{"id":7641,"date":"2024-04-11T17:22:25","date_gmt":"2024-04-11T09:22:25","guid":{"rendered":"https:\/\/www.nanofab.com.cn\/?p=7641"},"modified":"2024-05-28T10:35:18","modified_gmt":"2024-05-28T02:35:18","slug":"what-is-plasma-enhanced-chemical-vapor-deposition","status":"publish","type":"post","link":"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\/","title":{"rendered":"Grunds\u00e4tze und Vorteile der plasmaunterst\u00fctzten chemischen Gasphasenabscheidung (PE-CVD)"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"7641\" class=\"elementor elementor-7641\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-5667dde elementor-section-stretched elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"5667dde\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;,&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-e6337a4\" data-id=\"e6337a4\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-f6d2728 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"f6d2728\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-c70d05a\" data-id=\"c70d05a\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-0ad4b87 elementor-widget elementor-widget-heading\" data-id=\"0ad4b87\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\">Grunds\u00e4tze und Vorteile der plasmaunterst\u00fctzten chemischen Gasphasenabscheidung (PE-CVD)<\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-77c5937 elementor-widget elementor-widget-post-info\" data-id=\"77c5937\" data-element_type=\"widget\" data-widget_type=\"post-info.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor\/assets\/css\/widget-icon-list.min.css\"><link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-theme-elements.min.css\">\t\t<ul class=\"elementor-icon-list-items elementor-post-info\">\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-repeater-item-577f4c4\" itemprop=\"datePublished\">\n\t\t\t\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/2024\/04\/11\/\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text elementor-post-info__item elementor-post-info__item--type-date\">\n\t\t\t\t\t\t\t\t\t\t<time>2024-04-11<\/time>\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/li>\n\t\t\t\t<\/ul>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8fe61de elementor-widget elementor-widget-image\" data-id=\"8fe61de\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-image{text-align:center}.elementor-widget-image a{display:inline-block}.elementor-widget-image a img[src$=\".svg\"]{width:48px}.elementor-widget-image img{vertical-align:middle;display:inline-block}<\/style>\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"1024\" height=\"768\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f-1024x768.png\" class=\"attachment-large size-large wp-image-7642\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f-1024x768.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f-300x225.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f-768x576.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f-1536x1152.png 1536w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f-16x12.png 16w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/87e4263384dd4792a72f1ee89c59d4f.png 1632w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7dff69c elementor-widget elementor-widget-text-editor\" data-id=\"7dff69c\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p data-v-md-line=\"5\">Die PECVD-Technologie wird eingesetzt als<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/was-ist-die-chemische-gasphasenabscheidung\/\">CVD<\/a>und<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/was-ist-physikalische-gasphasenabscheidung\/\">PVD<\/a>Die Abscheidetemperatur der PECVD-Technologie liegt in der Regel unter 600\u2103, was den Anwendungsbereich der Substratmaterialien erweitert und die Vorteile einer einfachen Ausr\u00fcstung, einer geringen Verformung des Werkst\u00fccks, einer guten Leistung der Bypass-Plattierung und einer gleichm\u00e4\u00dfigen Beschichtung usw. bietet. Sie \u00fcberwindet nicht nur die Nachteile der hohen Abscheidetemperatur der CVD-Technologie, sondern vermeidet auch die Probleme der schlechten Bypass-Plattierung und der komplexen Ausr\u00fcstung der PVD-Technologie. Die PECVD-Technologie \u00fcberwindet die Nachteile der hohen Abscheidetemperatur und der hohen Anforderungen an die Substratmaterialien der CVD-Technologie und vermeidet die Probleme der schlechten Bypass-Beschichtung und der komplizierten Anlagen der PVD-Technologie, was eine neue Art von D\u00fcnnschichtvorbereitungstechnologie mit gro\u00dfen Entwicklungsaussichten und Anwendungswert darstellt.