{"id":7564,"date":"2024-04-07T16:05:56","date_gmt":"2024-04-07T08:05:56","guid":{"rendered":"https:\/\/www.nanofab.com.cn\/?p=7564"},"modified":"2024-05-28T10:08:14","modified_gmt":"2024-05-28T02:08:14","slug":"learn-more-about-magnetron-sputtering","status":"publish","type":"post","link":"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/mehr-uber-das-magnetronsputtern-erfahren\/","title":{"rendered":"Einfluss des Magnetron-Sputterns auf die Qualit\u00e4t von D\u00fcnnschichten"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"7564\" class=\"elementor elementor-7564\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-f85c8c0 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"f85c8c0\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-c7240c1\" data-id=\"c7240c1\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-522706d elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"522706d\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-cda05eb\" data-id=\"cda05eb\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-0f1f3d2 elementor-widget elementor-widget-heading\" data-id=\"0f1f3d2\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\">Einfluss des Magnetron-Sputterns auf die Qualit\u00e4t von D\u00fcnnschichten<\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-dc4ae23 elementor-widget elementor-widget-post-info\" data-id=\"dc4ae23\" data-element_type=\"widget\" data-widget_type=\"post-info.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor\/assets\/css\/widget-icon-list.min.css\"><link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-theme-elements.min.css\">\t\t<ul class=\"elementor-icon-list-items elementor-post-info\">\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-repeater-item-577f4c4\" itemprop=\"datePublished\">\n\t\t\t\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/2024\/04\/07\/\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text elementor-post-info__item elementor-post-info__item--type-date\">\n\t\t\t\t\t\t\t\t\t\t<time>2024-04-07<\/time>\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/li>\n\t\t\t\t<\/ul>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b7b740c elementor-widget elementor-widget-image\" data-id=\"b7b740c\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-image{text-align:center}.elementor-widget-image a{display:inline-block}.elementor-widget-image a img[src$=\".svg\"]{width:48px}.elementor-widget-image img{vertical-align:middle;display:inline-block}<\/style>\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"626\" height=\"417\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/2d15739bf0a5e9ed9318664d145f9d4.png\" class=\"attachment-large size-large wp-image-7565\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/2d15739bf0a5e9ed9318664d145f9d4.png 626w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/2d15739bf0a5e9ed9318664d145f9d4-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/2d15739bf0a5e9ed9318664d145f9d4-18x12.png 18w\" sizes=\"(max-width: 626px) 100vw, 626px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-496e604 elementor-widget elementor-widget-text-editor\" data-id=\"496e604\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p><a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/was-ist-magnetron-sputtern-2\/\">Magnetronzerst\u00e4ubung<\/a>Die Vorteile liegen in der hohen Geschwindigkeit, der niedrigen Temperatur, der geringen Besch\u00e4digung usw. Insbesondere ist es einfach, kontinuierlich gro\u00dffl\u00e4chige Schichten zu erzeugen, was f\u00fcr die Automatisierung und die Massenproduktion von Vorteil ist. In den letzten Jahren wurde das Magnetron-Sputtern in gro\u00dfem Umfang in integrierten Schaltkreisen, elektronischen Bauteilen, magnetischen und optischen Aufzeichnungen, Flachbildschirmen sowie in der Optik, im Energiesektor, im Maschinenbau und in anderen Industriezweigen eingesetzt.