{"id":7866,"date":"2024-05-15T11:08:20","date_gmt":"2024-05-15T03:08:20","guid":{"rendered":"https:\/\/www.nanofab.com.cn\/?p=7866"},"modified":"2024-05-28T11:14:24","modified_gmt":"2024-05-28T03:14:24","slug":"what-process-should-be-selected-to-prepare-amorphous-silicon-films","status":"publish","type":"post","link":"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/welches-verfahren-sollte-zur-herstellung-von-amorphen-siliziumschichten-gewahlt-werden-2\/","title":{"rendered":"PECVD versus Magnetron-Sputtern: Welche Technik ist besser f\u00fcr die Herstellung amorpher Silizium-D\u00fcnnschichten?"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"7866\" class=\"elementor elementor-7866\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-81125b4 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"81125b4\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-a4dcd52\" data-id=\"a4dcd52\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-b45d912 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"b45d912\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-5a105c9\" data-id=\"5a105c9\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-144a8df elementor-widget elementor-widget-heading\" data-id=\"144a8df\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\">PECVD versus Magnetron-Sputtern: Welche Technik ist besser f\u00fcr die Herstellung amorpher Silizium-D\u00fcnnschichten?<\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5d7fd22 elementor-widget elementor-widget-post-info\" data-id=\"5d7fd22\" data-element_type=\"widget\" data-widget_type=\"post-info.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor\/assets\/css\/widget-icon-list.min.css\"><link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-theme-elements.min.css\">\t\t<ul class=\"elementor-icon-list-items elementor-post-info\">\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-repeater-item-577f4c4\" itemprop=\"datePublished\">\n\t\t\t\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/2024\/05\/15\/\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text elementor-post-info__item elementor-post-info__item--type-date\">\n\t\t\t\t\t\t\t\t\t\t<time>2024-05-15<\/time>\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/li>\n\t\t\t\t<\/ul>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-bee305e elementor-widget elementor-widget-image\" data-id=\"bee305e\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-image{text-align:center}.elementor-widget-image a{display:inline-block}.elementor-widget-image a img[src$=\".svg\"]{width:48px}.elementor-widget-image img{vertical-align:middle;display:inline-block}<\/style>\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"1000\" height=\"667\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/05\/2bfb05c6db7ba39b73c3a9d7f0277c6.png\" class=\"attachment-large size-large wp-image-7867\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/05\/2bfb05c6db7ba39b73c3a9d7f0277c6.png 1000w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/05\/2bfb05c6db7ba39b73c3a9d7f0277c6-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/05\/2bfb05c6db7ba39b73c3a9d7f0277c6-768x512.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/05\/2bfb05c6db7ba39b73c3a9d7f0277c6-18x12.png 18w\" sizes=\"(max-width: 1000px) 100vw, 1000px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-c74e564 elementor-widget elementor-widget-text-editor\" data-id=\"c74e564\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p>Silizium-D\u00fcnnschicht-Solarzellen Forschung ist die internationale Photovoltaik-Bereich Forschung Hotspot, Silizium-D\u00fcnnschicht-Solarzellen im Vergleich zu monokristallinen Silizium-und polykristallinen Silizium-Solarzellen, mit weniger Verbrauchsmaterialien, niedrige Kosten Eigenschaften. Amorphe Silizium-D\u00fcnnschicht-Solarzellen Produktionsprozess ist einfach, niedrige Substrattemperatur, einfach, den Integrationsprozess und gro\u00dffl\u00e4chige Produktion gelten, ist es die vielversprechendste Klasse von Silizium-D\u00fcnnschicht-Solarzellen. Bei der Herstellung von amorphen Silizium-D\u00fcnnschichtzellen<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\/\">Plasmaunterst\u00fctzte chemische Gasphasenabscheidung (PECVD)<\/a>und<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/was-ist-magnetron-sputtern-2\/\">Magnetronzerst\u00e4ubung<\/a>sind zwei weit verbreitete Techniken. Jede Technik hat ihre eigenen Vorteile und Einschr\u00e4nkungen f\u00fcr unterschiedliche Anwendungsszenarien.