{"id":7744,"date":"2024-04-18T17:37:37","date_gmt":"2024-04-18T09:37:37","guid":{"rendered":"https:\/\/www.nanofab.com.cn\/?p=7744"},"modified":"2024-05-13T10:22:18","modified_gmt":"2024-05-13T02:22:18","slug":"factors-influencing-the-surface-properties-of-polysilicon-films","status":"publish","type":"post","link":"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/faktoren-die-die-oberflacheneigenschaften-von-polysilizium-filmen-beeinflussen\/","title":{"rendered":"Polysiliziumfilm\u4e28Verschiedene Faktoren, die die Oberfl\u00e4cheneigenschaften von Polysiliziumfilm beeinflussen"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"7744\" class=\"elementor elementor-7744\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-99c8d7d elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"99c8d7d\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-c094855\" data-id=\"c094855\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-e32e3d7 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"e32e3d7\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-e5eeed8\" data-id=\"e5eeed8\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-b07ae16 elementor-widget elementor-widget-heading\" data-id=\"b07ae16\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\">Polysiliziumfilm\u4e28Verschiedene Faktoren, die die Oberfl\u00e4cheneigenschaften beeinflussen<\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f8f1cd5 elementor-widget elementor-widget-post-info\" data-id=\"f8f1cd5\" data-element_type=\"widget\" data-widget_type=\"post-info.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor\/assets\/css\/widget-icon-list.min.css\"><link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-theme-elements.min.css\">\t\t<ul class=\"elementor-icon-list-items elementor-post-info\">\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-repeater-item-577f4c4\" itemprop=\"datePublished\">\n\t\t\t\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/2024\/04\/18\/\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text elementor-post-info__item elementor-post-info__item--type-date\">\n\t\t\t\t\t\t\t\t\t\t<time>2024-04-18<\/time>\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/li>\n\t\t\t\t<\/ul>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f340fb7 elementor-widget elementor-widget-image\" data-id=\"f340fb7\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-image{text-align:center}.elementor-widget-image a{display:inline-block}.elementor-widget-image a img[src$=\".svg\"]{width:48px}.elementor-widget-image img{vertical-align:middle;display:inline-block}<\/style>\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"1024\" height=\"683\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/0c91e769390a9353bfcb3f51096116a-1024x683.png\" class=\"attachment-large size-large wp-image-7746\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/0c91e769390a9353bfcb3f51096116a-1024x683.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/0c91e769390a9353bfcb3f51096116a-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/0c91e769390a9353bfcb3f51096116a-768x512.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/0c91e769390a9353bfcb3f51096116a-1536x1024.png 1536w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/0c91e769390a9353bfcb3f51096116a-2048x1365.png 2048w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/0c91e769390a9353bfcb3f51096116a-18x12.png 18w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-49ba868 elementor-widget elementor-widget-text-editor\" data-id=\"49ba868\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p>Wachstum von Polysilizium-D\u00fcnnschichten haben viele Methoden, nach der Vorbereitung Prozess kann in zwei Kategorien unterteilt werden, n\u00e4mlich, direkte Vorbereitung Methoden und indirekte Vorbereitung Methoden. Direkte Vorbereitung Methode ist direkt auf dem Substrat von Polysilizium-Film, wie Fl\u00fcssigphasen-Wachstum-Methode, chemische Gasphasenabscheidung Methode, Plasma chemische Gasphasenabscheidung Methode, Fl\u00fcssigphasen-Epitaxie-Methode, etc. abgeschieden; Indirekte Vorbereitung Methode ist die erste Vorbereitung der amorphen D\u00fcnnschicht-Materialien auf dem Substrat, und dann Festphase Charakterisierung von Polysilizium-Film.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3841510 elementor-widget elementor-widget-heading\" data-id=\"3841510\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Gr\u00fcnde, die die Oberfl\u00e4cheneigenschaften von Polysiliziumschichten beeinflussen<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-426ca33 elementor-widget elementor-widget-text-editor\" data-id=\"426ca33\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<h2>Auswirkung der Abscheidungstemperatur auf die Oberfl\u00e4cheneigenschaften polykristalliner Silizium-D\u00fcnnschichten<\/h2>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ec0d8a9 elementor-widget elementor-widget-text-editor\" data-id=\"ec0d8a9\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Aus dem thermodynamischen Prinzip kann gesehen werden, die Reaktantenmolek\u00fcle kommen an der Substrat-Wafer-Oberfl\u00e4che, werden gegenseitige Kollision und Keimbildung auf der Oberfl\u00e4che des Wafers auftreten. Mit der Abscheidung Temperatur steigt, wird der kritische Kern Radius erforderlich, um einen stabilen Kern zu bilden gr\u00f6\u00dfer werden, das hei\u00dft, mehr Atome sind erforderlich, um den kritischen Kern stabil zu machen, wird die Bildung des Korns gr\u00f6\u00dfer sein. Dar\u00fcber hinaus m\u00fcssen Silizium-Atome bestimmte Hindernisse f\u00fcr ein kontinuierliches Wachstum zu \u00fcberwinden, Abscheidung Temperatur h\u00f6her ist, wird die Mobilit\u00e4t der Atome gr\u00f6\u00dfer werden, die kinetische Energie erh\u00f6ht, wird die Schnittstelle Energie des Korns reduziert werden, was die Kombination von Diffusion zwischen den K\u00f6rnern, der Film ist einfach zu einer gr\u00f6\u00dferen Gr\u00f6\u00dfe der Insel-\u00e4hnliche Struktur wachsen.