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-c077655 elementor-widget elementor-widget-heading\" data-id=\"c077655\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Das Prinzip von PE-CVD<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6e3a25a elementor-widget elementor-widget-text-editor\" data-id=\"6e3a25a\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p data-v-md-line=\"17\">Es gibt viele Arten der plasmaunterst\u00fctzten chemischen Gasphasenabscheidung (kurz PECVD), wie z. B. DC-PECVD, gepulste DC-PECVD, PECVD mit metallorganischen Verbindungen, Hochfrequenz-PECVD, Mikrowellen-PECVD, Lichtbogen-PECVD usw. In den letzten Jahren wurden durch die gegenseitige Befruchtung verschiedener Beschichtungstechnologien PVD- und PECVD-integrierte Verbundstoffabscheidung, Partikelnitrierung und PECVD-integrierte Verbundstoffabscheidung im selben Ofen entwickelt. Nat\u00fcrlich wurden in den letzten Jahren durch die gegenseitige Befruchtung verschiedener Beschichtungstechnologien, PVD- und PECVD-integrierte Verbundwerkstoffabscheidung, Partikelnitrierung und PECVD-integrierte Verbundwerkstoffabscheidung im selben Ofen st\u00e4ndig neue Ger\u00e4te und Technologien entwickelt. Gegenw\u00e4rtig wird bei der industriellen Abscheidung von Hartstoffschichten \u00fcberwiegend die DC- und gepulste DC-PECVD-Technologie eingesetzt.<\/p><p data-v-md-line=\"17\">Die fr\u00fcheste Anwendung der PECVD war zusammen mit der Entwicklung der Halbleiterindustrie und erschien f\u00fcr die Verarbeitung von Halbleitermaterialien, dh die Verwendung von Silikon in der Halbleiter-Substrat Abscheidung von Si02. sp\u00e4ter auf der Grundlage der Merkmale der PECVD-Prozess ist besonders geeignet f\u00fcr die industrielle Produktion, begann das Verfahren in einer gro\u00dfen Anzahl von Mikroelektronik-Industrie (wie integrierte Schaltung Prozess, etc.), vor allem in der Abscheidung von gro\u00dffl\u00e4chigen Teilen der Schutzschicht und verschiedene isolierende Schichten und DLC-Filme verwendet werden. PECVD-Technologie ist die Verwendung von Hochspannungs-Elektrofeld in der Abscheidekammer angewandt, so dass die Reaktion Gas in einem bestimmten Druck und Anregungsquelle (zB: DC-Hochspannung, gepulste Stromversorgung, Hochfrequenz-oder Laser, etc.), die Elektronen in das elektrische Feld unter der beschleunigenden Wirkung der Energie gewonnen, und die neutralen Teilchen im Gas (Atome oder Molek\u00fcle auftretenden unelastischen Zusammensto\u00df, und dann die Ionisation von sekund\u00e4ren Elektronen, die wiederum weiter und die atomaren Teilchen im Gas, die sekund\u00e4ren Elektronen erzeugt. Sie sind weiter und Gasatome und Molek\u00fcle in der Kollision Ionisation und produzieren Elektronen, so wiederholt Kollision und Ionisation, wird es eine gro\u00dfe Anzahl von Elektronen und Ionen zu produzieren. Da die Anzahl der positiven und negativen Teilchen gleich ist, wird es als Plasma bezeichnet. Geladene Teilchen in der Kollision Prozess wird auch durch die Composite-und in neutrale Teilchen umgewandelt werden, und in Form einer Glimmentladung, um \u00fcbersch\u00fcssige Energie freizusetzen. Reaktionsgas wird in eine sehr aktive molekulare Hof, Ionen und atomaren Gruppen von Plasma, stark reduziert die Abscheidung Reaktionstemperatur, beschleunigen die chemische Reaktion, um die Abscheiderate zu verbessern angeregt.