{"id":7324,"date":"2024-03-26T16:50:37","date_gmt":"2024-03-26T08:50:37","guid":{"rendered":"https:\/\/www.nanofab.com.cn\/?p=7324"},"modified":"2024-06-11T15:49:18","modified_gmt":"2024-06-11T07:49:18","slug":"what-is-chemical-vapor-deposition","status":"publish","type":"post","link":"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/was-ist-die-chemische-gasphasenabscheidung\/","title":{"rendered":"Chemische Abscheidung aus der Gasphase (CVD) - Klassifizierung, Merkmale und Anwendungen"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"7324\" class=\"elementor elementor-7324\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-c5c35fd elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"c5c35fd\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-c06649c\" data-id=\"c06649c\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-2e81294 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"2e81294\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-681d447\" data-id=\"681d447\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-8dd75b9 elementor-widget elementor-widget-heading\" data-id=\"8dd75b9\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\">Chemische Abscheidung aus der Gasphase (CVD) - Klassifizierung, Merkmale und Anwendungen<\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a4a5308 elementor-widget elementor-widget-post-info\" data-id=\"a4a5308\" data-element_type=\"widget\" data-widget_type=\"post-info.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor\/assets\/css\/widget-icon-list.min.css\"><link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-theme-elements.min.css\">\t\t<ul class=\"elementor-icon-list-items elementor-post-info\">\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-repeater-item-577f4c4\" itemprop=\"datePublished\">\n\t\t\t\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/2024\/03\/26\/\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text elementor-post-info__item elementor-post-info__item--type-date\">\n\t\t\t\t\t\t\t\t\t\t<time>2024-03-26<\/time>\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/li>\n\t\t\t\t<\/ul>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-404330d elementor-widget elementor-widget-image\" data-id=\"404330d\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-image{text-align:center}.elementor-widget-image a{display:inline-block}.elementor-widget-image a img[src$=\".svg\"]{width:48px}.elementor-widget-image img{vertical-align:middle;display:inline-block}<\/style>\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"1024\" height=\"682\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/e3fb24a82e393e34239a65cbdea2e47-1024x682.png\" class=\"attachment-large size-large wp-image-7326\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/e3fb24a82e393e34239a65cbdea2e47-1024x682.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/e3fb24a82e393e34239a65cbdea2e47-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/e3fb24a82e393e34239a65cbdea2e47-768x511.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/e3fb24a82e393e34239a65cbdea2e47-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/e3fb24a82e393e34239a65cbdea2e47.png 1520w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f8b40a3 elementor-widget elementor-widget-text-editor\" data-id=\"f8b40a3\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p>Die chemische Gasphasenabscheidung (CVD) ist eine Technik, bei der ein Gasgemisch bei einer bestimmten Temperatur miteinander oder mit der Oberfl\u00e4che des Substrats in Wechselwirkung tritt und eine d\u00fcnne Schicht aus Metallen oder Verbindungen auf der Oberfl\u00e4che des Substrats bildet, so dass die Oberfl\u00e4che des Materials so ver\u00e4ndert werden kann, dass sie den Anforderungen an Verschlei\u00df-, Oxidations- und Korrosionsbest\u00e4ndigkeit sowie an spezifische elektrische, optische, tribologische und andere besondere Eigenschaften entspricht. Eine Technologie.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0950bb6 elementor-widget elementor-widget-heading\" data-id=\"0950bb6\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Grunds\u00e4tze der CVD-Technologie<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0ad891f elementor-widget elementor-widget-text-editor\" data-id=\"0ad891f\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Die CVD-Technologie basiert auf chemischen Reaktionen, die in der Regel als CVD-Reaktionen bezeichnet werden, bei denen sich die Reaktanten im gasf\u00f6rmigen Zustand und eines der Produkte im festen Zustand befinden; daher muss das chemische Reaktionssystem die folgenden drei Bedingungen erf\u00fcllen.<\/p><ul><li>Bei der Abscheidungstemperatur m\u00fcssen die Reaktanten einen ausreichend hohen Dampfdruck aufweisen. Wenn die Reaktanten bei Raumtemperatur alle gasf\u00f6rmig sind, ist die Abscheidungsapparatur relativ einfach. Wenn die Reaktanten bei Raumtemperatur nur wenig verdampfen, m\u00fcssen sie erhitzt werden, um sie zu verdampfen, und in einigen F\u00e4llen m\u00fcssen sie durch ein Tr\u00e4gergas in die Reaktionskammer gebracht werden.