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6302019 elementor-widget elementor-widget-text-editor\" data-id=\"6302019\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<h2>Auswirkung der Abscheidungszeit auf die Oberfl\u00e4cheneigenschaften von polykristallinen Silizium-D\u00fcnnschichten<\/h2>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b45d707 elementor-widget elementor-widget-text-editor\" data-id=\"b45d707\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Die Abscheidungszeit hat einen gro\u00dfen Einfluss auf die Keimbildung und das Wachstum der K\u00f6rner. Die Korngr\u00f6\u00dfe variiert bei geringerer Abscheidungszeit und nimmt mit zunehmender Abscheidungszeit zu. Das Wachstum der K\u00f6rner kann als die Bildung einiger Atome durch Selbstdiffusion durch die intergranularen Grenzen der K\u00f6rner betrachtet werden, die aufgrund der Grenzfl\u00e4chenenergie eher geneigt sind, ihre Fl\u00e4che zu minimieren. Mit zunehmender Abscheidungszeit bleibt gen\u00fcgend Zeit f\u00fcr die Migration zwischen den K\u00f6rnern, so dass die Korngr\u00f6\u00dfe zunimmt.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d1206c0 elementor-widget elementor-widget-text-editor\" data-id=\"d1206c0\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<h2>Auswirkung der Gl\u00fchtemperatur auf die Oberfl\u00e4cheneigenschaften von Polysilizium-D\u00fcnnschichten<\/h2>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-89c815d elementor-widget elementor-widget-text-editor\" data-id=\"89c815d\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Die starke Zunahme der Oberfl\u00e4chenkorngr\u00f6\u00dfe nach dem Gl\u00fchen ist darauf zur\u00fcckzuf\u00fchren, dass das Gl\u00fchen den Atomen mehr freie Energie gibt und die Migration f\u00f6rdert, was zur Agglomeration zwischen den Atomen und zur Rekristallisation der K\u00f6rner f\u00fchrt. Die Ver\u00e4nderungen der Oberfl\u00e4chenrauheit bei unterschiedlichen Gl\u00fchtemperaturen sind m\u00f6glicherweise darauf zur\u00fcckzuf\u00fchren, dass das weitere Wachstum der K\u00f6rner nach Erh\u00f6hung der Gl\u00fchtemperatur die Grenzfl\u00e4chen zwischen den K\u00f6rnern verringert und die Variabilit\u00e4t zwischen einigen K\u00f6rnern reduziert wird.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9c14fab elementor-widget elementor-widget-heading\" data-id=\"9c14fab\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Gr\u00fcnde, die die Dickengleichm\u00e4\u00dfigkeit von Polysiliziumschichten beeinflussen<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f0ec10d elementor-widget elementor-widget-text-editor\" data-id=\"f0ec10d\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<h2>Auswirkung der Abscheidungstemperatur auf die Dickengleichm\u00e4\u00dfigkeit von polykristallinen Siliziumschichten<\/h2>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f132f19 elementor-widget elementor-widget-text-editor\" data-id=\"f132f19\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Der Grad der Gleichm\u00e4\u00dfigkeit des Films nimmt mit steigender Temperatur ab. Der Grund f\u00fcr dieses Ph\u00e4nomen k\u00f6nnte in der unterschiedlichen Luftstr\u00f6mung zwischen der Mitte und den R\u00e4ndern liegen, wobei die Reaktionsmolek\u00fcle bevorzugt den Rand des Wafers erreichen und sich dort ablagern, und die Wachstumsrate des Films bei h\u00f6heren Temperaturen deutlich beschleunigt wird. Infolgedessen ist die Variabilit\u00e4t des Wachstums an der Kante im Vergleich zur Mitte st\u00e4rker ausgepr\u00e4gt.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9d38c17 elementor-widget elementor-widget-text-editor\" data-id=\"9d38c17\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<h2>Auswirkung des Reaktionsdrucks auf die Dickengleichm\u00e4\u00dfigkeit von polykristallinen Siliziumschichten<\/h2>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-dbb0430 elementor-widget elementor-widget-text-editor\" data-id=\"dbb0430\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Die Gleichm\u00e4\u00dfigkeit der Schichtdicke nimmt mit zunehmendem Druck leicht ab. Der Grund f\u00fcr dieses Ph\u00e4nomen kann der Unterschied in der Luftstr\u00f6mungsrate zwischen der Mitte und der Randposition sein. Die Reaktionsmolek\u00fcle erreichen bevorzugt den Rand des Wafers und keimen dort, und die Wachstumsrate des Films erh\u00f6ht sich aufgrund des Druckanstiegs, so dass das Wachstum des Randes im Vergleich zur Mitte eine gewisse Variabilit\u00e4t aufweist, aber die Variabilit\u00e4t ist auch geringer, weil die Auswirkung des Drucks auf die Wachstumsrate des Films im Vergleich zur Temperatur viel kleiner ist.