{"id":7336,"date":"2024-03-28T11:12:31","date_gmt":"2024-03-28T03:12:31","guid":{"rendered":"https:\/\/www.nanofab.com.cn\/?p=7336"},"modified":"2024-06-28T17:27:52","modified_gmt":"2024-06-28T09:27:52","slug":"what-is-physical-vapor-deposition","status":"publish","type":"post","link":"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/was-ist-physikalische-gasphasenabscheidung\/","title":{"rendered":"Physikalische Abscheidung aus der Gasphase (PVD) - Klassifizierung, Merkmale und Anwendungen"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"7336\" class=\"elementor elementor-7336\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-015ee3e elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"015ee3e\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-2808dca\" data-id=\"2808dca\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-680bbe8 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"680bbe8\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-06500c8\" data-id=\"06500c8\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-97b697f elementor-widget elementor-widget-heading\" data-id=\"97b697f\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\">Klassifizierung, Merkmale und Anwendungen der physikalischen Abscheidung aus der Gasphase (PVD)<\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-36c8774 elementor-widget elementor-widget-post-info\" data-id=\"36c8774\" data-element_type=\"widget\" data-widget_type=\"post-info.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor\/assets\/css\/widget-icon-list.min.css\"><link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-theme-elements.min.css\">\t\t<ul class=\"elementor-icon-list-items elementor-post-info\">\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-repeater-item-577f4c4\" itemprop=\"datePublished\">\n\t\t\t\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/2024\/03\/28\/\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text elementor-post-info__item elementor-post-info__item--type-date\">\n\t\t\t\t\t\t\t\t\t\t<time>2024-03-28<\/time>\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/li>\n\t\t\t\t<\/ul>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-24994b0 elementor-widget elementor-widget-image\" data-id=\"24994b0\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-image{text-align:center}.elementor-widget-image a{display:inline-block}.elementor-widget-image a img[src$=\".svg\"]{width:48px}.elementor-widget-image img{vertical-align:middle;display:inline-block}<\/style>\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"611\" height=\"407\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/58ca41aea128c.jpg\" class=\"attachment-large size-large wp-image-7338\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/58ca41aea128c.jpg 611w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/58ca41aea128c-300x200.jpg 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/58ca41aea128c-18x12.jpg 18w\" sizes=\"(max-width: 611px) 100vw, 611px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-64b29ae elementor-widget elementor-widget-text-editor\" data-id=\"64b29ae\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p>Die physikalische Gasphasenabscheidung (PVD) ist eine Technik zur Abscheidung d\u00fcnner Schichten auf festen Oberfl\u00e4chen. Dabei wird ein Material in einer Vakuum- oder Niederdruckumgebung erhitzt, um D\u00e4mpfe oder Ionen zu erzeugen, die sich auf einer Zieloberfl\u00e4che ablagern.PVD wird h\u00e4ufig zur Herstellung d\u00fcnner Schichten mit bestimmten Funktionen oder Eigenschaften verwendet, z. B. H\u00e4rte, Korrosionsbest\u00e4ndigkeit, elektrische Leitf\u00e4higkeit usw.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-06a34c8 elementor-widget elementor-widget-heading\" data-id=\"06a34c8\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Das Prinzip der PVD-Technologie<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-58bc467 elementor-widget elementor-widget-text-editor\" data-id=\"58bc467\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>PVD ist ein Verfahren zur Abscheidung d\u00fcnner Schichten auf festen Oberfl\u00e4chen, bei dem ein Material auf Verdampfungs- oder Sputtertemperaturen erhitzt wird, wodurch es D\u00e4mpfe oder Ionen bildet, die sich auf einer Zieloberfl\u00e4che ablagern.