{"id":7553,"date":"2024-04-03T17:08:10","date_gmt":"2024-04-03T09:08:10","guid":{"rendered":"https:\/\/www.nanofab.com.cn\/?p=7553"},"modified":"2024-06-12T11:58:30","modified_gmt":"2024-06-12T03:58:30","slug":"what-is-magnetron-sputtering","status":"publish","type":"post","link":"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/was-ist-magnetron-sputtern-2\/","title":{"rendered":"Magnetronsputtern\u4e28Verst\u00e4ndnis des Prinzips, der Klassifizierung und der Vorteile"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"7553\" class=\"elementor elementor-7553\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-55f65a8 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"55f65a8\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-56c63af\" data-id=\"56c63af\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-0095cc0 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"0095cc0\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-d5f3ef0\" data-id=\"d5f3ef0\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-b85b8ad elementor-widget elementor-widget-heading\" data-id=\"b85b8ad\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\">Was ist Magnetronsputtern?<\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-75bdda3 elementor-widget elementor-widget-post-info\" data-id=\"75bdda3\" data-element_type=\"widget\" data-widget_type=\"post-info.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor\/assets\/css\/widget-icon-list.min.css\"><link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-theme-elements.min.css\">\t\t<ul class=\"elementor-icon-list-items elementor-post-info\">\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-repeater-item-577f4c4\" itemprop=\"datePublished\">\n\t\t\t\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/2024\/04\/03\/\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text elementor-post-info__item elementor-post-info__item--type-date\">\n\t\t\t\t\t\t\t\t\t\t<time>2024-04-03<\/time>\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/li>\n\t\t\t\t<\/ul>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-cde9460 elementor-widget elementor-widget-image\" data-id=\"cde9460\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-image{text-align:center}.elementor-widget-image a{display:inline-block}.elementor-widget-image a img[src$=\".svg\"]{width:48px}.elementor-widget-image img{vertical-align:middle;display:inline-block}<\/style>\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"800\" height=\"450\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/b983fc3dbbd093a77ef12ccc39b7999.png\" class=\"attachment-large size-large wp-image-7554\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/b983fc3dbbd093a77ef12ccc39b7999.png 800w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/b983fc3dbbd093a77ef12ccc39b7999-300x169.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/b983fc3dbbd093a77ef12ccc39b7999-768x432.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/b983fc3dbbd093a77ef12ccc39b7999-18x10.png 18w\" sizes=\"(max-width: 800px) 100vw, 800px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-60bedbb elementor-widget elementor-widget-text-editor\" data-id=\"60bedbb\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p>Magnetronsputtern ist ein h\u00e4ufig verwendetes<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/was-ist-physikalische-gasphasenabscheidung\/\">PVD<\/a>Bei den Verfahren zur Herstellung von D\u00fcnnschichten, die auf den Grunds\u00e4tzen des Ionenbeschusses und der Zerst\u00e4ubung beruhen, werden hochfrequente elektrische und statische Magnetfelder in einer Vakuumumgebung angelegt. Bei diesem Verfahren wird das Material in Form eines Targets hergestellt, das sich in einer Vakuumkammer befindet. Durch Anlegen des elektrischen Feldes bildet sich auf der Oberfl\u00e4che des Targets ein Plasma, w\u00e4hrend das statische Magnetfeld Ionen aus dem Plasma zum Beschuss auf die Oberfl\u00e4che des Targets lenkt. Die beschossene Oberfl\u00e4che des Targets setzt Atome oder Molek\u00fcle frei, die sich mit hoher Geschwindigkeit auf der Substratoberfl\u00e4che ablagern und einen d\u00fcnnen Film bilden.