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d4306e5 elementor-widget elementor-widget-heading\" data-id=\"d4306e5\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Quellen f\u00fcr die Magnetronzerst\u00e4ubung<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-04a0293 elementor-widget elementor-widget-text-editor\" data-id=\"04a0293\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Die Plasma-Sputter-Beschichtung ist ein<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/was-ist-physikalische-gasphasenabscheidung\/\">Physikalische Abscheidung aus der Gasphase (PVD)<\/a>die seit Jahrzehnten als flexible, zuverl\u00e4ssige und wirksame Methode zur Abscheidung d\u00fcnner Schichten eingesetzt wird. Im 19. Jahrhundert beobachtete Grove Ablagerungen, als er eine Gleichstrom-Glimmentladung zur Untersuchung der elektrochemischen Polarit\u00e4t eines Gases verwendete. In den 1930er Jahren wurde die Sputterdeposition von D\u00fcnnschichten kommerziell genutzt. Die fr\u00fche Sputterabscheidung basierte auf dem kathodischen Sputtern oder dem DC-Diodensputtern. Mit der Verbesserung der Vakuumtechnik in den sp\u00e4ten 1950er und fr\u00fchen 1960er Jahren erkannte man jedoch, dass eine breite Palette leitf\u00e4higer Materialien durch Gleichstromzerst\u00e4ubung abgeschieden werden konnte. Gleichzeitig nutzten die Bell Laboratories und Western Electric in den fr\u00fchen 1960er Jahren das Sputtern zur Herstellung von Tantalschichten f\u00fcr integrierte Schaltkreise und begannen so mit der industriellen Anwendung des Verfahrens. Nach einem kontroversen Start entwickelte sich das Magnetron-Sputtern in den sp\u00e4ten 1970er und fr\u00fchen 1980er Jahren aufgrund der hohen Abscheidungsraten der abgedeckten Metallschichten rasch weiter und ist seither die Hauptst\u00fctze der Plasmasputterabscheidung. Das Magnetron-Sputterverfahren ist auch das am weitesten verbreitete Verfahren f\u00fcr die Abscheidung von D\u00fcnnschichten und die Oberfl\u00e4chenbehandlung.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-397279d elementor-widget elementor-widget-heading\" data-id=\"397279d\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Prinzip des Magnetronsputterns<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e9cbffa elementor-widget elementor-widget-text-editor\" data-id=\"e9cbffa\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Die Sputterbeschichtung ist ein Verfahren, bei dem ein Plasma auf der Oberfl\u00e4che eines Zielmaterials erzeugt und die Oberfl\u00e4che des Ziels mit energiegeladenen Teilchen im Plasma beschossen wird, so dass die gesputterten Teilchen eine Beschichtung auf der Oberfl\u00e4che des Substrats bilden, d. h. ein Film wird durch das Sputterph\u00e4nomen gebildet. Je nach Struktur und relativer Position der Elektroden und des Verfahrens der Sputterbeschichtung kann man zwischen DC-Sekund\u00e4rsputtern, Terti\u00e4rsputtern (einschlie\u00dflich Quadrupolsputtern), Magnetronsputtern, Sputtern mit entgegengesetztem Target und ECR-Sputtern unterscheiden.<\/p><p>Physikalische Abscheidungsmethoden haben in der Regel nur wenige Beschr\u00e4nkungen hinsichtlich des auf dem Substrat abzuscheidenden Materials und k\u00f6nnen praktisch jedes Material abscheiden. Der grundlegende physikalische Prozess des Plasmasputterns ist der Impulsaustausch zwischen energetischen Stoffen und Atomen innerhalb des Kathodentargets. Bei den energetischen Stoffen handelt es sich in der Regel um Ionen inerter Edelgase, da diese leichter durch die Kathodenh\u00fclle zum Kathodentarget beschleunigt werden k\u00f6nnen als neutrale Atome. Sputtering-Beschichtungen bieten viele Vorteile gegen\u00fcber herk\u00f6mmlichen Vakuumbeschichtungen. Zum Beispiel, die Film-Schicht und das Substrat Haftung, kann bequem zu produzieren hohen Schmelzpunkt Film, in einem gro\u00dfen Bereich kontinuierlichen Substrat kann einheitliche Film-Schicht, leicht zu kontrollieren, die Film-Zusammensetzung, kann eine Vielzahl von verschiedenen Zusammensetzung und das Verh\u00e4ltnis der Legierung Film, kann durchgef\u00fchrt werden, um reaktive Sputtern, produzieren eine Vielzahl von Verbindungen Film, kann bequem mit einem Multilayer-Film plattiert werden, leicht zu industrialisieren die Produktion von leicht zu realisieren die Kontinuit\u00e4t der Automatisierung, und andere Operationen. In den letzten Jahren, Magnetron-Sputter-Technologie in der Erh\u00f6hung der Metall-Ionisation, Verbesserung der Ziel-Nutzung, Verbesserung der Abscheiderate und vermeiden die Vergiftung des Ziels in der Reaktion Sputtern und andere Aspekte der kontinuierlichen Entwicklung. Die Oberfl\u00e4che des Magnetron-Targets wird ungleichm\u00e4\u00dfig zerst\u00e4ubt. Entlang der Bahn, auf der sich die Elektronen entlang der Spinnradlinie bewegen, wird ein Teil der Targetoberfl\u00e4che bevorzugt von Ionen besputtert, wodurch Sputterrillen entstehen. Es hat sich gezeigt, dass die Korngr\u00f6\u00dfe des Targets, die Mikromorphologie der Oberfl\u00e4che usw. eine wichtige Rolle bei der Herstellung d\u00fcnner Schichten spielen.