{"id":5545,"date":"2023-03-06T16:36:36","date_gmt":"2023-03-06T08:36:36","guid":{"rendered":"https:\/\/www.nanofab.com.cn\/?p=5545"},"modified":"2023-05-25T10:21:51","modified_gmt":"2023-05-25T02:21:51","slug":"semiconductor-production-and-analysis","status":"publish","type":"post","link":"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/halbleiter-produktion-und-analyse-2\/","title":{"rendered":"Die Schl\u00fcsselrolle von Siliziumnitrid-D\u00fcnnschichtfenstern in der Halbleiterproduktion und -analyse"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"5545\" class=\"elementor elementor-5545\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-b89cf7a elementor-section-stretched elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"b89cf7a\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;,&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-87c6798\" data-id=\"87c6798\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-8f4e5b6 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"8f4e5b6\" data-element_type=\"section\" data-settings=\"{&quot;jet_parallax_layout_list&quot;:[]}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-53072cb\" data-id=\"53072cb\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-7331855 elementor-widget elementor-widget-heading\" data-id=\"7331855\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\">Die Schl\u00fcsselrolle von Siliziumnitrid-D\u00fcnnschichtfenstern in der Halbleiterproduktion und -analyse<\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0d7da45 elementor-widget elementor-widget-post-info\" data-id=\"0d7da45\" data-element_type=\"widget\" data-widget_type=\"post-info.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor\/assets\/css\/widget-icon-list.min.css\"><link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-theme-elements.min.css\">\t\t<ul class=\"elementor-inline-items elementor-icon-list-items elementor-post-info\">\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-repeater-item-577f4c4 elementor-inline-item\" itemprop=\"datePublished\">\n\t\t\t\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/2023\/03\/06\/\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text elementor-post-info__item elementor-post-info__item--type-date\">\n\t\t\t\t\t\t\t\t\t\t<time>2023-03-06<\/time>\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/li>\n\t\t\t\t<\/ul>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ca94995 elementor-widget elementor-widget-image\" data-id=\"ca94995\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-image{text-align:center}.elementor-widget-image a{display:inline-block}.elementor-widget-image a img[src$=\".svg\"]{width:48px}.elementor-widget-image img{vertical-align:middle;display:inline-block}<\/style>\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"1024\" height=\"413\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/\u6c2e\u5316\u7845\u8584\u819c\u7a97\u53e3\u5728\u534a\u5bfc\u4f53\u751f\u4ea7\u4e0e\u5206\u6790-1-1024x413.jpg\" class=\"attachment-large size-large wp-image-5566\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/\u6c2e\u5316\u7845\u8584\u819c\u7a97\u53e3\u5728\u534a\u5bfc\u4f53\u751f\u4ea7\u4e0e\u5206\u6790-1-1024x413.jpg 1024w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/\u6c2e\u5316\u7845\u8584\u819c\u7a97\u53e3\u5728\u534a\u5bfc\u4f53\u751f\u4ea7\u4e0e\u5206\u6790-1-300x121.jpg 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/\u6c2e\u5316\u7845\u8584\u819c\u7a97\u53e3\u5728\u534a\u5bfc\u4f53\u751f\u4ea7\u4e0e\u5206\u6790-1-768x310.jpg 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/\u6c2e\u5316\u7845\u8584\u819c\u7a97\u53e3\u5728\u534a\u5bfc\u4f53\u751f\u4ea7\u4e0e\u5206\u6790-1-1536x620.jpg 1536w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/\u6c2e\u5316\u7845\u8584\u819c\u7a97\u53e3\u5728\u534a\u5bfc\u4f53\u751f\u4ea7\u4e0e\u5206\u6790-1-600x242.jpg 600w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/\u6c2e\u5316\u7845\u8584\u819c\u7a97\u53e3\u5728\u534a\u5bfc\u4f53\u751f\u4ea7\u4e0e\u5206\u6790-1.jpg 1800w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5dc75fb elementor-widget elementor-widget-text-editor\" data-id=\"5dc75fb\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.20.0 - 20-03-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p>Siliziumnitrid-D\u00fcnnschichtfenster sind aufgrund ihrer einzigartigen Eigenschaften ein wichtiger Bestandteil der Halbleiterindustrie geworden. Siliziumnitrid-D\u00fcnnschichtfenster haben ein breites Anwendungsspektrum, von der Produktion bis zur Analyse, und spielen eine Schl\u00fcsselrolle bei der Entwicklung neuer Halbleiterger\u00e4te und -materialien.