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-19363b6 elementor-widget elementor-widget-heading\" data-id=\"19363b6\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Prinzip des Magnetronsputterns<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5d08364 elementor-widget elementor-widget-text-editor\" data-id=\"5d08364\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Sputtering-Beschichtung ist der Prozess des Sputterns durch Partikelbeschuss des Zielmaterials, der Atome oder Ionen auf das Substrat schie\u00dft und sie auf dem Substrat ablagert, um eine Filmschicht zu bilden. Magnetronsputtern ist in der bipolaren Glimmentladung, wenn das zus\u00e4tzliche Magnetfeld, Elektronen durch das elektrische Feld zur gleichen Zeit durch das Magnetfeld gebunden beschleunigt werden, war eine Pendelbewegung, die Verbesserung der Kollisionsfrequenz von Elektronen und Zielteilchen und Arbeitsgas-Ionen, die Arbeitsgas-Ionisationsgrad erh\u00f6ht, wird der Arbeitsgasdruck reduziert, und die Arbeitsgas-Ionen werden durch das elektrische Feld beschleunigt, die Auswirkungen des Ziels und die Freisetzung von Energie auf das Ziel, um Atome oder Ionen aus Zielmaterial geschossen, wird die Filmschicht auf der Oberfl\u00e4che des Substrats abgeschieden. Eine Filmschicht wird auf der Oberfl\u00e4che abgeschieden.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9aeb39b elementor-widget elementor-widget-heading\" data-id=\"9aeb39b\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Klassifizierung des Magnetronsputterns<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5a0abf3 elementor-widget elementor-widget-text-editor\" data-id=\"5a0abf3\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<h5>Klassifizierung nach Magnetfeldkonfiguration<\/h5>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-88967de elementor-widget elementor-widget-text-editor\" data-id=\"88967de\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Planare Magnetronzerst\u00e4ubung (PMS)<\/p><ul><li>Konventionelle Magnetron-Sputter-Konfiguration mit Magnetfeld parallel zur Target-Oberfl\u00e4che.<\/li><li>Geeignet f\u00fcr die gleichm\u00e4\u00dfige Ablagerung auf gro\u00dfen Fl\u00e4chen.<\/li><\/ul><p>Rotations-Target-Magnetron-Sputtern (RMS)<\/p><ul><li>Die Zielscheibe wird in eine zylindrische Form gedreht, um die Lebensdauer der Zielscheibe zu verl\u00e4ngern.<\/li><li>Ideal f\u00fcr die Abscheidung von Schichten, die gro\u00dfe Fl\u00e4chen und hohe Gleichm\u00e4\u00dfigkeit erfordern.<\/li><\/ul><p>Zwei-Target-Magnetron-Sputtern (DMS)<\/p><ul><li>Es werden zwei magnetisch gesteuerte Targets verwendet, um die Ladungsansammlung auf der Targetoberfl\u00e4che w\u00e4hrend des Entladungsprozesses zu minimieren.<\/li><li>Verbessert die Sputtereffizienz und die Gleichm\u00e4\u00dfigkeit der Schichten und eignet sich f\u00fcr die Herstellung von elektrisch isolierenden Schichten.<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-61a39a0 elementor-widget elementor-widget-text-editor\" data-id=\"61a39a0\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<h5>Klassifizierung nach Prozessgas<\/h5>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9166bdc elementor-widget elementor-widget-text-editor\" data-id=\"9166bdc\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>DC-Magnetron-Sputtering (DC-Magnetron-Sputtering)<\/p><ul><li>Sputtern mit DC-Stromversorgung f\u00fcr leitende Targets.<\/li><li>Das Verfahren ist einfach und eignet sich f\u00fcr die Abscheidung von d\u00fcnnen Metallschichten.<\/li><\/ul><p>RF-Magnetron-Sputtering (RFMS)<\/p><ul><li>Sputtern mit RF-Stromversorgungen f\u00fcr leitende und nichtleitende Targets.<\/li><li>Geeignet f\u00fcr die Herstellung von isolierenden Schichten wie Oxiden und Nitriden.<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7fac34c elementor-widget elementor-widget-text-editor\" data-id=\"7fac34c\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<h5>Klassifizierung nach Ablagerungsumgebung<\/h5>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-c20ed8d elementor-widget elementor-widget-text-editor\" data-id=\"c20ed8d\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Reaktive Magnetronzerst\u00e4ubung (RMS)<\/p><ul><li>Dem Argongas werden Reaktionsgase (z. B. Sauerstoff, Stickstoff) zugesetzt, die mit dem Zielmaterial chemisch reagieren und einen Verbundfilm bilden.