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2316b1e elementor-widget elementor-widget-heading\" data-id=\"2316b1e\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Gr\u00fcnde, die die Qualit\u00e4t von magnetrongesputterten Schichten beeinflussen<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4d24990 elementor-widget elementor-widget-text-editor\" data-id=\"4d24990\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p><strong>Zerst\u00e4ubungsdruck<\/strong><\/p><p>Die Hauptwirkung des Sputterluftdrucks ist die Energie der gesputterten Ionen, und das Energieniveau der Ionen beeinflusst die F\u00e4higkeit der Ionen zu wandern und zu diffundieren, wenn sie das Substrat erreichen, was sich auf den spezifischen Widerstand, die Gl\u00e4tte der Oberfl\u00e4che usw. auswirkt. Dar\u00fcber hinaus hat der Arbeitsluftdruck einen zweifachen Einfluss auf die Sputterausbeute. Einerseits erh\u00f6ht er die Wahrscheinlichkeit des Zusammensto\u00dfes von Elektronen mit Ar-Gas-Atomen, was die Wahrscheinlichkeit des Zusammensto\u00dfes von ionisierten Ar-Gas-Atomen erh\u00f6ht, was die Menge an ionisiertem Ar-Gas vergr\u00f6\u00dfert und somit mehr Zielatome heraussputtern l\u00e4sst. Andererseits f\u00fchrt dies dazu, dass die Gasmolek\u00fcle beim Beschuss h\u00e4ufig mit den Zielatomen kollidieren, wodurch sich die Rate der auf dem Substrat abgeschiedenen Atome verringert.<\/p><p><strong>Sputterleistung<\/strong><\/p><p>Eine Erh\u00f6hung der Sputterleistung kann die Sputterrate steigern, die Schichtverdichtung erh\u00f6hen und die Qualit\u00e4t der Schicht verbessern. Eine zu hohe Sputterleistung kann jedoch die Wahrscheinlichkeit von Atomkollisionen erh\u00f6hen und die Abscheidungseffizienz verringern.<\/p><p><strong>Vorspannung<\/strong><\/p><p>Bei der Sputterbeschichtung kann der Beschuss des Substrats mit Ionen die Struktur und Morphologie der abgeschiedenen Schicht erheblich beeintr\u00e4chtigen. Das Anlegen einer entsprechenden negativen Spannung an das Substrat kann sowohl die Beschusswirkung verst\u00e4rken, was zu einer relativ glatten Schichtoberfl\u00e4che f\u00fchrt, als auch den Anteil und das Volumen der L\u00f6cher verringern. Diese Eigenschaften sind das Ergebnis der durch den Ionenbeschuss ausgel\u00f6sten Migration der abgeschiedenen Atome auf der Substratoberfl\u00e4che.<\/p><p><strong>Aushilfe<\/strong><\/p><p>Die Oberfl\u00e4chenmorphologie von aufgesputterten Schichten wird in erster Linie von der Substrattemperatur und in geringerem Ma\u00dfe von der Bindung zwischen der Schicht und dem Substrat beeinflusst.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-bca819a elementor-widget elementor-widget-text-editor\" data-id=\"bca819a\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Wir bieten <a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\">Magnetron-Sputter-Gie\u00dfereidienstleistung nach Ma\u00df<\/a>k\u00f6nnen 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srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8.png 640w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" >\n\t\t\t\tSubstitutionsverfahren durch Atomlagenabscheidung (ALD)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" aria-label=\"Lesen Sie mehr \u00fcber Atomic Layer Deposition (ALD) Foundry Processing\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7344 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png\" class=\"attachment-medium size-medium wp-image-7347\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1024x684.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-768x513.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1536x1025.png 1536w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/f394ed96-eaca-40cc-83f6-ebadaea95553-qlt2nzpy27w47wpv9hvjdczv85dnqtqc8q83uvppb4.