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f8f5bb0 elementor-widget elementor-widget-heading\" data-id=\"f8f5bb0\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Vorteile und Anwendungen von PECVD<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d0cc8bd elementor-widget elementor-widget-text-editor\" data-id=\"d0cc8bd\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Bei der PECVD-Technik wird durch Anregung eines siliziumhaltigen Gases (in der Regel Silan SiH\u2084) mit Hilfe von Hochfrequenz- oder Mikrowellenenergie ein Plasma erzeugt, das wiederum amorphe Siliziumd\u00fcnnschichten bei niedrigeren Temperaturen (etwa 200\u00b0C bis 300\u00b0C) auf einem Substrat abscheidet. Der Hauptvorteil dieser Technik ist:<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-bacb81e elementor-widget elementor-widget-text-editor\" data-id=\"bacb81e\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<ol><li>Niedertemperaturverfahren: f\u00fcr temperaturempfindliche Substrate wie Kunststoffe oder bestimmte biologische Materialien.<\/li><li>Hochwertige Membranschichten: Der Wasserstoffgehalt in der Membran kann eingestellt werden, was zur Verringerung mikroskopischer Defekte innerhalb der Membran beitr\u00e4gt und die elektrischen Eigenschaften der Membran verbessert.<\/li><li>Homogene, gro\u00dffl\u00e4chige Beschichtung: geeignet f\u00fcr die Massenproduktion, insbesondere in Bereichen wie Solarzellen und Flachbildschirme.<\/li><\/ol>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-cfd4587 elementor-widget elementor-widget-text-editor\" data-id=\"cfd4587\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>PECVD-Anlagen sind relativ komplex und kostspielig, und die Produktionsrate ist durch die chemische Reaktionsgeschwindigkeit begrenzt. W\u00e4hrend des Aufbereitungsprozesses wird eine gro\u00dfe Menge Gas ohne Reaktion direkt aus der Anlage abgeleitet, und die Gasnutzung ist gering. Da es sich bei der Methode um ionisiertes Gas handelt, herrscht in der Reaktionskammer ein hoher Luftdruck, der die Partikelabscheidung behindern kann. Um die Qualit\u00e4t der Filmbildung zu gew\u00e4hrleisten, kann keine zu hohe Leistung verwendet werden, so dass die Filmbildungsrate langsam ist.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ea99a58 elementor-widget elementor-widget-heading\" data-id=\"ea99a58\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Vorteile und Anwendungen des Magnetronsputterns<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1178ca9 elementor-widget elementor-widget-text-editor\" data-id=\"1178ca9\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Beim Magnetronsputtern wird das Plasma durch die Erzeugung eines Magnetfelds gesteuert, wodurch die gesputterten Partikel effizienter auf dem Substrat abgeschieden werden k\u00f6nnen. Zu den wichtigsten Vorteilen dieser Technik geh\u00f6ren:<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2990e37 elementor-widget elementor-widget-text-editor\" data-id=\"2990e37\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<ol><li>Geeignet f\u00fcr eine breite Palette von Materialien: Durch die Auswahl verschiedener Targets und Substrate k\u00f6nnen leitende und nichtleitende Materialien verarbeitet werden.<\/li><li>Einfache und kosteng\u00fcnstige Anlagen: Im Vergleich zu PECVD sind Magnetron-Sputter-Anlagen in der Regel einfacher und billiger und haben geringere Wartungskosten.<\/li><li>Hohe Abscheidungsrate: hohe Produktivit\u00e4t, besonders geeignet f\u00fcr industrielle Anwendungen, die eine schnelle Produktion gro\u00dfer Mengen erfordern.<\/li><\/ol>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-03b4cde elementor-widget elementor-widget-text-editor\" data-id=\"03b4cde\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Das Magnetron-Sputtern von amorphen Siliziumschichten bietet zwar Vorteile wie hohe Abscheidungsraten und relativ niedrige Anlagenkosten, ist aber auch mit einer Reihe von Problemen verbunden. Dazu geh\u00f6ren m\u00f6gliche Qualit\u00e4tsm\u00e4ngel der Schichten, ein schwer zu kontrollierender Wasserstoffgehalt, komplexere Anforderungen an die Wartung der Anlagen, das potenzielle Risiko einer Besch\u00e4digung des Substrats und ein h\u00f6herer Energieverbrauch.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-35a3817 elementor-widget elementor-widget-heading\" data-id=\"35a3817\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Prozessvergleich<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-77193d4 elementor-widget elementor-widget-image\" data-id=\"77193d4\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"771\" height=\"402\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/05\/292afe09c0f72f8f9e595c3b91d8782.png\" class=\"attachment-large size-large wp-image-7872\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/05\/292afe09c0f72f8f9e595c3b91d8782.png 771w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/05\/292afe09c0f72f8f9e595c3b91d8782-300x156.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/05\/292afe09c0f72f8f9e595c3b91d8782-768x400.