<\/p><ul><li><strong>Einrichtung einer Vakuumumgebung:<\/strong>Die PVD-Technologie muss in einer Hochvakuum- oder Niederdruckumgebung durchgef\u00fchrt werden, um die freie Ausbreitung von Materiald\u00e4mpfen oder Ionen zu gew\u00e4hrleisten und Zusammenst\u00f6\u00dfe mit Gasmolek\u00fclen zu vermeiden, die die Abscheidungseffizienz verringern k\u00f6nnen. Die Schaffung einer Vakuumumgebung kann durch Ger\u00e4te wie Vakuumpumpen erreicht werden.<\/li><li><strong>Erw\u00e4rmung des Materials:<\/strong>Beim PVD-Verfahren wird das Zielmaterial auf seine Verdampfungstemperatur erhitzt. Die Erw\u00e4rmung kann in Form von Widerstandserw\u00e4rmung, Induktionserw\u00e4rmung oder Elektronenstrahlerw\u00e4rmung erfolgen. Durch die Erw\u00e4rmung gewinnen die Oberfl\u00e4chenatome oder -molek\u00fcle des Materials gen\u00fcgend Energie, um die Oberfl\u00e4chenspannung zu \u00fcberwinden und in einen gasf\u00f6rmigen Zustand \u00fcberzugehen.<\/li><li><strong>Verdampfung oder Zerst\u00e4ubung:<\/strong>Sobald das Material eine ausreichende Temperatur erreicht hat, beginnt es zu verdampfen oder zu sputtern. Beim Verdampfen wird das Material direkt in einen gasf\u00f6rmigen Zustand umgewandelt, w\u00e4hrend beim Sputtern energiereiche Teilchen (in der Regel Edelgasionen) die Oberfl\u00e4che des festen Materials beschie\u00dfen, wodurch es Atome oder Molek\u00fcle freisetzt.<\/li><li><strong>Absetzung:<\/strong>Materiald\u00e4mpfe oder Ionen werden auf der Oberfl\u00e4che des Zielsubstrats abgeschieden, um einen d\u00fcnnen Film zu bilden. Das Substrat wird in der Regel vorher gereinigt und vorbereitet, um die Haftungseigenschaften und die Qualit\u00e4t des Films zu gew\u00e4hrleisten.<\/li><li><strong>Filmbildung und Kontrolle:<\/strong>Die auf der Oberfl\u00e4che des Substrats abgeschiedenen d\u00fcnnen Schichten werden w\u00e4hrend des Prozesses allm\u00e4hlich gebildet. Die Dicke und Beschaffenheit der Schicht kann durch die Steuerung von Parametern wie Abscheiderate, Abscheidezeit, Substrattemperatur und Konzentration des abgeschiedenen Materials angepasst werden.<\/li><\/ul><p>Das Prinzip der PVD-Technologie besteht in der Verdampfung oder Zerst\u00e4ubung von Materialien, um d\u00fcnne Schichten zu bilden. Durch die Steuerung der Heiz- und Abscheidungsbedingungen ist es m\u00f6glich, die Dicke, die Zusammensetzung und die Eigenschaften der Schichten genau zu kontrollieren, um den Anforderungen der verschiedenen Anwendungen gerecht zu werden.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-cac7892 elementor-widget elementor-widget-heading\" data-id=\"cac7892\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Klassifizierung der PVD-Technologie<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b07eae4 elementor-widget elementor-widget-text-editor\" data-id=\"b07eae4\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p><a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/was-ist-magnetron-sputtern-2\/\"><strong>Magnetronzerst\u00e4ubung<\/strong><\/a><\/p><p>Prinzip: Einsatz eines Magnetfelds zur Steuerung des Ionenbeschusses eines festen Ziels, wobei energiereiche Ionen erzeugt und auf der Zieloberfl\u00e4che freigesetzt werden.<br \/>Merkmale: Typischerweise h\u00f6here Abscheideraten und gleichm\u00e4\u00dfigere Schichtdickenverteilung.<br \/>Anwendungen: Weit verbreitet bei der Herstellung von Halbleiterbauelementen, optischen Filmen usw.<\/p><p><a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/was-ist-elektronenstrahl-verdampfung\/\"><strong>Elektronenstrahlverdampfung (EBE)<\/strong><\/a><\/p><p>Prinzip: Das Material wird mit einem Elektronenstrahl erhitzt, wodurch es verdampft und einen d\u00fcnnen Film bildet.<br \/>Merkmale: H\u00f6here Abscheidungsrate und h\u00f6here Abscheidungstemperatur, geeignet f\u00fcr die Abscheidung von Materialien mit hohem Schmelzpunkt.<br \/>Anwendung: Haupts\u00e4chlich f\u00fcr die Herstellung von Metallfilmen oder Beschichtungen aus anderen Materialien mit hohem Schmelzpunkt.<\/p><p><strong>Thermische Laserverdampfung (Laserablation)<\/strong><\/p><p>Prinzip: Mit einem Laser wird das Material erhitzt, wodurch es verdampft und sich auf der Substratoberfl\u00e4che ablagert.<br \/>Merkmale: Es kann eine lokale Abscheidung bestimmter Bereiche erreicht werden, die f\u00fcr Mikro- und Nanobearbeitungsbereiche geeignet ist.<br \/>Anwendung: Haupts\u00e4chlich f\u00fcr die Herstellung von funktionellen Beschichtungen, Nanostrukturen usw.<\/p><p><strong>Thermische Verdampfung (Thermische Verdampfung)<\/strong><\/p><p>Prinzip: Die PVD-Technologie basiert auf der Erhitzung des Materials auf seine Verdampfungstemperatur, um einen Dampf zu bilden.