<\/li><li>Die Reaktionsprodukte m\u00fcssen gasf\u00f6rmig sein, mit Ausnahme des erforderlichen Sediments, das fest sein muss.<\/li><li>Der Dampfdruck der abgeschiedenen Schicht sollte niedrig genug sein, um sicherzustellen, dass die abgeschiedene Schicht w\u00e4hrend der Abscheidungsreaktion bei einer bestimmten Abscheidungstemperatur fest mit dem Substrat verbunden ist. Der Dampfdruck des Substratmaterials bei der Abscheidetemperatur muss ebenfalls niedrig genug sein.<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0633fec elementor-widget elementor-widget-heading\" data-id=\"0633fec\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Klassifizierung der CVD-Technologie<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-112faef elementor-widget elementor-widget-text-editor\" data-id=\"112faef\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p><strong>Klassifizierung nach Temperatur<\/strong><\/p><ul><li>Niedertemperatur-CVD (LTCVD): Die Abscheidungstemperatur liegt in der Regel unter 400 \u00b0C und ist f\u00fcr temperaturempfindliche Substrate geeignet.<\/li><li>Medium-Temperature CVD (MTCVD): Abscheidungstemperatur zwischen 400\u00b0C und 700\u00b0C.<\/li><li>Hochtemperatur-CVD (HTCVD): Die Abscheidungstemperatur liegt in der Regel \u00fcber 700 \u00b0C und eignet sich f\u00fcr Materialien, die eine hohe Temperaturstabilit\u00e4t erfordern.<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a3b539d elementor-widget elementor-widget-text-editor\" data-id=\"a3b539d\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p><strong>Klassifizierung nach Druck<\/strong><\/p><ul><li>Atmosph\u00e4rendruck-CVD (APCVD): CVD-Verfahren, das bei Atmosph\u00e4rendruck durchgef\u00fchrt wird, einfache Ausr\u00fcstung, die jedoch leicht zu Partikelverunreinigungen f\u00fchren kann.<\/li><li>Niederdruck-CVD (LPCVD): Dieses Verfahren wird in einer Niederdruckumgebung durchgef\u00fchrt und reduziert die Partikelkontamination und verbessert die Gleichm\u00e4\u00dfigkeit der Schichten.<\/li><li>Ultrahochvakuum-CVD (UHVCVD): UHVCVD wird unter Ultrahochvakuumbedingungen durchgef\u00fchrt und eignet sich f\u00fcr die Herstellung von hochreinen und hochwertigen Schichten.<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-47dde66 elementor-widget elementor-widget-text-editor\" data-id=\"47dde66\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p><strong>Klassifizierung nach der Methode des Energieeintrags<\/strong><\/p><ul><li>Thermische CVD (Thermal CVD): Die Bildung d\u00fcnner Schichten durch Zersetzung oder Reaktion von Reaktionsgasen durch Erhitzen auf hohe Temperaturen.<\/li><li><a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\/\">Plasmaunterst\u00fctzte CVD (PECVD)<\/a>Plasmaeinsatz zur Senkung der Reaktionstemperatur und zur Verbesserung der Abscheidungsrate und der Schichtqualit\u00e4t.<\/li><li>Photounterst\u00fctzte CVD (PACVD): Die Nutzung von Lichtenergie (in der Regel UV-Licht) zur F\u00f6rderung chemischer Reaktionen, die \u00fcblicherweise bei der Abscheidung organischer Materialien eingesetzt wird.<\/li><li>Laser-CVD (LCVD): Die Verwendung eines Laserstrahls zur Einleitung oder F\u00f6rderung einer chemischen Reaktion, die eine \u00f6rtlich begrenzte Feinabscheidung erm\u00f6glicht.<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8d8d32d elementor-widget elementor-widget-text-editor\" data-id=\"8d8d32d\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p><strong>Klassifizierung nach Prozessmerkmalen<\/strong><\/p><ul><li>Metallorganische CVD (MOCVD): Verwendet metallorganische Verbindungen als Reaktionsgase und ist bei der Herstellung von Halbleitern und optoelektronischen Ger\u00e4ten weit verbreitet.<\/li><li>Vapor Phase CVD (VPCVD): verwendet gasf\u00f6rmige Verbindungen als Reaktanten.<\/li><li>Fl\u00fcssigphasen-CVD (LPCVD): verwendet fl\u00fcssige Verbindungen als Reaktanten, die in der Regel zun\u00e4chst vergast werden m\u00fcssen.<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0f6f681 elementor-widget elementor-widget-heading\" data-id=\"0f6f681\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Anwendungen von CVD<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-661140c elementor-widget elementor-widget-image\" data-id=\"661140c\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"1176\" height=\"268\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/b09cc7b5186f4a0153f20b78b157ffe.png\" class=\"attachment-full size-full wp-image-7327\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/b09cc7b5186f4a0153f20b78b157ffe.png 1176w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/b09cc7b5186f4a0153f20b78b157ffe-300x68.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/b09cc7b5186f4a0153f20b78b157ffe-1024x233.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/b09cc7b5186f4a0153f20b78b157ffe-768x175.