{"id":7544,"date":"2024-04-04T15:24:06","date_gmt":"2024-04-04T07:24:06","guid":{"rendered":"https:\/\/www.nanofab.com.cn\/?p=7544"},"modified":"2024-06-13T15:32:15","modified_gmt":"2024-06-13T07:32:15","slug":"what-is-electron-beam-evaporation-deposition","status":"publish","type":"post","link":"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/was-ist-elektronenstrahl-verdampfung\/","title":{"rendered":"Elektronenstrahl-Verdampfungsbeschichtungsverfahren (EB-PVD) und Vorteile und Nachteile"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"7544\" class=\"elementor elementor-7544\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-55163b3 elementor-section-stretched elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"55163b3\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;,&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-8487099\" data-id=\"8487099\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-09c365b elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"09c365b\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-d23f70b\" data-id=\"d23f70b\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-ca75822 elementor-widget elementor-widget-heading\" data-id=\"ca75822\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\">Verfahren und Vorteile der Elektronenstrahl-Verdampfungsbeschichtung (EB-PVD)<\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5172cc9 elementor-widget elementor-widget-post-info\" data-id=\"5172cc9\" data-element_type=\"widget\" data-widget_type=\"post-info.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor\/assets\/css\/widget-icon-list.min.css\"><link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-theme-elements.min.css\">\t\t<ul class=\"elementor-icon-list-items elementor-post-info\">\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-repeater-item-577f4c4\" itemprop=\"datePublished\">\n\t\t\t\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/2024\/04\/04\/\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text elementor-post-info__item elementor-post-info__item--type-date\">\n\t\t\t\t\t\t\t\t\t\t<time>2024-04-04<\/time>\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/li>\n\t\t\t\t<\/ul>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-696b9be elementor-widget elementor-widget-image\" data-id=\"696b9be\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-image{text-align:center}.elementor-widget-image a{display:inline-block}.elementor-widget-image a img[src$=\".svg\"]{width:48px}.elementor-widget-image img{vertical-align:middle;display:inline-block}<\/style>\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"626\" height=\"417\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/ce1a76ab6de1b85efc4303d0140426c.png\" class=\"attachment-large size-large wp-image-7545\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/ce1a76ab6de1b85efc4303d0140426c.png 626w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/ce1a76ab6de1b85efc4303d0140426c-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/ce1a76ab6de1b85efc4303d0140426c-18x12.png 18w\" sizes=\"(max-width: 626px) 100vw, 626px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-51b7cad elementor-widget elementor-widget-text-editor\" data-id=\"51b7cad\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p>Die Elektronenstrahlverdampfung ist eine Oberfl\u00e4chenbeschichtungstechnologie, die auf einer Elektronenstrahl-W\u00e4rmequelle basiert und zur Gruppe der<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/was-ist-physikalische-gasphasenabscheidung\/\">Physikalische Abscheidung aus der Gasphase<\/a>Das Prinzip ist einfach und effektiv. Bei diesem Verfahren wird ein hochenergetischer Elektronenstrahl auf die Oberfl\u00e4che des zu verdampfenden Materials fokussiert, das durch Energie\u00fcbertragung lokal erhitzt wird, wodurch es in einen gasf\u00f6rmigen Zustand verdampft. Das gasf\u00f6rmige Material wird dann in einer Vakuumumgebung auf dem Zielsubstrat abgeschieden und bildet einen d\u00fcnnen Film. Dieser Prozess ist in hohem Ma\u00dfe steuerbar und reproduzierbar, so dass Dicke, Zusammensetzung und Struktur des Films genau eingestellt werden k\u00f6nnen.