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1a1402b elementor-widget elementor-widget-heading\" data-id=\"1a1402b\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Anwendungen in der Halbleiterproduktion und -analyse<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-15e4e36 elementor-widget elementor-widget-heading\" data-id=\"15e4e36\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h3 class=\"elementor-heading-title elementor-size-default\">\u00dcberwachung der Reaktanten<\/h3>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-fe6bf5e elementor-widget elementor-widget-text-editor\" data-id=\"fe6bf5e\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Siliziumnitrid-D\u00fcnnschichtfenster k\u00f6nnen als Fenster zur \u00dcberwachung von Reaktanten verwendet werden. In der Halbleiterproduktion ist die Stabilit\u00e4t des Herstellungsprozesses sehr wichtig, da ein instabiler Prozess die Qualit\u00e4t und den Ertrag des Chips beeintr\u00e4chtigt. Durch die \u00dcberwachung von Parametern wie Reaktantenkonzentration und Temperatur in Echtzeit kann daher eine pr\u00e4zise Steuerung des Prozesses erreicht werden.<\/p><p>Die hohe Durchl\u00e4ssigkeit und die ausgezeichnete chemische Inertheit von Siliziumnitrid-D\u00fcnnschichtfenstern machen sie ideal f\u00fcr die \u00dcberwachung von Reaktanten. Bei der chemischen Gasphasenabscheidung (CVD) k\u00f6nnen Siliziumnitrid-D\u00fcnnschichtfenster beispielsweise zur \u00dcberwachung von Parametern wie der Konzentration des Ausgangsgases und der Reaktionstemperatur f\u00fcr die Prozessstabilit\u00e4t verwendet werden.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8b7f6ce elementor-widget elementor-widget-heading\" data-id=\"8b7f6ce\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Oberfl\u00e4chenanalyse<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-67f71dd elementor-widget elementor-widget-text-editor\" data-id=\"67f71dd\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Siliziumnitrid-D\u00fcnnschichtfenster k\u00f6nnen als Fenster f\u00fcr die Oberfl\u00e4chenanalyse verwendet werden. Die Oberfl\u00e4chenanalyse von Halbleitern ist ein wichtiger Bereich in der Halbleiterindustrie und umfasst die Analyse der Oberfl\u00e4chenzusammensetzung, der Oberfl\u00e4chenmorphologie und der Oberfl\u00e4chenfehler.<\/p><p>In der Rasterelektronenmikroskopie (SEM) kann beispielsweise ein Siliziumnitrid-D\u00fcnnfilmfenster als Probenhalterfenster verwendet werden, das die Probe in einer Vakuumumgebung trocken halten kann, wodurch eine Verunreinigung und Oxidation der Probenoberfl\u00e4che vermieden wird, und das einen Elektronenstrahl mit hoher \u00dcbertragungsrate liefern kann, wodurch die Aufl\u00f6sung und das Signal-Rausch-Verh\u00e4ltnis der SEM-Analyse verbessert werden.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0801c8b elementor-widget elementor-widget-image\" data-id=\"0801c8b\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"900\" height=\"600\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/02\/\u534a\u5bfc\u4f53\u751f\u4ea7\u4e0e\u5206\u6790-1.png\" class=\"attachment-large size-large wp-image-4156\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/02\/\u534a\u5bfc\u4f53\u751f\u4ea7\u4e0e\u5206\u6790-1.png 900w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/02\/\u534a\u5bfc\u4f53\u751f\u4ea7\u4e0e\u5206\u6790-1-300x200.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/02\/\u534a\u5bfc\u4f53\u751f\u4ea7\u4e0e\u5206\u6790-1-768x512.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/02\/\u534a\u5bfc\u4f53\u751f\u4ea7\u4e0e\u5206\u6790-1-600x400.png 600w\" sizes=\"(max-width: 900px) 100vw, 900px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-dd32995 elementor-widget elementor-widget-heading\" data-id=\"dd32995\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h3 class=\"elementor-heading-title elementor-size-default\">Optische Analyse<\/h3>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9f6b6ea elementor-widget elementor-widget-text-editor\" data-id=\"9f6b6ea\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Siliziumnitrid-D\u00fcnnschichtfenster k\u00f6nnen als Fenster f\u00fcr die optische Analyse verwendet werden. In der Halbleiterproduktion ist die optische Analyse sehr wichtig, um die Leistung und Qualit\u00e4t von Halbleitermaterialien und -ger\u00e4ten zu pr\u00fcfen.