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/b09cc7b5186f4a0153f20b78b157ffe-18x4.png 18w\" sizes=\"(max-width: 1176px) 100vw, 1176px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-057e12d elementor-widget elementor-widget-spacer\" data-id=\"057e12d\" data-element_type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-column .elementor-spacer-inner{height:var(--spacer-size)}.e-con{--container-widget-width:100%}.e-con-inner>.elementor-widget-spacer,.e-con>.elementor-widget-spacer{width:var(--container-widget-width,var(--spacer-size));--align-self:var(--container-widget-align-self,initial);--flex-shrink:0}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container,.e-con>.elementor-widget-spacer>.elementor-widget-container{height:100%;width:100%}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer,.e-con>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer{height:100%}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer>.elementor-spacer-inner,.e-con>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer>.elementor-spacer-inner{height:var(--container-widget-height,var(--spacer-size))}.e-con-inner>.elementor-widget-spacer.elementor-widget-empty,.e-con>.elementor-widget-spacer.elementor-widget-empty{position:relative;min-height:22px;min-width:22px}.e-con-inner>.elementor-widget-spacer.elementor-widget-empty .elementor-widget-empty-icon,.e-con>.elementor-widget-spacer.elementor-widget-empty .elementor-widget-empty-icon{position:absolute;top:0;bottom:0;left:0;right:0;margin:auto;padding:0;width:22px;height:22px}<\/style>\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b10b512 elementor-widget elementor-widget-text-editor\" data-id=\"b10b512\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Die CVD-Technologie spielt aufgrund ihrer Flexibilit\u00e4t und Effizienz bei der Herstellung verschiedener Materialien und Schichten eine Schl\u00fcsselrolle in verschiedenen Bereichen.<\/p><ul><li>D\u00fcnnschichtabscheidung: CVD wird f\u00fcr die Abscheidung einer Vielzahl von D\u00fcnnschichten verwendet, wie z. B.<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/welches-verfahren-sollte-zur-herstellung-von-amorphen-siliziumschichten-gewahlt-werden-2\/\">Amorphes Silizium<\/a>Polykristallines Silizium,<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/anwendung-von-siliziumnitrid-dunnschichten-im-optischen-feld\/\">Siliziumnitrid (Si3N4)<\/a>, ,<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/\u7535\u5b50\u675f\u84b8\u53d1\u9540\u4e8c\u6c27\u5316\u7845\u8584\u819c\u6709\u4ec0\u4e48\u7279\u6027\u4e0e\u5e94\u7528-2\/\">Siliziumdioxid (SiO2)<\/a>usw.<\/li><li>LEDs und Laser: CVD wird zur Herstellung von III-V-Halbleitermaterialien wie Galliumnitrid (GaN) und Galliumarsenid (GaAs) in LEDs und Lasern verwendet.<\/li><li>Fotovoltaikzellen: CVD wird zur Abscheidung d\u00fcnner Schichten bei der Herstellung von Solarzellen verwendet, wie z. B.<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/veranderungen-von-amorphem-silizium-bei-verschiedenen-wellenlangen-2\/\">Siliziumschicht<\/a>und Zinkoxid (ZnO) usw., um die photovoltaische Umwandlungseffizienz zu verbessern.<\/li><li>Verschlei\u00dffeste Beschichtungen: CVD wird eingesetzt, um superharte Schichten wie Diamant und kubisches Bornitrid (c-BN) abzuscheiden, um die Verschlei\u00dffestigkeit und Lebensdauer von Werkzeugen, Formen und mechanischen Teilen zu verbessern.<\/li><li>Korrosionsschutzschichten: CVD erm\u00f6glicht die Abscheidung von korrosionsbest\u00e4ndigen Schichten wie<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/ald-aufbereitung-von-zinn-film-2\/\">Titannitrid (TiN)<\/a>und Titancarbid (TiC) zum Schutz von Metalloberfl\u00e4chen vor Korrosion.<\/li><li>Antireflexionsbeschichtung: CVD wird zur Herstellung von Antireflexionsbeschichtungen verwendet, um Reflexionen auf der Oberfl\u00e4che optischer Elemente zu verringern und die optische Leistung zu verbessern.<\/li><li>Filter und Wellenleiter: In der optischen Kommunikation wird CVD zur Herstellung von Ger\u00e4ten wie Filtern und Lichtwellenleitern eingesetzt, um die Effizienz der Signal\u00fcbertragung zu verbessern.<\/li><li>Biokompatible Beschichtungen: Die CVD-Technologie wird eingesetzt, um biokompatible Beschichtungen wie Titannitrid und Zirkoniumoxid (ZrO2) auf Oberfl\u00e4chen von medizinischen Ger\u00e4ten und Implantaten aufzubringen, um die Biokompatibilit\u00e4t und Haltbarkeit zu verbessern.<\/li><li>Mikro-Elektro-Mechanische Systeme (MEMS): CVD wird zur Herstellung von Strukturmaterialien und Funktionsschichten in MEMS-Bauteilen verwendet, z. B. Polysilizium und Siliziumnitrid.<\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7b2f483 elementor-widget elementor-widget-text-editor\" data-id=\"7b2f483\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Wir haben Anfragen f\u00fcr kundenspezifische d\u00fcnne Schichten wie amorphes Silizium, polykristallines Silizium, Siliziumnitrid (Si3N4), Siliziumdioxid (SiO2) usw. oder f\u00fcr Gie\u00dfereiarbeiten f\u00fcr CVD-Prozesse wie ICPCVD (induktiv gekoppeltes Plasma) und PECVD (Plasmaveredelung).