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3254be1 elementor-widget elementor-widget-heading\" data-id=\"3254be1\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Anlagenkomponenten f\u00fcr die EB-PVD-Technologie<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-058feec elementor-widget elementor-widget-text-editor\" data-id=\"058feec\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p data-v-md-line=\"5\">Das Prinzip der Elektronenstrahl-Verdampfungsbeschichtung beruht auf der Energie\u00fcbertragung und Materialverdampfung durch einen Elektronenstrahl. Bei diesem Verfahren wird das Material durch den Einsatz einer Elektronenstrahl-W\u00e4rmequelle auf eine so hohe Temperatur erhitzt, dass es direkt vom festen in den gasf\u00f6rmigen Zustand \u00fcbergeht und sich dann auf dem Zielsubstrat zu einem d\u00fcnnen Film ablagert.<\/p><p>Vakuumsystem: Es besteht aus einer Vakuumkammer, Vakuumpumpen und den dazugeh\u00f6rigen Rohrleitungen, um sicherzustellen, dass der Abscheidungsprozess in einer Hochvakuumumgebung stattfindet, normalerweise im Bereich von 10^-5 bis 10^-7 Torr.<\/p><p>Elektronenstrahlquelle: Erzeugt einen hochenergetischen Elektronenstrahl, der durch ein elektromagnetisches Linsensystem, das die Energie und Position des Strahls steuert, fokussiert und abgetastet wird.<\/p><p>Target: Material, in der Regel ein Metall, eine Legierung oder eine Verbindung, das durch den Elektronenstrahl erhitzt und verdampft wird.<\/p><p>Substrattisch: Dient zum Halten und Erw\u00e4rmen des Substrats, das gedreht oder gekippt werden kann, um die Gleichm\u00e4\u00dfigkeit des Films zu verbessern.<\/p><p>Steuerungssystem: einschlie\u00dflich Steuerung der Elektronenstrahlleistung, Steuerung der Substratheizung und Steuerung des Vakuumsystems.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3497ccc elementor-widget elementor-widget-heading\" data-id=\"3497ccc\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Prozessschritte f\u00fcr die EB-PVD-Technologie<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9361c7a elementor-widget elementor-widget-text-editor\" data-id=\"9361c7a\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<ul><li>Reinigung des Substrats<\/li><li>Beladung mit Substrat<\/li><li>Vorl\u00e4ufige Evakuierung<\/li><li>Hochvakuum-Pumpen<\/li><li>Elektronenstrahlheizung<\/li><li>Zielverdampfung<\/li><li>Dampf\u00fcbertragung<\/li><li>Filmbildung<\/li><li>\u00dcberwachung der Schichtdicke<\/li><li>Kontrolle der Ablagerungsrate<\/li><li>K\u00fchlende Substrate<\/li><li>Entfernen Sie das Substrat<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b7f5e30 elementor-widget elementor-widget-heading\" data-id=\"b7f5e30\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Vorteile der EB-PVD-Technologie<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-874cdc6 elementor-widget elementor-widget-text-editor\" data-id=\"874cdc6\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p><strong>Hohe Ablagerungsrate<\/strong><\/p><ul><li>Hoher Wirkungsgrad: Durch die hohe Energiedichte des Elektronenstrahls und die schnelle Verdampfung des Targets kann eine hohe Abscheiderate erreicht werden, die sich f\u00fcr die Abscheidung gro\u00dfer Fl\u00e4chen und dicker Schichten eignet.<\/li><\/ul><p><strong>Hochreiner Film<\/strong><\/p><ul><li>Vakuumumgebung: Die Abscheidung erfolgt in einer Hochvakuumumgebung, die Verunreinigungen und Verschmutzungen wirksam reduziert und eine hohe Schichtreinheit gew\u00e4hrleistet.<\/li><li>Reine Materialquelle: Die Verwendung von hochreinen Targets verbessert die Reinheit und Qualit\u00e4t des Films weiter.<\/li><\/ul><p><strong>Pr\u00e4zise Kontrolle<\/strong><\/p><ul><li>Dicke und Zusammensetzung: Durch Anpassung der Elektronenstrahlleistung, der Scangeschwindigkeit und der Substrattemperatur lassen sich die Dicke und die Zusammensetzung des Films genau steuern.