<\/p><p>Siliziumnitrid-D\u00fcnnschichtfenster bieten hohe \u00dcbertragungsraten und hervorragende optische Eigenschaften f\u00fcr den Einsatz in optischen Mikroskopen, Raman-Spektrometern, Fourier-Transformations-Infrarotspektrometern und anderen optischen Analyseger\u00e4ten. In der Raman-Spektroskopie beispielsweise sorgen Siliziumnitrid-D\u00fcnnschichtfenster f\u00fcr eine hohe Durchl\u00e4ssigkeit des Laserstrahls f\u00fcr eine hochempfindliche und hochaufl\u00f6sende Analyse von Proben.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-20944b9 elementor-widget elementor-widget-heading\" data-id=\"20944b9\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h3 class=\"elementor-heading-title elementor-size-default\">Messung der Temperatur<\/h3>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1ee8701 elementor-widget elementor-widget-text-editor\" data-id=\"1ee8701\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>In der Halbleiterfertigung ist die Temperaturmessung sehr wichtig, da viele Prozessparameter eng mit der Temperatur zusammenh\u00e4ngen. Beim Abscheidungsprozess zum Beispiel h\u00e4ngt die Abscheidungsrate von der Abscheidungstemperatur ab. Dar\u00fcber hinaus wirkt sich die Temperatur bei Gl\u00fch- und Einbrennprozessen auch auf die Materialeigenschaften und die Kristallqualit\u00e4t aus.<\/p><p>Siliziumnitrid-D\u00fcnnschichtfenster k\u00f6nnen aufgrund der Temperaturempfindlichkeit von Siliziumnitrid als Teil eines Temperatursensors verwendet werden. In der Halbleiterproduktion k\u00f6nnen Siliziumnitrid-D\u00fcnnschichtfenster als reflektierende Temperatursensoren eingesetzt werden. Reflektierende Temperatursensoren messen die Temperatur durch Messung der Intensit\u00e4t des von der Oberfl\u00e4che eines Materials reflektierten Lichts. Wenn sich die Temperatur der Materialoberfl\u00e4che \u00e4ndert, \u00e4ndert sich auch der Reflexionsgrad der Materialoberfl\u00e4che, so dass aus der Messung der \u00c4nderung des Reflexionsgrads auf die Temperatur\u00e4nderung geschlossen werden kann.<span style=\"font-style: inherit; font-weight: inherit; color: var( --e-global-color-bff6d3b ); background-color: var( --e-global-color-astglobalcolor5 );\">Die Verwendung von Siliziumnitrid-D\u00fcnnschichtfenstern als reflektierende Temperatursensoren erm\u00f6glicht die ber\u00fchrungslose Temperaturmessung von Halbleitermaterialien. Dar\u00fcber hinaus ist das Siliziumnitrid-D\u00fcnnschichtfenster sehr temperaturbest\u00e4ndig und kann bei hohen Temperaturen \u00fcber lange Zeitr\u00e4ume stabil arbeiten, so dass es sich f\u00fcr Temperaturmessungen bei hohen Temperaturen eignet.<\/span><\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0c2211c elementor-widget elementor-widget-heading\" data-id=\"0c2211c\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h3 class=\"elementor-heading-title elementor-size-default\">Infrarotspektroskopischer Nachweis<\/h3>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3dc24e9 elementor-widget elementor-widget-text-editor\" data-id=\"3dc24e9\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Die Infrarotspektroskopie ist eine zerst\u00f6rungsfreie Pr\u00fcfmethode, die f\u00fcr die Charakterisierung und Qualit\u00e4tskontrolle von Halbleitermaterialien eingesetzt werden kann. Siliziumnitrid-D\u00fcnnschichtfenster werden in der Infrarotspektroskopie haupts\u00e4chlich f\u00fcr die optischen Fenster von Infrarotspektrometern verwendet. Die hohe Lichtdurchl\u00e4ssigkeit und chemische Inertheit von Siliziumnitridfilmen machen sie zu einem ausgezeichneten optischen Fenstermaterial f\u00fcr die Infrarotspektroskopie. Bei der Infrarotspektroskopie muss das Absorptionsspektrum der Probe erfasst werden, und das Siliziumnitrid-D\u00fcnnfilmfenster kann das Infrarotspektrum der Probe auf das Spektrometer \u00fcbertragen, um die Infrarotspektralinformationen der Probe zu erhalten.