{"id":7483,"date":"2024-04-09T16:53:20","date_gmt":"2024-04-09T08:53:20","guid":{"rendered":"https:\/\/www.nanofab.com.cn\/?p=7483"},"modified":"2024-05-22T16:09:32","modified_gmt":"2024-05-22T08:09:32","slug":"membrane-nucleation-and-growth","status":"publish","type":"post","link":"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/\u8584\u819c\u6210\u6838\u548c\u751f\u957f\/","title":{"rendered":"Keimbildung und Wachstum von D\u00fcnnschichten"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"7483\" class=\"elementor elementor-7483\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-be797d2 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"be797d2\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-50d53e7\" data-id=\"50d53e7\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-4c49c8e elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"4c49c8e\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-315f2be\" data-id=\"315f2be\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-d00fa15 elementor-widget elementor-widget-heading\" data-id=\"d00fa15\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\">Keimbildung und Wachstum von D\u00fcnnschichten<\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-daf2fc7 elementor-widget elementor-widget-post-info\" data-id=\"daf2fc7\" data-element_type=\"widget\" data-widget_type=\"post-info.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor\/assets\/css\/widget-icon-list.min.css\"><link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-theme-elements.min.css\">\t\t<ul class=\"elementor-icon-list-items elementor-post-info\">\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-repeater-item-577f4c4\" itemprop=\"datePublished\">\n\t\t\t\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/2024\/04\/09\/\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text elementor-post-info__item elementor-post-info__item--type-date\">\n\t\t\t\t\t\t\t\t\t\t<time>2024-04-09<\/time>\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/li>\n\t\t\t\t<\/ul>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1661e43 elementor-widget elementor-widget-image\" data-id=\"1661e43\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-image{text-align:center}.elementor-widget-image a{display:inline-block}.elementor-widget-image a img[src$=\".svg\"]{width:48px}.elementor-widget-image img{vertical-align:middle;display:inline-block}<\/style>\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"1000\" height=\"667\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/5022fe5d7a8cef738402a2673f74512.png\" class=\"attachment-large size-large wp-image-7628\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/5022fe5d7a8cef738402a2673f74512.png 1000w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/5022fe5d7a8cef738402a2673f74512-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/5022fe5d7a8cef738402a2673f74512-768x512.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/04\/5022fe5d7a8cef738402a2673f74512-18x12.png 18w\" sizes=\"(max-width: 1000px) 100vw, 1000px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-c502381 elementor-widget elementor-widget-text-editor\" data-id=\"c502381\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p>Die Keimbildung und das Wachstum von D\u00fcnnschichten sind die wichtigsten Schritte in der Beschichtungstechnologie. Die Keimbildung umfasst die Bildung winziger Keime des abgeschiedenen Materials auf der Oberfl\u00e4che des Substrats, die von der Temperatur, der Atmosph\u00e4re und anderen Faktoren beeinflusst wird; die Wachstumsphase ist der Prozess der allm\u00e4hlichen Verdickung des abgeschiedenen Materials um den Keimbildungspunkt herum, um einen vollst\u00e4ndigen Film zu bilden, der von den Abscheidungsbedingungen gesteuert wird. Das Verst\u00e4ndnis und die Optimierung dieser beiden Prozesse sind f\u00fcr die Regulierung der Qualit\u00e4t, der Dicke und der Struktur des Films von grundlegender Bedeutung und bilden die Grundlage f\u00fcr die Erforschung und Anwendung von Beschichtungstechnologien.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f1b7624 elementor-widget elementor-widget-heading\" data-id=\"f1b7624\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Was ist Filmkeimbildung?<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ff38b19 elementor-widget elementor-widget-text-editor\" data-id=\"ff38b19\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Unter Keimbildung versteht man den Prozess, bei dem sich Atome, Molek\u00fcle oder Ionen des abgeschiedenen Materials auf der Substratoberfl\u00e4che ansammeln und w\u00e4hrend des Beschichtungsprozesses winzige Keime oder Ausgangspunkte bilden. Die Keimbildung ist das Anfangsstadium der Filmbildung und hat einen erheblichen Einfluss auf die endg\u00fcltige Morphologie, Struktur und Eigenschaften des Films. Der Keimbildungsprozess wird in der Regel durch Faktoren wie Temperatur, Atmosph\u00e4re, Oberfl\u00e4chenenergie des Substrats und Oberfl\u00e4chenbehandlung beeinflusst. Die Keimbildungsstellen fungieren dann als Wachstumskern des Films, der sich w\u00e4hrend des Wachstumsprozesses allm\u00e4hlich ausdehnt und die gesamte Filmstruktur bildet.