{"id":7754,"date":"2024-04-22T16:09:07","date_gmt":"2024-04-22T08:09:07","guid":{"rendered":"https:\/\/www.nanofab.com.cn\/?p=7754"},"modified":"2024-05-13T10:14:43","modified_gmt":"2024-05-13T02:14:43","slug":"effect-of-stress-on-thin-films","status":"publish","type":"post","link":"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/auswirkung-von-stress-auf-dunnschichtfilme-2\/","title":{"rendered":"D\u00fcnne Schichten aus polykristallinem Silizium\u4e28Auswirkungen von Spannungen auf d\u00fcnne Schichten"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"7754\" class=\"elementor elementor-7754\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-b737903 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"b737903\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-1bb68e0\" data-id=\"1bb68e0\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-baa3382 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"baa3382\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-a4e6040\" data-id=\"a4e6040\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-23cbea7 elementor-widget elementor-widget-heading\" data-id=\"23cbea7\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\">D\u00fcnne Schichten aus polykristallinem Silizium\u4e28Auswirkungen von Spannungen auf d\u00fcnne Schichten<\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e3ddd0c elementor-widget elementor-widget-post-info\" data-id=\"e3ddd0c\" data-element_type=\"widget\" data-widget_type=\"post-info.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor\/assets\/css\/widget-icon-list.min.css\"><link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-theme-elements.min.css\">\t\t<ul class=\"elementor-icon-list-items elementor-post-info\">\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-repeater-item-577f4c4\" itemprop=\"datePublished\">\n\t\t\t\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/2024\/04\/22\/\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text elementor-post-info__item elementor-post-info__item--type-date\">\n\t\t\t\t\t\t\t\t\t\t<time>2024-04-22<\/time>\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/li>\n\t\t\t\t<\/ul>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-90e464a elementor-widget elementor-widget-image\" data-id=\"90e464a\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-image{text-align:center}.elementor-widget-image a{display:inline-block}.elementor-widget-image a img[src$=\".svg\"]{width:48px}.elementor-widget-image img{vertical-align:middle;display:inline-block}<\/style>\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"1024\" height=\"684\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/c9485d9527c19bdfd8150e468ae0b6a-1024x684.png\" class=\"attachment-large size-large wp-image-7755\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/c9485d9527c19bdfd8150e468ae0b6a-1024x684.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/c9485d9527c19bdfd8150e468ae0b6a-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/c9485d9527c19bdfd8150e468ae0b6a-768x513.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/c9485d9527c19bdfd8150e468ae0b6a-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/c9485d9527c19bdfd8150e468ae0b6a.png 1122w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-87cc488 elementor-widget elementor-widget-text-editor\" data-id=\"87cc488\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p>Wenn ein Film auf einem Substrat angebracht ist, \u00e4ndert sich die L\u00e4nge des Films, wenn er einer Art von Filmspannung ausgesetzt ist, die eine Kraft erzeugt. Filmspannungen k\u00f6nnen in der Regel in Zugspannungen und Druckspannungen unterteilt werden. Wenn es eine Kraft, um die L\u00e4nge des Films l\u00e4nger, es ist die Spannung f\u00fcr die Zugspannung unterzogen, unter den Bedingungen der Kraft Gleichgewicht, zu diesem Zeitpunkt wird das Substrat relativ unter Druckspannung, die das Substrat und Film wird nach innen gebogen, dass die Bildung von konkaven ist; Umgekehrt, wenn es eine Kraft, um den Film k\u00fcrzer in der L\u00e4nge, der Film unter der Spannung f\u00fcr die Druckspannung, die das Substrat und den Film nach unten Biegen, dass die Bildung einer konvexen Oberfl\u00e4che ist. Im Falle einer \u00fcberm\u00e4\u00dfigen Belastung, ist es leicht zu verursachen Film Riss oder Abl\u00f6sung vom Substrat.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-59df210 elementor-widget elementor-widget-heading\" data-id=\"59df210\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Was ist Filmstress?<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-fb04ace elementor-widget elementor-widget-text-editor\" data-id=\"fb04ace\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Die Gr\u00f6\u00dfe der Eigenspannung des Films und Film-Materialien, Substrat-Materialien, Vorbereitung Methoden sind im Zusammenhang mit der Art der gesamten Stress, die durch den Film ist in der Regel in zwei Kategorien unterteilt: externe Stress (externeStress) und internen Stress: (intermal Stress), internen Stress: kann in thermischen Stress und intrinsischen Stress unterteilt werden.<\/p><p>Der Mechanismus zur Erzeugung von Filmspannungen ist wie folgt.