{"id":7731,"date":"2024-04-17T16:57:04","date_gmt":"2024-04-17T08:57:04","guid":{"rendered":"https:\/\/www.nanofab.com.cn\/?p=7731"},"modified":"2024-05-13T10:23:29","modified_gmt":"2024-05-13T02:23:29","slug":"factors-influencing-the-growth-rate-of-polysilicon-films","status":"publish","type":"post","link":"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/faktoren-die-die-wachstumsrate-von-polysilizium-filmen-beeinflussen\/","title":{"rendered":"Eingehende Untersuchung der verschiedenen Faktoren, die die Wachstumsrate von polykristallinen Silizium-D\u00fcnnschichten beeinflussen"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"7731\" class=\"elementor elementor-7731\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-9778242 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"9778242\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-02ef55d\" data-id=\"02ef55d\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-e8cdf4f elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"e8cdf4f\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-f606ca3\" data-id=\"f606ca3\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-d75edf9 elementor-widget elementor-widget-heading\" data-id=\"d75edf9\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\">Polykristalline Silizium-D\u00fcnnschichten\u4e28Verschiedene Faktoren, die die Wachstumsrate beeinflussen<\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0cc7e25 elementor-widget elementor-widget-post-info\" data-id=\"0cc7e25\" data-element_type=\"widget\" data-widget_type=\"post-info.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor\/assets\/css\/widget-icon-list.min.css\"><link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-theme-elements.min.css\">\t\t<ul class=\"elementor-icon-list-items elementor-post-info\">\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-repeater-item-577f4c4\" itemprop=\"datePublished\">\n\t\t\t\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/2024\/04\/17\/\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text elementor-post-info__item elementor-post-info__item--type-date\">\n\t\t\t\t\t\t\t\t\t\t<time>2024-04-17<\/time>\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/li>\n\t\t\t\t<\/ul>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-bc7264c elementor-widget elementor-widget-image\" data-id=\"bc7264c\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-image{text-align:center}.elementor-widget-image a{display:inline-block}.elementor-widget-image a img[src$=\".svg\"]{width:48px}.elementor-widget-image img{vertical-align:middle;display:inline-block}<\/style>\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"690\" height=\"450\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/12304812998c243dbd9680b572454e9.png\" class=\"attachment-large size-large wp-image-7732\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/12304812998c243dbd9680b572454e9.png 690w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/12304812998c243dbd9680b572454e9-300x196.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/12304812998c243dbd9680b572454e9-18x12.png 18w\" sizes=\"(max-width: 690px) 100vw, 690px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7f65399 elementor-widget elementor-widget-text-editor\" data-id=\"7f65399\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p>Polykristalliner Siliziumfilm ist ein kristalliner Siliziumfilm, der auf Substraten aus verschiedenen Materialien gez\u00fcchtet werden kann. Er besteht aus einer gro\u00dfen Anzahl winziger K\u00f6rner unterschiedlicher kristallographischer Ausrichtung und Gr\u00f6\u00dfe, deren Durchmesser im Allgemeinen im Bereich von einigen hundert Mikrometern bis zu einigen zehn Mikrometern liegt und die die grundlegenden Eigenschaften von Bulk-Silizium aufweisen. Es ist relativ einfach herzustellen, kosteng\u00fcnstig und kann \u00fcber gro\u00dfe Fl\u00e4chen hergestellt werden. Bei der Herstellung von Polysiliciumschichten sind die innere Struktur, die Eigenschaften und die Oberfl\u00e4chenqualit\u00e4t der Schicht sehr empfindlich gegen\u00fcber Abscheidungsparametern wie Abscheidungstemperatur, Reaktionsdruck und Silanflussrate. Die Einstellung dieser Parameter wirkt sich direkt auf die Wachstumsrate der Schicht und die Bildung der inneren Struktur aus. Dar\u00fcber hinaus spielen neben diesen Parametern auch der Zustand der Prozesskammer und die Parametereinstellungen vor und nach der Stabilisierung des Prozesses eine wichtige Rolle f\u00fcr die Qualit\u00e4t der Schicht w\u00e4hrend des Schichtherstellungsprozesses.