<\/p><p>Im Gegensatz zu Massenmaterialien sind die physikalischen Eigenschaften d\u00fcnner Schichten eng mit den Grenzfl\u00e4chenwechselwirkungen zwischen Schicht und Substrat verbunden. Dies bedeutet, dass die Keimbildung und das Wachstum d\u00fcnner Schichten eine Schl\u00fcsselrolle bei der Bestimmung der strukturellen und morphologischen Eigenschaften der erhaltenen Materialien spielen. Keimbildung ist der Prozess, bei dem Atomkerne als Schablonen f\u00fcr das Wachstum von Festk\u00f6rpermaterialien dienen.<\/p><p>Dieses Ph\u00e4nomen wird in der Regel in homogene Keimbildung, die bei der Bildung von Keimen innerhalb der Hauptanfangsphase auftritt, und inhomogene Keimbildung an strukturellen Inhomogenit\u00e4ten (z. B. Reaktoroberfl\u00e4chen, Substratoberfl\u00e4chen oder feste Verunreinigungen) unterteilt. Obwohl das Konzept der Keimbildung bereits in den fr\u00fchen 1920er Jahren erforscht wurde, fasziniert das Gebiet die Forschungsgemeinschaft weiterhin mit neuen theoretischen Modellen, fortgeschrittenen In-situ-Charakterisierungstechniken und neuen Oberfl\u00e4chentechniken zur Kontrolle der Keimbildung und des Wachstums d\u00fcnner Schichten.<\/p><p>D\u00fcnne Schichten im Nanoma\u00dfstab und deren Strukturierung sind heute von entscheidender Bedeutung f\u00fcr Technologien wie Elektronik, Energieumwandlung und -speicherung, Sensoren und biomedizinische Ger\u00e4te. Wissenschaftliche und technologische Fortschritte in diesen Bereichen erfordern ein tieferes Verst\u00e4ndnis und eine Manipulation der Oberfl\u00e4chenbehandlungen in den fr\u00fchesten Schritten der Materialbildung. Ein hervorragendes Beispiel ist das aufkommende Gebiet der fl\u00e4chenselektiven Abscheidung (Area Selective Deposition, ASD), bei der der Keimbildungsmechanismus gehemmt wird, um die Abscheidung auf einem Bereich einer Oberfl\u00e4che zu vermeiden, w\u00e4hrend die Bildung der gew\u00fcnschten D\u00fcnnschicht in einem angrenzenden Bereich erm\u00f6glicht wird.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-02ea26b elementor-widget elementor-widget-heading\" data-id=\"02ea26b\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Anwendungen f\u00fcr die Keimbildung und das Wachstum d\u00fcnner Schichten<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-de37efa elementor-widget elementor-widget-text-editor\" data-id=\"de37efa\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Das Verst\u00e4ndnis und die Kontrolle der verschiedenen Aspekte, die bei der Keimbildung und dem Wachstum von d\u00fcnnen Schichten eine Rolle spielen, ist f\u00fcr viele moderne Anwendungen von gro\u00dfer Bedeutung. Die relative Bedeutung der Oberfl\u00e4chenenergie des Kerns im Vergleich zur Oberfl\u00e4chenenergie des Substrats spielt eine Schl\u00fcsselrolle bei der Bestimmung der Wachstumsart des Films. Oberfl\u00e4chentechniken wie mechanisches Polieren\/Schaben, nasschemische Verfahren, thermisches Gl\u00fchen, Plasmabehandlungen usw. k\u00f6nnen wirksam zur Erzeugung von Oberfl\u00e4chendefekten beitragen. Diese Oberfl\u00e4chenbehandlungen verringern die Oberfl\u00e4chenenergie und erh\u00f6hen somit die Keimbildungsdichte. Im Allgemeinen werden die Filmeigenschaften stark durch den Keimbildungsprozess beeinflusst.<\/p><p>Aufgrund des Keimbildungsprozesses kann man leicht Ver\u00e4nderungen in der Kristallstruktur und Morphologie der abgeschiedenen Schichten beobachten. So werden beispielsweise Schichten mit gro\u00dfer Korngr\u00f6\u00dfe und hoher Rauheit in der Regel mit niedriger Keimbildungsdichte erhalten, w\u00e4hrend kleine Korngr\u00f6\u00dfen und glatte Schichten einer hohen Keimbildungsdichte entsprechen. Es ist erw\u00e4hnenswert, dass Kristallstruktur und Morphologie einen erheblichen Einfluss auf die mechanischen, elektrischen und optischen Eigenschaften eines Materials haben k\u00f6nnen. So h\u00e4ngen beispielsweise die H\u00e4rte, Duktilit\u00e4t und Festigkeit eines Materials in hohem Ma\u00dfe von seiner Kristallstruktur und Morphologie ab. Ebenso k\u00f6nnen die optischen Eigenschaften (z. B. Transparenz oder Farbe) eines Materials durch seine Kristallstruktur und -morphologie beeinflusst werden.<\/p><p>Neben der Kristallstruktur und -morphologie beeinflusst der Keimbildungsprozess auch andere physikalische Eigenschaften des Materials, wie die thermische und elektrische Leitf\u00e4higkeit sowie die magnetischen Eigenschaften. So kann beispielsweise die Bildung einer homogenen Kristallstruktur w\u00e4hrend der Keimbildung die thermische und elektrische Leitf\u00e4higkeit erh\u00f6hen, w\u00e4hrend die Bildung einer inhomogenen Kristallstruktur zu einem Anstieg des elektrischen Widerstands und einer Abnahme der thermischen und elektrischen Leitf\u00e4higkeit f\u00fchren kann. Daher ist die Steuerung des Keimbildungsprozesses von entscheidender Bedeutung f\u00fcr die endg\u00fcltigen Eigenschaften des Films.