<\/p><p data-v-md-line=\"17\">Das Reaktionsgas wird in sehr aktive Molek\u00fcle, Atome, Ionen und Atomgruppen, die aus Plasma bestehen, angeregt, was die Abscheidungsreaktionstemperatur stark reduziert, den chemischen Reaktionsprozess beschleunigt und die Abscheidungsrate verbessert. Daher ist die allgemeine PECVD-Technologie Abscheidung Temperatur &lt;600 \u2103, die Erweiterung des Anwendungsbereichs des Substrats Material, mit einfacher Ausr\u00fcstung, kleine Verformung des Werkst\u00fccks, gute Leistung rund um die Beschichtung, Beschichtung Einheitlichkeit, Modulation der Zusammensetzung der Vorteile der Bequemlichkeit. Es \u00fcberwindet die M\u00e4ngel der hohen Abscheidungstemperatur und strenge Anforderungen an die Substratmaterialien der CVD-Technologie, und vermeidet die Probleme der schlechten Wicklung Beschichtung und komplexe Ausr\u00fcstung der PVD-Technologie, die sehr geeignet f\u00fcr die industrielle Produktion ist. Derzeit wird PECVD haupts\u00e4chlich in der MEMS-Industrie (z. B. bei integrierten Schaltkreisen) und bei der Herstellung feiner Schichten eingesetzt. Gleichzeitig wird die PECVD-Technologie auch in der bin\u00e4ren Optik, bei Solarfilmen, optischen Filmen mit Gradientenbrechungsindex und Anti-Laser-Schadensfilmen eingesetzt, da sie eine gute Gleichm\u00e4\u00dfigkeit und Stufenabdeckung, dichte abgeschiedene Filme, eine hohe Haftkraft zwischen der Filmschicht und dem Substrat und eine schnelle Abscheidungsgeschwindigkeit bietet.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0b5eb74 elementor-widget elementor-widget-heading\" data-id=\"0b5eb74\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Vorteile von PE-CVD<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-21e5768 elementor-widget elementor-widget-text-editor\" data-id=\"21e5768\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Mit dem PECVD-Verfahren k\u00f6nnen verschiedene Schichten hergestellt werden, indem die Prozessparameter variiert werden, z. B. Reaktivgasdurchsatz, Reaktivgasverh\u00e4ltnis, HF-Leistung, Kammerdruck, Abscheidungstemperatur, Schichtdicke usw., was zu erheblichen Ver\u00e4nderungen der Schichteigenschaften, insbesondere der optischen und mechanischen Eigenschaften, f\u00fchren kann.<\/p><p>Zum Beispiel f\u00fcr PECVD Vorbereitung von SiO2 Filme, wenn die HF-Leistung erh\u00f6ht wird, die Aktivierungsrate des Reaktionsgases erh\u00f6ht wird, so dass die Struktur des Films wird relativ dicht, und die Einheitlichkeit wird entsprechend verbessert werden. Aber wenn die Leistung zu hoch ist, f\u00fcr die Reaktion wird die SiO2 durch die Abscheiderate ist zu schnell, aber dazu f\u00fchren, dass die Filmstruktur ist locker, Vakuum Dichte erh\u00f6ht, Wiederholbarkeit wird auch sinken, was zu schlechten Einheitlichkeit, wenn die Hochfrequenz-Leistung ist zu hoch, und sogar Strahlung Sch\u00e4den an dem Substrat. Die Temperatur des Substrats ist ebenfalls ein wichtiger Faktor, der sich auf die Gleichm\u00e4\u00dfigkeit des Films auswirkt. Wenn die Temperatur des Substrats steigt, erh\u00f6ht sich die Energie der auf der Oberfl\u00e4che des Substrats abgeschiedenen Teilchen, was zu einer Zunahme der Mobilit\u00e4t der Teilchen auf der Oberfl\u00e4che des Tr\u00e4gers f\u00fchrt und die M\u00f6glichkeit vergr\u00f6\u00dfert, dass sich diese Teilchen in Clustern oder Inseln bewegen, was sich direkt auf die Gleichm\u00e4\u00dfigkeit des Films auswirkt. Andererseits erleichtert eine Erh\u00f6hung der Temperatur des Tr\u00e4germaterials das Auff\u00fcllen von Defekten in der Filmoberfl\u00e4che durch die Partikel.<\/p><p><strong>Daher hat die PECVD-Methode zur Herstellung optischer Schichten viele Vorteile, die andere Methoden nicht haben.<\/strong><\/p><p>(1) Die Reaktanten und Nebenprodukte sind Gase, und die Struktur ist im Vergleich zu PVD- und CVD-Anlagen einfach.<\/p><p>(2) Schnelle Reaktionsabscheidungsrate, insbesondere f\u00fcr D\u00fcnnschichtmaterialien mit hohem Brechungsindex, wie a-Si, TiO2 usw.<\/p><p>(3) Die Zusammensetzung des Films kann weitgehend beliebig eingestellt werden, und es k\u00f6nnen optische Filme mit einer Vielzahl von Materialien mit mittlerem Brechungsindex hergestellt werden, wie z. B. SiCO:H, SiN:H, SiOxNy, SiOxFy usw.