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6594394 elementor-widget elementor-widget-heading\" data-id=\"6594394\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Gr\u00fcnde, die die Wachstumsrate von Polysilizium-D\u00fcnnschichten beeinflussen<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-44c784b elementor-widget elementor-widget-text-editor\" data-id=\"44c784b\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Die Wachstumsrate des Films wird durch die Geschwindigkeit des Gasphasentransports und die Reaktionsgeschwindigkeit der Reaktanten auf der Oberfl\u00e4che bestimmt. Die gew\u00e4hlten Abscheidungsparameter h\u00e4ngen mit der Wachstumsrate des Films zusammen, und die Wachstumsrate des Films ist je nach den Abscheidungsbedingungen unterschiedlich.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1a8c306 elementor-widget elementor-widget-text-editor\" data-id=\"1a8c306\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<h2>Auswirkung der Abscheidungstemperatur auf die Wachstumsrate von polykristallinen Siliziumschichten<\/h2>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ea6183b elementor-widget elementor-widget-text-editor\" data-id=\"ea6183b\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Die Wachstumsrate der Polysiliciumfilme stieg von 74 auf 175 A\/min mit der Erh\u00f6hung der Abscheidungstemperatur von 610 auf 680 \u00b0C. In diesem Temperaturbereich war die Wachstumsrate im Wesentlichen linear und sehr empfindlich gegen\u00fcber Temperatur\u00e4nderungen. Nach dem kinetischen Modell von Grove wird die Wachstumsrate von Polysiliziumschichten, die durch LPCVD hergestellt werden, durch die Reaktionsgeschwindigkeit der Silanmolek\u00fcle auf der Oberfl\u00e4che bestimmt, und die \u00c4nderung der Wachstumsrate mit der Temperatur stimmt gut mit der \u00c4nderung der Wachstumsrate des Niedertemperaturbereichs des Modells \u00fcberein. Daher muss die Genauigkeit der Temperaturkontrolle bei der Abscheidung d\u00fcnner Schichten hoch sein, und um polykristalline Siliziumschichten mit guter Einheitlichkeit herzustellen, muss die Temperatur an allen Stellen der Waferoberfl\u00e4che konstant gehalten werden.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2cb9b2a elementor-widget elementor-widget-text-editor\" data-id=\"2cb9b2a\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<h2>Einfluss des Silanflusses auf die Wachstumsrate polykristalliner Siliziumschichten<\/h2>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8eb981c elementor-widget elementor-widget-text-editor\" data-id=\"8eb981c\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Als die SiH4-Durchflussmenge von 100 sccm auf 420 sccm anstieg, erh\u00f6hte sich die Wachstumsrate des Films von 39 A\/min auf 106 \/min. Im Falle einer kleinen SiH4-Durchflussmenge variierte die Wachstumsrate des Polyphenylsilan-Films schnell mit der Zunahme der Silan-Durchflussmenge, die im Grunde eine lineare Wachstumsbeziehung war, und die inkrementelle Zunahme der Wachstumsrate des Films nahm ab, wenn die SiH4-Durchflussmenge weiterhin gr\u00f6\u00dfer wurde.<\/p><p>Str\u00f6mungsmechanik, dass, weil die feste Oberfl\u00e4che und die Fl\u00fcssigkeit zwischen einer bestimmten Reibung, wenn die Fl\u00fcssigkeit mit einer bestimmten Geschwindigkeit von der festen Oberfl\u00e4che flie\u00dfen durch, von der festen Oberfl\u00e4che der Fl\u00fcssigkeit ist sehr nah an der Str\u00f6mungsgeschwindigkeit der festen Oberfl\u00e4che ist 0, desto kleiner ist der Abstand in der N\u00e4he der festen Oberfl\u00e4che, die Fl\u00fcssigkeit unterliegt der Reibung ist auch desto gr\u00f6\u00dfer ist die Geschwindigkeit der Verringerung der mehr, von der festen Oberfl\u00e4che der Abstand erh\u00f6ht die Auswirkungen der entsprechenden Schw\u00e4chung. Diese