<\/li><li>Geeignet f\u00fcr die Herstellung von Oxid-, Nitrid- und anderen Funktionsschichten.<\/li><\/ul><p>Nicht-reaktives Magnetron-Sputtern (NRMS)<\/p><ul><li>Sputtern unter ausschlie\u00dflicher Verwendung von Inertgasen (z. B. Argon) zur Abscheidung d\u00fcnner Schichten aus reinen Metallen oder Legierungen.<\/li><li>Geeignet f\u00fcr die Herstellung von d\u00fcnnen Metallschichten.<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7bd0700 elementor-widget elementor-widget-text-editor\" data-id=\"7bd0700\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<h5>Klassifizierung nach Prozessmerkmalen<\/h5>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4288ce5 elementor-widget elementor-widget-text-editor\" data-id=\"4288ce5\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Gepulste Magnetronzerst\u00e4ubung (PMS)<\/p><ul><li>Die kontrollierte Entladung mit einer gepulsten Stromversorgung verbessert die Stabilit\u00e4t des Sputterns und die Qualit\u00e4t der Schichten.<\/li><li>Geeignet zur Reduzierung der Partikelverschmutzung und zur Verbesserung der Filmdichte.<\/li><\/ul><p>Hochleistungs-Impuls-Magnetron-Sputtern (HiPIMS)<\/p><ul><li>Signifikante Verbesserung der Sputter-Ionisationsrate und der Schichtqualit\u00e4t durch kurze Hochleistungspulse.<\/li><li>Geeignet f\u00fcr die Herstellung von Folien mit hoher Dichte und geringen Defekten.<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3648475 elementor-widget elementor-widget-text-editor\" data-id=\"3648475\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<h5>Klassifizierung nach Anwendungsbereichen<\/h5>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d6c8d2b elementor-widget elementor-widget-text-editor\" data-id=\"d6c8d2b\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Dekorative Magnetronzerst\u00e4ubung (DMS)<\/p><ul><li>Wird bei der Herstellung von dekorativen Beschichtungen f\u00fcr Oberfl\u00e4chen wie Handygeh\u00e4use, Uhren und Brillengestelle verwendet.<\/li><li>In erster Linie werden Metall- oder Legierungsziele verwendet, wobei der Schwerpunkt auf der Farbe und dem Aussehen der Beschichtung liegt.<\/li><\/ul><p>Funktionelle Magnetronzerst\u00e4ubung (FMS)<\/p><ul><li>Sie wird zur Herstellung von d\u00fcnnen Schichten mit spezifischen Funktionen verwendet, z. B. f\u00fcr optische Beschichtungen, Schutzschichten und leitf\u00e4hige Schichten.<\/li><li>Der Schwerpunkt liegt auf den optischen, elektrischen und mechanischen Eigenschaften der Folie.<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8476cc8 elementor-widget elementor-widget-heading\" data-id=\"8476cc8\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Vorteile des Magnetronsputterns<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4572573 elementor-widget elementor-widget-text-editor\" data-id=\"4572573\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<ul><li>Hochgradig kontrollierbar: pr\u00e4zise Kontrolle der Zusammensetzung, Struktur und Dicke der Folie.<\/li><li>Gute Umweltvertr\u00e4glichkeit: Durch die Verwendung von Inertgasen entsteht weniger Abfall.<\/li><li>Niedrigtemperaturverfahren: geeignet f\u00fcr temperaturempfindliche Substrate, um Sch\u00e4den durch hohe Temperaturen zu vermeiden.<\/li><li>Hohe Abscheidungsrate: Erh\u00f6hte Plasmadichte f\u00fcr verbesserte Target-Sputtering-Effizienz.<\/li><li>Geringe Partikelverunreinigung: Verringert die Menge der w\u00e4hrend des Reaktionsprozesses entstehenden Partikel und verbessert die Reinheit des Films.<\/li><li>Anwendbar auf eine breite Palette von Materialien: Anwendbar auf eine breite Palette von Zielen wie Metalle, Legierungen und Verbindungen.<\/li><li>Geeignet f\u00fcr Mehrschichtfolien: Die Abscheidung von Mehrschichtstrukturen oder Verbundfolien ist m\u00f6glich.<\/li><li>Hohe Stabilit\u00e4t und Wiederholbarkeit: Prozessstabilit\u00e4t f\u00fcr die Massenproduktion.