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/05\/292afe09c0f72f8f9e595c3b91d8782-18x9.png 18w\" sizes=\"(max-width: 771px) 100vw, 771px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-88af483 elementor-widget elementor-widget-spacer\" data-id=\"88af483\" data-element_type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-column .elementor-spacer-inner{height:var(--spacer-size)}.e-con{--container-widget-width:100%}.e-con-inner>.elementor-widget-spacer,.e-con>.elementor-widget-spacer{width:var(--container-widget-width,var(--spacer-size));--align-self:var(--container-widget-align-self,initial);--flex-shrink:0}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container,.e-con>.elementor-widget-spacer>.elementor-widget-container{height:100%;width:100%}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer,.e-con>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer{height:100%}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer>.elementor-spacer-inner,.e-con>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer>.elementor-spacer-inner{height:var(--container-widget-height,var(--spacer-size))}.e-con-inner>.elementor-widget-spacer.elementor-widget-empty,.e-con>.elementor-widget-spacer.elementor-widget-empty{position:relative;min-height:22px;min-width:22px}.e-con-inner>.elementor-widget-spacer.elementor-widget-empty .elementor-widget-empty-icon,.e-con>.elementor-widget-spacer.elementor-widget-empty .elementor-widget-empty-icon{position:absolute;top:0;bottom:0;left:0;right:0;margin:auto;padding:0;width:22px;height:22px}<\/style>\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-72f6384 elementor-widget elementor-widget-heading\" data-id=\"72f6384\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Umfassender Vergleich und Auswahl<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b322136 elementor-widget elementor-widget-text-editor\" data-id=\"b322136\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Die Wahl der Technologie h\u00e4ngt weitgehend von den Anforderungen des Endprodukts und von Kosten-Nutzen-\u00dcberlegungen ab. Wenn Ihre Anwendung qualitativ hochwertige, elektrisch einwandfreie amorphe Siliziumschichten erfordert und das Substrat temperaturempfindlich ist, kann die PECVD die geeignetere Wahl sein. Wenn jedoch die Kosten ein wichtiger Faktor sind oder wenn die Anforderungen an das Produkt so hoch sind, dass eine etwas geringere Schichtqualit\u00e4t akzeptabel ist, kann das Magnetronsputtern eine kosteng\u00fcnstigere Option sein.<\/p><p>Auch Faktoren wie die Verf\u00fcgbarkeit von Ger\u00e4ten, technische Unterst\u00fctzung und Erfahrung m\u00fcssen bei der Auswahl ber\u00fccksichtigt werden. Eingehende Gespr\u00e4che mit unseren Branchenexperten und Ingenieuren k\u00f6nnen Ihnen helfen, eine fundierte Entscheidung zu treffen.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8d684ac elementor-widget elementor-widget-text-editor\" data-id=\"8d684ac\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Wir bieten <a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/\">Beschichtung (Mikro- und Nanofabrikation) - Dienstleistungen zur Prozessanpassung<\/a>k\u00f6nnen Sie gerne einen Kommentar hinterlassen.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-386c1b1 uael-mobile-wpf-button-justify uael-wpf-style-box uael-wpf-input-size-sm uael-wpf-button-left uael-wpf-btn-size-sm uael-wpf-highlight-style-default elementor-widget elementor-widget-uael-wpf-styler\" data-id=\"386c1b1\" data-element_type=\"widget\" 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href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-posts.min.css\">\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7386 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"195\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png\" class=\"attachment-medium size-medium wp-image-7388\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8.png 640w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" >\n\t\t\t\tSubstitutionsverfahren durch Atomlagenabscheidung (ALD)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" aria-label=\"Lesen Sie mehr \u00fcber Atomic Layer Deposition (ALD) Foundry Processing\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7344 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png\" class=\"attachment-medium size-medium wp-image-7347\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1024x684.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-768x513.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1536x1025.png 1536w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/f394ed96-eaca-40cc-83f6-ebadaea95553-qlt2nzpy27w47wpv9hvjdczv85dnqtqc8q83uvppb4.