<\/p><p>Bitte kontaktieren Sie uns f\u00fcr spezielle Anforderungen!<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1de7676 elementor-widget elementor-widget-text-editor\" data-id=\"1de7676\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div 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srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-300x195.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/2890e32db03fae1fa2ab67a6ed9c0d8.png 640w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" >\n\t\t\t\tSubstitutionsverfahren durch Atomlagenabscheidung (ALD)\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/atomlagenabscheidung-auftragsbearbeitung-2\/\" aria-label=\"Lesen Sie mehr \u00fcber Atomic Layer Deposition (ALD) Foundry Processing\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7344 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png\" class=\"attachment-medium size-medium wp-image-7347\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1024x684.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-768x513.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-1536x1025.png 1536w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/f394ed96-eaca-40cc-83f6-ebadaea95553-qlt2nzpy27w47wpv9hvjdczv85dnqtqc8q83uvppb4.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/f394ed96-eaca-40cc-83f6-ebadaea95553.png 1600w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" >\n\t\t\t\tChemical Vapour Deposition (CVD) Generation Processing\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/chemische-abscheidung-aus-der-gasphase-cvd-auftragsbearbeitung\/\" aria-label=\"Lesen Sie mehr \u00fcber Chemical Vapour Deposition (CVD) Subcontracting\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7355 page type-page status-publish has-post-thumbnail hentry category-process tag-process\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"200\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png\" class=\"attachment-medium size-medium wp-image-7357\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-1024x683.png 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-768x512.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-18x12.png 18w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/elementor\/thumbs\/59c77cbc-ce7b-4fe7-99ce-ee924312b932-qlti2lfsi53oh54jrq611wpt5lt6dogutrcqlbec0w.png 360w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2024\/03\/59c77cbc-ce7b-4fe7-99ce-ee924312b932.png 1508w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" >\n\t\t\t\tPhysikalische Abscheidung aus der Gasphase (PVD) - Generative Verarbeitung\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/beschichtungstechnik-dunnschicht-laminierung-2\/physikalische-abscheidung-aus-der-gasphase-contract-processing-2\/\" aria-label=\"Lesen Sie mehr \u00fcber Physical Vapour Deposition (PVD) Subcontracting\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-24aa745 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"24aa745\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 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100%;-webkit-mask-repeat:var(--divider-pattern-repeat);mask-repeat:var(--divider-pattern-repeat);background-color:var(--divider-color);-webkit-mask-image:var(--divider-pattern-url);mask-image:var(--divider-pattern-url)}.elementor-widget-divider--no-spacing{--divider-pattern-size:auto}.elementor-widget-divider--bg-round{--divider-pattern-repeat:round}.rtl .elementor-widget-divider .elementor-divider__text{direction:rtl}.e-con-inner>.elementor-widget-divider,.e-con>.elementor-widget-divider{width:var(--container-widget-width,100%);--flex-grow:var(--container-widget-flex-grow)}<\/style>\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e358b99 elementor-widget elementor-widget-heading\" data-id=\"e358b99\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div 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class=\"elementor-post__excerpt\">\n\t\t\t<p>Chemische Gasphasenabscheidung (CVD) Klassifizierung, Merkmale und Anwendungen Chemische Gasphasenabscheidung<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/was-ist-die-chemische-gasphasenabscheidung\/\" aria-label=\"Lesen Sie mehr \u00fcber die chemische Gasphasenabscheidung (CVD) - Klassifizierung, Merkmale und Anwendungen\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0c24d49 elementor-widget elementor-widget-heading\" data-id=\"0c24d49\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title elementor-size-default\"><a href=\"https:\/\/www.nanofab.com.cn\/de\/einblicke-2\/\">Mehr 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([...]<\/p>","protected":false},"author":3,"featured_media":7326,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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