<br \/>Eigenschaften: F\u00fcr die Herstellung von Metallschichten oder die Abscheidung von anderen Materialien mit niedrigem Schmelzpunkt.<br \/>Anwendung: Haupts\u00e4chlich f\u00fcr die Herstellung von Metallbeschichtungen, optischen Filmen usw.<\/p><p>Jede Technologie hat ihre eigenen, einzigartigen Prinzipien, Merkmale und Anwendungsbereiche. Die Wahl des richtigen PVD-Verfahrens h\u00e4ngt von den spezifischen Anwendungsanforderungen, den Materialeigenschaften und der gew\u00fcnschten Schichtleistung ab.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e41a831 elementor-widget elementor-widget-heading\" data-id=\"e41a831\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Vorteile von PVD<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0e90985 elementor-widget elementor-widget-text-editor\" data-id=\"0e90985\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<ul><li><strong>Filme von hoher Reinheit und Qualit\u00e4t<\/strong>Abscheidung im Hochvakuum, um Verunreinigungen und Kontaminationen zu reduzieren und die Reinheit der Folie zu gew\u00e4hrleisten.<\/li><li><strong>Gute Gleichm\u00e4\u00dfigkeit des Films<\/strong>: Erzielung von Filmen mit guter Gleichm\u00e4\u00dfigkeit und gleichbleibender Dicke durch pr\u00e4zise Steuerung der Prozessparameter.<\/li><li><strong>Hohe Adh\u00e4sion und Verdichtung<\/strong>Ionenplattierungs- und Sputtertechniken k\u00f6nnen die Schichthaftung und -verdichtung verbessern.<\/li><li><strong>breite Palette von Anwendungen<\/strong>Geeignet f\u00fcr die Bearbeitung einer breiten Palette von Materialien, einschlie\u00dflich Metallen, Legierungen, Oxiden, Nitriden und Karbiden.<\/li><li><strong>Umwelt<\/strong>PVD-Technologie: Sie verbraucht weniger Chemikalien und ist umweltfreundlicher als chemische Beschichtungsverfahren.<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5ab2cc4 elementor-widget elementor-widget-heading\" data-id=\"5ab2cc4\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">PVD-Anwendungen<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0d805b6 elementor-widget elementor-widget-text-editor\" data-id=\"0d805b6\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p><strong>Elektronik- und Halbleiterindustrie<\/strong><\/p><ul><li><strong>metallische Verbindungsschicht<\/strong>Metallische Verbindungsschichten wie Aluminium und Kupfer in integrierten Schaltkreisen, die als Leiterbahnen dienen.<\/li><li><strong>Barriere- und Diffusionsschichten<\/strong>Als<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/eigenschaften-und-anwendungen-von-titannitrid\/\">Titannitrid (TiN)<\/a>Wird verwendet, um die Diffusion von Metallatomen zu blockieren und die Stabilit\u00e4t der Ger\u00e4te zu verbessern.<\/li><li><strong>Folienwiderst\u00e4nde und -kondensatoren<\/strong>F\u00fcr die Herstellung von Pr\u00e4zisionsfilmwiderst\u00e4nden und Kondensatoren.<\/li><\/ul><p><strong>Photonische und optische Industrie<\/strong><\/p><ul><li><strong>Antireflexionsbeschichtung<\/strong>Antireflexionsbeschichtungen f\u00fcr Brillen, Kameras und Solarzellen zur Verbesserung der Lichtdurchl\u00e4ssigkeit.<\/li><li><strong>reflektierende Schicht<\/strong>Hochreflektierende Beschichtungen f\u00fcr Spiegel, Laser und optische Instrumente.<\/li><li><strong>optisches Filter<\/strong>Filter f\u00fcr die optische Kommunikation und optische Sensoren, die die Wellenl\u00e4nge und die Durchl\u00e4ssigkeit des Lichts regulieren.<\/li><\/ul><p><strong>Maschinen- und Werkzeugindustrie<\/strong><\/p><ul><li><strong>Abriebfeste Beschichtung<\/strong>Als<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/eigenschaften-und-anwendungen-von-titannitrid\/\">Titannitrid (TiN)<\/a>Beschichtungen aus Titankarbid (TiC) und diamant\u00e4hnlichem Kohlenstoff (DLC) f\u00fcr Werkzeuge, Formen und mechanische Teile zur Verbesserung der Verschlei\u00dffestigkeit und Lebensdauer.<\/li><li><strong>Anti-Korrosions-Beschichtung<\/strong>F\u00fcr Korrosionsschutzbeschichtungen in chemischen Anlagen und in Meeresumgebungen zur Verl\u00e4ngerung der Lebensdauer.<\/li><\/ul><p><strong>Dekorative Beschichtung<\/strong><\/p><ul><li><strong>Dekorative Beschichtungen<\/strong>Dekorative Beschichtungen f\u00fcr Uhren, Schmuck, Mobiltelefongeh\u00e4use und Brillengestelle, die ein \u00e4sthetisches Aussehen und Verschlei\u00dffestigkeit bieten.