<\/p><p>1, thermische Belastung: in den Herstellungsprozess, den Film und das Substrat zur gleichen Zeit durch die Hochtemperatur-Prozess und am Ende des Prozesses zur gleichen Zeit zur\u00fcck auf Raumtemperatur, gibt es einen Temperaturunterschied zwischen diesem Prozess und wegen der Film und der Koeffizient der thermischen Ausdehnung zwischen dem Substrat ist anders, so wird es in thermischen Stress f\u00fchren. Wenn der thermische Ausdehnungskoeffizient des Substrats gr\u00f6\u00dfer ist als der des Films, entsteht Zugspannung; umgekehrt wird Druckspannung erzeugt.<\/p><p>2, intrinsischen Stress: aufgrund von Unterschieden in den Materialeigenschaften an der Schnittstelle zwischen dem Film und dem Substrat, sowie die Mikrostruktur des Films Wachstumsprozess selbst durch die innere Spannung verursacht wird als intrinsische Stress. Dieser Stress hat eine gro\u00dfe Beziehung mit dem Prozess der Vorbereitung des Films und der Vorbereitung Methode, und ist eng mit dem Substrat-Material, wie das Substrat und der Film-Kontakt-Schnittstelle zwischen dem Gitter Mismatch oder den Film in das Wachstum der verschiedenen internen Defekte in der Bewegung und so weiter. Es ist stark abh\u00e4ngig von der Abscheidung Bedingungen, Gl\u00fchen, Heterogenit\u00e4t, etc.<\/p><p>3, externe Spannungen: die Spannungen, die durch externe Kr\u00e4fte auf den Film einwirken. Es ist schwer zu vermeiden, dass bei der Vorbereitung der Folie keine Restspannungen entstehen. Da keine \u00e4u\u00dfere Last aufgebracht wird, ist die \u00e4u\u00dfere Spannung gleich Null.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d98dcdd elementor-widget elementor-widget-heading\" data-id=\"d98dcdd\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Wachstumsmuster von D\u00fcnnschichten<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0d1d279 elementor-widget elementor-widget-text-editor\" data-id=\"0d1d279\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Es gibt grob drei Modelle f\u00fcr das Wachstum von d\u00fcnnen Schichten, die auf einem Substrat abgeschieden werden: laminare Struktur, Schichtl\u00e4nge plus Inselstruktur und Inselstruktur. Diese drei Wachstumsmodi unterscheiden sich haupts\u00e4chlich durch die freie Oberfl\u00e4chenenergie pro Fl\u00e4cheneinheit und den Gitterunterschied zwischen dem Substrat und dem Film.<\/p><p>1\u3001Schichtstruktur: der Gitterunterschied zwischen dem Film und dem Substratmaterial ist klein, oder die Gitterkonstante zwischen ihnen ist sehr nahe, so dass die Reaktantenmolek\u00fcle an das Substrat durch die Bindungskraft gebunden sind, ist st\u00e4rker als die anderen intermolekularen Bindungskraft ist st\u00e4rker, so dass die Kristalle werden zweidimensionale planare laminare Struktur Modus zu wachsen, und die Summe der freien Energie zwischen dem Film und der Schnittstelle wird kleiner sein als die freie Energie des Substrats.<\/p><p>2) Schicht- und Inselstruktur: Der Gitterunterschied zwischen dem Film und dem Substratmaterial ist etwas gr\u00f6\u00dfer als der der Schichtstruktur. In der Anfangsphase des Wachstums w\u00e4chst der Kristall noch in einer zweidimensionalen planaren Struktur, die als Ebene f\u00fcr die benetzende Oberfl\u00e4che bezeichnet wird. Wenn diese planare Struktur die Dicke der Grenzfl\u00e4che \u00fcberschreitet, polymerisiert sie automatisch zu einer inselartigen Struktur, um die angesammelten Spannungen vom Substrat abzubauen, und die Summe der freien Energien zwischen dem Film und der Grenzfl\u00e4che ist nicht unbedingt gr\u00f6\u00dfer oder kleiner als die des Substrats.<\/p><p>3, Insel-Struktur: das Gitter Unterschied zwischen dem Film und dem Substrat-Material ist gr\u00f6\u00dfer als die anderen beiden Modi, so dass die molekulare Wachstum unterliegt anderen intermolekularen Bindungskraft als das Substrat Bindungskraft ist viel gr\u00f6\u00dfer, der Kristall wird direkt auf die dreidimensionale Insel-Struktur-Modus zu wachsen, um die \u00fcberm\u00e4\u00dfige Belastung, und der Film und die Schnittstelle zwischen der Summe der freien Energie wird gr\u00f6\u00dfer sein als das Substrat die freie Energie.<\/p><p>Wenn keine chemischen Bindungen zwischen ungleichen Molek\u00fclen entstehen, haben die meisten ungleichen Molek\u00fcle eine geringere Anziehungskraft zueinander als zu ihrer eigenen Art. Die Bindungskraft zwischen abgeschiedenen Atomen oder zwischen abgeschiedenen Molek\u00fclen ist gr\u00f6\u00dfer als die des Substrats, die meisten der Filme auf der Oberfl\u00e4che zu Beginn der dreidimensionalen Inselstruktur gewachsen, zwischen den Inseln ist immer noch die Oberfl\u00e4che des Substrats, desto mehr Keimbildung Zentren auf der Oberfl\u00e4che, desto h\u00f6her ist die Dichte, und je d\u00fcnner die Oberfl\u00e4che ist mehr flach, die kontinuierliche Abscheidung der Insel der H\u00f6he und Fl\u00e4che zu erh\u00f6hen, und die Insel zu einer Fusion zu produzieren, und schlie\u00dflich das gesamte Substrat bedeckt. Dieser Wachstumsmechanismus geht jedoch mit gro\u00dfen inneren Eigenspannungen einher, und die LPCVD-Methode zur Herstellung polykristalliner Silizium-D\u00fcnnschichten ist von dieser Art.