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553.png 1600w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" >\n\t\t\t\tChemical Vapour Deposition (CVD) Generation Processing\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" aria-label=\"Lesen Sie mehr \u00fcber Chemical Vapour Deposition (CVD) Subcontracting\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7355 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png\" class=\"attachment-medium size-medium wp-image-7357\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-1024x683.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-768x512.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-qlti2lfsi53oh54jrq611wpt5lt6dogutrcqlbec0w.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932.png 1508w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" >\n\t\t\t\tPhysikalische Abscheidung aus der Gasphase (PVD) - Generative Verarbeitung\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" aria-label=\"Lesen Sie mehr \u00fcber Physical Vapour Deposition (PVD) Subcontracting\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-c45277c elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"c45277c\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 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100%;-webkit-mask-repeat:var(--divider-pattern-repeat);mask-repeat:var(--divider-pattern-repeat);background-color:var(--divider-color);-webkit-mask-image:var(--divider-pattern-url);mask-image:var(--divider-pattern-url)}.elementor-widget-divider--no-spacing{--divider-pattern-size:auto}.elementor-widget-divider--bg-round{--divider-pattern-repeat:round}.rtl .elementor-widget-divider .elementor-divider__text{direction:rtl}.e-con-inner>.elementor-widget-divider,.e-con>.elementor-widget-divider{width:var(--container-widget-width,100%);--flex-grow:var(--container-widget-flex-grow)}<\/style>\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-eae59eb elementor-widget elementor-widget-heading\" data-id=\"eae59eb\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<div class=\"elementor-heading-title elementor-size-default\">Verwandte Lekt\u00fcre<\/div>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1a8bae6 elementor-grid-1 elementor-posts--thumbnail-none elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-widget elementor-widget-posts\" data-id=\"1a8bae6\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7324 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/was-ist-die-chemische-gasphasenabscheidung\/\" >\n\t\t\t\tChemische Abscheidung aus der Gasphase (CVD) - Klassifizierung, Merkmale und Anwendungen\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Chemische Gasphasenabscheidung (CVD) Klassifizierung, Merkmale und Anwendungen Chemische Gasphasenabscheidung<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" 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Siliziumnitrid-D\u00fcnnschichtfenster haben ein breites Anwendungsspektrum, von der Produktion bis zur Analyse, und spielen eine Schl\u00fcsselrolle bei der Entwicklung neuer Halbleiterger\u00e4te und -materialien.<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/halbleiter-produktion-und-analyse-2\/\" aria-label=\"Lesen Sie mehr \u00fcber Siliziumnitrid-D\u00fcnnschichtfenster - Kritische Rolle in der Halbleiterproduktion und Analyse\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7744 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/faktoren-die-die-oberflacheneigenschaften-von-polysilizium-filmen-beeinflussen\/\" >\n\t\t\t\tPolysiliziumfilm\u4e28Verschiedene Faktoren, die die Oberfl\u00e4cheneigenschaften von Polysiliziumfilm beeinflussen\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Polysiliziumfilm\u4e28Verschiedene Faktoren, die die Oberfl\u00e4cheneigenschaften beeinflussen, wachsender Polysiliziumfilm<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/faktoren-die-die-oberflacheneigenschaften-von-polysilizium-filmen-beeinflussen\/\" aria-label=\"Lesen Sie mehr \u00fcber Polysilizium-D\u00fcnnschichten\u4e28Verschiedene Faktoren, die die Oberfl\u00e4cheneigenschaften von Polysilizium-D\u00fcnnschichten beeinflussen\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2e80f7b elementor-widget elementor-widget-heading\" data-id=\"2e80f7b\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title elementor-size-default\"><a href=\"https:\/\/www.nanofab.com.cn\/de\/einblicke-2\/\">Mehr dazu...<\/a><\/p>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>PECVD\u4e0e\u78c1\u63a7\u6e85\u5c04\uff1a\u54ea\u79cd\u6280\u672f\u66f4\u9002\u5408\u5236\u5907\u975e\u6676\u7845\u8584\u819c\uff1f \u7845\u8584\u819c\u592a\u9633\u80fd\u7535\u6c60\u7684\u7814\u7a76\u662f\u56fd\u9645\u5149\u4f0f\u9886\u57df\u7814\u7a76\u70ed\u70b9\uff0c\u7845\u8584\u819c\u592a\u9633 [&hellip;]<\/p>","protected":false},"author":3,"featured_media":7867,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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