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-85fcab8 elementor-widget elementor-widget-image\" data-id=\"85fcab8\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"800\" height=\"375\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/\u672a\u6807\u9898-4.png\" class=\"attachment-large size-large wp-image-5554\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/\u672a\u6807\u9898-4.png 800w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/\u672a\u6807\u9898-4-300x141.png 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/\u672a\u6807\u9898-4-768x360.png 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/\u672a\u6807\u9898-4-600x281.png 600w\" sizes=\"(max-width: 800px) 100vw, 800px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-c8357ea elementor-widget elementor-widget-heading\" data-id=\"c8357ea\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h3 class=\"elementor-heading-title elementor-size-default\">In-situ-\u00dcberwachung durch Reflexionsspektroskopie<\/h3>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2bc308b elementor-widget elementor-widget-text-editor\" data-id=\"2bc308b\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Die In-situ-Reflexionsspektroskopie ist eine Technik zur In-situ-\u00dcberwachung des Wachstums von Filmschichten auf der Oberfl\u00e4che von Halbleiterwafern, bei der spektrale Merkmale analysiert werden k\u00f6nnen, um das Wachstum und die Ver\u00e4nderung des Films zu erkennen.<\/p><p>Siliziumnitrid-D\u00fcnnschichtfenster werden bei der In-situ-Reflexionsspektroskopie in erster Linie als optische Fenster auf der Waferoberfl\u00e4che eingesetzt. Mit ihrer ausgezeichneten Lichtdurchl\u00e4ssigkeit und chemischen Stabilit\u00e4t liefern Siliziumnitrid-D\u00fcnnschichtfenster ein klares Spektralsignal in der In-situ-Reflexionsspektroskopie und erm\u00f6glichen so die Echtzeit\u00fcberwachung des Wachstums von Filmschichten auf der Oberfl\u00e4che von Halbleiterwafern.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f5ed92f elementor-widget elementor-widget-heading\" data-id=\"f5ed92f\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h3 class=\"elementor-heading-title elementor-size-default\">Herstellung von Mikro- und Nanostrukturen<\/h3>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-70d5585 elementor-widget elementor-widget-text-editor\" data-id=\"70d5585\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Die Mikro- und Nanostrukturpr\u00e4paration ist eine Technik zur Herstellung von Strukturen im Mikrometerbereich durch Photolithographie und \u00c4tzen, die f\u00fcr die Herstellung von Halbleiterbauelementen verwendet werden kann. Siliziumnitrid-D\u00fcnnfilmfenster werden bei der Mikrostrukturpr\u00e4paration haupts\u00e4chlich als \u00c4tzmaske verwendet, um das optische Muster von der Probenoberfl\u00e4che auf den Fotolack zu \u00fcbertragen, der dann ge\u00e4tzt wird, um schlie\u00dflich die gew\u00fcnschte Mikrostruktur zu bilden. Siliziumnitrid-D\u00fcnnschichtfenster haben eine hohe Lichtdurchl\u00e4ssigkeit und chemische Stabilit\u00e4t und k\u00f6nnen in \u00c4tzprozessen mit verschiedenen Arten von Fotolacken und \u00c4tzmitteln verwendet werden.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0805d51 elementor-widget elementor-widget-image\" data-id=\"0805d51\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"1000\" height=\"500\" src=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/\u534a\u5bfc\u4f53\u5668\u4ef6-TEM-\u548c-STEM-\u6210\u50cf\u7684\u6837\u54c1\u5236\u5907.jpg\" class=\"attachment-large size-large wp-image-5567\" alt=\"\" srcset=\"https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/\u534a\u5bfc\u4f53\u5668\u4ef6-TEM-\u548c-STEM-\u6210\u50cf\u7684\u6837\u54c1\u5236\u5907.jpg 1000w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/\u534a\u5bfc\u4f53\u5668\u4ef6-TEM-\u548c-STEM-\u6210\u50cf\u7684\u6837\u54c1\u5236\u5907-300x150.jpg 300w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/\u534a\u5bfc\u4f53\u5668\u4ef6-TEM-\u548c-STEM-\u6210\u50cf\u7684\u6837\u54c1\u5236\u5907-768x384.jpg 768w, https:\/\/www.nanofab.com.cn\/wp-content\/uploads\/2023\/03\/\u534a\u5bfc\u4f53\u5668\u4ef6-TEM-\u548c-STEM-\u6210\u50cf\u7684\u6837\u54c1\u5236\u5907-600x300.jpg 600w\" sizes=\"(max-width: 1000px) 100vw, 1000px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-47244cb elementor-widget elementor-widget-text-editor\" data-id=\"47244cb\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Zusammenfassend l\u00e4sst sich sagen, dass Siliziumnitrid-D\u00fcnnschichtfenster ein breites Spektrum an Anwendungsszenarien in der Halbleiterproduktion und -analyse bieten und f\u00fcr die Pr\u00e4paration, Charakterisierung und Qualit\u00e4tskontrolle verwendet werden k\u00f6nnen. Ihre hervorragende Leistung und hohe Zuverl\u00e4ssigkeit machen sie zu unverzichtbaren Materialien f\u00fcr die Halbleiterproduktion und -analyse.