{"id":7816,"date":"2024-04-28T16:52:53","date_gmt":"2024-04-28T08:52:53","guid":{"rendered":"https:\/\/www.nanofab.com.cn\/?p=7816"},"modified":"2024-05-28T11:07:50","modified_gmt":"2024-05-28T03:07:50","slug":"preparation-of-vo2-by-magnetron-sputtering","status":"publish","type":"post","link":"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/eigenschaften-und-anwendungen-des-magnetronsputterns-zur-herstellung-von-vanadium-dioxid\/","title":{"rendered":"Was sind die Eigenschaften und Anwendungen von Vanadiumdioxid, das durch Magnetronsputtern hergestellt wird?"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"7816\" class=\"elementor elementor-7816\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-be7dfe0 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"be7dfe0\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-2b006d4\" data-id=\"2b006d4\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-94a7039 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"94a7039\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-7067d4f\" data-id=\"7067d4f\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-a6d8828 elementor-widget elementor-widget-heading\" data-id=\"a6d8828\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\">Was sind die Eigenschaften und Anwendungen von Vanadiumdioxid, das durch Magnetronsputtern hergestellt wird?<\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-bf7148d elementor-widget elementor-widget-post-info\" data-id=\"bf7148d\" data-element_type=\"widget\" data-widget_type=\"post-info.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor\/assets\/css\/widget-icon-list.min.css\"><link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-theme-elements.min.css\">\t\t<ul class=\"elementor-icon-list-items elementor-post-info\">\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-repeater-item-577f4c4\" itemprop=\"datePublished\">\n\t\t\t\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/2024\/04\/28\/\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text elementor-post-info__item elementor-post-info__item--type-date\">\n\t\t\t\t\t\t\t\t\t\t<time>2024-04-28<\/time>\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/li>\n\t\t\t\t<\/ul>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7439d6d elementor-widget elementor-widget-image\" data-id=\"7439d6d\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-image{text-align:center}.elementor-widget-image a{display:inline-block}.elementor-widget-image a img[src$=\".svg\"]{width:48px}.elementor-widget-image img{vertical-align:middle;display:inline-block}<\/style>\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"1024\" height=\"688\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/f0e8ed5eb3e6e3a86aad56c3a05b7bc-1024x688.png\" class=\"attachment-large size-large wp-image-7817\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/f0e8ed5eb3e6e3a86aad56c3a05b7bc-1024x688.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/f0e8ed5eb3e6e3a86aad56c3a05b7bc-300x201.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/f0e8ed5eb3e6e3a86aad56c3a05b7bc-768x516.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/f0e8ed5eb3e6e3a86aad56c3a05b7bc-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/f0e8ed5eb3e6e3a86aad56c3a05b7bc.png 1190w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-943648b elementor-widget elementor-widget-text-editor\" data-id=\"943648b\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p><a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/was-ist-magnetron-sputtern-2\/\">Magnetronzerst\u00e4ubung<\/a>Weit verbreitet in der Vorbereitung der VO2 d\u00fcnne Filme, das Ziel Material ist in der Regel sehr rein Vanadium Metall, das Hintergrund-Vakuum ist in der Regel h\u00f6her als 10-3Pa, und die Vakuumkammer ist mit Sauerstoff und Argon gef\u00fcllt. Sputtern, Ar + Ionen Bombardement V Ziel Sputtern V-Atome und O-Atome auf der Substratoberfl\u00e4che kombiniert und abgeschieden, um Vanadiumoxide zu bilden, die Vorbereitung des Films enthalten in der Regel V2O3, VO2, V2O5 Vanadiumoxide, sondern durch die Anpassung der Partialdruck von Sauerstoff, Abscheidung Temperatur und das Ziel Basisabstand, hochwertige VO2 Filme hergestellt werden k\u00f6nnen.