<\/li><\/ul><p><strong>biomedizinische<\/strong><\/p><ul><li><strong>Biokompatible Beschichtungen<\/strong>Biokompatible Beschichtungen f\u00fcr medizinische Ger\u00e4te und Implantate, wie Titan und Titannitrid, zur Verbesserung der Biokompatibilit\u00e4t und Korrosionsbest\u00e4ndigkeit.<\/li><li><strong>Systeme zur Verabreichung von Medikamenten<\/strong>F\u00fcr die Herstellung von nanoskaligen Wirkstofftr\u00e4gern zur kontrollierten Freisetzung und gezielten Abgabe von Medikamenten.<\/li><\/ul><p><strong>Energie und Umwelt<\/strong><\/p><ul><li><strong>Solarzelle<\/strong>F\u00fcr die Abscheidung von transparenten leitf\u00e4higen Schichten, Puffer- und Absorberschichten zur Verbesserung der photovoltaischen Umwandlungseffizienz.<\/li><li><strong>Brennstoffzellen und Batterien<\/strong>Wird f\u00fcr die Herstellung von Hochleistungselektrodenmaterialien verwendet, wie z. B. Anoden auf Siliziumbasis in Lithium-Ionen-Batterien und Lithium-Eisenphosphat (LiFePO4)-Anodenmaterialien.<\/li><\/ul><p>Die PVD-Technologie spielt eine wichtige Rolle bei der Verbesserung der Oberfl\u00e4cheneigenschaften von Werkstoffen, der Hinzuf\u00fcgung neuer Funktionen und der Verbesserung der Produktqualit\u00e4t und -leistung. Mit der kontinuierlichen Entwicklung von Wissenschaft und Technik werden die Anwendungsbereiche der PVD-Technologie st\u00e4ndig erweitert und vertieft.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-417991a elementor-widget elementor-widget-text-editor\" data-id=\"417991a\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Wir bieten <a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\">Physikalische Gasphasenabscheidung (PVD) OEM-Anpassungsdienste<\/a>k\u00f6nnen Sie gerne einen Kommentar hinterlassen.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a3771fd uael-mobile-wpf-button-justify uael-wpf-style-box uael-wpf-input-size-sm uael-wpf-button-left uael-wpf-btn-size-sm uael-wpf-highlight-style-default elementor-widget elementor-widget-uael-wpf-styler\" data-id=\"a3771fd\" data-element_type=\"widget\" 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href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-posts.min.css\">\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7386 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img decoding=\"async\" width=\"300\" height=\"195\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png\" class=\"attachment-medium size-medium wp-image-7388\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8.png 640w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" >\n\t\t\t\tSubstitutionsverfahren durch Atomlagenabscheidung (ALD)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" aria-label=\"Lesen Sie mehr \u00fcber Atomic Layer Deposition (ALD) Foundry Processing\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7344 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png\" class=\"attachment-medium size-medium wp-image-7347\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1024x684.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-768x513.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1536x1025.png 1536w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/f394ed96-eaca-40cc-83f6-ebadaea95553-qlt2nzpy27w47wpv9hvjdczv85dnqtqc8q83uvppb4.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553.png 1600w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" >\n\t\t\t\tChemical Vapour Deposition (CVD) Generation Processing\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" aria-label=\"Lesen Sie mehr \u00fcber Chemical Vapour Deposition (CVD) Subcontracting\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7355 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png\" class=\"attachment-medium size-medium wp-image-7357\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-1024x683.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-768x512.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-qlti2lfsi53oh54jrq611wpt5lt6dogutrcqlbec0w.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932.png 1508w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" 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href=\"https:\/\/www.nanofab.com.cn\/de\/einblicke-2\/\">Mehr dazu...<\/a><\/p>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>Physikalische Gasphasenabscheidung (PVD) Klassifizierung, Merkmale und Anwendungen Physikalische Gasphasenabscheidung (PVD), 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