<\/p><p>(4) Niederschlag Film Struktur ist vollst\u00e4ndig und dicht, gute Haftung mit dem Substrat<\/p><p>(5) Hervorragende Stufendeckung<\/p><p>(6) Es kann eine glatte Ablagerungsoberfl\u00e4che erzielt werden.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f591a9b elementor-widget elementor-widget-spacer\" data-id=\"f591a9b\" data-element_type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-column .elementor-spacer-inner{height:var(--spacer-size)}.e-con{--container-widget-width:100%}.e-con-inner>.elementor-widget-spacer,.e-con>.elementor-widget-spacer{width:var(--container-widget-width,var(--spacer-size));--align-self:var(--container-widget-align-self,initial);--flex-shrink:0}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container,.e-con>.elementor-widget-spacer>.elementor-widget-container{height:100%;width:100%}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer,.e-con>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer{height:100%}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer>.elementor-spacer-inner,.e-con>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer>.elementor-spacer-inner{height:var(--container-widget-height,var(--spacer-size))}.e-con-inner>.elementor-widget-spacer.elementor-widget-empty,.e-con>.elementor-widget-spacer.elementor-widget-empty{position:relative;min-height:22px;min-width:22px}.e-con-inner>.elementor-widget-spacer.elementor-widget-empty .elementor-widget-empty-icon,.e-con>.elementor-widget-spacer.elementor-widget-empty .elementor-widget-empty-icon{position:absolute;top:0;bottom:0;left:0;right:0;margin:auto;padding:0;width:22px;height:22px}<\/style>\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2483e7e elementor-widget elementor-widget-text-editor\" data-id=\"2483e7e\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Wir bieten <a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\">Plasmaunterst\u00fctzte chemische Gasphasenabscheidung (PE-CVD) OEM-Anpassungsdienste<\/a>k\u00f6nnen Sie gerne einen Kommentar hinterlassen.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-cd43023 uael-mobile-wpf-button-justify uael-wpf-style-box uael-wpf-input-size-sm uael-wpf-button-left uael-wpf-btn-size-sm uael-wpf-highlight-style-default elementor-widget elementor-widget-uael-wpf-styler\" data-id=\"cd43023\" data-element_type=\"widget\" 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srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8.png 640w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" >\n\t\t\t\tSubstitutionsverfahren durch Atomlagenabscheidung (ALD)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" aria-label=\"Lesen Sie mehr \u00fcber Atomic Layer Deposition (ALD) Foundry Processing\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7344 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png\" class=\"attachment-medium size-medium wp-image-7347\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1024x684.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-768x513.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1536x1025.png 1536w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/f394ed96-eaca-40cc-83f6-ebadaea95553-qlt2nzpy27w47wpv9hvjdczv85dnqtqc8q83uvppb4.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553.png 1600w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" >\n\t\t\t\tChemical Vapour Deposition (CVD) Generation Processing\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" aria-label=\"Lesen Sie mehr \u00fcber Chemical Vapour Deposition (CVD) Subcontracting\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7355 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png\" class=\"attachment-medium size-medium wp-image-7357\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-1024x683.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-768x512.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-qlti2lfsi53oh54jrq611wpt5lt6dogutrcqlbec0w.