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-10cdd5e elementor-widget elementor-widget-heading\" data-id=\"10cdd5e\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Merkmale von Vanadiumdioxid<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-c9c7649 elementor-widget elementor-widget-text-editor\" data-id=\"c9c7649\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p><strong>Hochgradig gleichm\u00e4\u00dfiger und kontinuierlicher Film<\/strong><\/p><p>Mit der Magnetron-Sputtertechnik kann das Material gleichm\u00e4\u00dfig auf einem Substrat abgeschieden werden, so dass eine durchgehende Schicht ohne Risse oder signifikante Defekte entsteht. Dies ist besonders wichtig, um die Funktionalit\u00e4t des Films zu gew\u00e4hrleisten, da die Konsistenz der physikalischen Eigenschaften entscheidend f\u00fcr das thermische und elektrische Verhalten des VO\u2082 ist.<\/p><p><strong>Kontrollierte Schichtdicke und Zusammensetzung<\/strong><\/p><p>Durch die pr\u00e4zise Steuerung von Sputterparametern wie Leistung, Luftdruck, Sputterzeit und Abstand zwischen Target und Substrat k\u00f6nnen Dicke und Zusammensetzung des Films genau eingestellt werden. Dies ist wichtig, um VO\u2082-spezifische Phasen\u00e4nderungseigenschaften zu erzielen (z. B. Umwandlung von Isolator in Metall bei einer bestimmten Temperatur).<\/p><p><strong>Ausgezeichnete Phasenwechseleigenschaften<\/strong><\/p><p>Die Hauptattraktion von VO\u2082-Filmen ist ihre einzigartige temperaturabh\u00e4ngige Phasenumwandlungsf\u00e4higkeit, die durch Magnetronsputtern effektiv erhalten und reproduziert werden kann. Bei Umgebungstemperaturen nahe 68 \u00b0C k\u00f6nnen VO\u2082-Filme rasch von einem isolierenden in einen metallischen Zustand \u00fcbergehen, was mit erheblichen Ver\u00e4nderungen der Leitf\u00e4higkeit und der optischen Eigenschaften einhergeht.<\/p><p><strong>Verbesserte optische und elektrische Eigenschaften<\/strong><\/p><p>Durch Anpassung der Sputterbedingungen, wie Substrattemperatur und Sputteratmosph\u00e4re (z. B. Sauerstoffgehalt), kann die Struktur der Schicht optimiert werden, um ihre optische Durchl\u00e4ssigkeit und elektrische Leitf\u00e4higkeit zu verbessern. Bei intelligenten Fenstern zum Beispiel kann eine solche Optimierung die F\u00e4higkeit zur W\u00e4rme- und Lichtregulierung verbessern.<\/p><p><strong>H\u00f6here Materialausnutzung und Produktivit\u00e4t<\/strong><\/p><p>Die hohe Materialausnutzung des Targetmaterials beim Magnetronsputtern und die Tatsache, dass die Anlagen in der Regel eine hohe Abscheiderate aufweisen, f\u00fchren zu einer hohen Produktivit\u00e4t und geringeren Produktionskosten.<\/p><p><strong>Breite Palette von Substratanpassungen<\/strong><\/p><p>Das Magnetron-Sputtern kann auf vielen Arten von Substraten durchgef\u00fchrt werden, darunter Glas, Kunststoff und Metall, was die Anwendungsm\u00f6glichkeiten von VO\u2082-Filmen erweitert, z. B. die M\u00f6glichkeit, sie auf biegsame Oberfl\u00e4chen oder Gegenst\u00e4nde mit unterschiedlichen Formen aufzubringen.<\/p><p><strong>Umweltfreundlich und schadstoffarm<\/strong><\/p><p>Das Magnetronsputtern wird h\u00e4ufig als umweltfreundlicheres Pr\u00e4parationsverfahren angesehen als andere Methoden, wie z. B. die chemische Gasphasenabscheidung, da weniger Vorl\u00e4uferstoffe und keine hochgiftigen Chemikalien verwendet werden.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-161a6e7 elementor-widget elementor-widget-heading\" data-id=\"161a6e7\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Anwendungen von Vanadiumdioxid<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8e52ecf elementor-widget elementor-widget-text-editor\" data-id=\"8e52ecf\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<h2>Vanadiumdioxid-Terahertz-Vorrichtung<\/h2>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d361969 elementor-widget elementor-widget-text-editor\" data-id=\"d361969\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Der Wellenl\u00e4ngenbereich von 0,03~3mm wird als Terahertz definiert, der elektromagnetische Wellen mit Frequenzen im Bereich von 0,1THz bis 10THz enth\u00e4lt, die zwischen den Mikrowellen- und Infrarot-Wellenl\u00e4ngenb\u00e4ndern liegen. In den Anf\u00e4ngen war Terahertz in verschiedenen Bereichen unter verschiedenen Namen bekannt, wobei Ferninfrarot im optischen Bereich und Submillimeterwellen, Ultramikrowellen usw. im elektronischen Bereich verwendet wurden. Die Terahertz-Technologie wurde als eine der \"zehn wichtigsten Technologien, die die Welt in Zukunft ver\u00e4ndern werden\" anerkannt. Der Phasen\u00fcbergang von Vanadiumdioxid erm\u00f6glicht die Absorption bestimmter Frequenzen von Terahertz-Wellen, wobei diese Eigenschaft des Materials f\u00fcr Schaltzwecke genutzt wird. Auf der einen Seite, aufgrund der Impedanz des Films und des Substrats und der \u00e4u\u00dferen Umgebung Impedanz gleich ist, wird die Absorptionsstruktur nicht produzieren Reflexion, so dass die Terahertz-Welle wird nicht reflektiert werden; und Terahertz-Welle Resonanz und die oberste Schicht des Metall-Ring-Struktur, um eine oder mehrere Spitzen der Absorption zu produzieren, und zur gleichen Zeit, die Metall-Film, so dass die Terahertz kann nicht durch das Ger\u00e4t weitergegeben werden, und schlie\u00dflich die Absorption des Absorbers wird eine \u00c4nderung in der Absorptionsrate, die Verwendung eines solchen Grundsatzes, um den Absorber zu machen.