<\/p><p>Einer der neuesten Entwicklungen und attraktivsten Bereiche im Zusammenhang mit der Kontrolle der Keimbildung von D\u00fcnnschichten, n\u00e4mlich ASD, ist ein aufstrebendes Forschungsgebiet, das nicht nur fortschrittliche Abscheidungs- und Charakterisierungstechniken, sondern auch ein tiefgreifendes Verst\u00e4ndnis der Vorg\u00e4nge auf der Oberfl\u00e4che des Substrats, d. h. der Wechselwirkungen zwischen den gasf\u00f6rmigen Vorl\u00e4ufermolek\u00fclen und den funktionellen Gruppen der Oberfl\u00e4che, umfasst. Die fl\u00e4chenselektive Keimbildung von D\u00fcnnschichten kann durch eine Vielzahl von Techniken erreicht werden, die von der Verwendung von Inhibitormolek\u00fclen bis zur Kombination mit fl\u00e4chenselektivem \u00c4tzen (ASE) reichen und einzigartige Werkzeuge f\u00fcr die Entwicklung und Herstellung komplexer Nanostrukturen und -ger\u00e4te er\u00f6ffnen.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-11f731b elementor-widget elementor-widget-text-editor\" data-id=\"11f731b\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Wir bieten <span style=\"\"><a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/\">Beschichtung (Mikro- und Nanofabrikation) - Dienstleistungen zur Prozessanpassung<\/a>,<\/span> Sie k\u00f6nnen uns gerne eine Nachricht mit Ihrer Anfrage hinterlassen.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-744242b uael-mobile-wpf-button-justify uael-wpf-style-box uael-wpf-input-size-sm uael-wpf-button-left uael-wpf-btn-size-sm uael-wpf-highlight-style-default elementor-widget elementor-widget-uael-wpf-styler\" data-id=\"744242b\" data-element_type=\"widget\" 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class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-posts.min.css\">\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7866 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/welches-verfahren-sollte-zur-herstellung-von-amorphen-siliziumschichten-gewahlt-werden-2\/\" >\n\t\t\t\tPECVD versus Magnetron-Sputtern: Welche Technik ist besser f\u00fcr die Herstellung amorpher Silizium-D\u00fcnnschichten?\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>PECVD versus Magnetronsputtern: welche Technik ist besser f\u00fcr die Herstellung amorpher Silizium-D\u00fcnnschichten<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/welches-verfahren-sollte-zur-herstellung-von-amorphen-siliziumschichten-gewahlt-werden-2\/\" aria-label=\"Lesen Sie mehr \u00fcber PECVD versus Magnetronsputtern: Welche Technologie ist besser f\u00fcr die Herstellung amorpher Siliziumschichten?\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7761 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/der-grund-des-einflusses-auf-den-warming-grad-von-siliziumwafern-2\/\" >\n\t\t\t\tPolysilizium-D\u00fcnnfilm\u4e28Verschiedene Gr\u00fcnde f\u00fcr Waferverzug\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Polykristalliner Silizium-D\u00fcnnfilm\u4e28einfluss auf den Verzug von Siliziumwafern In vielen F\u00e4llen sollte es<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/der-grund-des-einflusses-auf-den-warming-grad-von-siliziumwafern-2\/\" aria-label=\"Lesen Sie mehr \u00fcber polykristalline Silizium-D\u00fcnnschichten\u4e28Verschiedene Gr\u00fcnde f\u00fcr den Verzug von Siliziumwafern\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7064 post type-post status-publish format-standard has-post-thumbnail hentry category-application tag-tem-grids\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/tem-grids-2\/\" >\n\t\t\t\tVertiefte Kenntnisse: Einf\u00fchrung, Arten und Anwendungen von Elektronenmikroskop-Tr\u00e4gergittern (Kupfergittern)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Vertiefende Wissenschaft: Einf\u00fchrung, Arten und Anwendungen von Elektronenmikroskop-Tr\u00e4gergittern (Kupfergitter) Elektronische Anzeige<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/tem-grids-2\/\" aria-label=\"Lesen Sie mehr \u00fcber: Einf\u00fchrung, Arten und Anwendungen von Kupfernetzen f\u00fcr die Elektronenmikroskopie\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e01778f elementor-widget elementor-widget-heading\" data-id=\"e01778f\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title elementor-size-default\"><a href=\"https:\/\/www.nanofab.com.cn\/de\/einblicke-2\/\">Mehr dazu...<\/a><\/p>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>Keimbildung und Wachstum von D\u00fcnnschichten Keimbildung und Wachstum von D\u00fcnnschichten sind zentrale Schritte in der Beschichtungstechnologie. In der Keimbildungsphase bilden sich winzige Keime des abgeschiedenen Materials auf der Oberfl\u00e4che des Substrats, die von der Temperatur beeinflusst werden 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