d\u00fcnne Schicht in der N\u00e4he der festen Oberfl\u00e4che durch die Geschwindigkeit der Fl\u00fcssigkeit betroffen ist die Stagnationsschicht genannt. Steigt die Gasdurchflussrate, so verringert sich ihre Dicke entsprechend, und umgekehrt nimmt sie zu. Wenn also die Durchflussrate des Siliziums steigt, wird die stagnierende Schicht auf der Festk\u00f6rperoberfl\u00e4che d\u00fcnner, und die Anzahl der Reaktionsmolek\u00fcle, die die Oberfl\u00e4che erreichen, nimmt zu, wodurch das Wachstum des Films beschleunigt wird, d. h. im Falle einer niedrigen Durchflussrate ist die Wachstumsrate des polykristallinen Siliziumfilms mit der Erh\u00f6hung der Silan-Durchflussrate im Grunde eine lineare Wachstumsbeziehung. Wenn die Silan-Durchflussrate weiter erh\u00f6ht wird, wird auch weiterhin den Einfluss der stagnierenden Schicht auf die Fl\u00fcssigkeit zu reduzieren, kann die Ann\u00e4herung betrachtet werden, dass die Reaktanten k\u00f6nnen relativ frei sein, um die Substratoberfl\u00e4che zu erreichen, ist die Wachstumsrate nicht mehr mit der Silan-Durchflussrate erh\u00f6ht und \u00c4nderungen.<\/p><p>Um qualitativ hochwertige polykristalline Silizium-Filme vorzubereiten, reduzieren Gasphase Zersetzung und Nebenprodukte, in den eigentlichen Prozess, der Fluss von Silan sollte nicht zu gro\u00df sein, wenn die Silizium-Flow steigt auf fast 400sccm, die Abscheiderate w\u00e4chst langsam, und wenn die Silizium-Flow weiter zu erh\u00f6hen wird die Reaktion Gasphase Zersetzung, die die Qualit\u00e4t der polykristallinen Silizium-Filme.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-34a0973 elementor-widget elementor-widget-text-editor\" data-id=\"34a0973\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<h2>Auswirkung des Reaktionsdrucks auf die Wachstumsrate von polykristallinen Silizium-D\u00fcnnschichten<\/h2>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0a0915e elementor-widget elementor-widget-text-editor\" data-id=\"0a0915e\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Der Reaktionsdruck und die Gasdurchflussrate pro Zeiteinheit sind umgekehrt proportional zueinander, und wenn der Reaktionsdruck steigt, wird die Gasdurchflussrate pro Zeiteinheit langsam kleiner. Diese Ver\u00e4nderung f\u00fchrt zu zwei Ergebnissen: Zum einen wird der Gasdurchsatz pro Zeiteinheit verringert, so dass das Reaktionsgas mehr Zeit hat, auf der Oberfl\u00e4che des Substrats zu verbleiben, was dazu f\u00fchrt, dass die Gasmolek\u00fcle auf der Oberfl\u00e4che des Substrats vollst\u00e4ndig reagieren k\u00f6nnen, und die Wachstumsrate des Films wird gr\u00f6\u00dfer. In diesem Fall wird die Wachstumsrate des Films durch den Mechanismus der Oberfl\u00e4chenreaktionsrate gesteuert; im anderen Fall nimmt die Gasdurchflussrate pro Zeiteinheit ab, und die Zeit, in der eine bestimmte Menge an Reaktionsmolek\u00fclen die Substratoberfl\u00e4che erreicht, nimmt zu, wodurch die Wachstumsrate des Films geringer wird. In diesem Fall wird die Wachstumsrate des Films durch den Massentransportmechanismus gesteuert. Daher wird die tats\u00e4chliche Gr\u00f6\u00dfe der Wachstumsrate durch das Ergebnis der Konkurrenz zwischen den beiden oben genannten Kontrollmechanismen bestimmt. Daher kann das Muster der abnehmenden Wachstumsrate des Films bei steigendem Reaktionsdruck das Ergebnis eines Gleichgewichts zwischen diesen beiden Kontrollmechanismen sein.<\/p><p>Ein zu hoher Reaktionsdruck verschlechtert die Gleichm\u00e4\u00dfigkeit des Films, und ein zu niedriger Druck f\u00fchrt zu einer sehr langsamen Wachstumsrate, was die tats\u00e4chliche Verarbeitungsleistung beeintr\u00e4chtigt. Daher ist es wichtig, bei der Herstellung von Mehrprodukt-Siliziumschichten den richtigen Reaktionsdruck zu w\u00e4hlen.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a9ffc56 elementor-widget elementor-widget-text-editor\" data-id=\"a9ffc56\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Wir bieten <a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\">Chemische Gasphasenabscheidung (CVD) OEM-Anpassungsdienste<\/a>k\u00f6nnen Sie gerne einen Kommentar hinterlassen.