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932.png 1508w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" >\n\t\t\t\tPhysikalische Abscheidung aus der Gasphase (PVD) - Generative Verarbeitung\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" aria-label=\"Lesen Sie mehr \u00fcber Physical Vapour Deposition (PVD) Subcontracting\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0be945d elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"0be945d\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 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class=\"elementor-widget-container\">\n\t\t\t<div class=\"elementor-heading-title elementor-size-default\">Verwandte Lekt\u00fcre<\/div>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3919c66 elementor-grid-1 elementor-posts--thumbnail-none elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-widget elementor-widget-posts\" data-id=\"3919c66\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-5487 post type-post status-publish format-standard has-post-thumbnail hentry category-application tag-app-silicon-nitride-window\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/anwendung-von-siliziumnitrid-dunnschicht-fenstern-2\/\" >\n\t\t\t\tSiliziumnitrid-D\u00fcnnschicht-Fensteranwendungen Materialwissenschaft\u4e28Halbleiter\u4e28Biowissenschaft\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Siliziumnitrid-D\u00fcnnschicht-Fensterprodukte werden in einer Vielzahl von Anwendungen in der Materialwissenschaft, der Halbleiterproduktion und -analyse sowie der Biowissenschaft eingesetzt. Unsere hochwertigen Produkte bieten hochaufl\u00f6sende Bildgebungsm\u00f6glichkeiten f\u00fcr eine Vielzahl von Probentypen und -gr\u00f6\u00dfen.<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/anwendung-von-siliziumnitrid-dunnschicht-fenstern-2\/\" aria-label=\"Lesen Sie mehr \u00fcber Siliziumnitrid-D\u00fcnnschicht-Fensteranwendungen Materialwissenschaft\u4e28Halbleiter\u4e28Biowissenschaft\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7744 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/faktoren-die-die-oberflacheneigenschaften-von-polysilizium-filmen-beeinflussen\/\" >\n\t\t\t\tPolysiliziumfilm\u4e28Verschiedene Faktoren, die die Oberfl\u00e4cheneigenschaften von Polysiliziumfilm beeinflussen\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Polysiliziumfilm\u4e28Verschiedene Faktoren, die die Oberfl\u00e4cheneigenschaften beeinflussen, wachsender Polysiliziumfilm<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/faktoren-die-die-oberflacheneigenschaften-von-polysilizium-filmen-beeinflussen\/\" aria-label=\"Lesen Sie mehr \u00fcber Polysilizium-D\u00fcnnschichten\u4e28Verschiedene Faktoren, die die Oberfl\u00e4cheneigenschaften von Polysilizium-D\u00fcnnschichten beeinflussen\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7754 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/auswirkung-von-stress-auf-dunnschichtfilme-2\/\" >\n\t\t\t\tD\u00fcnne Schichten aus polykristallinem Silizium\u4e28Auswirkungen von Spannungen auf d\u00fcnne Schichten\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Polykristalliner Silizium-D\u00fcnnfilm\u4e28Auswirkungen von Spannungen auf den D\u00fcnnfilm Wenn der Film auf dem Substrat befestigt ist<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/auswirkung-von-stress-auf-dunnschichtfilme-2\/\" aria-label=\"Lesen Sie mehr \u00fcber Polykristalline Siliziumd\u00fcnnschichten\u4e28Auswirkungen von Spannungen auf d\u00fcnne Schichten\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-35f6d81 elementor-widget elementor-widget-heading\" data-id=\"35f6d81\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title elementor-size-default\"><a href=\"https:\/\/www.nanofab.com.cn\/de\/einblicke-2\/\">Mehr dazu...<\/a><\/p>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>Grunds\u00e4tze und Vorteile der plasmaunterst\u00fctzten chemischen Gasphasenabscheidung (PE-CVD) Die PECVD-Technologie wurde als Erg\u00e4nzung zu CVD und PVD entwickelt [...]<\/p>","protected":false},"author":3,"featured_media":7642,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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