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553.png 1600w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" >\n\t\t\t\tChemical Vapour Deposition (CVD) Generation Processing\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" aria-label=\"Lesen Sie mehr \u00fcber Chemical Vapour Deposition (CVD) Subcontracting\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7355 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png\" class=\"attachment-medium size-medium wp-image-7357\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png 300w, 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>\n\t\t\t\tPhysikalische Abscheidung aus der Gasphase (PVD) - Generative Verarbeitung\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" aria-label=\"Lesen Sie mehr \u00fcber Physical Vapour Deposition (PVD) Subcontracting\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8654780 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"8654780\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 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class=\"elementor-widget-container\">\n\t\t\t<div class=\"elementor-heading-title elementor-size-default\">Verwandte Lekt\u00fcre<\/div>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3d93ede elementor-grid-1 elementor-posts--thumbnail-none elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-widget elementor-widget-posts\" data-id=\"3d93ede\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-5487 post type-post status-publish format-standard has-post-thumbnail hentry category-application tag-app-silicon-nitride-window\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/anwendung-von-siliziumnitrid-dunnschicht-fenstern-2\/\" >\n\t\t\t\tSiliziumnitrid-D\u00fcnnschicht-Fensteranwendungen Materialwissenschaft\u4e28Halbleiter\u4e28Biowissenschaft\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Siliziumnitrid-D\u00fcnnschicht-Fensterprodukte werden in einer Vielzahl von Anwendungen in der Materialwissenschaft, der Halbleiterproduktion und -analyse sowie der Biowissenschaft eingesetzt. Unsere hochwertigen Produkte bieten hochaufl\u00f6sende Bildgebungsm\u00f6glichkeiten f\u00fcr eine Vielzahl von Probentypen und -gr\u00f6\u00dfen.<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/anwendung-von-siliziumnitrid-dunnschicht-fenstern-2\/\" aria-label=\"Lesen Sie mehr \u00fcber Siliziumnitrid-D\u00fcnnschicht-Fensteranwendungen Materialwissenschaft\u4e28Halbleiter\u4e28Biowissenschaft\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7744 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/faktoren-die-die-oberflacheneigenschaften-von-polysilizium-filmen-beeinflussen\/\" >\n\t\t\t\tPolysiliziumfilm\u4e28Verschiedene Faktoren, die die Oberfl\u00e4cheneigenschaften von Polysiliziumfilm beeinflussen\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Polysiliziumfilm\u4e28Verschiedene Faktoren, die die Oberfl\u00e4cheneigenschaften beeinflussen, wachsender Polysiliziumfilm<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/faktoren-die-die-oberflacheneigenschaften-von-polysilizium-filmen-beeinflussen\/\" aria-label=\"Lesen Sie mehr \u00fcber Polysilizium-D\u00fcnnschichten\u4e28Verschiedene Faktoren, die die Oberfl\u00e4cheneigenschaften von Polysilizium-D\u00fcnnschichten beeinflussen\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7816 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/eigenschaften-und-anwendungen-des-magnetronsputterns-zur-herstellung-von-vanadium-dioxid\/\" >\n\t\t\t\tWas sind die Eigenschaften und Anwendungen von Vanadiumdioxid, das durch Magnetronsputtern hergestellt wird?\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Was sind die Merkmale und Anwendungen von Vanadiumdioxid, das durch Magnetronsputtern hergestellt wird Magnetronsputtern<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/eigenschaften-und-anwendungen-des-magnetronsputterns-zur-herstellung-von-vanadium-dioxid\/\" aria-label=\"Lesen Sie mehr \u00fcber die Eigenschaften und Anwendungen von Vanadiumdioxid, das durch Magnetronsputtern hergestellt wird?\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-18d890d elementor-widget elementor-widget-heading\" data-id=\"18d890d\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title elementor-size-default\"><a href=\"https:\/\/www.nanofab.com.cn\/de\/einblicke-2\/\">Mehr dazu...<\/a><\/p>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>Magnetronsputtern\u4e28Einfluss auf die Qualit\u00e4t des Films Magnetronsputtern hat die Vorteile von hoher Geschwindigkeit, niedriger Temperatur, geringer Besch\u00e4digung, besonders einfach, um kontinuierlich gro\u00dffl\u00e4chige 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