<\/li><li>Gute Filmgleichm\u00e4\u00dfigkeit und hohe Verdichtung: dichter Film mit starker Haftung und gleichm\u00e4\u00dfiger Dicke.<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a09d2da elementor-widget elementor-widget-heading\" data-id=\"a09d2da\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">G\u00e4ngige Sputtering-Materialien<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6c04774 elementor-widget elementor-widget-text-editor\" data-id=\"6c04774\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Aluminium (Al), Kupfer (Cu), Titan (Ti), Wolfram (W), Nickel (Ni), Silber (Ag), Gold (Au), Indium-Zinn-Oxid (ITO), Zinkoxid (ZnO), Titanoxid (TiO2), Aluminiumoxid (Al2O3), Siliziumnitrid (Si3N4), Titannitrid (TiN), Aluminiumnitrid (AlN), Siliziumkarbid (SiC), Titankarbid (TiC), Mehrschichttargets aus Titan\/Titannitrid (Ti\/TiN), usw. Mehrschichtige Targets aus Titannitrid (Ti\/TiN) usw.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5f7e9b3 elementor-widget elementor-widget-text-editor\" data-id=\"5f7e9b3\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Wir bieten <a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\">Magnetron-Sputter-Gie\u00dfereidienstleistung nach Ma\u00df<\/a>k\u00f6nnen Sie gerne einen Kommentar hinterlassen.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8b0d7f2 uael-mobile-wpf-button-justify uael-wpf-style-box uael-wpf-input-size-sm uael-wpf-button-left uael-wpf-btn-size-sm uael-wpf-highlight-style-default elementor-widget elementor-widget-uael-wpf-styler\" data-id=\"8b0d7f2\" data-element_type=\"widget\" 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srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8.png 640w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" >\n\t\t\t\tSubstitutionsverfahren durch Atomlagenabscheidung (ALD)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" aria-label=\"Lesen Sie mehr \u00fcber Atomic Layer Deposition (ALD) Foundry Processing\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7344 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png\" class=\"attachment-medium size-medium wp-image-7347\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1024x684.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-768x513.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1536x1025.png 1536w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/f394ed96-eaca-40cc-83f6-ebadaea95553-qlt2nzpy27w47wpv9hvjdczv85dnqtqc8q83uvppb4.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553.png 1600w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" >\n\t\t\t\tChemical Vapour Deposition (CVD) Generation Processing\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" aria-label=\"Lesen Sie mehr \u00fcber Chemical Vapour Deposition (CVD) Subcontracting\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7355 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png\" class=\"attachment-medium size-medium wp-image-7357\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-1024x683.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-768x512.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-qlti2lfsi53oh54jrq611wpt5lt6dogutrcqlbec0w.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932.png 1508w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" >\n\t\t\t\tPhysikalische Abscheidung aus der Gasphase (PVD) - Generative Verarbeitung\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" aria-label=\"Lesen Sie mehr \u00fcber Physical Vapour Deposition (PVD) Subcontracting\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-20b5c3b elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"20b5c3b\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 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100%;-webkit-mask-repeat:var(--divider-pattern-repeat);mask-repeat:var(--divider-pattern-repeat);background-color:var(--divider-color);-webkit-mask-image:var(--divider-pattern-url);mask-image:var(--divider-pattern-url)}.elementor-widget-divider--no-spacing{--divider-pattern-size:auto}.elementor-widget-divider--bg-round{--divider-pattern-repeat:round}.rtl .elementor-widget-divider .elementor-divider__text{direction:rtl}.e-con-inner>.elementor-widget-divider,.e-con>.elementor-widget-divider{width:var(--container-widget-width,100%);--flex-grow:var(--container-widget-flex-grow)}<\/style>\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-27e0a89 elementor-widget elementor-widget-heading\" data-id=\"27e0a89\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<div class=\"elementor-heading-title elementor-size-default\">Verwandte Lekt\u00fcre<\/div>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-85fe010 elementor-grid-1 elementor-posts--thumbnail-none elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-widget elementor-widget-posts\" data-id=\"85fe010\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7881 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/veranderungen-von-amorphem-silizium-bei-verschiedenen-wellenlangen-2\/\" >\n\t\t\t\tVer\u00e4nderung des Brechungsindex und des Absorptionskoeffizienten von amorphem Silizium bei verschiedenen Wellenl\u00e4ngen\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Ver\u00e4nderung des Brechungsindex und des Absorptionskoeffizienten von amorphem Silizium bei verschiedenen Wellenl\u00e4ngen Bei der Untersuchung der<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/veranderungen-von-amorphem-silizium-bei-verschiedenen-wellenlangen-2\/\" aria-label=\"Lesen Sie mehr \u00fcber die Ver\u00e4nderung des Brechungsindex und des Absorptionskoeffizienten von amorphem Silizium bei verschiedenen Wellenl\u00e4ngen\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-5545 post type-post status-publish format-standard has-post-thumbnail hentry category-application tag-app-silicon-nitride-window\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/halbleiter-produktion-und-analyse-2\/\" >\n\t\t\t\tDie Schl\u00fcsselrolle von Siliziumnitrid-D\u00fcnnschichtfenstern in der Halbleiterproduktion und -analyse\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Siliziumnitrid-D\u00fcnnschichtfenster sind aufgrund ihrer einzigartigen Eigenschaften ein wichtiger Bestandteil der Halbleiterindustrie geworden. Siliziumnitrid-D\u00fcnnschichtfenster haben ein breites Anwendungsspektrum, von der Produktion bis zur Analyse, und spielen eine Schl\u00fcsselrolle bei der Entwicklung neuer Halbleiterger\u00e4te und -materialien.<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/halbleiter-produktion-und-analyse-2\/\" aria-label=\"Lesen Sie mehr \u00fcber Siliziumnitrid-D\u00fcnnschichtfenster - Kritische Rolle in der Halbleiterproduktion und Analyse\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7648 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/der-film-wurde-im-sputtering-verfahren-hergestellt\/\" >\n\t\t\t\tPrinzip und Eigenschaften der D\u00fcnnschichtherstellung durch Sputtering-Verfahren\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Grunds\u00e4tze und Merkmale der D\u00fcnnschichtherstellung durch Sputtern Die Sputtertechnologie ist eine physikalische Abscheidung aus der Gasphase<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/der-film-wurde-im-sputtering-verfahren-hergestellt\/\" aria-label=\"Lesen Sie mehr \u00fcber Grunds\u00e4tze und Merkmale der D\u00fcnnschichtherstellung durch Sputtern\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5c6acbf elementor-widget elementor-widget-heading\" data-id=\"5c6acbf\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title elementor-size-default\"><a href=\"https:\/\/www.nanofab.com.cn\/de\/einblicke-2\/\">Mehr dazu...<\/a><\/p>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>\u4ec0\u4e48\u662f\u78c1\u63a7\u6e85\u5c04\uff1f \u78c1\u63a7\u6e85\u5c04\u662f\u4e00\u79cd\u5e38\u7528\u7684PVD\u8584\u819c\u5236\u5907\u6280\u672f\uff0c\u5229\u7528\u79bb\u5b50\u8f70\u51fb\u548c\u6e85\u5c04\u539f\u7406\uff0c\u5728\u771f\u7a7a\u73af\u5883\u4e2d\u901a\u8fc7\u65bd\u52a0\u9ad8\u9891\u7535\u573a [&hellip;]<\/p>","protected":false},"author":3,"featured_media":7554,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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