<\/li><li>Gleichm\u00e4\u00dfigkeit: Die E-Beam-Scanning-Technologie erm\u00f6glicht eine gleichm\u00e4\u00dfige Abscheidung auf der Oberfl\u00e4che des Substrats und gew\u00e4hrleistet eine gleichm\u00e4\u00dfige Schichtdicke.<\/li><\/ul><p><strong>Geeignet f\u00fcr eine breite Palette von Materialien<\/strong><\/p><ul><li>Vielseitige Ziele: Die EB-PVD-Technologie kann eine breite Palette von Materialien verarbeiten, darunter Metalle, Legierungen, Oxide, Karbide und Nitride, und ist \u00e4u\u00dferst anpassungsf\u00e4hig.<\/li><li>Verbundwerkstoffe: Die Abscheidung von Verbundwerkstoffen kann durch Co-Verdampfung oder Multi-Source-Verdampfung erfolgen, um d\u00fcnne Schichten mit besonderen Eigenschaften herzustellen.<\/li><\/ul><p><strong>Hochwertige Folie<\/strong><\/p><ul><li>Hohe Verdichtung: Der abgeschiedene Film hat eine dichte, porenfreie Struktur mit hervorragenden mechanischen Eigenschaften und Haltbarkeit.<\/li><li>Starke Haftung: Starke Haftung zwischen Folie und Substrat bei hoher Belastung und hohen Temperaturen.<\/li><\/ul><p><strong>F\u00e4higkeit zur Hochtemperaturabscheidung<\/strong><\/p><ul><li>Hochtemperaturbest\u00e4ndigkeit: EB-PVD kann in Hochtemperaturumgebungen abgeschieden werden und eignet sich f\u00fcr die Herstellung hochtemperaturbest\u00e4ndiger Materialien wie W\u00e4rmed\u00e4mmschichten (TBCs).<\/li><li>Hochtemperaturstabilit\u00e4t: Der abgeschiedene Film hat eine gute Stabilit\u00e4t bei hohen Temperaturen und ist nicht leicht zu oxidieren oder zu zersetzen.<\/li><\/ul><p><strong>geringer Schaden<\/strong><\/p><ul><li>Substratschutz: Da sich die Elektronenstrahlheizung haupts\u00e4chlich auf das Zielmaterial konzentriert, ist die thermische Auswirkung auf das Substrat gering, und es eignet sich f\u00fcr die D\u00fcnnschichtabscheidung w\u00e4rmeempfindlicher Materialien.<\/li><\/ul><p><strong>Prozess-Flexibilit\u00e4t<\/strong><\/p><ul><li>Einstellbare Prozessparameter: Die Leistung des Elektronenstrahls, der Scanmodus, die Substrattemperatur und andere Prozessparameter k\u00f6nnen an die verschiedenen Anwendungsanforderungen angepasst werden.<\/li><li>Vielseitige Anwendungen: Mehrschichtige und gradientenf\u00f6rmige Beschichtungen k\u00f6nnen realisiert werden, um unterschiedliche Funktions- und Leistungsanforderungen zu erf\u00fcllen.<\/li><\/ul><p><strong>Umwelt und Wirtschaft<\/strong><\/p><ul><li>Umweltfreundlich: Die Hochvakuumumgebung reduziert den Verbrauch und die Emission von sch\u00e4dlichen Gasen und ist relativ umweltfreundlich.<\/li><li>Kosteneffizienz: Die Erstinvestition in die Ausr\u00fcstung ist zwar hoch, aber die hohe Effizienz und Qualit\u00e4t des Abscheidungsprozesses reduziert die langfristigen Nutzungskosten.<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-893fc8d elementor-widget elementor-widget-heading\" data-id=\"893fc8d\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Verdampfbare Materialien<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4aeee8c elementor-widget elementor-widget-text-editor\" data-id=\"4aeee8c\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Aluminium (Al), Kupfer (Cu), Titan (Ti), Nickel (Ni), Chrom (Cr), Gold (Au), Silber (Ag), Wolfram (W), Indiumzinnoxid (ITO), Titanoxid (TiO2), Aluminiumoxid (Al2O3), Zinkoxid (ZnO), Hafniumoxid (HfO2), Titancarbid (TiC), Siliciumcarbid (SiC), Titannitrid (TiN), Siliciumnitrid (Si3N4), Aluminiumnitrid (AlN), Titanborid (TiB2), Titansilicid (TiSi2), Kohlenstoff (C) und so weiter. Si3N4), Aluminiumnitrid (AlN), Titanborid (TiB2), Titansilicid (TiSi2), Kohlenstoff (C) und so weiter.