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d23a371 elementor-widget elementor-widget-text-editor\" data-id=\"d23a371\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<h2>Datentr\u00e4ger-Material<\/h2>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-39cb587 elementor-widget elementor-widget-text-editor\" data-id=\"39cb587\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Materialien mit bistabilen optischen Eigenschaften k\u00f6nnen zu optischen Datenspeichermedien verarbeitet werden. Die Vo2-Folie geh\u00f6rt zu einem solchen Material, und der \u00dcbergang zwischen den beiden stabilen Zust\u00e4nden ist reversibel, so dass sie als lesbares, beschreibbares und l\u00f6schbares Material f\u00fcr optische Datentr\u00e4ger verwendet werden kann. Es wurde festgestellt, dass die in Vo2-Filmen gespeicherten Daten \u00fcber einen langen Zeitraum erhalten bleiben und \u00c4nderungen der Umgebungstemperatur sowie ultravioletter Bestrahlung standhalten k\u00f6nnen.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-44fa8d5 elementor-widget elementor-widget-text-editor\" data-id=\"44fa8d5\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<h2>Optische Schaltger\u00e4te<\/h2>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f7e9fd1 elementor-widget elementor-widget-text-editor\" data-id=\"f7e9fd1\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Mit einer Widerstandsphasen\u00e4nderung von bis zu 5 Gr\u00f6\u00dfenordnungen vor und nach der Phasen\u00e4nderung von VO2 und einer Umwandlungszeit von Nanosekunden kann VO2 als W\u00e4rmeschalter oder W\u00e4rmesensor verwendet werden, um eine automatische Steuerung von Schaltkreisen zu realisieren. Optische Schalter verwenden VO2 im sichtbaren und infraroten Bereich der Durchl\u00e4ssigkeit der pl\u00f6tzlichen Ver\u00e4nderung, indem sie eine Art von Anregung, und letztlich erreichen die \u00dcbertragung und Reflexion der ein und aus, die als Lichtmodulator bekannt ist. Terahertz-Welle ist in der Mikrowelle und Infrarot zwischen elektromagnetischen Wellen befindet, ist das letzte elektromagnetische Spektrum in den Spektralbereich entwickelt werden, in Richtung der Breitband-Kommunikation, biologische Sensorik, Halbleiter-Material-Eigenschaften der Forschung hat gro\u00dfen Anwendungswert.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ded7a8d elementor-widget elementor-widget-text-editor\" data-id=\"ded7a8d\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<h2>Laserschutzschicht f\u00fcr Infrarotdetektoren<\/h2>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-09d8ba4 elementor-widget elementor-widget-text-editor\" data-id=\"09d8ba4\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Aufgrund des gro\u00dfen Unterschieds in der IR-Durchl\u00e4ssigkeit vor und nach dem Phasen\u00fcbergang von VO2 k\u00f6nnen wir VO2-Folien als Schutzschicht gegen IR-Laserstrahlung verwenden. Wenn sie Laserpulsstrahlung ausgesetzt wird, kann sie schnell einen Phasen\u00fcbergang von der metallischen zur Halbleiterphase durchlaufen, mit einer hohen IR-Durchl\u00e4ssigkeit vor dem Phasen\u00fcbergang und einem sehr hohen IR-Reflexionsgrad nach dem Phasen\u00fcbergang. In Abwesenheit von Laserstrahlung, VO2 Film zeigt hohe Infrarot-Durchl\u00e4ssigkeit, die normale Arbeit der Infrarot-Ger\u00e4t nicht beeintr\u00e4chtigt; wenn Laserstrahlung ausgesetzt, VO2 Film in der ultra-kurzen Zeitraum, die Phase zu \u00e4ndern, um die Metall-Zustand, dieses Mal mit hohen Infrarot-Reflexion, die Blockierung der \u00dcbertragung von Strahlung Licht, um den Zweck des Schutzes der Detektor zu erreichen.