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-de5f643 elementor-widget elementor-widget-text-editor\" data-id=\"de5f643\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Wir bieten <a href=\"https:\/\/www.nanofab.com.cn\/de\/kundenspezifische-dienstleistungen-2\/\">Siliziumnitrid-D\u00fcnnschichtfenster \/ MEMS-Anpassungsdienste<\/a>F\u00fcr weitere Informationen k\u00f6nnen Sie uns gerne eine Nachricht hinterlassen.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-92806c1 uael-mobile-wpf-button-justify uael-wpf-style-box uael-wpf-input-size-sm uael-wpf-button-left uael-wpf-btn-size-sm uael-wpf-highlight-style-default elementor-widget 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class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.nanofab.com.cn\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-posts.min.css\">\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-8065 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/prozess-prinzip-und-anwendung-der-optischen-beschichtung\/\" >\n\t\t\t\tVerfahrensprinzipien und Anwendungen optischer Beschichtungen\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Prinzipien und Anwendungen der optischen Beschichtungstechnologie Die Verfahrensprinzipien der optischen Beschichtung umfassen haupts\u00e4chlich<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/prozess-prinzip-und-anwendung-der-optischen-beschichtung\/\" aria-label=\"Lesen Sie mehr \u00fcber Verfahrensprinzipien und Anwendungen optischer Beschichtungen\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-7780 post type-post status-publish format-standard has-post-thumbnail hentry category-application\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/eigenschaften-und-anwendungen-von-titannitrid\/\" >\n\t\t\t\tTitannitrid\u4e28TiN Eigenschaften und Anwendungen\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Eigenschaften und Anwendungen von Titannitrid D\u00fcnne Schichten aus Titannitrid (TiN) sind ein wichtiges<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/eigenschaften-und-anwendungen-von-titannitrid\/\" aria-label=\"Lesen Sie mehr \u00fcber Eigenschaften und Anwendungen von Titannitrid \u4e28TiN\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-6160 post type-post status-publish format-standard has-post-thumbnail hentry category-application tag-app-silicon-nitride-window\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h4 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/was-ist-das-siliziumnitrid-dunnschichtfenster\/\" >\n\t\t\t\tWissenschaftlicher Leitfaden: Einf\u00fchrung, Prinzipien und Anwendungsszenarien von Siliziumnitrid-D\u00fcnnschichtfenstern\t\t\t<\/a>\n\t\t<\/h4>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Wissenschaftlicher Leitfaden: Einf\u00fchrung, Eigenschaften und Anwendungsszenarien von Siliziumnitrid-D\u00fcnnschichtfenstern Nitrid<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.nanofab.com.cn\/de\/einblick-2\/application\/was-ist-das-siliziumnitrid-dunnschichtfenster\/\" aria-label=\"Lesen Sie mehr \u00fcber Science Guide: Einf\u00fchrung, Prinzipien und Anwendungsszenarien von Siliziumnitrid-D\u00fcnnschichtfenstern\" tabindex=\"-1\" >\n\t\t\tMehr lesen \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b11290a elementor-widget elementor-widget-heading\" data-id=\"b11290a\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title elementor-size-default\"><a href=\"https:\/\/www.nanofab.com.cn\/de\/einblicke-2\/\">Mehr dazu...<\/a><\/p>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>Siliziumnitrid-D\u00fcnnschichtfenster sind aufgrund ihrer einzigartigen Eigenschaften ein wichtiger Bestandteil der Halbleiterindustrie geworden. Siliziumnitrid-D\u00fcnnschichtfenster haben ein breites Anwendungsspektrum, von der Produktion bis zur Analyse, und spielen eine Schl\u00fcsselrolle bei der Entwicklung neuer Halbleiterger\u00e4te und -materialien.<\/p>","protected":false},"author":2,"featured_media":4156,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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