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e5ffa93 elementor-widget elementor-widget-text-editor\" data-id=\"e5ffa93\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Wir bieten <a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\">Chemische Gasphasenabscheidung (CVD) OEM-Anpassungsdienste<\/a>k\u00f6nnen Sie gerne einen Kommentar hinterlassen.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-620c90d uael-mobile-wpf-button-justify uael-wpf-style-box 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href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-posts.min.css\">\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7386 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img decoding=\"async\" width=\"300\" height=\"195\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png\" class=\"attachment-medium size-medium wp-image-7388\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8.png 640w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" >\n\t\t\t\tSubstitutionsverfahren durch Atomlagenabscheidung (ALD)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" aria-label=\"Lesen Sie mehr \u00fcber Atomic Layer Deposition (ALD) Foundry Processing\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7344 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png\" class=\"attachment-medium size-medium wp-image-7347\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1024x684.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-768x513.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1536x1025.png 1536w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/f394ed96-eaca-40cc-83f6-ebadaea95553-qlt2nzpy27w47wpv9hvjdczv85dnqtqc8q83uvppb4.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553.png 1600w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" >\n\t\t\t\tChemical Vapour Deposition (CVD) Generation Processing\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" aria-label=\"Lesen Sie mehr \u00fcber Chemical Vapour Deposition (CVD) Subcontracting\" tabindex=\"-1\" >\n\t\t\tMehr lesen 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100%;-webkit-mask-repeat:var(--divider-pattern-repeat);mask-repeat:var(--divider-pattern-repeat);background-color:var(--divider-color);-webkit-mask-image:var(--divider-pattern-url);mask-image:var(--divider-pattern-url)}.elementor-widget-divider--no-spacing{--divider-pattern-size:auto}.elementor-widget-divider--bg-round{--divider-pattern-repeat:round}.rtl .elementor-widget-divider .elementor-divider__text{direction:rtl}.e-con-inner>.elementor-widget-divider,.e-con>.elementor-widget-divider{width:var(--container-widget-width,100%);--flex-grow:var(--container-widget-flex-grow)}<\/style>\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d8a14f8 elementor-widget elementor-widget-heading\" data-id=\"d8a14f8\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<div class=\"elementor-heading-title elementor-size-default\">Verwandte Lekt\u00fcre<\/div>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f6ef099 elementor-grid-1 elementor-posts--thumbnail-none elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-widget elementor-widget-posts\" data-id=\"f6ef099\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-5420 post type-post status-publish format-standard has-post-thumbnail hentry category-application tag-app-silicon-nitride-window\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/silikon-nitrid-biowissenschaftliche-anwendungen-2\/\" >\n\t\t\t\tErforschung von 4 Anwendungen von Siliziumnitrid-D\u00fcnnschichtfenstern in den Biowissenschaften\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>In diesem Artikel werden die Eigenschaften und Vorteile von Siliziumnitrid-D\u00fcnnschichtfenstern beschrieben und vier g\u00e4ngige Anwendungen in den Biowissenschaften er\u00f6rtert.<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a 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class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/faktoren-die-die-wachstumsrate-von-polysilizium-filmen-beeinflussen\/\" aria-label=\"Lesen Sie mehr \u00fcber die eingehende Untersuchung verschiedener Faktoren, die die Wachstumsrate polykristalliner Siliziumd\u00fcnnschichten beeinflussen\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7780 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/eigenschaften-und-anwendungen-von-titannitrid\/\" >\n\t\t\t\tTitannitrid\u4e28TiN Eigenschaften und Anwendungen\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Eigenschaften und Anwendungen von Titannitrid D\u00fcnne Schichten aus Titannitrid (TiN) sind ein wichtiges<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/eigenschaften-und-anwendungen-von-titannitrid\/\" aria-label=\"Lesen Sie mehr \u00fcber Eigenschaften und Anwendungen von Titannitrid \u4e28TiN\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-86e8e55 elementor-widget elementor-widget-heading\" data-id=\"86e8e55\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title elementor-size-default\"><a href=\"https:\/\/www.nanofab.com.cn\/de\/einblicke-2\/\">Mehr 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