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0c8e93b elementor-widget elementor-widget-text-editor\" data-id=\"0c8e93b\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<h2>Smart Window Film Beschichtung<\/h2>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-89a93f1 elementor-widget elementor-widget-text-editor\" data-id=\"89a93f1\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Wenn Vanadiumdioxid einen Isolator-Metall-Phasen\u00fcbergang durchl\u00e4uft, \u00e4ndern sich auch seine optischen Eigenschaften schlagartig. Diese optische Vorrichtung, die mit einem d\u00fcnnen Film aus VO2 beschichtet ist, wird gesteuert, wenn die von au\u00dfen zugef\u00fchrten elektrischen, optischen und thermischen Bedingungen einen Phasen\u00fcbergang des VO2-Materials induzieren, wobei der hohe Transmissionsgrad des isolierenden Zustands vor dem Phasen\u00fcbergang und der hohe Reflexionsgrad des metallischen Zustands nach dem Phasen\u00fcbergang das Prinzip des Vanadiumdioxid-Materials f\u00fcr das intelligente Fenster ist. Dieses intelligente Vanadiumdioxid-Fenster kann durch den Einfluss der Temperatur auf den Phasen\u00fcbergang reversibel reguliert werden. Insbesondere kann das Licht aus dem Infrarotbereich die Absorption von externem Infrarotlicht wirksam verhindern und so eine konstante Innentemperatur aufrechterhalten. Im Gegenteil, wenn die Au\u00dfentemperatur niedriger ist als die Temperatur des Phasen\u00fcbergangs der Folie, steigt die Lichtdurchl\u00e4ssigkeit, was die Raumtemperatur entsprechend erh\u00f6ht. Die Verwendung von VO2-Materialien zur flexiblen Regulierung und Aufrechterhaltung der Raumtemperatur nutzt die Gaben der Natur in vollem Umfang und tr\u00e4gt so zum Ziel einer nachhaltigen Entwicklung bei.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e0da30c elementor-widget elementor-widget-text-editor\" data-id=\"e0da30c\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Wir bieten <a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\">Magnetron-Sputter-Gie\u00dfereidienstleistung nach Ma\u00df<\/a>k\u00f6nnen Sie gerne einen Kommentar hinterlassen.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f003633 uael-mobile-wpf-button-justify 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srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8.png 640w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" >\n\t\t\t\tSubstitutionsverfahren durch Atomlagenabscheidung (ALD)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" 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src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png\" class=\"attachment-medium size-medium wp-image-7347\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1024x684.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-768x513.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1536x1025.png 1536w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/f394ed96-eaca-40cc-83f6-ebadaea95553-qlt2nzpy27w47wpv9hvjdczv85dnqtqc8q83uvppb4.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553.png 1600w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" >\n\t\t\t\tChemical Vapour Deposition (CVD) Generation Processing\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" aria-label=\"Lesen Sie mehr \u00fcber Chemical Vapour Deposition (CVD) Subcontracting\" tabindex=\"-1\" >\n\t\t\tMehr lesen 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https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-1024x683.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-768x512.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-qlti2lfsi53oh54jrq611wpt5lt6dogutrcqlbec0w.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932.png 1508w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" 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100%;-webkit-mask-repeat:var(--divider-pattern-repeat);mask-repeat:var(--divider-pattern-repeat);background-color:var(--divider-color);-webkit-mask-image:var(--divider-pattern-url);mask-image:var(--divider-pattern-url)}.elementor-widget-divider--no-spacing{--divider-pattern-size:auto}.elementor-widget-divider--bg-round{--divider-pattern-repeat:round}.rtl .elementor-widget-divider .elementor-divider__text{direction:rtl}.e-con-inner>.elementor-widget-divider,.e-con>.elementor-widget-divider{width:var(--container-widget-width,100%);--flex-grow:var(--container-widget-flex-grow)}<\/style>\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9f7cfe1 elementor-widget elementor-widget-heading\" data-id=\"9f7cfe1\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div 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Mit hoher Energie<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/\u6e85\u5c04\u9540\u819c-2\/\" aria-label=\"Lesen Sie mehr \u00fcber Welche Faktoren beeinflussen den Sputtering-Beschichtungsprozess von D\u00fcnnschichtmaterialien?\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8cf50f5 elementor-widget elementor-widget-heading\" data-id=\"8cf50f5\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title elementor-size-default\"><a href=\"https:\/\/www.nanofab.com.cn\/de\/einblicke-2\/\">Mehr 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