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d20ed9c elementor-widget elementor-widget-spacer\" data-id=\"d20ed9c\" data-element_type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-column .elementor-spacer-inner{height:var(--spacer-size)}.e-con{--container-widget-width:100%}.e-con-inner>.elementor-widget-spacer,.e-con>.elementor-widget-spacer{width:var(--container-widget-width,var(--spacer-size));--align-self:var(--container-widget-align-self,initial);--flex-shrink:0}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container,.e-con>.elementor-widget-spacer>.elementor-widget-container{height:100%;width:100%}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer,.e-con>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer{height:100%}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer>.elementor-spacer-inner,.e-con>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer>.elementor-spacer-inner{height:var(--container-widget-height,var(--spacer-size))}.e-con-inner>.elementor-widget-spacer.elementor-widget-empty,.e-con>.elementor-widget-spacer.elementor-widget-empty{position:relative;min-height:22px;min-width:22px}.e-con-inner>.elementor-widget-spacer.elementor-widget-empty .elementor-widget-empty-icon,.e-con>.elementor-widget-spacer.elementor-widget-empty .elementor-widget-empty-icon{position:absolute;top:0;bottom:0;left:0;right:0;margin:auto;padding:0;width:22px;height:22px}<\/style>\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3cb2012 elementor-widget elementor-widget-text-editor\" data-id=\"3cb2012\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Wir bieten <a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\">Elektronenstrahl-Verdampfungsbeschichtung (EB-PVD) OEM-Anpassungsdienste<\/a>k\u00f6nnen Sie gerne einen Kommentar hinterlassen.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8eedcd1 uael-mobile-wpf-button-justify uael-wpf-style-box uael-wpf-input-size-sm uael-wpf-button-left uael-wpf-btn-size-sm uael-wpf-highlight-style-default elementor-widget elementor-widget-uael-wpf-styler\" data-id=\"8eedcd1\" data-element_type=\"widget\" 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srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8.png 640w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" >\n\t\t\t\tSubstitutionsverfahren durch Atomlagenabscheidung (ALD)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" aria-label=\"Lesen Sie mehr \u00fcber Atomic Layer Deposition (ALD) Foundry Processing\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7344 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png\" class=\"attachment-medium size-medium wp-image-7347\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1024x684.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-768x513.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1536x1025.png 1536w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/f394ed96-eaca-40cc-83f6-ebadaea95553-qlt2nzpy27w47wpv9hvjdczv85dnqtqc8q83uvppb4.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553.png 1600w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" >\n\t\t\t\tChemical Vapour Deposition (CVD) Generation Processing\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" aria-label=\"Lesen Sie mehr \u00fcber Chemical Vapour Deposition (CVD) Subcontracting\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7355 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png\" class=\"attachment-medium size-medium wp-image-7357\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-1024x683.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-768x512.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-qlti2lfsi53oh54jrq611wpt5lt6dogutrcqlbec0w.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932.png 1508w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" >\n\t\t\t\tPhysikalische Abscheidung aus der Gasphase (PVD) - Generative Verarbeitung\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" aria-label=\"Lesen Sie mehr \u00fcber Physical Vapour Deposition (PVD) Subcontracting\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5bd004f elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"5bd004f\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 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100%;-webkit-mask-repeat:var(--divider-pattern-repeat);mask-repeat:var(--divider-pattern-repeat);background-color:var(--divider-color);-webkit-mask-image:var(--divider-pattern-url);mask-image:var(--divider-pattern-url)}.elementor-widget-divider--no-spacing{--divider-pattern-size:auto}.elementor-widget-divider--bg-round{--divider-pattern-repeat:round}.rtl .elementor-widget-divider .elementor-divider__text{direction:rtl}.e-con-inner>.elementor-widget-divider,.e-con>.elementor-widget-divider{width:var(--container-widget-width,100%);--flex-grow:var(--container-widget-flex-grow)}<\/style>\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-69a3f8d elementor-widget elementor-widget-heading\" data-id=\"69a3f8d\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<div class=\"elementor-heading-title elementor-size-default\">Verwandte Lekt\u00fcre<\/div>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6dc0f4b elementor-grid-1 elementor-posts--thumbnail-none elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-widget elementor-widget-posts\" data-id=\"6dc0f4b\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7896 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/der-unterschied-zwischen-icpcvd-und-pecvd-bei-der-aufbereitung-von-silizium-nitrid-filmen\/\" >\n\t\t\t\tUnterschiede zwischen ICPCVD und PECVD bei der Herstellung von Siliziumnitridschichten\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Unterschiede zwischen ICPCVD und PECVD bei der Herstellung von Siliziumnitridschichten IC<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/der-unterschied-zwischen-icpcvd-und-pecvd-bei-der-aufbereitung-von-silizium-nitrid-filmen\/\" aria-label=\"Lesen Sie mehr \u00fcber die Unterschiede zwischen ICPCVD und PECVD bei der Herstellung von Siliziumnitrid-D\u00fcnnschichten\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-5545 post type-post status-publish format-standard has-post-thumbnail hentry category-application tag-app-silicon-nitride-window\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/halbleiter-produktion-und-analyse-2\/\" >\n\t\t\t\tDie Schl\u00fcsselrolle von Siliziumnitrid-D\u00fcnnschichtfenstern in der Halbleiterproduktion und -analyse\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Siliziumnitrid-D\u00fcnnschichtfenster sind aufgrund ihrer einzigartigen Eigenschaften ein wichtiger Bestandteil der Halbleiterindustrie geworden. Siliziumnitrid-D\u00fcnnschichtfenster haben ein breites Anwendungsspektrum, von der Produktion bis zur Analyse, und spielen eine Schl\u00fcsselrolle bei der Entwicklung neuer Halbleiterger\u00e4te und -materialien.<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/halbleiter-produktion-und-analyse-2\/\" aria-label=\"Lesen Sie mehr \u00fcber Siliziumnitrid-D\u00fcnnschichtfenster - Kritische Rolle in der Halbleiterproduktion und Analyse\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7761 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/der-grund-des-einflusses-auf-den-warming-grad-von-siliziumwafern-2\/\" >\n\t\t\t\tPolysilizium-D\u00fcnnfilm\u4e28Verschiedene Gr\u00fcnde f\u00fcr Waferverzug\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Polykristalliner Silizium-D\u00fcnnfilm\u4e28einfluss auf den Verzug von Siliziumwafern In vielen F\u00e4llen sollte es<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/der-grund-des-einflusses-auf-den-warming-grad-von-siliziumwafern-2\/\" aria-label=\"Lesen Sie mehr \u00fcber polykristalline Silizium-D\u00fcnnschichten\u4e28Verschiedene Gr\u00fcnde f\u00fcr den Verzug von Siliziumwafern\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-77094ce elementor-widget elementor-widget-heading\" data-id=\"77094ce\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title elementor-size-default\"><a href=\"https:\/\/www.nanofab.com.cn\/de\/einblicke-2\/\">Mehr dazu...<\/a><\/p>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>Verfahren und Vorteile der Elektronenstrahlverdampfung (EB-PVD) Die Elektronenstrahlverdampfung ist eine auf einer Elektronenstrahl-W\u00e4rmequelle basierende Oberfl\u00e4chenbeschichtungstechnologie, die zur physikalischen Dampfphasenabscheidung geh\u00f6rt und [...]<\/p>","protected":false},"author":3,"featured_media":7545,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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