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d6b5507 elementor-widget elementor-widget-text-editor\" data-id=\"d6b5507\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<h2>Einfluss des Silanflusses auf die Dickengleichm\u00e4\u00dfigkeit von Polysiliziumschichten<\/h2>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7648100 elementor-widget elementor-widget-text-editor\" data-id=\"7648100\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Die Dickengleichm\u00e4\u00dfigkeit der polykristallinen Siliziumschichten bleibt bei \u00c4nderungen des Silanflusses im Wesentlichen unver\u00e4ndert. Dies deutet darauf hin, dass das molekulare Profil der Reaktanten, die das Zentrum und die Randbereiche des Wafers erreichen, mit steigender Flussrate im Wesentlichen gleich ist.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-008bbbf elementor-widget elementor-widget-text-editor\" data-id=\"008bbbf\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>1, mit der Abscheidung Temperatur steigt, die Wachstumsrate des Films wird gr\u00f6\u00dfer, im Grunde lineare Ver\u00e4nderung, die Wachstumsrate ist sehr empfindlich auf Ver\u00e4nderungen in der Temperatur.<\/p><p>2, im Falle der SiH4 Durchflussrate und Reaktionsdruck ist klein, mit der Erh\u00f6hung der Silan-Durchflussrate und Reaktionsdruck, die Wachstumsrate des Films steigt schneller, im Grunde lineare Ver\u00e4nderung, wenn die SiH4 Durchflussrate und Reaktionsdruck weiter zu erh\u00f6hen, die schrittweise Ver\u00e4nderung der Wachstumsrate abnimmt. Beide haben eine viel geringere Auswirkung auf die Wachstumsrate des Films als die Abscheidungstemperatur.<\/p><p>3, die Wachstumsrate des Films im Grunde nicht mit der Erh\u00f6hung der Abscheidungszeit zu \u00e4ndern. Die Reproduzierbarkeit des Filmwachstums ist sehr gut, was eine Grundlage f\u00fcr das Wachstum von Filmen mit kontrollierbarer Dicke bilden kann.<\/p><p>4, wenn die Abscheidung Temperatur von 630 \u2103, Reaktionsdruck von 0,25 Torr, Str\u00f6mungsgeschwindigkeit von 360sccm f\u00fcr die ideale Abscheidung Bedingungen, die Einheitlichkeit der abgeschiedenen Film und Oberfl\u00e4cheneigenschaften sind besser.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-18e7fa8 elementor-widget elementor-widget-text-editor\" data-id=\"18e7fa8\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Wir bieten <a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\">Chemische Gasphasenabscheidung (CVD) OEM-Anpassungsdienste<\/a>k\u00f6nnen Sie gerne einen Kommentar hinterlassen.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-db997e9 uael-mobile-wpf-button-justify uael-wpf-style-box uael-wpf-input-size-sm uael-wpf-button-left uael-wpf-btn-size-sm uael-wpf-highlight-style-default elementor-widget elementor-widget-uael-wpf-styler\" data-id=\"db997e9\" data-element_type=\"widget\" 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href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-posts.min.css\">\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7386 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img decoding=\"async\" width=\"300\" height=\"195\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png\" class=\"attachment-medium size-medium wp-image-7388\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8.png 640w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" >\n\t\t\t\tSubstitutionsverfahren durch Atomlagenabscheidung (ALD)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" aria-label=\"Lesen Sie mehr \u00fcber Atomic Layer Deposition (ALD) Foundry Processing\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7344 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png\" class=\"attachment-medium size-medium wp-image-7347\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1024x684.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-768x513.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1536x1025.png 1536w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/f394ed96-eaca-40cc-83f6-ebadaea95553-qlt2nzpy27w47wpv9hvjdczv85dnqtqc8q83uvppb4.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553.png 1600w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" >\n\t\t\t\tChemical Vapour Deposition (CVD) Generation Processing\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" aria-label=\"Lesen Sie mehr \u00fcber Chemical Vapour Deposition (CVD) Subcontracting\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7355 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png\" class=\"attachment-medium size-medium wp-image-7357\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-1024x683.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-768x512.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-qlti2lfsi53oh54jrq611wpt5lt6dogutrcqlbec0w.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932.png 1508w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" >\n\t\t\t\tPhysikalische Abscheidung aus der Gasphase (PVD) - Generative Verarbeitung\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" aria-label=\"Lesen Sie mehr \u00fcber Physical Vapour Deposition (PVD) Subcontracting\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1847818 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"1847818\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 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class=\"elementor-widget-container\">\n\t\t\t<div class=\"elementor-heading-title elementor-size-default\">Verwandte Lekt\u00fcre<\/div>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ca2b370 elementor-grid-1 elementor-posts--thumbnail-none elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-widget elementor-widget-posts\" data-id=\"ca2b370\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div 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