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4571009 uael-mobile-wpf-button-justify uael-wpf-style-box uael-wpf-input-size-sm uael-wpf-button-left uael-wpf-btn-size-sm uael-wpf-highlight-style-default elementor-widget elementor-widget-uael-wpf-styler\" data-id=\"4571009\" data-element_type=\"widget\" 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srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8.png 640w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" >\n\t\t\t\tSubstitutionsverfahren durch Atomlagenabscheidung (ALD)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" aria-label=\"Lesen Sie mehr \u00fcber Atomic Layer Deposition (ALD) Foundry Processing\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7344 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png\" class=\"attachment-medium size-medium wp-image-7347\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1024x684.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-768x513.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1536x1025.png 1536w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/f394ed96-eaca-40cc-83f6-ebadaea95553-qlt2nzpy27w47wpv9hvjdczv85dnqtqc8q83uvppb4.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553.png 1600w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" >\n\t\t\t\tChemical Vapour Deposition (CVD) Generation Processing\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" aria-label=\"Lesen Sie mehr \u00fcber Chemical Vapour Deposition (CVD) Subcontracting\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7355 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png\" class=\"attachment-medium size-medium wp-image-7357\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-1024x683.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-768x512.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-qlti2lfsi53oh54jrq611wpt5lt6dogutrcqlbec0w.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932.png 1508w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" >\n\t\t\t\tPhysikalische Abscheidung aus der Gasphase (PVD) - Generative Verarbeitung\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" aria-label=\"Lesen Sie mehr \u00fcber Physical Vapour Deposition (PVD) Subcontracting\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-544d933 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"544d933\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 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class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7336 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/was-ist-physikalische-gasphasenabscheidung\/\" >\n\t\t\t\tPhysikalische Abscheidung aus der Gasphase (PVD) - Klassifizierung, Merkmale und Anwendungen\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Klassifizierung, Merkmale und Anwendungen der physikalischen Beschichtung aus der Gasphase (PVD) Physikalische Beschichtung aus der Gasphase<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/was-ist-physikalische-gasphasenabscheidung\/\" aria-label=\"Lesen Sie mehr \u00fcber die physikalische Gasphasenabscheidung (PVD) - Klassifizierung, Merkmale und Anwendungen\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-8065 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/prozess-prinzip-und-anwendung-der-optischen-beschichtung\/\" >\n\t\t\t\tVerfahrensprinzipien und Anwendungen optischer Beschichtungen\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Prinzipien und Anwendungen der optischen Beschichtungstechnologie Die Verfahrensprinzipien der optischen Beschichtung 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class=\"elementor-post__excerpt\">\n\t\t\t<p>Grunds\u00e4tze und Vorteile der plasmaunterst\u00fctzten chemischen Gasphasenabscheidung (PE-CVD)<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\/\" aria-label=\"Lesen Sie mehr \u00fcber die Grunds\u00e4tze und Vorteile der plasmaunterst\u00fctzten chemischen Gasphasenabscheidung (PE-CVD)\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-985f69b elementor-widget elementor-widget-heading\" data-id=\"985f69b\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title elementor-size-default\"><a 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