a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/\">Beschichtung (Mikro- und Nanofabrikation) - Dienstleistungen zur Prozessanpassung<\/a>k\u00f6nnen Sie gerne einen Kommentar hinterlassen.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f83c2e0 uael-mobile-wpf-button-justify uael-wpf-style-box uael-wpf-input-size-sm uael-wpf-button-left uael-wpf-btn-size-sm uael-wpf-highlight-style-default elementor-widget elementor-widget-uael-wpf-styler\" data-id=\"f83c2e0\" data-element_type=\"widget\" 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href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-posts.min.css\">\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7386 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"195\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png\" class=\"attachment-medium size-medium wp-image-7388\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8.png 640w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" >\n\t\t\t\tSubstitutionsverfahren durch Atomlagenabscheidung (ALD)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" aria-label=\"Lesen Sie mehr \u00fcber Atomic Layer Deposition (ALD) Foundry Processing\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7344 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png\" class=\"attachment-medium size-medium wp-image-7347\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1024x684.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-768x513.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1536x1025.png 1536w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/f394ed96-eaca-40cc-83f6-ebadaea95553-qlt2nzpy27w47wpv9hvjdczv85dnqtqc8q83uvppb4.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553.png 1600w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" >\n\t\t\t\tChemical Vapour Deposition (CVD) Generation Processing\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" aria-label=\"Lesen Sie mehr \u00fcber Chemical Vapour Deposition (CVD) Subcontracting\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7355 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png\" class=\"attachment-medium size-medium wp-image-7357\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-1024x683.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-768x512.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-qlti2lfsi53oh54jrq611wpt5lt6dogutrcqlbec0w.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932.png 1508w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" >\n\t\t\t\tPhysikalische Abscheidung aus der Gasphase (PVD) - Generative Verarbeitung\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" aria-label=\"Lesen Sie mehr \u00fcber Physical Vapour Deposition (PVD) Subcontracting\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2d0835e elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"2d0835e\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 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class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7064 post type-post status-publish format-standard has-post-thumbnail hentry category-application tag-tem-grids\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/tem-grids-2\/\" >\n\t\t\t\tVertiefte Kenntnisse: Einf\u00fchrung, Arten und Anwendungen von Elektronenmikroskop-Tr\u00e4gergittern (Kupfergittern)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Vertiefende Wissenschaft: Einf\u00fchrung, Arten und Anwendungen von Elektronenmikroskop-Tr\u00e4gergittern (Kupfergitter) Elektronische Anzeige<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/tem-grids-2\/\" aria-label=\"Lesen Sie mehr \u00fcber: Einf\u00fchrung, Arten und Anwendungen von Kupfernetzen f\u00fcr die Elektronenmikroskopie\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7866 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/welches-verfahren-sollte-zur-herstellung-von-amorphen-siliziumschichten-gewahlt-werden-2\/\" >\n\t\t\t\tPECVD versus Magnetron-Sputtern: Welche Technik ist besser f\u00fcr die Herstellung amorpher Silizium-D\u00fcnnschichten?\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>PECVD versus Magnetronsputtern: welche Technik ist besser f\u00fcr die Herstellung amorpher Silizium-D\u00fcnnschichten<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/welches-verfahren-sollte-zur-herstellung-von-amorphen-siliziumschichten-gewahlt-werden-2\/\" aria-label=\"Lesen Sie mehr \u00fcber PECVD versus Magnetronsputtern: Welche Technologie ist besser f\u00fcr die Herstellung amorpher Siliziumschichten?\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7816 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/eigenschaften-und-anwendungen-des-magnetronsputterns-zur-herstellung-von-vanadium-dioxid\/\" >\n\t\t\t\tWas sind die Eigenschaften und Anwendungen von Vanadiumdioxid, das durch Magnetronsputtern hergestellt wird?\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Was sind die Merkmale und Anwendungen von Vanadiumdioxid, das durch Magnetronsputtern hergestellt wird Magnetronsputtern<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/eigenschaften-und-anwendungen-des-magnetronsputterns-zur-herstellung-von-vanadium-dioxid\/\" aria-label=\"Lesen Sie mehr \u00fcber die Eigenschaften und Anwendungen von Vanadiumdioxid, das durch Magnetronsputtern hergestellt wird?\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-52c1988 elementor-widget elementor-widget-heading\" data-id=\"52c1988\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title elementor-size-default\"><a href=\"https:\/\/www.nanofab.com.cn\/de\/einblicke-2\/\">Mehr dazu...<\/a><\/p>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>Unterschied zwischen ICPCVD und PECVD Herstellung von Siliciumnitrid-D\u00fcnnschichten ICPCVD (Inductively Coupled Plasm [...]<\/p>","protected":false},"author":3,"featured_media":5109,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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